JP2000010062A - Liquid crystal display element manufacturing method and liquid crystal display element manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display element manufacturing method and a liquid crystal display element manufacturing device capable of adsorbing and fixing a substrate of a liquid crystal display element in a flat state without deviating positionally and with sufficient force and without leaving the deformation of the substrate. SOLUTION: An insulated substrate 5 is mounted on a stage 1 and at the same time, attracting force is made to act on the substrate 5 through second suction ports 3 by turning a valve 15 of a blower to previously be operated 16 ON. Then, by operating a vacuum pump 10 and valve 9, attracting force is made to act on nearlly the all areas of the central part of the substrate 5 through the first area 2a of first suction ports 2 and next, the first area 2a and a second area 2b and moreover, the first area 2a, the second are 2b and a third area 2c. Thus, the deformation of the substrate 5 is successively moved to a non-suction area and the deformation is collected in the vicinity of the outer peripheral part of the substrate finally and at this timing, the attracting force action on the vicinity of the outer peripheral parts from the second suction ports 3 is released by turning the valve 15 of the blower 16 OFF.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display element used in a process for manufacturing a liquid crystal display element and an apparatus for manufacturing a liquid crystal display element, and particularly to a resist coating apparatus, an exposure apparatus, an alignment film printing apparatus, and rubbing. apparatus,
The present invention relates to a spacer spraying device, a seal printing device, and the like.

[0002]

2. Description of the Related Art Conventionally, a liquid crystal display device has, for example, 300
A glass substrate with a size of about 400 mm × 400 mm × about 0.7 mm in thickness is mainly used.
Larger glass substrates with a size of 00 mm have also been used.

[0003] Such a glass substrate is used during the manufacturing process of a liquid crystal display element, for example, in a resist coating apparatus, an exposure apparatus, or the like.
The glass substrate 51 is sequentially conveyed through an alignment film printing device, a spacer dispersing device, a seal printing device, and the like. During the processing operation in each device, as shown in FIGS. The stage is fixed on a stage (hereinafter, referred to as a stage) 52 by vacuum suction.

That is, the stage 52 has a diameter of 0.5
A plurality of suction ports 53 of about 1.0 mm are provided in a grid pattern at intervals of about 5 to 30 mm.
It is connected to a vacuum pump 55 provided below the stage 52 via a communication path 54. The glass substrate 51 is caused by the vacuum suction force acting simultaneously through each suction port 53,
It is absorbed over almost the entire surface and fixed on the stage 52.

A glass substrate 51 formed in a flat plate shape
Has excellent flatness and high rigidity, so that even if the suction force is applied discretely at the same time through the suction port 53 as described above, the glass substrate 51 does not deform such as warpage. Since the alignment film is uniformly fixed on the stage 52, as a result, in the manufacturing process of the liquid crystal display device, the alignment film is uniformly applied by, for example, the printing process of the alignment film, and the unevenness or the like in the finished state does not occur. Absent.

Further, even if the glass substrate 51 has a certain amount of warpage, the glass substrate 51 having a thickness of about 0.7 mm
Then, as disclosed in Japanese Patent Application Laid-Open No. 9-80404, if several regions are sucked with a time difference through a switching valve or the like using a vacuum pump as described in Japanese Patent Application Laid-Open No. can do.

When the glass substrate 51 is placed on the stage 52, the glass substrate 51 is positioned in a cassette in which a plurality of glass substrates 51 are housed by positioning pins or the like, and then placed on lift pins protruding from the stage 52 by a transfer arm or the like. The substrate 51 is placed.

Then, the glass substrate 51 is placed on the stage 52 by lowering the lift pins, and as described above, the vacuum suction force is applied simultaneously from the suction ports 53 or sequentially with a time lag through a switching valve or the like. , Glass substrate 51
Is fixed to the stage 52 by suction.

Thereafter, in an alignment film printing apparatus or a sticker printing apparatus, etc., each processing is performed after high-precision positioning is performed using an alignment mark formed in advance on the glass substrate 51 using a CCD camera or the like. .

On the other hand, as another adsorption method, a method using a blower is disclosed in JP-A-8-324786 or JP-A-7-33281.

In recent years, as the liquid crystal display element has become thinner and lighter, a thin glass substrate having a thickness of 0.7 mm or less or a plastic substrate made of plastic has been employed, and some of them have been put into practical use. Such a thin glass substrate or a plastic substrate also employs the above-described suction method.

[0012]

However, the above-described method of adsorbing and fixing a thin insulating substrate such as a glass substrate or a plastic substrate has the following problems.

From the state where the insulating pins are placed on the stage by lowering the lift pins, the vacuum suction force is simultaneously applied from each suction port or with a time lag as disclosed in JP-A-9-80404. When the insulating substrate is suction-fixed on the stage by the action of air, the air that flows between the insulating substrate and the stage is sucked through the suction port, and this air flows to generate static electricity. However, the insulating substrate may move up to about 1 cm so as to slide on the stage.

