JP2000121340A - Face inclination angle measuring apparatus - Google Patents
Face inclination angle measuring apparatusInfo
- Publication number
- JP2000121340A JP2000121340A JP10298099A JP29809998A JP2000121340A JP 2000121340 A JP2000121340 A JP 2000121340A JP 10298099 A JP10298099 A JP 10298099A JP 29809998 A JP29809998 A JP 29809998A JP 2000121340 A JP2000121340 A JP 2000121340A
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- Japan
- Prior art keywords
- measured
- laser
- inclination angle
- screen
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は面傾斜角度測定機に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inclination angle measuring device.
【０００２】[0002]
【従来の技術】従来、物体の面傾斜角度を測定する方法
は、様々なものがあるが、電子部品の小型化、細密化に
より、光を用いて非接触で測定することが多くなってき
ている。量産品の物体の面傾斜角度を効率よく測定する
ものとして、レーザー変位計が、小型化、低価格化によ
り、高速かつ安価な非接触の面傾斜角度測定機として採
用されている。2. Description of the Related Art Conventionally, there are various methods for measuring the surface inclination angle of an object. However, due to miniaturization and miniaturization of electronic parts, non-contact measurement using light has been increasing. I have. As a device for efficiently measuring the surface inclination angle of a mass-produced object, a laser displacement meter has been adopted as a high-speed and inexpensive non-contact surface inclination angle measuring device due to miniaturization and cost reduction.
【０００３】図１を使用して従来の面傾斜角度測定機の
説明をする。図１は従来の面傾斜角度測定機の単純な構
成図である。図中の符号について説明する。１はレーザ
ー変位計センサヘッド部、２は面傾斜角度を測定される
対象物、３は対象物２をＸＹ方向に動かすためのＸＹテ
ーブル、４はレーザー変位計アンプ、５はＸＹテーブル
コントローラ、６はレーザー変位計アンプ４とＸＹテー
ブルコントローラ５と通信し、システム全体をコントロ
ールするコンピュータ、７はモニタである。A conventional surface inclination angle measuring device will be described with reference to FIG. FIG. 1 is a simple configuration diagram of a conventional surface inclination angle measuring device. The reference numerals in the figure will be described. 1 is a laser displacement sensor head, 2 is an object whose plane inclination angle is to be measured, 3 is an XY table for moving the object 2 in the XY directions, 4 is a laser displacement meter amplifier, 5 is an XY table controller, 6 Is a computer that communicates with the laser displacement meter amplifier 4 and the XY table controller 5 to control the entire system, and 7 is a monitor.
【０００４】前記構成による面傾斜角度測定機で具体的
に対象物２の面傾斜角度の測定方法について説明する。 １．コンピュータ６がＸＹテーブルコントローラ５に指
令を出してＸＹテーブル３を動作させ、載置されている
対象物２を位置決めする。この点をＸＹ１とする。２．
コンピュータ６がレーザー変位計アンプ４に指令を出し
てレーザー変位計センサヘッド部１を動作させ、対象物
２とレーザー変位計センサヘッド部１との距離を測定さ
せ結果をメモリに取り込む。この距離をＺ１とする。 ３．コンピュータ６がＸＹテーブルコントローラ５に指
令を出してＸＹテーブル３を移動させ、載置されている
対象物２を移動する。この点をＸＹ２とする。 ４．コンピュータ６がレーザー変位計アンプ４に指令を
出してレーザー変位計センサヘッド部１を動作させ、対
象物２とレーザー変位計センサヘッド部１との距離を測
定させ結果をメモリに取り込む。この距離をＺ２とす
る。 ５．Ｚ１とＺ２の差をｈとし、ＸＹ１とＸＹ２間の距離
をｌとする。A method for measuring the surface inclination angle of the object 2 with the surface inclination angle measuring device having the above configuration will be specifically described. 1. The computer 6 issues a command to the XY table controller 5 to operate the XY table 3 to position the placed object 2. This point is designated as XY1. 2.
