JPH1058438A - Guide roller of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To adjust the position of the groove between respective guide rollers automatically. SOLUTION: A guide roller 16 is movably supported along the axial direction of the roller, and the movement of the roller in the axial direction is regulated with rubber. In this case, when the mutual groove positions of the neighboring guide rollers are deviated, the respective guide roller receives the force of the axial-direction component of the tension of a wire 14 for guiding in the axial direction. When the force of the axial-direction component of the tension of the wire 14 is received, each guide roller is moved along the axial line so as to eliminate the deviation. Thus, the deviation of the groove positions of the respective guide rollers is eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a guide roller for a wire saw, and more particularly to a guide roller for a wire saw for cutting brittle materials such as silicon, glass, and ceramics.

[0002]

2. Description of the Related Art A wire saw cuts a workpiece by a lapping action of the abrasive grains by pressing the workpiece while supplying a slurry (a working fluid containing abrasive grains) to a wire row traveling at high speed. Device. A number of guide rollers are used in the wire saw to guide a traveling wire, and a wire traveling between a pair of wire reels travels on a wire traveling path formed by the guide roller.

[0003]

In the wire saw described above, if the groove positions of adjacent guide rollers are misaligned, the wires and the guide rollers vibrate, and the grooves of the guide rollers are unevenly worn. There is a problem that the life of the device is shortened. For this reason, when the guide rollers are mounted, the operator adjusts the groove position between the guide rollers. However, the number of guide rollers is large and the adjustment is delicate, which is extremely troublesome.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a wire saw guide roller that automatically adjusts the groove position between each guide roller.

[0005]

According to the present invention, in order to achieve the above object, a wire which is guided by a plurality of guide rollers between a pair of wire reels is wound around a plurality of grooved rollers. By forming a row, by pressing the workpiece while supplying a processing liquid containing abrasive grains to the wire row, in a wire saw that cuts the workpiece into a number of wafers, the guide roller of the guide roller It is supported so as to be movable along the axial direction, and the movement in the axial direction is regulated by a shock absorber.

When the groove positions of the adjacent guide rollers are misaligned, each guide roller receives a force in the axial direction of the component of the tension of the wire to be guided in the axial direction. On the other hand, the guide rollers of the present invention are supported so as to be movable in the axial direction, so that when receiving the force of the axial component of the tension of the wire, the guide rollers are moved along the axis so as to eliminate the deviation. Move along, and the gap disappears. Thereby, the vibration generated in the wire and the guide roller can be prevented.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a guide roller for a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. First, the configuration of a wire saw to which the guide roller according to the present invention is applied will be described.

FIG. 1 is a perspective view of a wire saw. As shown in FIG. 1, a wire 14 wound around one of the wire reels 12 passes through a wire traveling path formed by a number of guide rollers 16, 16,.
It is wound around 8B and 18C. Each grooved roller 18
A large number of grooves are formed at a constant pitch on the peripheral surface of A to 18C, and a horizontal wire row 20 is formed on the upper surface by sequentially winding the wires 14 around these grooves.

The wire running path is formed symmetrically with the wire row 20 interposed therebetween. The wire 14 forming the wire row 20 passes through the wire running path on the other side and the wire 14 on the other side (not shown). It is wound on a reel. In the wire running path formed on both sides of the wire row 20,
A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided (only one side is shown). The wire guide device 22 guides the wire 14 from the wire reel 12 at a constant pitch, and the dancer roller 24 applies a constant tension to the traveling wire 14. Further, the wire cleaning device 26 injects the cleaning liquid to discharge the wire 1.
The slurry and the like attached to 4 are removed.

The pair of wire reels 12 and the grooved rollers 18C are connected to motors (not shown) that can rotate forward and backward, respectively, and the wires 14 drive these motors synchronously. It reciprocates between the pair of wire reels 12 at high speed. The grooved roller 18A
A work feed table 28 that moves vertically with respect to the wire row 20 is installed above the wire row 20 formed by １８C. The work feed table 28 is provided with a tilting device 30, and an ingot 32 to be processed is moved by the tilting device 30.
Is held at the lower part, and is set to an arbitrary inclination angle.

In the wire saw 10 configured as described above, the cutting of the ingot 32 is performed as follows. First, ingot 32 was placed on work feed table 2
The ingot 32 is tilted at a predetermined angle by the tilting device 30 so that the attached ingot 32 is cut in a predetermined crystal orientation. Next, the motor connected to the wire reel 12 and the grooved roller 18C is driven to make the wire 14 run at high speed. Then, the work feed table 28 is lowered, and the ingot 32 is pressed against the wire row 20 traveling at high speed. At this time, a slurry is supplied to the wire row 20 from a slurry tank 34 via a nozzle (not shown), and the ingot 32 is cut into wafers by a lapping action of abrasive grains contained in the slurry.