In particular, a thin glass substrate or a plastic substrate having a thickness of 0.7 mm or less is lighter in weight than a glass substrate having the same external size and a thickness of more than 0.7 mm. It becomes easy to move.

If the insulating substrate moves on the stage as described above, the alignment mark may be out of the field of view of the CCD camera or the like. There is a problem that it becomes impossible to perform positioning.

In the case where a thin glass substrate or a plastic substrate is processed in each apparatus while being heated to a room temperature or higher, or when the substrate is sequentially transported while being heated, the temperature fluctuation in the substrate is caused by the temperature fluctuation in the apparatus. And deformation such as warping, undulation or bending of the substrate occurs entirely or partially.

In this deformation, the shape may be fixed by the processing, or may return to flat after the processing. Also, the shape may constantly change during processing. Also, the size, direction, and location of occurrence may be fixed, may return to the original state after processing, or may constantly change during processing. Such deformation occurs even when the substrate temperature is increased or decreased before and after the process, even if there is no temperature variation in the apparatus. It also occurs when processing is performed sequentially at different temperatures.

When the above-described deformation occurs, the lift pins are lowered and the thin glass substrate or the plastic substrate is placed on the stage.
Alternatively, when the substrate is sucked and fixed on the stage by applying a vacuum suction force with a time difference, the substrate cannot be sucked from the beginning, or even if it is initially sucked, the substrate is more deformed than the suction force and the vacuum is broken Then, the adsorption may be interrupted.

In particular, a thin glass substrate or a plastic substrate has a lower rigidity and a higher deformation than a glass substrate having the same outer size and a thickness of more than 0.7 mm, so that it is easily deformed and hardly attracted.

Further, a thin glass substrate or a plastic substrate is lighter in weight than a glass substrate having the same external size and a thickness of more than 0.7 mm, so that a warp of a certain degree or more (a substrate having a size of about 300 mm × 400 mm) is obtained. In contrast, when warpage occurs in the convex or concave direction of about 1 to 2 mm or more), the warp cannot be canceled out by its own weight to make it flat, so that the substrate cannot be attracted to the stage.

As described above, if the substrate cannot be attracted to the stage, post-processing such as alignment cannot be performed.

On the other hand, the thickness of the plastic substrate is 0.4 mm.
A thin film having a thickness of 0.3 mm or less and a film having a thickness of 0.3 mm or less have less rigidity, and the substrate is deformed or rolled without heating. This is a so-called lack of rigidity. When the substrate is partially held, the rigidity of the portion not held by the substrate loses gravity, and a deformation phenomenon called hanging occurs.

If the molecular orientation state of the substrate material or the physical or chemical properties of the substrate in the cross-sectional direction is not isotropic, a deformation phenomenon called curl, in which the substrate becomes a roll, occurs.

In the above-mentioned deformation, the shape may be fixed by processing such as holding, or may return to flat after the processing. Also, the shape may constantly change during processing.

When the various deformations as described above occur, the lift pins are lowered and the plastic substrate is placed on the stage, and the vacuum suction force is applied simultaneously from each suction port or with a time lag. When the substrate is fixed on the stage by suction, the substrate cannot be sucked from the beginning, or even if it is sucked at the beginning, the deformation of the substrate exceeds the suction force and the vacuum is broken, the suction is interrupted, and post-processing such as alignment is performed There is a problem that it becomes impossible.

In order to obtain an attraction force for a substrate having deformation as described above, a suction method using a blower is effective as disclosed in JP-A-8-324786 or JP-A-7-33281. It is.

A blower generates airflow by rotating an impeller, and performs air intake on one side and exhaust air on the other side. When an object is placed on the intake side, the object is sucked into the blower. Can be For example, an electric vacuum cleaner is a good example.

Although the blower does not have the absolute suction force of a vacuum pump, it does not break in a vacuum, so it is excellent in adaptability to deformed objects, and even if the intake port is not necessarily completely blocked by the object. This is because an object can be adsorbed.

However, when the suction force is applied to the entire surface of the substrate at once, as in the configuration disclosed in Japanese Patent Application Laid-Open No. 8-324786 or Japanese Patent Application Laid-Open No. 7-33281,
In the case of a deformed thin glass substrate or plastic substrate, although the substrate is adsorbed to the stage, the substrate may be adsorbed to the stage while being deformed. Cannot be applied uniformly, resulting in uneven printing such as unevenness in the finished state.

Further, for example, in the rubbing treatment, the rubbing cloth hits at the deformed portion of the substrate too much, so that the alignment film is damaged and the substrate is broken.

