CN101670623A

CN101670623A - Main shaft of wire wheel

Info

Publication number: CN101670623A
Application number: CN200910075571A
Authority: CN
Inventors: 田惠兰
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2009-09-29
Filing date: 2009-09-29
Publication date: 2010-03-17

Abstract

The invention relates to a main shaft of a wire wheel, which comprises a shaft, a shaft sleeve, the wire wheel and a belt wheel, three groups of bearings are respectively arranged between the shaft and the shaft sleeve along the left, the middle and the right, each group of the bearings are two angular contact ball bearings which are mounted back-to-back, wherein the first group of the bearings are arranged at the left end of the shaft and provided with a first bearing cover fixed at the left end of the shaft sleeve and a first inner retaining ring and a first lock nut which are arranged on the outer sides of the first group of the bearings; the second group of the bearings are arranged in the middle of the shaft, and a second inner retaining ring and a second lock nut are arranged on theleft sides of the second group of the bearings; the third group of the bearings are arranged at the right end of the shaft, spacing rings are arranged between the left sides of the third group of thebearings and the second group of the bearings, and a second bearing cover fixed with the right end of the shaft sleeve is arranged on the right side; and the belt wheel and the wire wheel are respectively fixed at the left end and the right end of the shaft. The main shaft of the wire wheel has high working efficiency, low cost, large range of cutting dimension and capability of saving raw materials.

Description

Main shaft of wire wheel

Technical field

The present invention relates to a kind of main shaft of wire wheel, particularly a kind ofly be used for the main shaft of wire wheel that semiconductor manufacturing equipment is a multi-line cutting machine.

Background technology

In the semiconductor manufacturing, when monocrystalline, polycrystalline and solar energy materials etc. were carried out cutting processing, the equipment that have the monolithic annular blade that adopt cut more.Its weak point is that cutting efficiency is low, cost is high; The cut lengths scope is little; Need be bonding during the material cutting, cut not waste material to the end.Along with the news of modern processing industry hail exhibition, new material, new technology are constantly emerged in large numbers in the semiconductor manufacturing, and this kind equipment no longer adapts to the needs of producing.In order to realize the cutting of fast and high quality, existing at present multi-line cutting machine comes out.The critical component of this equipment is identical actinobacillus wheel main shaft of its structure and take-up pulley mainshaft mechanism, because heavier load need be carried in this mechanism.

Summary of the invention

Technical problem to be solved by this invention provides that a kind of bearing capacity is strong, the main shaft of wire wheel of reliable operation.

The present invention adopts following technical scheme:

The present invention includes axle, axle sleeve, line wheel and belt wheel, said axle is arranged with three groups of bearings with shaft room along left, center, right, every group of bearing is the angular contact ball bearing of two back-to-back installations, wherein, first group of bearing is located at the left end of axle, and is provided with the clutch shaft bearing gland and first inner shield ring and first locknut of being located at the first group bearing outside fixing with the axle sleeve left end; Second group of bearing is located at the middle part of axle, and its left side is provided with second inner shield ring and second locknut; The 3rd group of bearing is located at the right-hand member of axle, is provided with spacer ring between its left side and second group of bearing, and the right side is provided with and the second fixing bearing gland of axle sleeve right-hand member; Belt wheel and line wheel are separately fixed at the left and right two ends of axle.

All be inlaid with elastic opening drag ring on said first locknut and second locknut for locking.

Said line wheel fixedly is to be provided with jointing therebetween with an axle right-hand member, and joint and line are taken turns and between centers is established screw respectively and is connected and fixed, and joint and between centers are provided with one or a pair of alignment pin.

Said belt wheel and an axle left end fixedly are to be provided with connecting key or tensioning cover therebetween to be connected and to fix, and belt wheel is the synchronous cog belt belt wheel.

Beneficial effect of the present invention:

The invention provides the main shaft of wire wheel on a kind of multi-line cutting machine that is used for the semicon industry special use.This main shaft both can be used for the unwrapping wire system of multi-line cutting machine, also can be used for the take-up system of multi-line cutting machine, and in this bobbin main axle structure, first group of bearing being located at a left end mainly carries driving torque; Second group of bearing being located at the axle middle part mainly plays a supportive role; The 3rd group of bearing being located at a right-hand member be driving torque but also play a supportive role not only.Three groups of bearing combinations can carry-over moment can be carried heavy load again.This main shaft of wire wheel reasonable in design, reliable operation.When carrying out multi-thread cutting on the home roll that line of cut is arranged in multi-line cutting machine by means of this main shaft of wire wheel, the work efficiency height, cost is low, and the cut lengths scope is big, cuts about raw material.

Description of drawings

Accompanying drawing 1 is looked the sectional structure schematic diagram for the master of an embodiment of the present invention;

Accompanying drawing 2 is the partial enlarged drawing of Fig. 1;

Accompanying drawing 3 is the main sectional structure schematic diagram of looking of line wheel shown in Figure 1;

Accompanying drawing 4 is looked the sectional structure schematic diagram for joint master shown in Figure 1;

Accompanying drawing 5 cuts open structural representation for the master office of looking of axle shown in Figure 1;

Accompanying drawing 6 is looked the sectional structure schematic diagram for the first locknut master shown in Figure 1;

Accompanying drawing 7 is the left view of Fig. 6;

Accompanying drawing 8 is looked the sectional structure schematic diagram for axle sleeve master shown in Figure 1.