The slurry used for processing the ingot 32 is as follows:
The oil is collected in the slurry tank 34 via an oil pan 38 provided below the wire array 20, and is recycled while replenishing the shortage. At this time, the temperature of the slurry is increased by absorbing heat generated during processing, and the recovered slurry is cooled to a constant temperature by the heat exchanger 36. Next, a first embodiment of a guide roller according to the present invention applied to the above-described wire saw 10 will be described.

FIG. 2 shows a first embodiment of the guide roller according to the present invention.
FIG. 3 is a side cross-sectional view showing the configuration of the embodiment. As shown in the figure, a bearing case 44 is rotatably supported at the distal end of a shaft 40 fixed to the body frame 10F of the wire saw 10 via roller bearings 42,42. The bearing case 44 is formed in a cylindrical shape, and a flange 44F is formed at a base end thereof.

At the tip of the bearing case 44,
The bearing cap 46 is fixed by bolts 48 to prevent slurry or the like from flowing into the bearing case 44. A thread 46S is formed on the outer peripheral surface of the bearing cap 46.
S is screwed with a holding ring 50 having an internal thread formed on the inner peripheral surface.

The guide roller 16 is mounted on the outer peripheral portion of the bearing case 44, is clamped between the flange 44 F of the bearing case 44 and the clamping ring 50, and is integrally fixed to the bearing case 44. In addition,
The guide roller 16 has a guide groove 1 for guiding a wire.
The two grooves 6a and 16b are formed for the following reason. That is, the guide roller 16 is worn when used, but by forming two guide grooves, when one of the grooves is worn, it can be inverted and the other groove can be used. Double life can be obtained. When using the bearing case 4
The guide groove located on the front end side (left side in the figure) of No. 4 is used.

Incidentally, the bearing case 44 includes:
The roller bearings 42, 42 are rotatably supported by the roller bearings 42, 42. The roller bearings 42, 42 are formed so that their outer races can be moved by a small amount along the axial direction. As a result, the bearing case 44 can move in the axial direction, but in order to restrict the movement of the bearing case 44 in the axial direction, the base end of the bearing case 44 has the following airflow. A bearing mechanism is provided.

A circular concave portion 44C is formed at the base end surface of the bearing case 44. This recess 4
4C is covered with a disk-shaped plate 54 fixed to the base end surface of the bearing case 44 with bolts 52, 52. As a result, the base end of the bearing case 44 has a ring-shaped groove. 56 are formed. A disk-shaped flange 40F formed substantially at the center of the shaft 40 is inserted into the ring-shaped groove 56. A predetermined gap is formed between the flange 40F and the groove 56, and the bearing case 44
Can move in the axial direction by the gap.

On the other hand, the flange 4 inserted in the groove 56
In the vicinity of the peripheral end of OF, a large number of holes 58 penetrating both sides of the flange 40F are formed concentrically at a constant pitch (only one is shown). The large number of holes 58 are respectively formed in the communication passages 6 radially formed inside the flange 40F.
0 (only one is shown).
Is an air supply passage 6 formed inside the shaft 40.
It is connected to 2.

Compressed air is supplied to the air supply path 62 from air supply means (not shown). This air supply path 6
2 is injected from each hole 58 through the communication path 60. As a result, the bearing case 44 is pressed on both side surfaces of the groove 56 by the compressed air injected from the respective holes 58, and the movement in the axial direction is restricted.

The air pressure of the compressed air supplied to the air supply path 62 is set according to the tension of the wire 14 guided by the guide roller 16. With the above configuration,
The bearing case 44 is movably supported in the axial direction, and the movement is regulated by the air bearing mechanism so as to maintain a fixed position.

The operation of the first embodiment of the guide roller according to the present invention configured as described above is as follows.
As shown in FIG. 3, two adjacent guide rollers 16
It is assumed that the positions of the guide grooves of A and 16B are shifted by d. Here, the wire 14 guided by the guide rollers 16A and 16B is given a constant tension F by the dancer roller 24 (see FIG. 1) as described above. Therefore, when the groove positions of the guide grooves are shifted from each other, each of the guide rollers 16A and 16B receives a force f of the axial component of the wire tension F in the axial direction.

