JP2000084826A - Group roller structure for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a group roller structure capable of suppressing a deformation of the group roller while requiring no axis alignment of a bearing. SOLUTION: Group rollers 18A-18C are formed by rotatably supporting cylindrical bearings 44A-44C and driving rings 46A-46C on fixed shafts 42A-42C. The fixed shafts 42A-42C are supported by a frame 48R and covers 50A-50C so that each one end part fixed by a frame 48L and another end part is extensible in the axis direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a groove roller structure of a wire saw, and more particularly to a groove roller structure of a wire saw for cutting brittle materials such as silicon, glass, and ceramics.

[0002]

2. Description of the Related Art A wire saw is a device for winding a wire around a plurality of groove rollers to form a wire array, running the wire and pressing a workpiece against the wire array to cut the wafer. The groove roller is generally formed in a cylindrical shape, and is rotatably supported by sandwiching both ends of the groove roller with a pair of spindles.

[0003]

However, the conventional wire saw has a structure in which both ends of the groove roller are supported by spindles, so that it is necessary to make each bearing supporting the spindle concentric. was there. Also, in the conventional wire saw, when the groove roller rises in temperature and thermally expands, since the both ends of the groove roller are pinched by a pair of spindles, the groove roller cannot be extended in the axial direction and is deformed. there were.

The present invention has been made in view of such circumstances, and provides a groove roller structure of a wire saw that can eliminate the need for axial alignment of a bearing that supports the groove roller and can prevent deformation of the groove roller. The purpose is to do.

[0005]

According to the present invention, in order to attain the above object, a wire is wound around a plurality of groove rollers to form a wire row, the wire is run, and a cutting section of the wire row is formed. In a wire saw that simultaneously cuts a large number of wafers by pressing a workpiece, the groove roller has one end fixed to the frame and the other end supported by the frame so that it can expand and contract in the axial direction. Fixed shaft, a number of grooves around which the wire is wound on the surface, a cylindrical shaft rotatably supported via a radial bearing around the fixed shaft, and an angular bearing on the fixed shaft. A drive ring fixed to the cylindrical shaft and rotatably rotating the cylindrical shaft.

According to the first aspect of the present invention, the groove roller is configured such that a cylindrical shaft is rotatably provided on a fixed shaft. Since the fixed shaft has one end fixed to the frame, it is not necessary to perform the axial alignment of the bearing as in the conventional device. According to the first aspect of the present invention, the other end of the fixed shaft is supported by the frame so as to be able to expand and contract in the axial direction. Therefore, when the temperature of the groove roller rises, it can be extended in the axial direction, so that the groove roller is not deformed.

According to the invention of claim 2, the fixed shaft is
A cooling device is provided inside. Thereby, the temperature rise of the groove roller can be suppressed, and the thermal deformation of the groove roller can be prevented.

[0008]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a groove roller structure of a wire saw according to the present invention. FIG. 1 is a perspective view showing the entire configuration of a wire saw 10 to which the groove roller structure according to the first embodiment is applied.

As shown in FIG. 1, a wire 14 wound around a wire reel 12 has a large number of guide rollers 16, 16,
Are wound around three groove rollers 18A, 18B and 18C via a wire running path formed by... To form a parallel wire row 20. Wire 1 on which wire row 20 is formed
The wire 4 is wound around a wire reel (not shown) through a wire running path on the other side formed symmetrically with respect to the wire row 20.

A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided on each of the wire running paths formed on both sides of the wire row 20 (only one side is shown). The wire 14 is guided from the wire reel 12 at a constant pitch. Also,
The dancer roller 24 has a predetermined weight (not shown).
Is provided, and a constant tension is applied to the traveling wire 14 by this weight. The wire cleaning device 26 sprays a cleaning liquid onto the running wire 14 to remove the slurry attached to the wire 14 from the wire 14.

