JP2000015163A - Paste applying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make favorable the tact surface and space surface of application/ inspection, to increase inspection accuracy and to smoothly make a change of the application direction without deteriorating paste application property in a paste applying device. SOLUTION: In a paste applying device for applying linear paste to a substrate 50 from an applying nozzle 10 while moving a XY table on which the substrate 50 is mounted, image pickup cameras 20A, 20B, 20C and 20D are arranged in the forward and the rear and the right and the left of the applying nozzle 10 above the XY table 60, and slit light sources 30A, 30B, 30C and 30D for irradiating slit light perpendicular to the linear paste with respect to an intersection point of optical axes of the image pickup cameras and the XY table 60 from the diagonal direction are arranged, and based on image data taken by the image pickup cameras, normal/defective condition of the paste application property is decided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste coating apparatus, and more particularly to a paste coating apparatus capable of simultaneously inspecting the properties of a paste application.

[0002]

2. Description of the Related Art A paste coating apparatus discharges a paste in a linear form from a coating nozzle and applies the paste in a desired pattern on a flat surface such as a substrate. Used for etc.

[0003] A conventional paste coating apparatus discharges a paste filled in a coating nozzle from a coating nozzle onto a substrate.
At the same time, by moving the application nozzle and the substrate relatively, the paste is linearly applied on the substrate in a required pattern. For example, in manufacturing a liquid crystal panel, when two glass substrates are bonded together with a liquid crystal sealed therebetween, a linear paste is applied to one glass substrate surface as an adhesive in a rectangular loop shape.

FIG. 11 is a schematic diagram showing an example of a conventional paste coating apparatus. The substrate 50 to be coated is placed and fixed on the XY table 60 in an aligned state, and the coating nozzle 10 is positioned above the substrate 50. The arithmetic processing unit 84 gives the data of the movement trajectory to the XY table driving unit (not shown), and also gives the application control unit 70 an application start signal and data of the discharge pressure. Thus, the XY table driving unit moves the XY table 60 along the substrate 50 along a predetermined trajectory, and at the same time, the application control unit 70 causes the application nozzle 10 to discharge a predetermined amount of the paste 40 in a linear shape.
As a result, the linear paste 40 is applied on the substrate 50 in a predetermined application pattern.

When the discharge port of the application nozzle 10 is partially clogged, the discharge pressure of the paste from the application nozzle 10 fluctuates, or the moving speed of the XY table 60 fluctuates, the substrate 50 Abnormal application of paste such as "thin", "blurred", and "cut" occurs.
However, if the application process and the inspection process are separated, the application process continues to be abnormally applied until an error is detected after an inspection is performed in the inspection process. Since the substrate on which paste application has become abnormal must be discarded, the production yield of liquid crystal panels deteriorates. In order to avoid this, the inspection may be performed simultaneously with the application of the paste. If a coating abnormality occurs, the line is immediately stopped, and if the line returns to a normal state, it is possible to prevent a lot of defective products from appearing.

In the paste application process, it is conceivable that an operator visually inspects paste application abnormalities (thin, faint or broken) at the same time. However, long-term continuous inspection naturally has a certain limit, and the inspection accuracy, This leaves a problem in inspection quality.

The seal inspection system disclosed in Japanese Patent Application Laid-Open No. 8-334478 takes an image of a seal material applied on a substrate by an image pickup camera and resolves the image processing by a microcomputer in order to eliminate defects caused by visual inspection. Is performed to judge whether or not the coating is abnormal, and the inspection can be performed automatically without relying on humans. But,
The application step and the inspection step are separate in time and place, and can be a major obstacle in terms of production tact time and space.

The cream solder application hand disclosed in Japanese Utility Model Laid-Open No. 5-28561 discloses an optical displacement system in which a needle at the tip (lower end) of a syringe is moved toward the application start point of cream solder applied to a substrate. The distance from the displacement meter to the top surface of the applied solder is measured based on irradiating light from the meter and picking up the reflected light, and when the measured distance deviates from the threshold value, it is detected as a coating abnormality. It was done. In this case, there is a high efficiency that the coating inspection can be performed simultaneously with the coating.