Even if the plastic substrate is thin, having a thickness of 0.4 mm or less, or a film having a thickness of 0.3 mm or less, when a suction force is applied to the entire surface of the substrate at one time, the substrate is attracted to the stage by a blower. Even if it is possible, it may be adsorbed to the stage while deformed, for example, during printing of an alignment film or rubbing treatment, the printing pressure or rubbing pressure applied to the substrate may cause irreversible folds or breakage of the substrate Occurs.

The present invention has been made in view of the above-mentioned conventional problems. Even when a thin glass substrate or a plastic substrate is used, the present invention does not cause a displacement.
It is an object of the present invention to provide a method of manufacturing a liquid crystal display element and a liquid crystal display element manufacturing apparatus capable of holding a substrate in a smooth state by suction with sufficient force without deforming the substrate.

[0033]

According to a first aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device, comprising: a mounting table having a flat mounting surface having a plurality of suction openings. A method of manufacturing a liquid crystal display element in which an insulating substrate is fixed by applying a suction force through the suction port and various processes are performed on the insulating substrate, wherein a center portion of the insulating substrate is suction-fixed. A first suction port and a second suction port that suction-fixes the vicinity of an outer peripheral portion of the insulating substrate so as to surround the periphery of the first suction port; It is characterized in that an insulating substrate is fixed and various processes are performed.

According to a second aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first aspect.
The second suction port is characterized in that a suction force is applied by a blower.

According to a third aspect of the present invention, in the method for manufacturing a liquid crystal display element according to the first or second aspect, after applying the suction force from the second suction port, It is characterized in that a suction force is applied from one suction port.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the third aspect.
The first suction port is divided into at least two regions, and a time difference is provided for each of the regions to apply a suction force to the insulating substrate.

According to a fifth aspect of the present invention, in the method for manufacturing a liquid crystal display element according to the third or fourth aspect, after applying the suction force from the first suction port, 2 is characterized in that the suction force from the suction port is released and various treatments are performed.

According to a sixth aspect of the present invention, in the method of manufacturing a liquid crystal display element according to any one of the first to fifth aspects, an end of the insulating substrate is provided outside the second suction port. A third suction port for suction and fixation is provided.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the sixth aspect.
At the time of printing the alignment film, the third suction port is provided so as to correspond to a position where the relief plate provided on the printing roller first contacts the insulating substrate.

According to a eighth aspect of the present invention, in the method for manufacturing a liquid crystal display element according to the sixth or seventh aspect, the first suction port acts on the first suction port to apply an attraction force to the first liquid crystal element. After the suction force is applied from the suction port, the suction force from the second suction port is released, and the suction force is applied from the third suction port to perform various processes.

According to a ninth aspect of the present invention, in the method of manufacturing a liquid crystal display element according to any one of the first to eighth aspects, the insulating substrate is made of plastic.

According to a tenth aspect of the present invention, in the method for manufacturing a liquid crystal display element according to the first to eighth aspects, the insulating substrate is made of glass having a thickness of 0.7 mm or less. Features.

According to a eleventh aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device, comprising: a mounting table having a flat mounting surface on which an insulating substrate is mounted; and a plurality of suction ports provided on the mounting surface. In a liquid crystal display element manufacturing apparatus for fixing the insulating substrate by applying suction force through the suction port and performing various processes on the insulating substrate, a first suction for suction-fixing a central portion of the insulating substrate. A second port for adsorbing and fixing the vicinity of the outer peripheral portion of the insulating substrate so as to surround the first port and the periphery of the first suction port;
And a suction port.

According to a twelfth aspect of the present invention, there is provided a liquid crystal display element manufacturing apparatus according to the eleventh aspect.
The second suction port is characterized in that a suction force is applied by a blower.

A liquid crystal display element manufacturing apparatus according to a thirteenth aspect is the liquid crystal display element manufacturing apparatus according to the twelfth aspect,
The pipe from the blower to the second suction port is provided with a desorption mechanism.

According to a fourteenth aspect of the present invention, in the liquid crystal display element manufacturing apparatus according to the eleventh to thirteenth aspects, the first suction port is divided into at least two regions. It is characterized in that a suction force can be applied to the insulating substrate by providing a time difference.

According to a fifteenth aspect of the present invention, in the liquid crystal display element manufacturing apparatus according to any one of the eleventh to fourteenth aspects, the first suction port and the second suction port are independently formed. It is characterized in that the suction force can be controlled.

According to a sixteenth aspect of the present invention, in the liquid crystal display element manufacturing apparatus according to the eleventh to fifteenth aspects, an end portion of the insulating substrate is fixed by suction to the outside of the second suction port. A third suction port is provided.

A liquid crystal display device manufacturing apparatus according to claim 17 is the liquid crystal display element manufacturing apparatus according to claim 16,
In the case of an alignment film printing apparatus, the third suction port is provided so as to correspond to a position where a relief plate installed on a printing roller first contacts the insulating substrate.