The pair of wire reels 12 and the groove rollers 18C are respectively connected to motors (not shown) which can rotate forward and reverse, and the wires 14 are driven by the motors to form a pair of wires. It reciprocates between the reels 12 at high speed. Above the wire row 20,
A work feed table 28 that moves vertically with respect to the wire row 20 is provided. The work feed table 28 is provided with a holding unit 30, and the ingot 32 is held at a lower portion of the holding unit 30 with the crystal orientation aligned.

Next, the groove roller structure will be described. FIG. 2 is a front view of the groove rollers 18A to 18C, and FIGS. 3 and 4 are partial sectional views of FIG. As shown in these figures, the groove rollers 18A to 18C have fixed shafts 42A to 42C and cylindrical shafts 44A to 44C, respectively.
C and drive pulleys (drive rings) 46A to 46C. The fixed shafts 42A to 42C have one ends fixed to the frame 48L with bolts 47 as shown in FIG.

As shown in FIG. 4, the other end of each of the fixed shafts 42A to 42C is supported by covers 50A to 50C attached to the frame 48R.
In the frame 48R, extraction holes 52A to 52C having a diameter larger than the outer diameter of the groove rollers 18A to 18C are formed at positions corresponding to the fixed shafts 42A to 42C. The covers 50A to 50C are provided with the extraction holes 52A to 52C.
At the position C, the frame 48R is
Is concluded. In addition, holes 5 are formed in covers 50A to 50C.
6A to 56C are formed, and the other ends of the fixed shafts 42A to 42C are inserted into the holes 56A to 56C. Therefore, the fixed shafts 42A to 42C are provided with the holes 56A to 56C.
Is supported in a state where the end is inserted, and can expand and contract in the axial direction.

The fixed shaft 42 is provided with an air pipe 58 at an inner shaft core. The air pipe 58 is connected to an air supply source (not shown) via an air supply port 60 formed at the end on the frame 48L side. The frame 48R side of the air pipe 58 communicates with the labyrinth 70 via the branch pipes 62,62. Thereby, the air supplied from the air supply source is supplied to the air supply port 60 and the air pipe 58.
In addition, it prevents the slurry and dust from flowing out from the labyrinth 70 through the branch pipe 62 and flowing into a radial bearing 84 described later.

An inner pipe 64 is provided on the outer periphery of the air pipe 58.
a and a cooling water pipe 64 formed by the outer pipe 64b. The inner pipe 64a is connected to a cooling water supply source (not shown) via a supply port 66 formed at an end on the frame 48L side. The inner tube 64a communicates with the outer tube 64b on the frame 48R side, and the outer tube 64b is connected to the frame 48R.
The cooling water supply source is connected via a discharge port 68 formed on the L side. Thereby, the cooling water supplied from the cooling water supply source circulates through the supply port 66, the inner pipe 64a, the outer pipe 64b, and the discharge port 68, and cools the fixed shafts 42A to 42C and the cylindrical shafts 44A to 44C. .

The driving pulleys 46A to 46C are connected to the fixed shaft 42 via an angular bearing 72 as shown in FIG.
A to 42C rotatably supported. The angular bearing 72 is given an axial force by a nut member 76 via a sleeve 74, and receives a thrust load and a radial load of the drive pulleys 46A to 46C. Groove roller 1
Of the 8A to 18C, the drive pulley 46C of the groove roller 18C has a groove formed on the outer peripheral surface, and is connected to a lower motor (not shown) via a belt wound around the groove.

The cylindrical shafts 44A-44C are
And a groove forming member 80. The roller body 82
It is rotatably supported by the fixed shafts 42A to 42C via radial bearings 84, and is fastened to the drive pulleys 46A to 46C by bolts 86 on the frame 48L side. Thus, the roller body 80 receives the radial load by the radial bearing 84 and receives the thrust load by the angular bearing 72.

The groove forming member 80 is formed by fixing a grooved sleeve 80b to an outer peripheral surface of a support sleeve 80a. The support sleeve 80a is fitted around the roller main body 82, and is fastened to the roller main body 82 with a bolt 88 on the frame 48L side. A large number of grooves are formed at a constant pitch on the outer peripheral surface of the grooved sleeve 80b, and the wires 14 are wound around the grooves to form the wire rows 20.