[0009]

The technique disclosed in Japanese Utility Model Laid-Open Publication No. Hei 5-28561, in which coating and coating inspection can be performed simultaneously, has the following problems. Since only one displacement meter is provided, it is effective for a straight line application in the direction from the displacement meter to the needle, but cannot be applied to a two-dimensional XY direction application on a plane. Syringe,
It is possible to cope with the change of the entire direction of the application hand including the heater, the cylinder for vertical movement, the plurality of blocks, and the displacement meter, but this is not described. In addition, even if the entire direction is changed, since it takes a long time to change the direction, there is a problem that excessive coating occurs at the turning point and coating properties deteriorate. Also, the mechanism becomes very complicated.

The present invention has been made in order to solve the above-mentioned problems, and has advantages in the tact surface and the space surface of coating / inspection, improving the inspection accuracy, and improving the coating direction without deteriorating the paste coating properties. The purpose is to make the conversion smooth.

[0011]

SUMMARY OF THE INVENTION A paste coating apparatus according to the present invention is to apply a linear paste to an object to be coated while automatically applying a paste at the same time as applying the paste. Irradiate slit light perpendicular to the paste. Then, the quality of the paste application property is automatically determined based on taking a slit light image in which the slit light crosses the linear paste from a direction inclined with respect to the slit light irradiation direction.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of a paste coating apparatus according to the present invention will be described in detail with reference to the drawings.

[First Embodiment] FIG. 1 is a schematic structural view (partial side view) of a paste coating apparatus according to a first embodiment.
FIG. 2 is a plan view corresponding to FIG. XY table 60
Is arranged in a horizontal position, and is assembled using a slide table, a ball screw, a mechanism for maintaining orthogonality in a horizontal plane, and the like, in the same manner as a known structure. It is configured to move left, right, front and rear along. The XY table drive section is composed of a motor and a motor drive circuit and the like.
4, the moving direction, moving speed, and moving distance of the XY table 60 are controlled. Also,
The XY table 60 has an upper surface on which an object to be coated, for example, a substrate 50 of a liquid crystal panel is placed, and is fixedly held by a suction mechanism (not shown). XY table 60
The application nozzle 10 is disposed in a vertical posture immediately above. The coating nozzle 10 contains a paste therein, and discharges the paste 40 from the tip by applying pressure to apply the paste 40 onto the substrate 50 in a linear manner. Coating control unit 70
Is for controlling the discharge of the paste 40 by the application nozzle 10, and the amount of the paste discharged is controlled by adjusting the applied pressure. The arithmetic processing unit 84 in the main control device 80 gives an on / off signal of the ejection to the application control unit 70 and also gives instruction data of the applied pressure. XY table 6
By moving the paste 40 linearly from the application nozzle 10 onto the substrate 50 while moving the substrate 50 along with the substrate 50, the paste is linearly applied on the substrate 50 along a rectangular loop locus set in advance by the arithmetic processing unit 84. The paste 40 will be applied.