The computer 6 issues a command to the laser displacement meter amplifier 4 to operate the laser displacement meter sensor head 1, measure the distance between the object 2 and the laser displacement meter sensor head 1, and fetch the result into the memory. This distance is defined as Z1. 3. The computer 6 issues a command to the XY table controller 5 to move the XY table 3 and move the placed object 2. This point is designated as XY2. 4. The computer 6 issues a command to the laser displacement meter amplifier 4 to operate the laser displacement meter sensor head 1, measure the distance between the object 2 and the laser displacement meter sensor head 1, and fetch the result into the memory. This distance is defined as Z2. 5. Let h be the difference between Z1 and Z2 and l be the distance between XY1 and XY2.
【０００５】対象物２がＸＹ１に在る時にレーザー光１
−１が被測定面２−１に入射した点と対象物２がＸＹ２
に在る時にレーザー光１−１が被測定面２−１に入射し
た点を結んだ線の角度θはθ＝ｔａｎ−１ｈ／ｌ（式
１）で求められる。ＸＹテーブル３の動作面とレーザー
光１−１は垂直であるとする。[0005] When the object 2 is in the XY1, the laser beam 1
-1 is incident on the surface to be measured 2-1 and the object 2 is XY2
The angle θ of the line connecting the points at which the laser beam 1-1 is incident on the surface 2-1 to be measured when the distance is in the range is determined by θ = tan −1 h / l (Equation 1). It is assumed that the operating surface of the XY table 3 is perpendicular to the laser beam 1-1.
【０００６】次に前述のレーザー変位計の測定原理につ
いて説明する。図２は測定原理を説明するための模式図
である。レーザー変位計センサヘッド部１は、ボディ１
０、半導体レーザー１１、レンズ１２、レンズ１７、受
光素子１８により構成されている。半導体レーザー１１
から出射されたレーザー光はレンズ１２で被測定面１４
−１の前後で焦点を結ぶように絞られレーザー入射光１
３となる。レーザー入射光１３は被測定面１４−１で反
射し、レーザー反射光１５−１となり、レンズ１７で受
光素子１８に焦点を結ぶように絞られ、受光素子１８の
入射位置１９に到達する。被測定面が１４−２の位置に
変位した時は、レーザー反射光は１５−２となり、受光
素子１８の入射位置２０に到達する。受光素子１８上の
レーザー光の到達位置の違いによりレーザー変位計は被
測定面のレーザー入射光軸方向の変位量を知ることがで
きる。Next, the measurement principle of the laser displacement meter will be described. FIG. 2 is a schematic diagram for explaining the measurement principle. The laser displacement sensor head 1 is
0, a semiconductor laser 11, a lens 12, a lens 17, and a light receiving element 18. Semiconductor laser 11
The laser light emitted from the lens 12
Laser incident light 1 focused so as to focus before and after -1
It becomes 3. The laser incident light 13 is reflected on the surface to be measured 14-1, becomes a laser reflected light 15-1, is narrowed by the lens 17 so as to focus on the light receiving element 18, and reaches the incident position 19 of the light receiving element 18. When the surface to be measured is displaced to the position 14-2, the laser reflected light becomes 15-2 and reaches the incident position 20 of the light receiving element 18. The laser displacement meter can know the amount of displacement of the surface to be measured in the direction of the laser incident optical axis based on the difference in the arrival position of the laser light on the light receiving element 18.
【０００７】[0007]
【発明が解決しようとする課題】レーザー反射光は被測
定面での乱反射光である。図３は受光素子１８上のレー
ザー光の入射分布を示す図であり、実線はレーザー反射
光１５−１、点線はレーザー反射光１５−２の分布であ
る。入射位置１９、入射位置２０はピークの位置を示し
ている。ここで、被測定面が乱反射しにくい表面である
場合について考えてみる。レーザー変位計の構造上、受
光素子に到達する光成分は少なくなり、被測定面が鏡面
の場合は測定できなくなる。また、鏡面でなくとも完全
に乱反射せず正反射成分の強い面の場合、被測定面が図
２の紙面に垂直な軸まわりに回転してしまうと、測定結
果に違いが発生する。The laser reflected light is irregularly reflected light on the surface to be measured. FIG. 3 is a diagram showing the incident distribution of the laser light on the light receiving element 18, where the solid line is the distribution of the laser reflected light 15-1, and the dotted line is the distribution of the laser reflected light 15-2. The incident position 19 and the incident position 20 indicate peak positions. Here, consider the case where the surface to be measured is a surface that is unlikely to undergo irregular reflection. Due to the structure of the laser displacement meter, the light component reaching the light receiving element is reduced, and the measurement cannot be performed when the surface to be measured is a mirror surface. In addition, in the case of a surface having a strong specular reflection component without complete irregular reflection even if it is not a mirror surface, a difference occurs in the measurement result if the surface to be measured rotates around an axis perpendicular to the paper surface of FIG.