The liquid crystal display element manufacturing apparatus according to claim 18 is the liquid crystal display element manufacturing apparatus according to claim 16 or 17, wherein the first suction port, the second suction port, and the third suction port. The mouth is characterized in that the suction force can be independently controlled.

According to the method of manufacturing a liquid crystal display element of the present invention, the first suction port for suction-fixing the central portion of the insulating substrate and the outer peripheral portion of the insulating substrate so as to surround the periphery of the first suction port. By applying a suction force to the insulating substrate by the second suction port for suction-fixing the vicinity, the vicinity of the outer peripheral portion of the insulating substrate becomes a closed system as if the vicinity of the insulating substrate were cut off by an O-ring. There is no way for the air to escape from the mounting table, so even for an insulating substrate that is easily deformed, the central part of the insulating substrate can be firmly fixed by suction, and the insulating substrate can be fixed during various subsequent processes. Is not displaced or the suction fixation is not displaced.

Further, the suction force is applied to the second suction port by a blower, so that when the insulating substrate is suction-fixed on the mounting table, the air between the insulating substrate and the mounting table flows. Even if static electricity is going to be generated, the air is suctioned by a blower with a large flow rate before the static electricity is generated, so the amount of generated static electricity can be significantly reduced, and the displacement of the insulating substrate during suction fixing Can be prevented.

Further, since the suction method using a blower that suctions at an absolute flow rate is used, when the insulating substrate is placed on the mounting table, a part of the suction port is closed by the insulating substrate due to deformation of the insulating substrate. Vacuum breakage does not occur even if it is not removed, and adsorption is not interrupted.

Further, by applying the suction force from the second suction port and then applying the suction force from the first suction port, the above-mentioned closed system can be formed first, and the insulating substrate and the insulating substrate can be formed. The air between the mounting table and the mounting table can be sucked efficiently and in the shortest time, and the amount of static electricity generated can be reduced by the short flow time of the air. The displacement can be further prevented.

Further, even if the insulating substrate is deformed by dividing the first suction port into at least two regions and providing a time difference for each region to apply the suction force to the insulating substrate, Since the area is sequentially fixed by suction,
Since the deformation is sequentially transferred to the area where the insulating substrate is not fixed by suction, and finally collected on the outer peripheral portion, the central portion of the insulating substrate can be fixed by suction to the mounting table in a smooth state.

Further, after the suction force is applied from the first suction port, the suction force from the second suction port is released, and various treatments are performed. It is almost eliminated by releasing the suction power of the suction port of
The insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, by providing the third suction port for adsorbing and fixing the end of the insulating substrate outside the second suction port, even if the end of the insulating substrate remains deformed, the third suction port is provided. With the suction force from the suction port, the end surface of the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, at the time of printing the alignment film, the third suction port is provided so as to correspond to the position where the relief plate provided on the printing roller first comes into contact with the insulating substrate, so that a portion where vacuum breakdown is most likely to occur is formed. It is firmly fixed by adsorption, so that vacuum breakage does not occur during printing.

Further, after the suction force is applied from the second suction port and the suction force is applied from the first suction port, the suction force from the second suction port is released, and the suction force is released from the third suction port. By performing various kinds of processing by applying the suction force, the deformation of the insulating substrate is collected at the outer peripheral portion and eliminated, and the insulating substrate can be suction-fixed to the mounting table in a smooth state to the end portion.

Further, even if the insulating substrate is made of plastic, it is possible to prevent a displacement during suction fixing to the mounting table.

Further, even if the insulating substrate is made of glass having a thickness of 0.7 mm or less, it is possible to prevent a positional shift at the time of suction-fixing to the mounting table.

According to the liquid crystal display element manufacturing apparatus of the present invention,
By providing a first suction port for suction-fixing the central portion of the insulating substrate, and a second suction port for suction-fixing the vicinity of the outer peripheral portion of the insulating substrate so as to surround the periphery of the first suction port, The outer periphery of the insulating substrate becomes a closed system as if it were cut off by an O-ring, and there is no way for air to escape between the insulating substrate and the mounting table. The central portion of the non-conductive substrate can be securely fixed by suction, and the position of the insulating substrate does not shift during the various processes to be performed later, and the suction and fixation does not deviate.

Further, the suction force is applied by the blower to the second suction port, so that when the insulating substrate is suction-fixed on the mounting table, the air between the insulating substrate and the mounting table flows. Even if static electricity is going to be generated, the air is suctioned by a blower with a large flow rate before the static electricity is generated, so the amount of generated static electricity can be significantly reduced, and the displacement of the insulating substrate during suction fixing Can be prevented.

Since the suction method using a blower that sucks at an absolute flow rate is used, when the insulating substrate is placed on the mounting table, a part of the suction port is closed by the insulating substrate due to the deformation of the insulating substrate. Vacuum breakage does not occur even if it is not removed, and adsorption is not interrupted.