Imaging cameras 20A and 20B for directly photographing the state of the linear paste 40 immediately after the application on the right and left sides, the rear side and the front side immediately above the XY table 60 and the application nozzle 10 from directly above. , 20C, and 20D. For these imaging cameras, a monochrome or color two-dimensional CCD camera, which is a solid-state imaging device, is used. The height positions of the four imaging cameras are the same, and the separation distance from the application nozzle 10 is also the same. The optical axes of the four imaging cameras are exactly perpendicular and parallel to each other. Each of the imaging cameras 20A, 20B, 20C, and 20D transmits an analog video signal of the NTSC system or the like to the A / D converter 81 in the main control device 80. The slit light source 30A is further on the right side of the right side imaging camera 20A, the slit light source 30B is on the left side of the left side imaging camera 20B, the slit light source 30C is on the further rear side of the rear side imaging camera 20C, and the front side imaging camera 20D is Further, a slit light source 30D is disposed on the near side. The height positions of the four slit light sources are the same, and the distances from the corresponding imaging cameras are the same. Each slit light source 30A, 30B, 30C, 30D
Are the respective imaging cameras 20A, 2 corresponding to the oblique optical axes.
They are arranged so as to pass through the intersections between the optical axes 0B, 20C, and 20D and the surface of the substrate 50. Substrate 5 for each slit light source
The angles of incidence for zero are equal to each other. The plane formed by the optical axis of the imaging camera 20A and the optical axis of the slit light source 30A is along the X direction. As shown in FIG. 9, the slit light 31a emitted from the slit light source 30A
The slit light image 32a formed on the upper surface of the zero is along the Y direction. Optical axis of imaging camera 20B and slit light source 30
The plane formed by the optical axis of B is in the X direction, and the slit light 31b emitted from the slit light source 30B is
Is formed along the Y direction. The plane formed by the optical axis of the imaging camera 20C and the optical axis of the slit light source 30C is along the Y direction, and the slit light image 32c formed on the upper surface of the substrate 50 by the slit light 31c emitted from the slit light source 30C is X It will be along the direction. Optical axis of imaging camera 20D and slit light source 3
The plane formed by the optical axis 0D is along the Y direction, and the slit light 31d emitted from the slit light source 30D is
The slit light image 32d formed on the upper surface of the zero is along the X direction. Slit light source 30A, imaging camera 20A, imaging camera 20B, slit light source 30 arranged along the X direction
Each optical axis of B is in the same vertical plane along the X direction, and the axis of the application nozzle 10 is located in the vertical plane. Further, the slit light source 30C, the imaging camera 20C, the imaging camera 20D, and the slit light source 30 arranged along the Y direction
Each optical axis of D is in the same vertical plane along the Y direction, and the axis of the application nozzle 10 is located in the vertical plane. Each slit light source 30A, 30B, 30C, 30D and each imaging camera 20A, 20B, 20C, 20D
The corresponding processing units 84 in the main control unit 80 are activated simultaneously. That is, the arithmetic processing unit 84 sets the XY table 6
0 is moved to the right in the X direction, and the slit light source 30A is applied when the linear paste 40 from the application nozzle 10 is applied on the substrate 50 in a state of extending to the right from the application nozzle 10.
And the imaging camera 20A is activated, the XY table 60 is moved to the left in the X direction, and the slit light source is used when the linear paste 40 from the application nozzle 10 is applied on the substrate 50 so as to extend to the left from the application nozzle 10. 3
0B and the imaging camera 20B are activated, the XY table 60 is moved to the rear side in the Y direction,
From the application nozzle 10 on the substrate 50
When the application is performed in a state that the application extends further behind, the slit light source 30C and the imaging camera 20C are activated, and the XY table 60 is moved to the front side in the Y direction so that the linear paste 40 from the application nozzle 10 is applied on the substrate 50. The slit light source 30D and the imaging camera 20D are activated when the coating is applied in a state of extending forward from the nozzle 10. As the slit light source, for example, it is conceivable to configure so as to irradiate light from a halogen lamp in a slit shape through an optical fiber.

