JP2000024803A - ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 - Google Patents
ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法Info
- Publication number
- JP2000024803A JP2000024803A JP10188412A JP18841298A JP2000024803A JP 2000024803 A JP2000024803 A JP 2000024803A JP 10188412 A JP10188412 A JP 10188412A JP 18841298 A JP18841298 A JP 18841298A JP 2000024803 A JP2000024803 A JP 2000024803A
- Authority
- JP
- Japan
- Prior art keywords
- guide bush
- carbon film
- hard carbon
- workpiece
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021385 hard carbon Inorganic materials 0.000 title claims abstract description 423
- 238000000034 method Methods 0.000 title claims description 146
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 114
- 239000010941 cobalt Substances 0.000 claims abstract description 114
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 112
- 238000005530 etching Methods 0.000 claims abstract description 43
- 230000002093 peripheral effect Effects 0.000 claims description 272
- 239000007789 gas Substances 0.000 claims description 93
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 90
- 229910052799 carbon Inorganic materials 0.000 claims description 61
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 60
- 238000005520 cutting process Methods 0.000 claims description 39
- 230000000149 penetrating effect Effects 0.000 claims description 33
- 239000011259 mixed solution Substances 0.000 claims description 24
- 238000001039 wet etching Methods 0.000 claims description 24
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 21
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 20
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 16
- 239000000853 adhesive Substances 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 description 17
- 230000007774 longterm Effects 0.000 description 14
- 239000000470 constituent Substances 0.000 description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 12
- 229910052721 tungsten Inorganic materials 0.000 description 12
- 239000010937 tungsten Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 230000002159 abnormal effect Effects 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 150000001868 cobalt Chemical class 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000009191 jumping Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 239000010755 BS 2869 Class G Substances 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- -1 carbon ions Chemical class 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Turning (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10188412A JP2000024803A (ja) | 1998-07-03 | 1998-07-03 | ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10188412A JP2000024803A (ja) | 1998-07-03 | 1998-07-03 | ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000024803A true JP2000024803A (ja) | 2000-01-25 |
| JP2000024803A5 JP2000024803A5 (https=) | 2005-10-13 |
Family
ID=16223214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10188412A Pending JP2000024803A (ja) | 1998-07-03 | 1998-07-03 | ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000024803A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117548703A (zh) * | 2024-01-12 | 2024-02-13 | 山东建筑大学 | 一种仿生圆鳞结构微织构刀具及加工方法 |
-
1998
- 1998-07-03 JP JP10188412A patent/JP2000024803A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117548703A (zh) * | 2024-01-12 | 2024-02-13 | 山东建筑大学 | 一种仿生圆鳞结构微织构刀具及加工方法 |
| CN117548703B (zh) * | 2024-01-12 | 2024-03-12 | 山东建筑大学 | 一种仿生圆鳞结构微织构刀具及加工方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6056443A (en) | Guide bush and method of forming film over guide bush | |
| KR100261534B1 (ko) | 가이드 부쉬 및 그 안둘레면으로의 경질 카본막 형성방법 | |
| US5941647A (en) | Guide bush and method of forming hard carbon film over the inner surface of the guide bush | |
| US5922418A (en) | Method of forming a DLC film over the inner surface of guide bush | |
| US6337000B1 (en) | Guide bush and method of forming diamond-like carbon film over the guide bush | |
| JP3224134B2 (ja) | ガイドブッシュの内周面に形成された硬質カーボン膜の剥離方法 | |
| US5939152A (en) | Method of forming hard carbon film over the inner surface of guide bush | |
| JP3043674B2 (ja) | ガイドブッシュの内周面への硬質カーボン膜形成方法 | |
| JP2000024803A (ja) | ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 | |
| JPWO1998006885A1 (ja) | ガイドブッシュの内周面に形成された硬質カーボン膜の剥離方法 | |
| JP2000071103A (ja) | ガイドブッシュおよびガイドブッシュへのダイヤモンドライク・カ―ボン膜の形成方法 | |
| US6117496A (en) | Method of forming a hard carbon film over an inner surface of a guide bush using a jig | |
| JP2000042802A (ja) | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 | |
| JP3090430B2 (ja) | ガイドブッシュへの被膜形成方法 | |
| JP3043669B2 (ja) | ガイドブッシュおよびその内周面に硬質カーボン膜を形成する方法 | |
| JP3043670B2 (ja) | ガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JP3665247B2 (ja) | ガイドブッシュ | |
| JPH11124671A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JP3924051B2 (ja) | 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JPH11152568A (ja) | 円筒状部材の内周面への硬質カーボン膜形成方法 | |
| JPH10110270A (ja) | ガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JPH1112743A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JPH10328904A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JPWO1996028270A1 (ja) | ガイドブッシュおよびその内周面への硬質カーボン膜形成方法 | |
| HK1017393A (en) | Method of removing hard carbon film formed on inner circumferential surface of guide bush |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050606 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050606 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080709 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080715 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20081111 |