JP2000100892A5 - - Google Patents

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Publication number
JP2000100892A5
JP2000100892A5 JP1998264534A JP26453498A JP2000100892A5 JP 2000100892 A5 JP2000100892 A5 JP 2000100892A5 JP 1998264534 A JP1998264534 A JP 1998264534A JP 26453498 A JP26453498 A JP 26453498A JP 2000100892 A5 JP2000100892 A5 JP 2000100892A5
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JP
Japan
Prior art keywords
substrate
inspection
opening
room
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998264534A
Other languages
English (en)
Japanese (ja)
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JP2000100892A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26453498A priority Critical patent/JP2000100892A/ja
Priority claimed from JP26453498A external-priority patent/JP2000100892A/ja
Publication of JP2000100892A publication Critical patent/JP2000100892A/ja
Publication of JP2000100892A5 publication Critical patent/JP2000100892A5/ja
Pending legal-status Critical Current

Links

JP26453498A 1998-09-18 1998-09-18 基板検査装置 Pending JP2000100892A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26453498A JP2000100892A (ja) 1998-09-18 1998-09-18 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26453498A JP2000100892A (ja) 1998-09-18 1998-09-18 基板検査装置

Publications (2)

Publication Number Publication Date
JP2000100892A JP2000100892A (ja) 2000-04-07
JP2000100892A5 true JP2000100892A5 (enrdf_load_stackoverflow) 2005-11-04

Family

ID=17404608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26453498A Pending JP2000100892A (ja) 1998-09-18 1998-09-18 基板検査装置

Country Status (1)

Country Link
JP (1) JP2000100892A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100526946C (zh) * 2006-07-03 2009-08-12 元太科技工业股份有限公司 防止产生粉尘的无电能环保式玻璃基板载运装置
WO2017187803A1 (ja) * 2016-04-26 2017-11-02 日本電産サンキョー株式会社 処理装置
JP2019052914A (ja) * 2017-09-14 2019-04-04 日本電産サンキョー株式会社 検査装置

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