Main controller 80 includes imaging cameras 20A, 2
A / D converter 81 that converts an analog video signal input from any one of OB, 20C, and 20D into digital image data, an image memory 82 that stores image data in a predetermined sequence, and feature data from image data. Image processing unit 83 for extracting the paste data, and an arithmetic processing unit 84 for performing the judgment of the quality of the paste application based on the characteristic data and other processes.
It is composed of FIG. 3 is a block diagram showing a detailed configuration of the arithmetic processing unit 84. In FIG. 3, reference numeral 841 denotes a CPU (Central Processing Unit) for controlling the entire system, and 842, a ROM (Read Only Memory) storing a program for control and calculation by the CPU.
And R that assists in control and calculation and stores data
A memory as a main storage device comprising an AM (random access memory); 843, a display unit comprising a display such as a CRT or a liquid crystal display and a display controller; 844, an external storage unit such as a floppy disk device or a hard disk device; An input / output unit 846 including a keyboard, a mouse, a parallel I / O interface, and the like, and a communication unit 846 such as an RS-232C interface. The above components are connected by a system bus 847 and managed by the CPU 841. The image processing unit 83 and the coating control unit 70 are connected to the input / output unit 845 of the arithmetic processing unit 84, and the XY table driving unit (not shown) is connected to the communication unit 846.

The resolution of each imaging camera is, for example, 512 × 480 dots in the case of monochrome, and the A / D
The resolution of the conversion unit 81 is, for example, 8 bits (256 gradations). In this case, one frame of image data (512 × 480 × 8 bits) captured by the imaging camera is stored in the image memory 82. In the case of color, the image data for each of R, G, and B is stored in the image memory 82, which is three times the image data of the case of monochrome. The image processing unit 83 includes a dedicated image processing circuit, a CPU or a DSP (Digital Signal Processor), a VRAM, and the like, and can process a large amount of image data at high speed. That is, the image processing sequence program from the arithmetic processing unit 84 is received in advance by the CPU, and the image processing circuit and the DSP execute necessary processing at required timing. The contents of the processing are as follows: image data is read from the image memory 82 in accordance with a required image processing algorithm, feature data on the slit light image applied to the coated linear paste 40 is extracted, and the feature data is processed by the arithmetic processing unit. 84
To be sent. The arithmetic processing unit 84 is configured to collate the received feature data with reference data registered in advance and determine whether the paste application is good or not. It should be noted that the image processing sequence program based on the image processing algorithm can be appropriately changed in the arithmetic processing unit 84.