In the accompanying drawings: 1 belt wheel, 2 clutch shaft bearing glands, 3 first inner shield rings, 4 first groups of bearings, 5,6 axle sleeves, 7 second groups of bearings, 8 spacer rings, 9 the 3rd groups of bearings, 10 second bearing glands, 11 alignment pins, 12 lines wheel, 13 joints, 14 second inner shield rings, 15 second locknuts, 16 frames, 17 first locknuts, 18 elastic opening drag rings.

The specific embodiment

The invention will be further described below in conjunction with the embodiment accompanying drawing:

Referring to accompanying drawing, present embodiment comprises axle 5, axle sleeve 6, line wheel 12 and

belt wheel

1,6 on said axle 5 and axle sleeve are arranged with three groups of bearings along left, center, right, every group of bearing is the angular contact ball bearing of two back-to-back installations, wherein, first group of bearing 4 is located at the left end of axle 5, and is provided with the clutch shaft bearing gland 2 and first inner shield ring 3 and first locknut 17 of being located at first group bearing 4 outsides fixing with axle sleeve 6 left ends; Second group of bearing 7 is located at the middle part of axle 5, and its left side is provided with second inner shield ring 14 and second locknut 15; The 3rd group of bearing 9 is located at the right-hand member of axle 5, and its left side and second group of 7 on bearing are provided with spacer ring 8, and the right side is provided with and the second fixing bearing gland 10 of axle sleeve 6 right-hand members; Belt wheel 1 and line wheel 12 are separately fixed at the left and right two ends of axle 5.

In the present embodiment, for the ease of making,, use the screw of 6 M8 * 25 that the two is connected and fixed then and be one line wheel 12 and joint 13 split productions.When fixedlying connected with the right-hand member of axle 5, the central shaft of joint 13 cooperates centering with the centre bore butt joint of axle on 5 right sides, locks 11 with a pair of location again and locatees, and alignment pin 11 is selected the straight pin of φ 12 for use.Use the screw of 4 M12 * 50 that axle 5 and joint 13 are connected and fixed afterwards.

The belt wheel fix of axle 5 left ends 1 is for being used for the synchronous cog belt belt wheel of power input, so that drive bobbin main axis rotation, is used for unwrapping wire or take-up.Belt wheel 1 can adopt key to be connected with 5 on axle, also can adopt the tensioning cover to connect.

The clutch shaft bearing gland 2 and second bearing gland 10 are pressed in respectively on the outer ring of first group of bearing 4 and the 3rd group of bearing 9, and fix with axle sleeve 6 left and right two ends respectively, and when installing and using this main shaft of wire wheel, axle sleeve 6 is fixing with frame 16.

First inner shield ring 3, first locknut 17 and second inner shield ring 14, second locknut 15 are used for compressing respectively the inner ring of first group of bearing 4 and second group of bearing 7, prevent that it from producing axial displacement.

The structure of first locknut 17 and second locknut 15 is identical, just its specification difference.Fig. 6, shown in Figure 7 be that example illustrates its structure just with first locknut 17, when interior circle one end of locknut shown in the figure 17 was inlaid with an elastic opening drag ring 18. uses, elastic opening drag ring 18 was stuck between the tooth crack of screw thread, has the locking stopping function.When this main shaft of wire wheel forward or reverse was worked, the locknut of locking all can not produce loosening.

In the present embodiment, to select model for use be the angular contact ball bearing of 7207GYNDB/P4 to first group of bearing 4; It is the angular contact ball bearing of 7010CTYNDB/P4 that second group of bearing 7 selected model for use; It is the angular contact ball bearing of 7210CTYNDB/P4 that the 3rd group of bearing 9 selected model for use.

Claims

1, a kind of main shaft of wire wheel, it is characterized in that it comprises axle (5), axle sleeve (6), line wheel (12) and belt wheel (1), be arranged with three groups of bearings between said axle (5) and axle sleeve (6) along left, center, right, every group of bearing is the angular contact ball bearing of two back-to-back installations, wherein, first group of bearing (4) is located at the left end of axle (5), and is provided with the fixing clutch shaft bearing gland (2) of axle sleeve (6) left end and is located at first inner shield ring (3) and first locknut (17) outside first group of bearing (4); Second group of bearing (7) is located at the middle part of axle (5), and its left side is provided with second inner shield ring (14) and second locknut (15); The 3rd group of bearing (9) is located at the right-hand member of axle (5), is provided with spacer ring (8) between its left side and second group of bearing (7), and the right side is provided with and fixing second bearing gland (10) of axle sleeve (6) right-hand member; Belt wheel (1) and line wheel (12) are separately fixed at the left and right two ends of axle (5).

2, main shaft of wire wheel according to claim 1 is characterized in that all being inlaid with on said first locknut (17) and second locknut (15) the elastic opening drag ring for locking.

3, main shaft of wire wheel according to claim 1, it is characterized in that said line wheel (12) and axle (5) right-hand member fixedly are to be provided with jointing (13) therebetween, establish screw respectively between joint (13) and line wheel (12) and axle (5) and be connected and fixed, and be provided with one or a pair of alignment pin (11) between joint (13) and axle (5).

4, main shaft of wire wheel according to claim 1 is characterized in that a said belt wheel (1) and axle (a 5) left end fixedly are to be provided with connecting key or tensioning cover therebetween to be connected and to fix, and belt wheel (1) is the synchronous cog belt belt wheel.