JP2000097871A - Review device - Google Patents
Review deviceInfo
- Publication number
- JP2000097871A JP2000097871A JP10270944A JP27094498A JP2000097871A JP 2000097871 A JP2000097871 A JP 2000097871A JP 10270944 A JP10270944 A JP 10270944A JP 27094498 A JP27094498 A JP 27094498A JP 2000097871 A JP2000097871 A JP 2000097871A
- Authority
- JP
- Japan
- Prior art keywords
- abnormal part
- reference image
- abnormal
- sample
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体装置製造過
程において、半導体基板等の試料上に発生したパターン
欠陥、もしくは付着した異物を観察するレビュー装置に
関するもので、特に欠陥あるいは異物の種類を特定する
分類作業に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a review apparatus for observing a pattern defect or a foreign substance adhered to a sample such as a semiconductor substrate in a process of manufacturing a semiconductor device. Related to the classification work to be performed.
【０００２】半導体製造過程において半導体基板上の欠
陥あるいは異物の種類を特定し、欠陥あるいは異物の発
生原因を解析することは歩留まり向上のために重要なこ
とである。It is important to improve the yield by specifying the type of a defect or foreign matter on a semiconductor substrate and analyzing the cause of the defect or foreign matter in a semiconductor manufacturing process.
【０００３】[0003]
【従来の技術】近年の半導体素子の微細化の進歩に伴
い、半導体装置の不良の発生原因となる欠陥、あるいは
異物は微小化し、光学顕微鏡を用いての、欠陥あるいは
異物の発生個所の特定、および不良個所の観察，欠陥あ
るいは異物の種類の特定を行うことは困難になってい
る。2. Description of the Related Art With the recent progress in miniaturization of semiconductor elements, defects or foreign matters that cause defects in semiconductor devices are miniaturized, and the occurrence of defects or foreign substances is specified using an optical microscope. In addition, it is difficult to observe defective parts and to specify the type of defect or foreign matter.
【０００４】そこで、通常、光学式欠陥検査装置あるい
は光学式異物検査装置を用いて、欠陥あるいは異物の発
生個所を特定し、検査装置の提供する欠陥・異物座標等
の情報を基に、電子顕微鏡等を用いて、欠陥あるいは異
物の存在位置に移動し、欠陥あるいは異物を観察して種
類を特定することが一般的である。[0004] Therefore, usually, an optical defect inspection apparatus or an optical foreign substance inspection apparatus is used to specify a position where a defect or a foreign substance is generated, and an electron microscope is used on the basis of information such as coordinates of defects and foreign substances provided by the inspection apparatus. It is common practice to move to a position where a defect or a foreign substance is present, and observe the defect or the foreign substance to specify the type.
【０００５】欠陥あるいは異物の種類の特定は、欠陥あ
るいは異物の発生原因を解析するために重要な意味を持
つ。誤った分類、あいまいな分類は正確な発生原因を特
定する妨げになる。そのため管理者は事前に各欠陥ある
いは異物の種類に対応した代表的な画像を写真に取り、
その画像写真を貼り付けた分類指示書を作成する。実際
に分類するときには作業者はその分類指示書を装置の脇
に貼るか手元に置き、欠陥あるいは異物の種類に対応し
た代表的な画像写真と実際の欠陥あるいは異物の画像を
見比べながら分類作業を行う。[0005] The identification of the type of a defect or foreign matter is important for analyzing the cause of the defect or foreign matter. Misclassification or ambiguous classification hinders the identification of the exact cause. Therefore, the manager takes a representative image corresponding to each type of defect or foreign matter beforehand,
A classification instruction with the image photograph attached is created. When actually classifying, the worker attaches the classification instruction to the side of the device or places it near the device, and performs the classification work while comparing a typical image photograph corresponding to the type of defect or foreign matter with an image of the actual defect or foreign matter. Do.
【０００６】しかし、この方法では、分類指示書を作成
するのに手間がかかり、各分類の代表的な画像写真を簡
単に変更することもできなかった。また紙を用いるため
参照画像が複数になったとき瞬時に探すことが困難であ
った。However, in this method, it takes time and effort to prepare a classification instruction, and a typical image photograph of each classification cannot be easily changed. In addition, since paper is used, it is difficult to instantly search for a plurality of reference images.