Next, the operation of the paste coating apparatus according to the first embodiment configured as described above will be described. First, the substrate 50 of the liquid crystal panel to which the paste is to be applied is XY
It is placed at a predetermined position on the upper surface of the table 60. At the time of mounting, the alignment marks are attached to the imaging cameras 20A and 20A.
Positioning is performed with high accuracy while capturing images using B, 20C, and 20D. After the mounting, the substrate 50 is fixed on the XY table 60 by vacuum suction. Next, the arithmetic processing unit 84 in the main controller 80 gives initial movement data to an XY table driving unit (not shown), and the XY table 60
The XY table 60 is moved so that the paste application start position on the upper substrate 50 is directly below the discharge port at the tip of the application nozzle 10. When this initial alignment is completed,
The arithmetic processing unit 84 gives an ejection ON signal to the application control unit 70 and gives instruction data of applied pressure, and at the same time, gives movement data corresponding to a predetermined paste application locus to the XY table driving unit. This movement data is a combination of X coordinate data and Y coordinate data. As the movement data, there are prepared several types of application patterns corresponding to the size of the liquid crystal panel, and necessary ones are selected in advance. The movement data is set so as to continuously move at a constant speed from the start point to the end point of application. Therefore, when the intended application is performed, the paste discharge amount per unit time becomes constant, and the application paste becomes a uniform continuous line having a constant width and a constant height. At the same time, the arithmetic processing unit 84
The imaging camera and the slit light source corresponding to the moving direction of the Y table 60 are activated. For example, XY table 6
0 is moved to the right in the X direction, the paste 40 discharged from the application nozzle 10
It will be applied in a state extending to the right side from 0,
At this time, the slit light source 30A and the imaging camera 20
Activate A. Slit light image 32a where the slit light 31a emitted obliquely from the slit light source 30A is made of a top surface of the substrate 50 becomes that along the Y direction, will form a curved image portion 32a ₂ is on the coating paste 40 (Fig. 5 (a)). The slit light image 32a and its surrounding image are taken by the imaging camera 20A directly above,
The video signal is sent to the A / D converter 81 of the main controller 80. The digital image data A / D converted by the A / D converter 81 is stored in the image memory 82. The image processing unit 83 reads out image data from the image memory 82 in accordance with a required image processing algorithm, and extracts characteristic data on the paste in the applied state. Image processing unit 8
FIG. 4 shows an example of the image processing sequence in No. 3. In this case, when the portion of the slit light image 32a is emphasized by filtering in Step S1, the portion of the slit light image 32a is distinguished from the background portion by binarization in Step S2, and the binarization is performed by noise removal in Step S3. An extra portion other than the slit light image remaining in the slit light image is removed. In step S4, the image of the slit light image 32a is recognized by labeling. Determine the position and shape. The calculated data is sent to the arithmetic processing unit 84 as feature data. Note that, if necessary, other processing is added to perform optimal image processing. The CPU 841 of the arithmetic processing unit 84 stores the received feature data in the external storage unit 844. The characteristic data is stored in the external storage unit 844.
Is compared with reference data registered in advance to determine the quality of paste application. A specific example of determining the quality of the paste application based on the characteristic data will be described with reference to FIG. The coating paste image 40 'is not included in the feature data sent to the arithmetic processing unit 84, but is illustrated for easy understanding. In the case of FIG. 5 (a), since the slit light image 32a is a linear image portion 32a ₁ and the curved image portion 32a ₂ and the linear image portion 32a ₃ is a series in the viewing area 90 by the image pickup camera, the reference data As a result, it is determined that the paste application properties are good. In the case of FIG. 5B, since the entire slit light image 32a is linearly continuous in the visual field region 90, as a result of collation with the reference data, the coating paste has a "cut", and the paste coating properties Is determined to be defective. Similarly, when the applied paste has "faintness" or "thinness", the paste application property is also determined to be poor. The CPU 841 displays the determination result of the paste application on the display unit 843, and immediately moves the XY table 60 and the application nozzle 10.
The application of the paste 40 is stopped and an alarm is issued.

As long as the paste application property is normal, the XY pattern is maintained until the end point of the paste application trajectory.
The operation of applying the linear paste 40 to the substrate 50 from the application nozzle 10 while moving the table 60 is continued. That is, XY as shown in FIGS.
The table 60 is moved to the right in the X direction, and the linear paste 40 is placed on the substrate 50 in a partial trajectory 41 along one front side in the X direction.
7A, the XY table 60 is moved to the front side in the Y direction, and the linear paste 40 is transferred onto the substrate 50 as shown in FIGS. 7A and 7B.
The coating is applied to the end of the partial trajectory 41D along the left side in the direction. At this time, the slit light source 30D and the imaging camera 20D are activated. 8A, the XY table 60 is moved to the left in the X direction to move the linear paste 40 on the substrate 50 in the X direction, as shown in FIG. The coating is applied to the end of the partial trajectory 41B along one side. At this time, the slit light source 30B and the imaging camera 20B are activated. At the stage of application to the end of the partial trajectory 41B, the direction of movement is changed, and the XY table 60 is moved to the rear side in the Y direction to move the linear paste 40 on the substrate 50 in the Y direction as shown in FIG. Partial trajectory 41 along one right side
C is applied to the end of C. In this case, the slit light source 3
0C and the imaging camera 20C are activated. During this period, if there is no determination of a defect in the paste application property, the application locus of the linear paste 40 becomes rectangular as shown in FIG. 9 (the dashed arrow indicates the moving direction of the substrate 50).
When reaching the end of the partial trajectory 41C as shown in (b), the arithmetic processing unit 84 outputs an OFF signal to the XY table driving unit and the coating control unit 70 to stop the movement of the XY table 60 and to apply the coating nozzle. Linear paste 4 from 10
The discharge of 0 is stopped. When the application of the linear paste 40 to the substrate 50 is completed, the vacuum suction on the substrate 50 is released, and the substrate 50 is taken out of the XY table 60. In the meantime, if the paste application property is determined to be defective during this time, the arithmetic processing unit 84 immediately stops the movement of the XY table 60 and the application of the linear paste 40 from the application nozzle 10, and issues an alarm. The substrate 50 is removed from the XY table 60.