On the other hand, the guide roller 16 of the present embodiment
Since A and 16B are supported so as to be movable in the axial direction, when they receive the force f of the axial component of the wire tension F in the axial direction, they move so as to eliminate the deviation of the groove positions. When the groove positions coincide with each other, the axial component f of the wire tension F becomes zero, so that the guide rollers 16A and 16B guide the wire 14 while maintaining the state.

As described above, the guide roller 16 of the present embodiment can automatically adjust the position of the adjacent guide rollers 16A and 16B even if the groove positions of the adjacent guide rollers 16A and 16B are misaligned. Accordingly, the vibration of the wire 14 and the guide rollers 16A and 16B due to the deviation of the groove position is eliminated, and the life of the guide rollers 16A and 16B is extended. Also, uneven wear does not occur in the guide groove.

Further, since the positioning operation of the groove position need not be performed at the time of mounting the guide roller, the workability when replacing the guide roller is improved. Further, as the installation time is shortened, the operation stop time of the wire saw 10 is shortened, and the productivity is also improved. In addition, since the precision of the components of the guide roller 16 and the bearing unit supporting the guide roller 16 does not need to be increased, the manufacturing cost can be reduced.

Next, a description will be given of a second embodiment of the guide roller according to the present invention. FIG. 4 is a side sectional view showing a configuration of a guide roller according to a second embodiment of the present invention, and FIG. 5 is a sectional view taken along line AA of FIG. As shown in the drawing, bearings 72, 72 are provided at the tip of a shaft 70 fixed to the main body frame 10F of the wire saw 10.
The bearing case 74 is rotatably supported via the. The bearing case 74 is formed in a cylindrical shape, and a flange 74F is formed at a base end thereof.

At the tip of the bearing case 74,
The bearing cap 76 is fixed by bolts 78 to prevent slurry or the like from flowing into the bearing case 74. A thread 76S is formed on the outer peripheral surface of the bearing cap 76, and the thread 76S is formed.
S is screwed with a holding ring 80 having a female screw formed on the inner peripheral surface.

The guide roller 16 is mounted on the outer periphery of the bearing case 74 and is sandwiched between the flange 44F of the bearing case 74 and the holding ring 80. A ring-shaped rubber 8 is provided on the holding surface.
2, 82 are laid. Further, the guide roller 1
The inner diameter of the bearing case 6 is slightly larger than the outer diameter of the bearing case 74.
4, a minute gap G is formed. Therefore, the guide roller 16 can move along the axial direction, but its movement is regulated by the rubbers 82 so as to maintain a fixed position.

With the above configuration, the guide rollers of the second embodiment can be automatically moved even if the adjacent guide rollers are displaced from each other, similarly to the guide rollers of the first embodiment. It is possible to perform the position alignment. In the present embodiment, the movement of the guide roller 16 is restricted by supporting the guide roller 16 via the rubbers 82, 82, but may be restricted by a spring or the like.

[0029]

As described above, according to the present invention,
When the groove position of the adjacent guide roller is displaced, it can be automatically canceled by the tension of the wire running on the deviation. Therefore, the wire can be guided without causing vibration on the guide rollers, and the life of each guide roller is extended. Also, uneven wear does not occur in the guide groove. Further, when the guide rollers are mounted, it is not necessary to adjust the groove positions of the guide rollers, so that the operation of mounting the guide rollers can be completed simply and quickly.

[Brief description of the drawings]

FIG. 1 is a perspective view of an embodiment of a wire saw.

FIG. 2 is a side cross-sectional view of the first embodiment of the guide roller according to the present invention.

FIG. 3 is an explanatory diagram for explaining the operation of the guide roller according to the present invention.

FIG. 4 is a side sectional view of a second embodiment of the guide roller according to the present invention.

FIG. 5 is a sectional view taken along line AA of FIG. 4;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Wire saw 14 ... Wire 16 ... Guide roller 16a, 16b ... Guide groove 18A-18C ... Grooved roller 32 ... Ingot 40, 70 ... Shaft 42 ... Roller bearing 44, 74 ... Bearing case 50, 80 ... Clamping ring 82 ... Rubber

Claims (1)

[Claims] 1. A working fluid containing abrasive grains formed by winding a wire guided and guided by a plurality of guide rollers between a pair of wire reels around a plurality of grooved rollers. A wire saw that cuts the workpiece into a large number of wafers by pressing the workpiece while supplying the guide roller, wherein the guide roller is movably supported along the axial direction of the guide roller, and A guide roller for a wire saw, wherein the movement of the wire is regulated by a shock absorber.