The frame 48L has a cover 9 on it.
6 is installed to prevent slurry and dust from flowing into the angular bearing 72 and a motor (not shown). Next, the operation of the groove roller structure configured as described above will be described. First, the ingot 32 is mounted on the holding unit 30. Then, the motor (not shown) is driven to rotate the wire reel 12 and the groove roller 18C at a high speed, thereby causing the wire 14 to run at a high speed. Then, when the traveling of the wire 14 is stabilized, the work feed table 28 is lowered, and the ingot 32 is pressed against the wire row 20 traveling at high speed. At this time, a slurry is supplied from a nozzle (not shown) to a contact portion between the wire row 20 and the ingot 32, and the ingot 32 is cut into a large number of wafers by a lapping action of abrasive grains contained in the slurry. .

When the ingot 32 is cut in this way,
The radial bearing 84 and the thrust bearing 72 generate heat as the groove rollers 18A to 18C rotate. In the groove roller structure of the present embodiment, as described above, the cooling water passes through the inside of the fixed shafts 18A to 18C through the supply port 66 and the inner pipe 64.
a, circulating through the outer tube 64b and the outlet 68.
Therefore, the fixed shafts 42A to 42C and the cylindrical shafts 44A to 44A
The temperature rise of 4C can be suppressed. Further, the groove roller structure according to the present embodiment includes fixed shafts 42A to 42C.
Is cooled substantially uniformly in the axial direction, the temperature gradient in the axial direction can be suppressed, and the thermal deformation of the fixed shaft can be effectively suppressed.

In the groove roller structure of the present embodiment, the fixed shafts 42A to 42C are supported at the ends on the frame 48R side by the holes 56A to 56C of the covers 50A to 50C so as to be able to expand and contract in the axial direction. I have. Therefore,
When the temperature of the fixed shafts 42A to 42C rises,
A to 42C extend in the axial direction. Thereby, the deformation of the groove rollers 18A to 18C can be prevented, so that the ingot 32 can be cut with high accuracy.

In the groove roller structure of the present embodiment, one end of each of the fixed shafts 42A to 42C is fixed to the frame 48L, so that there is no need to perform axis alignment as in the conventional device. Therefore, it is not necessary to manufacture the frame 48R and the covers 50A to 50C with high accuracy.
The cost of the entire wire saw 10 can be reduced.

By the way, when the ingot 32 is cut as described above, the groove on the outer peripheral surface of the groove forming member 80 gradually wears, and there is a possibility that the cutting accuracy of the wafer is deteriorated and the wire 14 is disconnected. Therefore, the groove forming member 80 whose groove has been worn by a predetermined amount is replaced with a new groove forming member 80. Hereinafter, the replacement operation of the groove forming member 80 will be described.

First, the covers 50A to 50C and the frame 4
8R and the cover 54A
Remove ~ 50C from frame 48R. Then, the bolt 88 that fastened the groove forming member 80 and the roller body 62 is removed, and the groove forming member 64 is removed from the extraction hole 52A of the frame 48R.
Pull out from ~ 52C. Next, a new groove forming member 80 is inserted from the extraction holes 52A to 52C, and the fixed shafts 42A to 42C are inserted.
After externally fitting to C, it is fastened to the roller body 62 with bolts 88. Then, holes 56A to 56 of the covers 50A to 50C are formed.
After inserting the ends of the fixed shafts 42A to 42C into C, the fixing shafts are fastened to the frame 48L with the bolts 54, and the replacement work of the groove forming member 80 is completed.

As described above, in this embodiment, since only the hollow and lightweight groove forming member 80 is replaced, the replacement operation can be performed quickly and safely. Further, in the present embodiment, the groove rollers 18A to 18C are fixed to the fixed shaft 42A.
To 42C and the cylindrical shafts 44A to 44C, the cylindrical shafts 44A to 44C are formed to be lightweight. Therefore,
The inertia of the cylindrical shafts 44A to 44C is reduced, and the ability of the cylindrical shafts 44A to 44C to follow the traveling wire 14 is improved. Thereby, the wear rate of the groove of the groove forming member 80 is also reduced, and the life of the groove forming member 80 is extended. Further, since the inertia of the cylindrical shafts 44A to 44C is reduced, the radial bearing 84 and the thrust bearing 72 are reduced.
Can be used with a small rated load.