【０００８】図４を使用して説明する。図４は図２の被
測定面１４−１が、被測定面１４−１とレーザー入射光
１３との交点を回転中心として時計方向に少し回転した
場合の図である。被測定面は１４−３となる。被測定面
１４−３のレーザー入射光１３に対する反射の様子に変
化がないため、受光素子１８に向かうレーザー反射光は
１５−３となり、受光素子１８上への入射位置は２１に
ずれることになる。そのため、測定点の高さに変位が無
いにもかかわらず、受光素子上の入射位置に違いが出
て、結果としてレーザー変位計は変位量を出力してしま
うことになる。This will be described with reference to FIG. FIG. 4 is a diagram when the measured surface 14-1 in FIG. 2 is slightly rotated clockwise about the intersection of the measured surface 14-1 and the laser incident light 13. The measured surface is 14-3. Since there is no change in the state of reflection of the measured surface 14-3 with respect to the laser incident light 13, the laser reflected light traveling toward the light receiving element 18 is 15-3, and the incident position on the light receiving element 18 is shifted to 21. . Therefore, although there is no displacement in the height of the measuring point, the incident position on the light receiving element differs, and as a result, the laser displacement meter outputs the displacement amount.
【０００９】この事は、被測定面が金属表面のように正
反射し易いものである場合、被測定面の僅かな面のうね
りによって変位量ｈが出力され式１によって計算された
測定結果に誤差が出ることになる。また式１のｌを小さ
くしたとき、レーザー変位計の精度が同じ場合、計算し
たθの誤差が大きくなってしまう。従来の面傾斜角度測
定機は、測定面が乱反射する面である場合には有効であ
るが、面が仕上の良い金属表面である場合や、測定範囲
ｌが小さい場合には誤差が大きくなる欠点を有してい
た。本発明は前記欠点を解消するものであり、測定範囲
が小さく表面が正反射し易い被測定物でも測定誤差の少
なくできる面傾斜角度測定機を提供するものである。This is because, when the surface to be measured is easily reflected regularly, such as a metal surface, the displacement h is output due to the undulation of a slight surface of the surface to be measured, and the measurement result calculated by Equation 1 is obtained. There will be errors. In addition, when l in Equation 1 is reduced and the accuracy of the laser displacement meter is the same, the error of the calculated θ increases. The conventional surface inclination angle measuring device is effective when the measurement surface is a surface that diffusely reflects, but a disadvantage that the error increases when the surface is a metal surface having a good finish or when the measurement range l is small. Had. SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks, and an object of the present invention is to provide a surface inclination angle measuring instrument capable of reducing a measurement error even for an object whose measurement range is small and whose surface is easily specularly reflected.
【００１０】[0010]
【課題を解決するための手段】被測定面を照射するレー
ザー光のレーザー光源部と、被測定面より反射された前
記レーザー光の反射光軸上におかれたスクリーンと、ス
クリーンを観察するための画像処理用ＣＣＤカメラで構
成された面傾斜角度測定機とする。A laser light source for irradiating a surface to be measured with a laser beam, a screen placed on a reflection optical axis of the laser light reflected from the surface to be measured, and a screen for observing the screen. Is a surface tilt angle measuring device composed of a CCD camera for image processing.