Since the paste application properties are inspected while applying the linear paste 40 to the substrate 50, the application step and the inspection step can be performed at the same place and at the same time, which is advantageous in terms of production tact time and space. In addition, since the defective line is not generated, the line can be stopped immediately and the normal operation can be resumed when at least one defective item comes out, so that the production yield of the liquid crystal panel is improved. Since the inspection is performed automatically, inspection accuracy and inspection quality are improved as compared with the paste application inspection visually inspected by the inspector. When applying in the XY two-dimensional directions on a plane, that is, in the form of a rectangular loop, it is not necessary to perform a complicated and time-consuming turning of the application nozzle 10 as in the case of the related art, and a simple turning of the XY table 60 is required. Since it is only necessary to do so, the mechanism does not need to be complicated, and the change of the coating locus from the X direction to the Y direction and from the Y direction to the X direction can be smoothly performed without stagnation, and the change does not take time. In addition, there is no inconvenience such as excessive application at the turning point and deterioration of application properties, and paste application with good properties can be performed.

[Embodiment 2] In Embodiment 2, the positions of the imaging camera and the slit light source are interchanged. Referring to FIG. 10 which is a plan view, the application nozzle 10
One annular slit light source 30 concentrically near the outside of the
And the four imaging cameras 20
A, 20B, 20C and 20D are arranged. It is assumed that the slit light source 30 emits slit light vertically right below, and the optical axis of each imaging camera is oblique. The optical axis of the imaging camera passes through a portion where the slit light intersects the upper surface of the substrate 50. Other configurations and operations are the same as those of the first embodiment, and thus description thereof is omitted. The slit light sources may be four slit light sources located on each of the four sides of the square.

If the number of pairs of the imaging camera and the slit light source is eight and they are arranged on each side of the regular octagon, in addition to the rightward, leftward, forward and rearward coating inspections,
Application inspection in four oblique directions with different oblique directions can also be performed.

When a plurality of liquid crystal panel substrates are sampled from one substrate, rectangular loop-shaped coating is repeated at different locations on the substrate. Alternatively, a plurality of sets of a coating nozzle, a plurality of imaging cameras, and a plurality of slit light sources may be provided, and the coating may be performed simultaneously.

The table on which the substrate 50 is placed is XY
In addition to using a fixed table instead of the table, the application nozzle 10, the imaging cameras 20A, 20B, 20C, 20
D, one slit light source 30A, 30B, 30C, 30D
One block may be attached to the XY table. However, it is easier to fix the position of the application nozzle, the imaging camera, and the slit light source and mount the substrate on the XY table.

[0024]

According to the first aspect of the present invention, a slit light image crossing the linear paste is photographed from a direction inclined with respect to the slit light irradiation direction, and the slit light image is taken in parallel with the application. Since the quality of the paste application property is automatically determined, the application step and the inspection step can be performed at the same place and at the same time, which is advantageous in terms of production tact time and space. Also, without generating many defective products,
When even one defective product comes out, the line can be stopped immediately to return to normal, so that the production yield is improved. Since the inspection is performed automatically, inspection accuracy and inspection quality are improved as compared with the paste application inspection visually inspected by the inspector.

According to the second aspect of the present invention, the coating nozzle and the object to be coated are relatively moved left and right and back and forth. Since the slit light sources for irradiating orthogonal slit light are arranged on the left, right, front and rear, it is not a complicated and time-consuming change when changing the coating direction as in the case of the conventional technology, but a simple XY table. A simple paste with good properties, without the need for complicated mechanisms, can smoothly change the application direction without stagnation, and does not cause inconvenience such as excessive application at the transition point and deterioration of application properties. Coating can be performed.