In this embodiment, the groove forming member 80 is used.
However, the support sleeve 80a and the grooved sleeve 80b may be fastened with a bolt, and when the groove is worn, the bolt may be removed to replace only the grooved sleeve 80b. In the present embodiment, the fixed shafts 42A to 42A to
42C, the frame 48R and the covers 50A-50
Although supported by C, the present invention is not limited to this, and any structure may be used as long as the ends of the fixed shafts 42A to 42C are supported so as to be able to expand and contract in the axial direction. For example, FIGS. 5 and 6 are a front view and a side view of a groove roller structure in which the ends of the fixed shafts 42A to 42C are supported by the reinforcing plate 90.

As shown in the figure, fixed shafts 42A to 42C
Are bolts 94, 9 on the end opposite to the frame 48L.
4, and are fastened to the reinforcing plate 90. This reinforcing plate 9
0 is configured to connect the ends of the fixed shafts 42A to 42C. In the groove roller structure configured as described above, when the temperature of the fixed shafts 42A to 42C rises, the end of the fixed shafts 42A to 42C on the reinforcing plate 90 side becomes the reinforcing plate 9.
Move by 0. That is, since the fixed shafts 42A to 42C can be extended in the axial direction, deformation can be prevented.

By the way, in such a groove roller structure, each groove roller 18A around which the wire 14 is wound is used.
6 to 18C, a large radial load is applied in the direction of arrow 92 in FIG. 6, but each of the fixed shafts 42A to 42C
0 keeps the distance constant, so that each fixed shaft 4
2A to 42C are not deformed by the load of the wire 14.

As described above, even when the ends of the fixed shafts 42A to 42C are supported by the reinforcing plate 78, the deformation of the groove rollers 18A to 18C can be prevented as in the above-described embodiment. Further, the connecting plate 90 includes a bolt 94,
It can be easily removed by loosening 94, ...
The replacement of the groove forming member 80 can be performed efficiently as in the above-described embodiment.

[0030]

As described above, according to the present invention,
Since the deformation of the groove roller can be prevented, the cutting accuracy of the workpiece can be improved. Further, according to the present invention, since a groove roller that does not require axial alignment is provided, the cost of the wire saw can be reduced.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a wire saw to which a groove roller structure of the present invention is applied.

FIG. 2 is a front view of the groove roller of the present invention.

FIG. 3 is a partial sectional view of FIG. 2;

FIG. 4 is a partial sectional view of FIG. 2;

FIG. 5 is a front view of a groove roller using a reinforcing plate.

FIG. 6 is a side view of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Wire saw 14 ... Wire 18A-18C ... Groove roller 20 ... Wire row 32 ... Ingot 42A-42C ... Fixed shaft 44A-44C ... Cylindrical shaft 46A-46C ... Drive pulley 48L, 48R ... Frame 50A-50C ... Cover 52A-52C ... extraction holes 56A to 56C ... engagement holes 72 ... thrust bearings 84 ... radial bearings

Claims (2)

[Claims] 1. A wire array is formed by winding a wire around a plurality of groove rollers, and a plurality of wafers are simultaneously formed by running the wire and pressing a workpiece against a cut portion of the wire array. In the wire saw to be cut, the groove roller has one end fixed to the frame and the other end supported on the frame so that the other end can expand and contract in the axial direction, and a number of grooves around which the wire is wound around the surface. Are formed, and a cylindrical shaft rotatably supported via a radial bearing around the fixed shaft, and rotatably supported via an angular bearing on the fixed shaft and fixed to the cylindrical shaft. And a drive ring for rotating the cylindrical shaft. A groove roller structure for a wire saw, comprising: 2. The groove roller structure of a wire saw according to claim 1, wherein the fixed shaft includes a cooling device for passing a cooling medium through the fixed shaft to cool the fixed shaft.