【０００７】[0007]
【発明が解決しようとする課題】本発明の目的は、欠陥
あるいは異物の種類ごとの代表的な画像を異常参照画像
として電子情報で保存し、その異常参照画像と現在観察
中の試料の欠陥あるいは異物の画像を同時に操作画面に
表示することによって分類作業をスムーズに行い書類を
作成する手間と書類自体を省くことと、観察している欠
陥あるいは異物の画像を随時異常部参照画像として登録
することによって常に最新の異常部参照画像を参照する
ことができるレビュー装置を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to store a representative image for each type of defect or foreign matter in electronic information as an abnormal reference image, and to store the abnormal reference image and the defect or defect of the sample currently being observed. Simultaneously displaying the image of the foreign matter on the operation screen, smoothing the classification work, saving the trouble of creating the document and the document itself, and registering the image of the observed defect or foreign matter as an abnormal part reference image as needed Accordingly, it is an object of the present invention to provide a review device that can always refer to the latest abnormal part reference image.
【０００８】[0008]
【課題を解決するための手段】本発明は、半導体基板上
に存在する欠陥あるいは異物をレビューし、欠陥あるい
は異物の種類を判別するときに、欠陥あるいは異物の種
別を判別する目安となるように、欠陥検査装置あるいは
異物検査装置等の異常部検出装置から提供された情報を
もとに、試料と関連のある品種や工程の異常部参照画像
リストを自動で表示するものである。According to the present invention, a defect or a foreign substance present on a semiconductor substrate is reviewed, and the type of the defect or the foreign substance is determined when the type of the defect or the foreign substance is determined. In addition, an abnormal part reference image list of a type or a process related to a sample is automatically displayed based on information provided from an abnormal part detection device such as a defect inspection device or a foreign material inspection device.
【０００９】現在観察している画像も参照用画像として
適当だと判断された場合は随時参照画像リストの登録す
ることができる。If it is determined that the image currently being observed is also suitable as a reference image, a reference image list can be registered at any time.
【００１０】また、作業をより簡単に行うために登録や
参照の作業にポインティング手段を多用することを特徴
とする。Further, in order to perform the work more easily, a pointing device is frequently used for the work of registration and reference.
【００１１】[0011]
【発明の実施の形態】以下、図面に基づき本発明の一実
施例を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【００１２】図１は本発明の装置構成を示す概略図であ
る。最初に欠陥あるいは異物１１の存在している試料１
を異常部検出装置（欠陥あるいは異物検査装置）２に搬
送し試料上の異常部の有無を検査する。その結果試料上
の異常部の存在位置や大きさを検出し検査結果に出力す
る。検査結果にはその他に試料の品種や工程などの付属
情報も出力される。FIG. 1 is a schematic diagram showing the configuration of the apparatus of the present invention. Sample 1 having defect or foreign matter 11 at first
Is transported to an abnormal part detection device (defect or foreign matter inspection device) 2 to inspect the sample for an abnormal portion. As a result, the existence position and size of the abnormal part on the sample are detected and output to the inspection result. In addition to the inspection result, additional information such as the type and process of the sample is also output.
【００１３】ところで、ディスプレイ８と電子顕微鏡３
は通信媒体１０（ＲＳ２３２Ｃ通信回線等）で結ばれ、
コンピュータ６から電子顕微鏡のステージ４を制御す
る。また、電子顕微鏡の観察像信号はディスプレイ８の
観察ＣＲＴ９上に二次電子像として観察像を表示する。
ＣＲＴに表示される観察像の倍率や画質はコンピュータ
６から制御される。The display 8 and the electron microscope 3
Are connected by a communication medium 10 (such as an RS232C communication line),
The computer 4 controls the stage 4 of the electron microscope. The observation image signal of the electron microscope displays the observation image as a secondary electron image on the observation CRT 9 of the display 8.
The magnification and the image quality of the observation image displayed on the CRT are controlled by the computer 6.