Further, since the pipe from the blower to the second suction port is provided with a desorption mechanism, it is not necessary to pipe the pipe over a long distance in consideration of the movement of the mounting table at the time of the process after the suction and fixing.

Further, the first suction port is divided into at least two regions, and a time difference is provided for each of the regions to apply a suction force to the insulating substrate, so that even if the insulating substrate is deformed. Since the area is sequentially suction-fixed, the deformation is sequentially shifted to the area where suction is not fixed, and finally collected on the outer peripheral portion, so that the center portion of the insulating substrate is fixed to the mounting table in a smooth state by suction. Can be.

Further, the first suction port and the second suction port can independently control the suction force, so that
The deformation collected on the outer peripheral portion is also substantially eliminated by releasing the suction force of the second suction port, so that the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, by providing a third suction port for adsorbing and fixing the end of the insulating substrate outside the second suction port, even if the end of the insulating substrate remains deformed, the third suction port is provided. With the suction force from the suction port, the end surface of the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, in the case of the alignment film printing apparatus, the third suction port is provided in correspondence with the position where the relief plate provided on the printing roller first comes into contact with the insulating substrate, so that the vacuum breaking is most likely to occur. Thus, a portion where the ink is likely to occur is firmly fixed by suction, and no vacuum break occurs during printing.

Further, since the first suction port, the second suction port, and the third suction port can independently control the suction force, the deformation of the insulating substrate is collected at the outer peripheral portion and eliminated, and The substrate can be suction-fixed to the mounting table in a smooth state up to the end of the flexible substrate.

[0071]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS.

For example, as shown in FIGS. 1 to 3, an alignment film printing apparatus in a manufacturing process of a liquid crystal display element includes:
A stage (mounting table) 1 having a flat mounting surface on the upper surface is provided. The stage 1 has a diameter of 0.5-1.
A plurality of first suction ports 2 having a diameter of 0 mm
The openings are in a grid pattern at 0 mm intervals.

In this embodiment, the first suction port 2
Are the first region 2a, the second region 2b, and the third region 2c
Are divided into three regions. As the area division of the first suction port 2, it is desirable to divide the area into at least two or more areas.

Further, the second suction port 3 has a width of 1.0 to 2.
The opening is 0 mm so as to surround the periphery of the first suction port 2. The shape of the second suction port 3 is 0.5 to 0.5 mm.
The suction ports of 1.0 mm may be linearly arranged in about 2 to 5 rows.

Further, outside the second suction port 3, a third suction port 4 having a width of 2.0 mm may be linearly opened. The shape of the third suction port 4 is 0.5-1.
The suction ports of 0 mm may be linearly arranged in about 2 to 5 rows. It is preferable that the position where the third suction port 4 is provided corresponds to the position where the relief plate installed on the printing roller first contacts the insulating substrate 5 and starts printing.

First divided area 2 of first suction port 2
a, the second area 2b and the third area 2c are respectively connected to the first, second and third communication paths 6, 2 and 7 provided inside the stage 1 and having elasticity. The first communication path 6, the second communication path 7, and the third communication path 8 are connected to a vacuum pump 10 via a switching valve 9.

Similarly, the third suction port 4 is connected to a stretchable fourth communication passage 11 provided inside the stage 1, and the fourth communication passage 11 connects the switching valve 9. It is connected to the vacuum pump 10 via.

The switching valve 9 causes the suction force when the vacuum pump 10 is operated to act from the first communication path 6 via the first area 2a of the first suction port 2 and the second state. And a state where the third communication path 8 operates via the second area 2b of the first suction port 2 and the third communication path 8 and a state where it operates via the third area 2c of the first suction port 2. And the fourth communication passage 1
Switching from the first to the state acting via the third suction port 4 can be independently performed.

That is, switching can be performed by the switching valve 9 in a state where the attraction force acts independently or in an arbitrary combination. Further, the respective adsorbing forces can be applied with a time difference.

On the other hand, the second suction port 3 is connected to a fifth communication passage 12 provided inside the stage 1, and the fifth communication passage 12 is connected to the first detachable portion 13 and the second communication passage 12. Is connected to a blower 16 via a desorption section 14 and a valve 15. The piping of the blower section can be disconnected and connected between the first detachable section 13 and the second detachable section 14 in conjunction with the movement of the stage 1.

When an insulating substrate 5 made of a plastic substrate or a thin glass substrate having a thickness of 0.7 mm or less is placed on the alignment film printing apparatus having the stage 1 as described above, the following operation procedure is used. , The insulating substrate 5 is fixed by suction.

First, in a cassette in which a plurality of insulating substrates 5 are stored, the insulating substrates 5 are positioned by positioning pins or the like, and then the stage 1 is moved by a transfer arm or the like.
The insulating substrate 5 is placed on lift pins (not shown) protruding from the substrate.