【００１１】基準となる傾斜角度を設定し、基準となる
傾斜角度からのずれ量を測定する。また、被測定面に照
射するレーザー光は所定の照射面積を有し、レーザー反
射光によりスクリーンに投射されたパターンをＣＣＤカ
メラで撮影して画像処理・演算して比較し、そのスクリ
ーン上での移動量を求め面傾斜角度の変化を測定する。A reference inclination angle is set, and a deviation from the reference inclination angle is measured. In addition, the laser light applied to the surface to be measured has a predetermined irradiation area. The pattern projected on the screen by the laser reflected light is photographed by a CCD camera, subjected to image processing / computation, compared, and then compared on the screen. The amount of movement is determined, and the change in the surface inclination angle is measured.
【００１２】[0012]
【発明の実施の形態】図５は本発明の一実施形態を説明
するためのものであり、本発明に使用するレーザー光源
より出射されたレーザー光に垂直な方向より見た概略図
である。２２はレーザー光源であり、２３はレーザー入
射光である。２４−１は被測定面であり、２５−１は被
測定面２４−１によるレーザー反射光である。２４−２
は被測定面２４−１が時計と逆方向に少し回転した時の
被測定面であり、２５−２は被測定面２４−２によるレ
ーザー反射光である。レーザー反射光の光路上には半透
明のスクリーン２６がレーザー反射光に垂直に配置され
ており、スクリーン２６に投射されたレーザー反射光を
ＣＣＤカメラ２７で撮影する。ＣＣＤカメラ２７はスク
リーン２６を垂直に見る位置に配置されている。レーザ
ー光は平行光線に近いものであり、ビームはあまり広が
ることはなくスクリーン２６に投射されるレーザー反射
光は被測定面の正反射成分が強ければ強いほど鮮明にな
る。レーザー入射光２３を測定したい面の形状に加工
（例えば所望形状の穴を通過させる）しておいて、被測
定面に入射させれば、レーザー反射光は面の形状をその
ままスクリーン２６に投射する。これは本発明が正反射
し易い面を測定対象にしていることによる。FIG. 5 is a view for explaining an embodiment of the present invention, and is a schematic diagram viewed from a direction perpendicular to a laser beam emitted from a laser light source used in the present invention. Reference numeral 22 denotes a laser light source, and 23 denotes laser incident light. Reference numeral 24-1 denotes a surface to be measured, and reference numeral 25-1 denotes laser reflected light from the surface to be measured 24-1. 24-2
Is the surface to be measured when the surface to be measured 24-1 is slightly rotated in the opposite direction to the clock, and 25-2 is the laser reflected light from the surface to be measured 24-2. On the optical path of the laser reflected light, a translucent screen 26 is arranged perpendicular to the laser reflected light, and the laser reflected light projected on the screen 26 is photographed by the CCD camera 27. The CCD camera 27 is arranged at a position where the screen 26 is viewed vertically. The laser beam is close to a parallel beam, the beam does not spread so much, and the laser reflected beam projected on the screen 26 becomes sharper as the specular reflection component of the surface to be measured becomes stronger. If the laser incident light 23 is processed into the shape of the surface to be measured (for example, through a hole having a desired shape) and is incident on the surface to be measured, the laser reflected light projects the surface shape on the screen 26 as it is. . This is because the present invention targets a surface that is easily specularly reflected.
【００１３】被測定面２４−２が被測定面２４−１より
反時計方向にθ１だけ回転した時にレーザー反射光２５
−２はレーザー反射光２５−１より２θ１だけ回転す
る。被測定面２４−１とレーザー入射光２３との交点と
スクリーン２６とのおおよその距離をＬとする。スクリ
ーン２６上での投射位置の移動量ｌ１はｌ１＝Ｌ・ｔａ
ｎ２θ１で求められるので、移動量ｌ１よりθ１は２θ
１＝ｔａｎ−１ｌ１／Ｌで求められる。When the measured surface 24-2 rotates counterclockwise from the measured surface 24-1 by θ1, the laser reflected light 25
-2 rotates by 2θ1 from the laser reflected light 25-1. The approximate distance between the intersection of the measured surface 24-1 and the laser incident light 23 and the screen 26 is represented by L. The movement amount l1 of the projection position on the screen 26 is l1 = L · ta
Since it is obtained by n2θ1, θ1 is 2θ from the movement amount l1.