【００１４】異常部検出装置で検査した試料１を電子顕
微鏡装置のステージ４に搬送する。また同時に異常部検
出装置２が検出した検査結果を情報媒体５（通信または
Ｆ／Ｄ，ＭＯなど）を介して電子顕微鏡装置のコンピュ
ータ６に提供する。コンピュータ６は前記検査結果に含
まれるアライメント情報や試料の外周を基にして電子顕
微鏡ステージ４に対する試料１のアライメントを行う。
続いて欠陥あるいは異物１１の存在する座標に電子顕微
鏡の視野を移動し、欠陥あるいは異物１１の画像を観察
ＣＲＴ９に表示する。The sample 1 inspected by the abnormal part detecting device is transported to the stage 4 of the electron microscope device. At the same time, the inspection result detected by the abnormal part detection device 2 is provided to the computer 6 of the electron microscope device via the information medium 5 (communication or F / D, MO, etc.). The computer 6 performs alignment of the sample 1 on the electron microscope stage 4 based on the alignment information included in the inspection result and the outer periphery of the sample.
Subsequently, the visual field of the electron microscope is moved to the coordinates where the defect or the foreign substance 11 exists, and an image of the defect or the foreign substance 11 is displayed on the observation CRT 9.
【００１５】図２は操作の概要を示したフローチャート
である。図３は本発明の一操作画面を示す。欠陥あるい
は異物のレビューを開始すると、ＣＲＴ９上に異常部検
出装置２で検出した欠陥あるいは異物のＩＤ，試料上の
位置座標，サイズが記述されたリストやマップが表示さ
れる。作業者はそのリスト１８やマップ１９から観察し
たい欠陥あるいは異物を指定する。欠陥あるいは異物を
指定するとコンピュータ６は試料を指定した欠陥あるい
は異物１１が観察できる位置に移動し、指定された欠陥
あるいは異物の像をＣＲＴ９に表示する。また同時に異
物検出装置２から取得した検査結果より試料の品種や工
程等の付属情報を読み取り、その品種や工程に対応する
異常部参照画像リスト１２を自動的に表示する。FIG. 2 is a flowchart showing an outline of the operation. FIG. 3 shows one operation screen of the present invention. When the review of a defect or a foreign substance is started, a list or a map on which the ID of the defect or the foreign substance detected by the abnormal part detecting device 2, the position coordinates on the sample, and the size are described is displayed on the CRT 9. The operator specifies a defect or a foreign substance to be observed from the list 18 or the map 19. When the defect or the foreign matter is designated, the computer 6 moves to a position where the defect or the foreign matter 11 which designates the sample can be observed, and displays the image of the designated defect or the foreign matter on the CRT 9. At the same time, the auxiliary information such as the type and process of the sample is read from the inspection result obtained from the foreign substance detection device 2, and the abnormal part reference image list 12 corresponding to the type and process is automatically displayed.
【００１６】観察している欠陥あるいは異物１１の異常
部判別情報を特定するために、表示された異常部参照画
像リスト１２の画面を任意の方向に移動する手段（スク
ロールバー，ボタン等）を縦横に動かして類似した画像
を探し出す。図４で示すように異常部参照画像リスト１
２は大きさを変更することが可能である。縦方向に複数
の異常部判別情報の参照画像を表示し横方向に１つの異
常部判別情報に登録した参照画像を表示しているとき、
複数の異常部判別情報の参照画像をみたいときは異常部
参照画像リストを縦長に大きくし、１つの異常部判別情
報に登録された複数の参照画像を見たい場合は異常部参
照画像リストを横長に大きくする。In order to identify the abnormal part discrimination information of the defect or the foreign substance 11 being observed, means (scroll bars, buttons, etc.) for moving the screen of the displayed abnormal part reference image list 12 in any direction are arranged vertically and horizontally. To find similar images. As shown in FIG. 4, the abnormal part reference image list 1
2 can be changed in size. When displaying a plurality of reference images of abnormal part determination information in the vertical direction and displaying a reference image registered in one abnormal part determination information in the horizontal direction,
If you want to see the reference images of a plurality of abnormal part discrimination information, enlarge the abnormal part reference image list vertically, and if you want to see multiple reference images registered in one abnormal part discrimination information, make the abnormal part reference image list horizontally long To be larger.