Then, the lift pins are lowered to place the insulating substrate 5 on the stage 1, and at the same time, the valve 15 of the blower 16, which is operating in advance, is turned on, and the second suction port 3 is turned on.
To cause the suction force to act on the insulating substrate 5.

As a result, the air between the insulating substrate 5 and the stage 1 is quickly sucked, and the generation of static electricity can be suppressed. Further, even if the insulating substrate 5 is deformed, it is suction-fixed so as to surround the vicinity of the outer peripheral portion of the insulating substrate 5 by the strong suction force of the blower 16.

Next, the vacuum pump 10 and the switching valve 9 are operated to apply a suction force to the central portion of the insulating substrate 5 through the first area 2a of the first suction port 2. Next, the switching valve 9 is operated to apply the suction force to the central portion of the insulating substrate 5 through the first region 2a and the second region 2b. Further, by operating the switching valve 9, the first region 2a,
Through the second region 2b and the third region 2c, the suction force is applied to almost the entire central region of the insulating substrate 5.

Here, when the suction force of the vacuum pump 10 is applied to the insulating substrate 5 through the first suction port 2, the insulating substrate 5 is already suction-fixed so as to surround the periphery of the insulating substrate 5. Since there is no escape route of air between the conductive substrate 5 and the stage 1, even if the insulating substrate 5 is deformed, it can be surely fixed by suction even in the vacuum suction method. Therefore, the insulating substrate 5 may be used during various subsequent processes.
Is not displaced or the suction fixation is not displaced.

Further, the suction force from the first suction port 2 is first measured in the first area 2a, then in the second area 2b, and finally in the third area 2b.
In the case where the insulating substrate 5 is deformed, it is possible to smoothly adsorb the insulating substrate 5 without leaving any deformation while releasing the deformation to the non-adsorbing region.

In this manner, the deformation of the insulating substrate 5 is sequentially transferred to the non-suction area, and finally collected near the outer peripheral portion. At this timing, the valve 15 of the blower 16 is turned off, and the second suction port 3 is turned off. The deformation is eliminated by releasing the suction force acting on the vicinity of the outer peripheral portion from.

At this time, after the suction force from the second suction port 3 is released, the switching valve 9 is operated, and the vacuum pump 10
Is preferably applied to the insulating substrate 5 through the third suction port 4.

Here, the position where the third suction port 4 is provided corresponds to the position where the relief plate installed on the printing roller first contacts the insulating substrate 5 and starts printing, as described above. If this is done, the location where vacuum breakage is most likely to occur will be firmly fixed by suction, and vacuum breakage will not occur during printing.

As described above, after the insulating substrate 5 is suction-fixed, high-precision positioning is performed by using an alignment mark formed on the insulating substrate 5 using a CCD camera or the like.

Next, the stage 1 moves to the print processing position for printing the alignment film. At this time, in conjunction with the movement of the stage 1, the blower unit connects the pipe to the first detachable unit and the second detachable unit. And detaching it.

Here, the suction force from the second suction port 3 has been released, but since the insulating substrate 5 has already been suction-fixed to the stage 1 in a flat state, the first suction port 2 and the second suction port are not fixed. The suction force acting through the suction port 4 of the nozzle 3 alone is sufficient, and the suction fixation does not come off during the treatment.

Next, when the alignment film is printed on the insulating substrate 5, the stage 1 itself becomes a transport mechanism, and moves to a position where the insulating substrate 5 is unloaded to the next step. Then, the switching valve 9 is operated to release the suction force acting on the insulating substrate 5 through the first suction port 2 and the third suction port 4, and the insulating substrate 5 is carried out from this apparatus to the next step. I do.

Here, the piping of the vacuum pump section is connected to the first communication passage 6, the second communication passage 7, and the third communication passage 8 which are stretchable.
The expansion and contraction of the fourth communication path 11 is linked to the movement of the stage 1.

In the present embodiment, the alignment film printing apparatus has been described. However, the present invention is applied to a resist coating apparatus, an exposure apparatus, a spacer spraying apparatus, a seal printing apparatus, and a transport mechanism for loading and unloading these apparatuses. The same effect can be obtained by using.

[0097]

As described above, according to the liquid crystal display element manufacturing method of the present invention, the first suction port for suction-fixing the central portion of the insulating substrate and the periphery of the first suction port are formed. By applying a suction force to the insulating substrate by the second suction port for suction-fixing the vicinity of the outer peripheral portion of the insulating substrate so as to surround the insulating substrate, even in the case of an insulating substrate that is easily deformed, the center of the insulating substrate can be removed. It is possible to surely fix by suction, and there is no possibility that the position of the insulating substrate is shifted or the suction and fixation is not shifted during various subsequent processes.