According to the third aspect of the present invention, the coating nozzle and the object to be coated are relatively moved left and right and back and forth, and the slit for irradiating slit light orthogonal to the linear paste at least to the left and right and front and back of the coating nozzle. Place the light source,
Since the imaging camera for photographing the intersection of the slit light and the object to be applied from an oblique direction is arranged outside the slit light source in the left, right, front, and back of the application nozzle, the application direction can be reduced without complicating the mechanism as described above. Conversion can be performed smoothly without stagnation, and there is no inconvenience such as excessive coating at the conversion point and deterioration of coating properties, and paste application with good properties can be performed.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram including a partial side view of a paste application device according to a first embodiment of the present invention.

FIG. 2 is a plan view corresponding to FIG.

FIG. 3 is a block diagram showing a detailed configuration of an arithmetic processing unit in FIG. 1;

FIG. 4 is a processing sequence of an image processing unit in FIG. 1;

FIG. 5 is an explanatory diagram for judging the quality of paste application properties according to the first embodiment.

FIG. 6 is an explanatory diagram of a paste application operation in the first embodiment.

FIG. 7 is an explanatory view of a paste application operation in the first embodiment (continuation of FIG. 6).

FIG. 8 is an explanatory view of a paste application operation in the first embodiment (continuation of FIG. 7).

FIG. 9 is an operation explanatory view collectively showing FIGS. 6 to 8;

FIG. 10 is a plan view of a paste application device according to a second embodiment.

FIG. 11 is a schematic configuration diagram showing a conventional paste application device.

[Explanation of Signs] 10 ... Application nozzle, 20A, 20B, 20C, 20
D: imaging camera, 30, 30A, 30B, 30C, 3
0D: slit light source, 31a, 31b, 31c, 3
1d: slit light, 32a, 32b, 32c, 32
d ...... slit light images, 32a _1, 32a ₃ ...... linear image part, 32a ₂ ...... curved image unit, 40 ...... linear pastes, 41A, 41B, 41C, part trajectory of 41D ...... linear paste, 50 …… Substrate (application target), 60…
XY table, 70 Application control unit, 80 Main controller, 81 A / D conversion unit, 82 Image memory, 83 Image processing unit, 84 Operation processing unit

Claims (3)

[Claims] 1. While applying a linear paste to an object to be applied, a slit light substantially perpendicular to the linear paste immediately after the application is irradiated, and a slit light image in which the slit light crosses the linear paste is irradiated with a slit light irradiation direction. A paste application apparatus configured to determine whether the paste application property is good or not by photographing from a direction inclined with respect to the apparatus. 2. A method for applying a linear paste to an application object by relatively moving the application nozzle and the application object to the left, right, front and rear, and applying light to the application nozzle to apply the linear paste to the application object. An imaging camera having a substantially vertical axis is arranged, and a slit light source that irradiates slit light substantially orthogonal to the linear paste from an oblique direction with respect to an intersection between the optical axis of the imaging camera and the application target corresponds to each imaging camera. And a paste application device configured to determine the quality of the paste application property based on image processing of image data captured by an imaging camera. 3. A method for applying a linear paste to an application object by relatively moving an application nozzle and an application object to the left, right, front and back, and at least to the left, right, front and back of the application nozzle for applying the linear paste to the application object. A slit light source that irradiates slit light that is almost perpendicular to the linear paste and has an optical axis that is almost perpendicular is arranged. An imaging camera that shoots the intersection of the slit light and the object to be applied from an oblique direction is located outside the slit light source at the left and right of the application nozzle. A paste application device that is arranged before and after and configured to determine the quality of paste application properties based on image processing of image data captured by an imaging camera.