1 = tan −1 11 / L
【００１４】被測定面２４−１からのレーザー反射光２
５−１がスクリーン２６に投影されたパターンと被測定
面２４−２からのレーザー反射光２５−２がスクリーン
２６に投影されたパターンをＣＣＤカメラ２７で撮影し
て画像処理・演算して比較し、そのスクリーン上での移
動量を求め面傾斜角度の変化を推定する。本発明の面傾
斜角度測定機では、レーザー入射光を法線とする平面に
対する絶対角度を測定することはできないが、被測定面
を基準とし、そこからどの程度面が傾斜しているかを正
確に測定できるものである。The laser reflected light 2 from the surface to be measured 24-1
The pattern 5-1 is projected on the screen 26 and the pattern of the laser reflected light 25-2 from the measured surface 24-2 projected on the screen 26 is photographed by the CCD camera 27, image processed and calculated, and compared. Then, the amount of movement on the screen is obtained, and the change in the surface inclination angle is estimated. With the surface inclination angle measuring device of the present invention, it is not possible to measure the absolute angle with respect to a plane whose normal line is the laser incident light, but based on the surface to be measured, it is possible to accurately determine how much the surface is inclined from there. It can be measured.
【００１５】本発明では、被測定面の比較的大きな面積
部分レーザー光線を当て、被測定面によるレーザー反射
光をＣＣＤカメラにより撮影、画像処理して面傾斜角度
を測定するので、被測定面の細かいうねりや汚れ等は測
定の大きな障害にはならない。In the present invention, a laser beam is applied to a relatively large area of the surface to be measured, and the laser reflected light from the surface to be measured is photographed by a CCD camera, image processing is performed, and the surface inclination angle is measured. Swell and dirt do not become a major obstacle to measurement.
【００１６】図６は本発明の更に具体的な実施形態を説
明する概略図である。への字形に成形された測定対象物
３０はＸＹテーブル３４に固定された治具３３に取付け
られている。レーザー光源２２はＨｅＮｅレーザーであ
る。レーザー光線はコリメータレンズ３１を透過し、直
径２ｍｍの平行光線束のレーザー入射光２３となってい
る。レーザー入射光２３は４５度ハーフミラー３２を透
過し、被測定物３０に照射される。本実施形態では被測
定物３０の基準傾斜角面がレーザー入射光に垂直になる
ように設定されている。すなわち、基準傾斜角面でレー
ザー入射光２３は垂直に反射され、４５度ハーフミラー
３２で反射されスクリーン２６の原点Ｏに到達する。基
準傾斜角面からスクリーンまでの距離はＡ＋Ｂである。FIG. 6 is a schematic diagram illustrating a more specific embodiment of the present invention. The measurement object 30 shaped like a triangle is attached to a jig 33 fixed to an XY table 34. The laser light source 22 is a HeNe laser. The laser beam passes through the collimator lens 31 and becomes a laser beam 23 of a parallel beam having a diameter of 2 mm. The laser incident light 23 transmits through the 45-degree half mirror 32 and irradiates the object 30 to be measured. In the present embodiment, the reference tilt angle plane of the DUT 30 is set to be perpendicular to the laser incident light. That is, the laser incident light 23 is vertically reflected by the reference tilt angle plane, reflected by the 45-degree half mirror 32, and reaches the origin O of the screen 26. The distance from the reference inclined plane to the screen is A + B.
【００１７】への字形の成形に誤差が生じ点線で示すよ
うに測定傾斜各面が反時計方向にθ２回転していると、
レーザー反射光２５−２はθ２だけ回転し、スクリーン
２６に到達した時は原点ＯからＬ２離れている。θ２＝
ｔａｎ−１Ｌ／（Ａ＋Ｂ）で基準傾斜角面からの回転角
度が求められる。If an error occurs in the formation of the U-shape, as shown by the dotted line, when each of the measurement inclined surfaces is rotated counterclockwise by θ2,
The laser reflected light 25-2 rotates by θ2, and when it reaches the screen 26, is separated from the origin O by L2. θ2 =
The rotation angle from the reference tilt angle plane is determined by tan −1 L / (A + B).