【００１７】類似した異常部参照画像があった場合は、
その異常部参照画像リスト上の異常部判別情報１４をポ
インティング手段（マウス，トラックボール等）でクリ
ックする。観察している欠陥あるいは異物の像に異常部
判別情報が特定されると異常部判別情報登録部１５に記
述されるのでそれを確認する。異常部判別情報は何度で
も書きかえることができる。類似した欠陥あるいは異物
がない場合は異常部判別情報登録部で新しい異常部判別
情報に登録する。If there is a similar abnormal part reference image,
The abnormal part discrimination information 14 on the abnormal part reference image list is clicked by a pointing means (mouse, trackball, or the like). When the abnormal part discrimination information is specified in the image of the defect or the foreign matter being observed, it is described in the abnormal part discrimination information registration unit 15 and is confirmed. The abnormal part determination information can be rewritten any number of times. If there is no similar defect or foreign matter, the abnormal part discriminating information registration unit registers the new abnormal part discriminating information.
【００１８】また、現在観察している画像が異常部参照
画像リストの参照画像に適している場合は、参照画像登
録部１６で観察画像を参照画像として登録することがで
きる。If the currently observed image is suitable for the reference image in the abnormal part reference image list, the reference image registration unit 16 can register the observed image as a reference image.
【００１９】異常部参照画像リスト１２は品種や工程名
等１７の試料の付属情報ごとに作成されるが場合によっ
ては別の品種や工程に異常部参照画像にリストにコピー
することもできる。The abnormal part reference image list 12 is created for each piece of accessory information of the sample such as the product type and the process name, but may be copied to the abnormal part reference image list for another product type or process in some cases.
【００２０】図５は異常部参照リスト１２の一例であ
る。通常は複数の異常部判別情報１４の一代表画像が表
示されているが、必要な場合は特定の部位をポインティ
ング手段（マウス，トラックボール等）でクリックする
とその異常部判別情報１４に登録されている参照画像１
３が表示される。FIG. 5 shows an example of the abnormal part reference list 12. Normally, one representative image of a plurality of abnormal part discrimination information 14 is displayed, but if necessary, a specific part is clicked with a pointing means (mouse, trackball, or the like) and registered in the abnormal part discrimination information 14. Reference image 1
3 is displayed.
【００２１】図６は異常部参照リスト１２の一例であ
る。異常部参照画像１３は通常は複数の異常部参照画像
１３を同時に見るため縮小した画像であるが、異常部参
照画像リスト１２上の拡大したい参照画像１３をポイン
ティング手段（マウス，トラックボール等）でダブルク
リックすると選択した異常部参照画像１３を拡大して表
示する。FIG. 6 shows an example of the abnormal part reference list 12. The abnormal part reference image 13 is usually an image reduced in order to simultaneously view a plurality of abnormal part reference images 13, but the reference image 13 to be enlarged on the abnormal part reference image list 12 is pointed by a pointing means (mouse, trackball, etc.). When double-clicking, the selected abnormal part reference image 13 is enlarged and displayed.
【００２２】なお、本手法は、上記実施例の電子顕微鏡
に限定されるものではなく、例えば、光学式顕微鏡，レ
ーザ顕微鏡，集束イオンビーム装置での異物観察装置で
の欠陥あるいは異物の分類に転用可能である。Note that the present method is not limited to the electron microscope of the above embodiment, but may be diverted to classification of defects or foreign matter in a foreign matter observation device using an optical microscope, a laser microscope, or a focused ion beam device. It is possible.
【００２３】[0023]
【発明の効果】本発明は、欠陥あるいは異物の種類ごと
の代表的な画像とその異常部判別情報を事前あるいは同
時に電子情報として保存し、欠陥あるいは異物の分類作
業時に操作画面に表示し参照画像と観察画像を比較して
分類情報を決定するものである。これによって、常に最
新の参照画像を参照することができ、試料上の欠陥ある
いは異物の分類作業を短時間で容易に行うことができ
る。According to the present invention, a representative image for each type of defect or foreign matter and its abnormal part discrimination information are stored as electronic information in advance or at the same time, and displayed on an operation screen at the time of classifying the defect or foreign matter, and a reference image is displayed. And the observation image are compared to determine the classification information. Thus, the latest reference image can always be referred to, and the work of classifying a defect or a foreign substance on a sample can be easily performed in a short time.
【図１】本発明のレビュー装置構成を示す概略図。FIG. 1 is a schematic diagram showing a configuration of a review device of the present invention.
【図２】本発明の操作を示すフローチャート。FIG. 2 is a flowchart showing the operation of the present invention.
【図３】本発明の操作画面の一例を示す説明図。FIG. 3 is an explanatory diagram showing an example of an operation screen according to the present invention.