Further, since the suction force is applied to the second suction port by the blower, the air is sucked by the suction method using the blower having a large flow rate before the static electricity is generated. Therefore, it is possible to prevent the displacement of the insulating substrate during the suction fixing. In addition, when the insulating substrate is placed on the mounting table, the vacuum is not broken even if a part of the suction port is not closed by the insulating substrate due to the deformation of the insulating substrate, and the suction is interrupted. Never.

Further, by applying the suction force from the second suction port and then applying the suction force from the first suction port, the air between the insulating substrate and the mounting table can be efficiently removed.
The suction can be performed in the shortest time, and the amount of generated static electricity can be reduced by the short flow time of the air, so that the displacement of the insulating substrate at the time of suction fixing can be further prevented.

Further, even if the insulating substrate is deformed by dividing the first suction port into at least two regions and providing a time difference for each region to apply the suction force to the insulating substrate, Since the deformation is collected on the outer peripheral portion, the central portion of the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, after the suction force is applied from the first suction port, the suction force from the second suction port is released, and various treatments are performed to substantially eliminate the deformation collected on the outer peripheral portion. Thus, the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, by providing a third suction port for adsorbing and fixing the end of the insulating substrate outside the second suction port, even if the end of the insulating substrate remains deformed, the insulating property is maintained. The substrate can be suction-fixed to the mounting table in a smooth state up to the end of the substrate.

Further, at the time of printing the alignment film, the third suction port is provided so as to correspond to the position where the relief plate provided on the printing roller first comes into contact with the insulating substrate, so that a portion where vacuum breakdown is most likely to occur is formed. It is firmly fixed by adsorption, so that vacuum breakage does not occur during printing.

Further, after the suction force is applied from the second suction port and the suction force is applied from the first suction port, the suction force from the second suction port is released, and the suction force is applied from the third suction port. By performing various kinds of processing by applying the suction force, the deformation of the insulating substrate is collected at the outer peripheral portion and eliminated, and the insulating substrate can be suction-fixed to the mounting table in a smooth state to the end portion.

Further, even if the insulating substrate is made of plastic, it is possible to prevent the displacement during the suction fixing to the mounting table.

Further, even if the insulating substrate is made of glass having a thickness of 0.7 mm or less, it is possible to prevent the displacement during the suction fixing to the mounting table.

According to the liquid crystal display device manufacturing apparatus of the present invention,
By providing a first suction port for suction-fixing the central portion of the insulating substrate, and a second suction port for suction-fixing the vicinity of the outer peripheral portion of the insulating substrate so as to surround the periphery of the first suction port, Even in the case of an insulating substrate that is easily deformed, the central part of the insulating substrate can be securely fixed by suction, and the position of the insulating substrate shifts during the various subsequent processes, or the suction fixing is lost. There is no.

Further, since the suction force is applied to the second suction port by the blower, air is suctioned by a suction method using a blower having a large flow rate before static electricity is generated. Therefore, the amount of generated static electricity is significantly reduced. Therefore, it is possible to prevent the displacement of the insulating substrate during the suction fixing. In addition, when the insulating substrate is placed on the mounting table, the vacuum is not broken even if a part of the suction port is not closed by the insulating substrate due to the deformation of the insulating substrate, and the suction is interrupted. Never.

Furthermore, since the piping from the blower to the second suction port is provided with a desorption mechanism, it is not necessary to perform piping over a long distance in consideration of the fact that the mounting table moves during processing after suction and fixing.

Further, the first suction port is divided into at least two regions, and a time difference is provided for each of the regions to apply a suction force to the insulating substrate, so that even if the insulating substrate is deformed. Since the deformation is collected on the outer peripheral portion, the central portion of the insulating substrate can be fixed by suction to the mounting table in a smooth state.

Further, since the first suction port and the second suction port can independently control the suction force,
Deformation collected on the outer peripheral portion is almost eliminated, and the insulating substrate can be suction-fixed to the mounting table in a smooth state.

Further, by providing a third suction port on the outside of the second suction port for suction-fixing the end of the insulating substrate, even if the end of the insulating substrate remains deformed, the insulating property is maintained. The substrate can be suction-fixed to the mounting table in a smooth state up to the end of the substrate.

Further, in the case of the alignment film printing apparatus, the third suction port is provided in correspondence with the position where the relief plate provided on the printing roller first comes into contact with the insulating substrate, so that the most vacuum breaking is performed. Thus, a portion where the ink is likely to occur is firmly fixed by suction, and no vacuum break occurs during printing.

Further, since the first suction port, the second suction port, and the third suction port can independently control the suction force, the deformation of the insulating substrate is collected at the outer peripheral portion to be eliminated, and The substrate can be suction-fixed to the mounting table in a smooth state up to the end of the flexible substrate.

[Brief description of the drawings]

FIG. 1 is a plan view showing a stage and an insulating substrate according to an embodiment.

FIG. 2 is a cross-sectional view showing a stage and an insulating substrate in a state where piping of a blower is connected.