【００１８】本発明ではレーザー入射光に所定の面積を
もたせて測定を安定化しているが、画像処理の手法によ
り、例えば、レーザー入射光を複数にして傾斜角度を測
定することも可能である。In the present invention, the measurement is stabilized by giving a predetermined area to the laser incident light. However, it is also possible to measure the tilt angle by using a plurality of laser incident lights, for example, by an image processing technique.
【００１９】[0019]
【発明の効果】本発明は被測定面の高さの変化を測定し
て面傾斜角度を計算するのではなく、予め設定した基準
傾斜面との比較による面傾斜角度の測定なので精度の高
い面傾斜角度の測定ができる。The present invention does not calculate the surface inclination angle by measuring the change in the height of the surface to be measured, but rather measures the surface inclination angle by comparison with a preset reference inclination surface. Measurement of tilt angle is possible.
【図１】従来の面傾斜角度測定機の単純な構成図FIG. 1 is a simple configuration diagram of a conventional surface inclination angle measuring device.
【図２】レーザー変位計の測定原理を説明するための模
式図FIG. 2 is a schematic diagram for explaining the measurement principle of a laser displacement meter.
【図３】受光素子上のレーザー光の入射分布を示す図FIG. 3 is a view showing an incident distribution of laser light on a light receiving element.
【図４】図２の被測定面１４−１が、被測定面１４−１
とレーザー入射光１３との交点を回転中心として時計方
向に少し回転した場合の図FIG. 4 is a diagram illustrating the measured surface 14-1 in FIG.
Of a small clockwise rotation about the point of intersection between the laser and the laser incident light 13
【図５】本発明の一実施形態を説明するためのものであ
り、本発明に使用するレーザー光源より出射されたレー
ザー光に垂直な方向より見た概略図FIG. 5 is a view for explaining one embodiment of the present invention, and is a schematic diagram viewed from a direction perpendicular to a laser beam emitted from a laser light source used in the present invention.
【図６】本発明の具体的な実施形態を説明する概略図FIG. 6 is a schematic diagram illustrating a specific embodiment of the present invention.
１ レーザー変位計センサヘッド部 ２ 測定される対象物 ３ ＸＹテーブル ４ レーザー変位計アンプ ５ ＸＹテーブルコントローラ ６ コンピュータ ７ モニタ １０ ボディ １１ 半導体レーザー １２ レンズ １４−１ 被測定面 １４−２ 被測定面 １４−３ 被測定面 １５−１ レーザー反射光 １５−２ レーザー反射光 １５−３ レーザー反射光 １７ レンズ １８ 受光素子 １９ 入射位置 ２０ 入射位置 ２１ 入射位置 ２２ レーザー光源 ２３ レーザー入射光 ２４−１ 被測定面 ２４−２ 被測定面 ２５−１ レーザー反射光 ２５−２ レーザー反射光 ２６ スクリーン ２７ ＣＣＤカメラ ３０ 測定対象物 ３１ コリメータレンズ ３２ ４５度ハーフミラー ３３ 治具 ３４ ＸＹテーブル DESCRIPTION OF SYMBOLS 1 Laser displacement meter sensor head part 2 Object to be measured 3 XY table 4 Laser displacement meter amplifier 5 XY table controller 6 Computer 7 Monitor 10 Body 11 Semiconductor laser 12 Lens 14-1 Measurement surface 14-2 Measurement surface 14- 3 Surface to be Measured 15-1 Laser Reflected Light 15-2 Laser Reflected Light 15-3 Laser Reflected Light 17 Lens 18 Light Receiving Element 19 Incident Position 20 Incident Position 21 Incident Position 22 Laser Light Source 23 Laser Incident Light 24-1 Measured Surface 24 -2 Measurement surface 25-1 Laser reflected light 25-2 Laser reflected light 26 Screen 27 CCD camera 30 Object to be measured 31 Collimator lens 32 45 degree half mirror 33 Jig 34 XY table
Claims (3)
ー光源部と、被測定面より反射された前記レーザー光の
反射光軸上におかれたスクリーンと、スクリーンを観察
するための画像処理用ＣＣＤカメラからなることを特徴
とする面傾斜角度測定機。1. A laser light source for irradiating a surface to be measured with a laser beam, a screen placed on a reflection optical axis of the laser light reflected from the surface to be measured, and an image processing device for observing the screen A surface tilt angle measuring device comprising a CCD camera.