【図４】本発明の操作画面の一例を示す説明図。FIG. 4 is an explanatory diagram showing an example of an operation screen according to the present invention.
【図５】本発明の操作画面の一例を示す説明図。FIG. 5 is an explanatory diagram showing an example of an operation screen according to the present invention.
【図６】本発明の操作画面の一例を示す説明図。FIG. 6 is an explanatory diagram showing an example of an operation screen according to the present invention.
１…試料、２…異常検出装置、３…レビュー装置、４…
ステージ、５…情報媒体、６…コンピュータ、７…ディ
スク、８…ディスプレイ、９…観察ＣＲＴ、１０…通信
媒体、１１…試料上の欠陥あるいは異物、１２…異常部
参照画像リスト、１３…異常部参照画像、１４…異常部
判別情報、１５…分類情報登録部、１６…参照画像登録
部、１７…試料の付属情報、１８…異常部リスト、１９
…異常部表示マップ、２０…画面を任意の方向に移動す
る手段、２１…参照画像の拡大画像、２２…異常部参照
画像リストと現在観察している試料の異常部像を同時に
表示させる手段。1 ... sample, 2 ... abnormality detection device, 3 ... review device, 4 ...
Stage, 5 ... information medium, 6 ... computer, 7 ... disk, 8 ... display, 9 ... observation CRT, 10 ... communication medium, 11 ... defect or foreign matter on sample, 12 ... abnormal part reference image list, 13 ... abnormal part Reference image, 14 ... abnormal part discrimination information, 15 ... Classification information registration part, 16 ... Reference image registration part, 17 ... Attachment information of sample, 18 ... Abnormal part list, 19
... Abnormal part display map, 20. Means for moving the screen in an arbitrary direction, 21. Enlarged image of the reference image, 22. Means for simultaneously displaying the abnormal part reference image list and the abnormal part image of the sample currently observed.
Claims (9)
置から試料の付属情報や異常部の座標位置，異常部の大
きさが含まれた検査結果を取得する手段と、その検査結
果に基づいて視野を前記試料の異常部存在領域に設定す
る視野設定手段と、異常部を観察する手段と、観察した
画像を保存する手段と、観察した試料上の異常部に異常
部判別情報を持たせる手段を有するレビュー装置におい
て、異常部判別情報ごとの異常部参照画像リストと現在
観察している試料の異常部像を同時に表示することを特
徴とするレビュー装置。1. A means for acquiring an inspection result including information attached to a sample, a coordinate position of the abnormal portion, and a size of the abnormal portion from an abnormality detecting device for inspecting the presence or absence of an abnormal portion of the sample, and A visual field setting means for setting a visual field to an abnormal part existing region of the sample based on the visual field, a means for observing the abnormal part, a means for storing an observed image, and an abnormal part identification information for the abnormal part on the observed sample. A review apparatus having a means for causing an abnormal part to be displayed, wherein an abnormal part reference image list for each abnormal part determination information and an abnormal part image of a sample currently being observed are simultaneously displayed.
て、現在観察している試料の異常部像を随時異常部参照
画像として異常部参照画像リストに登録することを特徴
とするレビュー装置。2. The review device according to claim 1, wherein an abnormal portion image of the sample currently being observed is registered in the abnormal portion reference image list as an abnormal portion reference image as needed.
て、品種や工程名等の試料の付属情報ごとに異常部参照
画像リストを作成することを特徴とするレビュー装置。3. The review device according to claim 1, wherein an abnormal part reference image list is created for each sample attached information such as a product type and a process name.
て、特定の試料を観察すると前述の異常検出装置から取
得した検出結果よりその試料の品種や工程を識別し、そ
れと同じ品種や工程の異常部参照画像リストを自動的に
出力することを特徴とするレビュー装置。4. A review apparatus according to claim 1, wherein when a specific sample is observed, the type or process of the sample is identified from the detection result obtained from the abnormality detection device, and an abnormal portion of the same type or process is identified. A review device for automatically outputting a reference image list.
て、現在観察している試料の異常部像の異常部判別情報
を特定するときに、操作画面上に示される異常部判別情
報をポインティング手段で指定することによって特定す
る異常画像判別情報特定手段であることを特徴とするレ
ビュー装置。5. The reviewing apparatus according to claim 1, wherein when identifying the abnormal part discrimination information of the abnormal part image of the sample currently being observed, the abnormal part discrimination information shown on the operation screen is pointed by pointing means. A review device characterized by abnormal image discrimination information specifying means for specifying by specifying.
