JP2000097871A5 - - Google Patents

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Publication number
JP2000097871A5
JP2000097871A5 JP1998270944A JP27094498A JP2000097871A5 JP 2000097871 A5 JP2000097871 A5 JP 2000097871A5 JP 1998270944 A JP1998270944 A JP 1998270944A JP 27094498 A JP27094498 A JP 27094498A JP 2000097871 A5 JP2000097871 A5 JP 2000097871A5
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Japan
Prior art keywords
abnormal part
abnormal
review
sample
image
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JP1998270944A
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Japanese (ja)
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JP3893765B2 (en
JP2000097871A (en
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Priority to JP27094498A priority Critical patent/JP3893765B2/en
Priority claimed from JP27094498A external-priority patent/JP3893765B2/en
Publication of JP2000097871A publication Critical patent/JP2000097871A/en
Publication of JP2000097871A5 publication Critical patent/JP2000097871A5/ja
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Publication of JP3893765B2 publication Critical patent/JP3893765B2/en
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Claims (9)

試料の異常部の有無を検査する異常検出装置から試料の付属情報や異常部の座標位置，異常部の大きさが含まれた検査結果を取得する手段と、その検査結果に基づいて視野を前記試料の異常部存在領域に設定する視野設定手段と、異常部を観察する手段と、観察した画像を保存する手段と、異常部判別情報ごとの異常部参照画像リストと現在観察している試料の異常部像を同時に表示する手段を備えることを特徴とするレビュー装置。Means for obtaining an inspection result including the attached information of the sample, the coordinate position of the abnormal part, and the size of the abnormal part from the abnormality detecting device for inspecting the presence or absence of the abnormal part of the sample, and the visual field based on the inspection result a field setting unit configured to set the abnormal portion existence region of the sample, and means for observing the abnormal portion, and means for storing the image observed, the sample being observed currently and the abnormal portion reference picture list for each abnormal unit determination information A review apparatus comprising means for simultaneously displaying the abnormal part image of the above. 請求項１に記載したレビュー装置において、現在観察している試料の異常部像を随時異常部参照画像として異常部参照画像リストに登録することを特徴とするレビュー装置。2. The review apparatus according to claim 1, wherein an abnormal part image of a sample currently observed is registered in an abnormal part reference image list as an abnormal part reference image as needed. 請求項１に記載したレビュー装置において、品種や工程名等の試料の付属情報ごとに異常部参照画像リストを作成することを特徴とするレビュー装置。2. The review apparatus according to claim 1, wherein an abnormal part reference image list is created for each sample attached information such as a product type and a process name. 請求項１に記載したレビュー装置において、特定の試料を観察すると前述の異常検出装置から取得した検出結果よりその試料の品種や工程を識別し、それと同じ品種や工程の異常部参照画像リストを自動的に出力することを特徴とするレビュー装置。In the review apparatus according to claim 1, when a specific sample is observed, the type and process of the sample are identified from the detection result obtained from the above-described abnormality detection apparatus, and an abnormal part reference image list of the same type and process is automatically obtained. A review device characterized in that it outputs automatically. 請求項１に記載したレビュー装置において、現在観察している試料の異常部像の異常部判別情報を特定するときに、操作画面上に示される異常部判別情報をポインティング手段で指定することによって特定する異常画像判別情報特定手段であることを特徴とするレビュー装置。2. The review apparatus according to claim 1, wherein the abnormal part discriminating information shown on the operation screen is specified by pointing means when specifying the abnormal part discriminating information of the abnormal part image of the sample currently observed. A review device, characterized in that it is an abnormal image discrimination information specifying means. 請求項１に記載したレビュー装置において、前記異常部参照画像リストを任意の方向に移動する手段を備えることを特徴とするレビュー装置。In reviewing apparatus according to claim 1, review system, characterized in that it comprises means for moving the abnormal portion reference image list in any direction. 請求項６に記載したレビュー装置において、前記異常部参照画像リストの大きさをポインティング手段を用いて自由に変更する手段を備えることを特徴とするレビュー装置。In reviewing apparatus according to claim 6, review system, characterized in that it comprises means for freely changed using the pointing means a size of the abnormal portion reference picture list. 請求項１に記載したレビュー装置において、通常は異常部判別情報の代表画像を１つ表示し、異常部参照画像リストの参照したい異常部判別情報をポインティング手段で指定した場合には、該異常部判別情報に登録されている複数の参照画像を表示する手段を備えることを特徴とするレビュー装置。In the review apparatus according to claim 1, when one representative image of abnormal part discrimination information is normally displayed and abnormal part discrimination information to be referred to in the abnormal part reference image list is designated by pointing means, the abnormal part review apparatus comprising means for displaying a plurality of reference images registered in the identification information. 請求項６又は８に記載したレビュー装置において、特定の参照画像をポインティング手段で指定した場合には該指定された参照画像を拡大表示する手段を備えることを特徴とするレビュー装置。 In reviewing apparatus according to claim 6 or 8, review system, characterized in that it comprises means to enlarge the reference picture, said specified if you specify a specific reference image by the pointing means.
JP27094498A 1998-09-25 1998-09-25 Review device Expired - Fee Related JP3893765B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27094498A JP3893765B2 (en) 1998-09-25 1998-09-25 Review device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27094498A JP3893765B2 (en) 1998-09-25 1998-09-25 Review device

Publications (3)

Publication Number Publication Date
JP2000097871A JP2000097871A (en) 2000-04-07
JP2000097871A5 true JP2000097871A5 (en) 2005-01-13
JP3893765B2 JP3893765B2 (en) 2007-03-14

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JP27094498A Expired - Fee Related JP3893765B2 (en) 1998-09-25 1998-09-25 Review device

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4526661B2 (en) * 2000-06-28 2010-08-18 株式会社日立製作所 Inspection apparatus and inspection method
WO2003100405A1 (en) * 2002-05-23 2003-12-04 Hitachi High-Technologies Corporation Defect classification device generation method and automatic defect classification method
US7602962B2 (en) 2003-02-25 2009-10-13 Hitachi High-Technologies Corporation Method of classifying defects using multiple inspection machines
JP2007285880A (en) * 2006-04-17 2007-11-01 Omron Corp Sample image registration method in board inspection, and sample image producing system
JP2008076242A (en) * 2006-09-21 2008-04-03 Olympus Corp Visual macro-inspection device, substrate inspection system, substrate treatment system and visual macro-inspection method
WO2019054235A1 (en) * 2017-09-13 2019-03-21 キヤノン株式会社 Information processing device, information processing method, and program
JP2019053050A (en) * 2017-09-13 2019-04-04 キヤノン株式会社 Information processing apparatus, information processing method and program
JP7273556B2 (en) * 2019-03-15 2023-05-15 株式会社東芝 Analysis system, analysis method, program, and storage medium
CN116930207B (en) * 2023-07-24 2024-04-12 上海感图网络科技有限公司 Display method for synchronously amplifying field of view of display area and real-time area

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0891543A (en) * 1994-09-28 1996-04-09 Omron Corp Image processing method, and device therefor
JP3255292B2 (en) * 1996-03-19 2002-02-12 株式会社日立製作所 Process management system
US6148099A (en) * 1997-07-03 2000-11-14 Neopath, Inc. Method and apparatus for incremental concurrent learning in automatic semiconductor wafer and liquid crystal display defect classification
JP4220595B2 (en) * 1998-08-10 2009-02-04 株式会社日立製作所 Defect classification method and teaching data creation method

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