FIG. 3 is a cross-sectional view showing a stage and an insulating substrate in a state where a pipe of a blower is cut off.

FIG. 4 is a plan view showing a conventional stage and a glass substrate mounted on the stage.

FIG. 5 is a cross-sectional view showing a conventional stage and a glass substrate mounted on the stage.

[Explanation of symbols]

 Reference Signs List 1 stage (mounting table) 2 first suction port 2a first area 2b second area 2c third area 3 second suction port 4 third suction port 5 insulating substrate 6 first communication path 7 Second communication path 8 Third communication path 9 Switching valve 10 Vacuum pump 11 Fourth communication path 12 Fifth communication path 13 First detachable part 14 Second detachable part 15 Valve 16 Blower 51 Glass substrate 52 Mounting Mounting table (stage) 53 Suction port 54 Communication path 55 Vacuum pump

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toru Sakuwa 22-22 Nagaikecho, Abeno-ku, Osaka City, Osaka Inside (72) Inventor Makoto Iwamoto 22-22 Nagaikecho, Abeno-ku, Osaka City, Osaka F-term (for reference) 2H088 FA02 FA03 FA17 FA30 HA01 HA03 MA20 2H090 HC06 HC18 JB02 MB02

Claims (18)

[Claims] An insulating substrate is fixed on a mounting table having a flat mounting surface on which a plurality of suction ports are opened by applying suction force through the suction ports, and various processes are performed on the insulating substrate. In the method of manufacturing a liquid crystal display element to be performed, a first suction port for suction-fixing a central portion of the insulating substrate, and a suction portion near an outer peripheral portion of the insulating substrate so as to surround the periphery of the first suction port. A method for producing a liquid crystal display element, wherein a suction force is applied to the insulating substrate by the second suction port to perform various processes while fixing the insulating substrate. 2. The method according to claim 1, wherein the second suction port exerts a suction force by a blower. 3. The liquid crystal display device according to claim 1, wherein after the suction force is applied from the second suction port, the suction force is applied from the first suction port. Production method. 4. The liquid crystal display according to claim 3, wherein the first suction port is divided into at least two regions, and a time difference is provided for each of the regions to apply a suction force to the insulating substrate. Device manufacturing method. 5. The method according to claim 3, wherein after applying the suction force from the first suction port, the suction force from the second suction port is released and various processes are performed. 5. The method for manufacturing a liquid crystal display element according to item 4. 6. The liquid crystal display device according to claim 1, further comprising a third suction port provided outside the second suction port for suction-fixing an end of the insulating substrate. Production method. 7. The printing apparatus according to claim 6, wherein the third suction port is provided in correspondence with a position where a relief plate provided on a printing roller first contacts the insulating substrate when the alignment film is printed. Method for manufacturing a liquid crystal display element. 8. After the suction force is applied from the second suction port and the suction force is applied from the first suction port, the suction force from the second suction port is released and the third suction port is released. 8. The method for manufacturing a liquid crystal display device according to claim 6, wherein various treatments are performed by applying an attraction force from the attraction port. 9. The method according to claim 1, wherein the insulating substrate is made of plastic. 10. The apparatus according to claim 1, wherein the insulating substrate is made of glass having a thickness of 0.7 mm or less.
The manufacturing method of the liquid crystal display element described in. 11. A mounting table having a flat mounting surface on which an insulating substrate is mounted, and a plurality of suction ports provided on the mounting surface, wherein suction force is applied through the suction port. In a liquid crystal display element manufacturing apparatus for fixing the insulating substrate and performing various processes on the insulating substrate, a first suction port for suction-fixing a central portion of the insulating substrate, A second suction port for adsorbing and fixing the periphery of the insulating substrate so as to surround the periphery thereof. 12. The liquid crystal display device manufacturing apparatus according to claim 11, wherein the second suction port exerts a suction force by a blower. 13. The piping from the blower to the second suction port is provided with a desorption mechanism.
3. The liquid crystal display element manufacturing apparatus according to 2. 14. The suction port according to claim 11, wherein the first suction port is divided into at least two regions, and a time difference is provided for each of the regions to apply a suction force to the insulating substrate. 14. An apparatus for manufacturing a liquid crystal display element according to item 13. 15. The liquid crystal display device manufacturing apparatus according to claim 11, wherein the first suction port and the second suction port can independently control a suction force. 16. The liquid crystal display device according to claim 11, further comprising a third suction port provided outside the second suction port for suction-fixing an end of the insulating substrate. apparatus. 17. In the case of an alignment film printing apparatus, the third suction port is provided so as to correspond to a position where a relief plate installed on a printing roller first contacts the insulating substrate. The liquid crystal display element manufacturing apparatus according to claim 16, wherein 18. The suction port according to claim 16, wherein the first suction port, the second suction port, and the third suction port can independently control a suction force.
8. The liquid crystal display element manufacturing apparatus according to 7.