て、異常部参照画像リストに画面を任意の方向に移動す
る手段を付属し、異常部判別情報ごとの異常部参照画像
や１つの異常部判別情報に登録されている複数の異常部
参照画像を画面を任意の方向に移動する手段を動かしな
がら探索する参照画像リストの画面構成であることを特
徴とするレビュー装置。6. The review device according to claim 1, further comprising means for moving a screen in an arbitrary direction to the abnormal part reference image list, and an abnormal part reference image and one abnormal part determination for each abnormal part determination information. A review device having a screen configuration of a reference image list for searching for a plurality of abnormal part reference images registered in information while moving means for moving the screen in an arbitrary direction.
６に記載した参照画像探索手段において、異常部参照画
像リストの大きさをポインティング手段を用いて自由に
変更することによって複数の異常部判別情報の参照画像
を一つずつ見たい場合と一つの異常部判別情報に登録さ
れた複数の参照画像を見たい場合の両方に対応する参照
画像リストの画面構成であることを特徴とするレビュー
装置。7. The review device according to claim 1, and the reference image searching means according to claim 6, wherein the size of the abnormal part reference image list is freely changed by using a pointing means, so that a plurality of abnormal parts are obtained. The review is characterized in that it has a screen configuration of a reference image list corresponding to both a case where the user wants to see the reference images of the discrimination information one by one and a case where he wants to see a plurality of reference images registered in one abnormal part discrimination information. apparatus.
て、通常は異常部判別情報の代表画像が１つだけ表示さ
れているが、異常部参照画像リストの参照したい異常部
判別情報をポインティング手段で指定するとその異常部
判別情報に登録されている複数の参照画像が表示される
参照画像リストの画面構成であることを特徴とするレビ
ュー装置。8. The review apparatus according to claim 1, wherein normally only one representative image of the abnormal part discrimination information is displayed, but the abnormal part discrimination information to be referred to in the abnormal part reference image list is pointed by pointing means. A review apparatus characterized by having a screen configuration of a reference image list in which a plurality of reference images registered in the abnormal part determination information are displayed when specified.
６や請求項８に記載した参照画像登録リストにおいて、
通常は複数の参照画像を一度に見るために縮小された参
照画像が表示されているが、特定の参照画像をポインテ
ィング手段で指定すると選択された参照画像が拡大され
る参照画像リストの画面構成であることを特徴とするレ
ビュー装置。9. The review device according to claim 1 and the reference image registration list according to claim 6 or claim 8, wherein:
Normally, a reduced reference image is displayed in order to see a plurality of reference images at once, but when a specific reference image is specified by pointing means, the selected reference image is enlarged in a screen configuration of a reference image list. A review device, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27094498A JP3893765B2 (en) | 1998-09-25 | 1998-09-25 | Review device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27094498A JP3893765B2 (en) | 1998-09-25 | 1998-09-25 | Review device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000097871A true JP2000097871A (en) | 2000-04-07 |
| JP2000097871A5 JP2000097871A5 (en) | 2005-01-13 |
| JP3893765B2 JP3893765B2 (en) | 2007-03-14 |
Family
ID=17493195
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27094498A Expired - Fee Related JP3893765B2 (en) | 1998-09-25 | 1998-09-25 | Review device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3893765B2 (en) |
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| JP2008076242A (en) * | 2006-09-21 | 2008-04-03 | Olympus Corp | Visual macro-inspection device, substrate inspection system, substrate treatment system and visual macro-inspection method |
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| JP2020149557A (en) * | 2019-03-15 | 2020-09-17 | 株式会社東芝 | Analysis system, analysis method, program, and storage medium |
| CN116930207A (en) * | 2023-07-24 | 2023-10-24 | 上海感图网络科技有限公司 | Display method for synchronously amplifying field of view of display area and real-time area |
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| CN116930207A (en) * | 2023-07-24 | 2023-10-24 | 上海感图网络科技有限公司 | Display method for synchronously amplifying field of view of display area and real-time area |
| CN116930207B (en) * | 2023-07-24 | 2024-04-12 | 上海感图网络科技有限公司 | Display method for synchronously amplifying field of view of display area and real-time area |
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