る傾斜角度からのずれ量を測定することを特徴とする請
求項１記載の面傾斜角度測定機。2. The surface inclination angle measuring device according to claim 1, wherein a reference inclination angle is set, and a deviation amount from the reference inclination angle is measured.
照射面積を有し、レーザー反射光によりスクリーンに投
射されたパターンをＣＣＤカメラで撮影して画像処理・
演算して比較し、そのスクリーン上での移動量を求め面
傾斜角度の変化を測定することを特徴とする請求項２記
載の面傾斜角度測定機。3. A laser beam applied to a surface to be measured has a predetermined irradiation area, and a pattern projected on a screen by laser reflected light is photographed by a CCD camera to perform image processing.
3. The surface inclination angle measuring device according to claim 2, wherein the operation is compared, the amount of movement on the screen is determined, and the change in the surface inclination angle is measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29809998A JP3607821B2 (en) | 1998-10-20 | 1998-10-20 | Inclination angle measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29809998A JP3607821B2 (en) | 1998-10-20 | 1998-10-20 | Inclination angle measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000121340A true JP2000121340A (en) | 2000-04-28 |
| JP3607821B2 JP3607821B2 (en) | 2005-01-05 |
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ID=17855152
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29809998A Expired - Fee Related JP3607821B2 (en) | 1998-10-20 | 1998-10-20 | Inclination angle measuring machine |
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| Country | Link |
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| JP (1) | JP3607821B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1314943C (en) * | 2005-10-12 | 2007-05-09 | 浙江大学 | Micro angular displacement measuring device based on linear array charge-coupled device |
| CN104180778A (en) * | 2014-09-17 | 2014-12-03 | 中国科学院光电技术研究所 | Structured light method for small angle measurement |
| CN114577179A (en) * | 2022-02-25 | 2022-06-03 | 烟台帝峰信息技术有限公司 | Laser mapping method, system, device and storage medium based on image recognition |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634281A (en) * | 2015-02-15 | 2015-05-20 | 上海理工大学 | Drum machine and measuring method |
| CN107345793B (en) * | 2017-06-22 | 2020-07-10 | 四川大学 | Angle measuring device of CCD image sensor micro-displacement measuring instrument |
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|---|---|---|---|---|
| JPH08128807A (en) * | 1994-10-31 | 1996-05-21 | Kobe Steel Ltd | Method and apparatus for displacement measurement of roll of rolling mill |
| JPH10227624A (en) * | 1997-02-13 | 1998-08-25 | Fuji Elelctrochem Co Ltd | Parallelism measuring method of parallel double refraction plate |
-
1998
- 1998-10-20 JP JP29809998A patent/JP3607821B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08128807A (en) * | 1994-10-31 | 1996-05-21 | Kobe Steel Ltd | Method and apparatus for displacement measurement of roll of rolling mill |
| JPH10227624A (en) * | 1997-02-13 | 1998-08-25 | Fuji Elelctrochem Co Ltd | Parallelism measuring method of parallel double refraction plate |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1314943C (en) * | 2005-10-12 | 2007-05-09 | 浙江大学 | Micro angular displacement measuring device based on linear array charge-coupled device |
| CN104180778A (en) * | 2014-09-17 | 2014-12-03 | 中国科学院光电技术研究所 | Structured light method for small angle measurement |
| CN114577179A (en) * | 2022-02-25 | 2022-06-03 | 烟台帝峰信息技术有限公司 | Laser mapping method, system, device and storage medium based on image recognition |
| CN114577179B (en) * | 2022-02-25 | 2024-05-14 | 烟台帝峰信息技术有限公司 | Laser mapping method, system, device and storage medium based on image recognition |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3607821B2 (en) | 2005-01-05 |
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