JP2000009791A - Bias power circuit for semiconductor testing device - Google Patents

Bias power circuit for semiconductor testing device

Info

Publication number
JP2000009791A
JP2000009791A JP10177878A JP17787898A JP2000009791A JP 2000009791 A JP2000009791 A JP 2000009791A JP 10177878 A JP10177878 A JP 10177878A JP 17787898 A JP17787898 A JP 17787898A JP 2000009791 A JP2000009791 A JP 2000009791A
Authority
JP
Japan
Prior art keywords
current
power supply
test
amplifier
current amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10177878A
Other languages
Japanese (ja)
Other versions
JP3436138B2 (en
Inventor
Takahiro Nagata
孝弘 永田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP17787898A priority Critical patent/JP3436138B2/en
Priority to KR1019990021521A priority patent/KR20000006076A/en
Publication of JP2000009791A publication Critical patent/JP2000009791A/en
Application granted granted Critical
Publication of JP3436138B2 publication Critical patent/JP3436138B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver

Abstract

PROBLEM TO BE SOLVED: To carry out a test, without generating a power voltage variation at an alternating testing of a device to be measured. SOLUTION: A bias power circuit for a semiconductor testing device is constituted by a body 6, having a power amplifier 3 supplying a power source to a device 10 to be measured, a first current amplifier 4 which amplifies a current fed from the power source and feeding it to the device 10 to be measured, and a current measuring means 5 for measuring a power current fed by the first current amplifier 4, and a test head 11 having a second current amplifier 7 for amplifying a current fed from the power source and switching means 8, 9 switching a power supply from the first current amplifier 4 and a power supply from the second current amplifier 7.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、ＩＣテスターでの
デバイス試験において、デバイスの交流試験及び直流試
験を行う場合に用いる半導体試験装置のバイアス電源回
路に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bias power supply circuit of a semiconductor test apparatus used for performing an AC test and a DC test of a device in a device test using an IC tester.

【０００２】[0002]

【従来の技術】従来技術による半導体試験装置用バイア
ス電源回路として、図２に示すようなものがあった。図
中の１は制御回路、２はＤＡ変換回路、３は増幅器、４
は電流増幅器、５は電流測定回路である。前記の１〜５
は全て試験装置の本体６に内蔵されている。１０は被測
定デバイス（以下ＤＵＴとする）、１１はこのＤＵＴ１
０のすぐそばに設けられて、ＤＵＴ１０にテストピン等
を接続させるためのテストヘッドである。ＤＵＴ１０の
試験は、デバイスの電源電流を測定する直流試験と、機
能・動作を試験する交流試験とに分けられる。どちらの
試験時にもＤＵＴ１０に電源が供給されるが、従来技術
では、この電源は、直流試験および交流試験で共通に使
用される電流増幅器４によって供給されていた。そし
て、直流試験においては、ＤＵＴ１０に供給される電源
電流が電流測定回路５によって測定され、この測定値が
デジタル値に変換され、制御回路１に送られていた。2. Description of the Related Art FIG. 2 shows a prior art bias power supply circuit for a semiconductor test apparatus. In the figure, 1 is a control circuit, 2 is a DA conversion circuit, 3 is an amplifier, 4
, A current amplifier; and 5, a current measurement circuit. 1-5 above
Are all incorporated in the main body 6 of the test apparatus. Reference numeral 10 denotes a device under test (hereinafter referred to as a DUT), and reference numeral 11 denotes the DUT
0 is a test head provided for connecting test pins and the like to the DUT 10. The test of the DUT 10 is divided into a DC test for measuring the power supply current of the device and an AC test for testing the function and operation. Power is supplied to the DUT 10 in both tests, but in the prior art, this power was supplied by the current amplifier 4 commonly used in the DC test and the AC test. Then, in the DC test, the power supply current supplied to the DUT 10 was measured by the current measuring circuit 5, and the measured value was converted to a digital value and sent to the control circuit 1.

【０００３】[0003]

【発明が解決しようとする課題】しかし、上記の方法で
は、電流増幅器４とテストヘッド１１が数メートル離れ
ているために、接続線路の抵抗値が大きく、交流試験等
の急激に電源電流が変動する場合に、ＤＵＴ１０との接
続点での電源電圧レベルが変動してしまうという問題が
あった。この問題を解決したものが図３に示す構成の装
置である。図３の装置では電源回路全体をテストヘッド
に内蔵させているため、ＤＵＴ１０と電源回路の接続線
路は短く、その抵抗値は小さい。従って、図２の構成で
起こるような電源電圧レベルの変動は発生しない。しか
し、図３の方法では、テストヘッドの回路規模が大きく
なり、テストヘッドが大きくなってしまうという問題が
あった。However, in the above method, since the current amplifier 4 and the test head 11 are separated from each other by several meters, the resistance value of the connection line is large, and the power supply current fluctuates rapidly in an AC test or the like. In this case, there is a problem that the power supply voltage level at the connection point with the DUT 10 fluctuates. An apparatus having the configuration shown in FIG. 3 solves this problem. In the apparatus of FIG. 3, since the entire power supply circuit is built in the test head, the connection line between the DUT 10 and the power supply circuit is short, and its resistance value is small. Therefore, the power supply voltage level does not fluctuate as in the configuration of FIG. However, the method of FIG. 3 has a problem that the circuit size of the test head becomes large and the test head becomes large.

【０００４】本発明は、上記の問題を解決するためにな
されたもので、テストヘッドの回路規模を抑えながら、
デバイスの交流試験時に電源電圧変動を発生させずに試
験を行うことができる半導体試験装置用バイアス電源回
路を提供するものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and has been made while suppressing the circuit scale of a test head.
It is an object of the present invention to provide a bias power supply circuit for a semiconductor test apparatus that can perform a test without causing a power supply voltage fluctuation during an AC test of a device.

【０００５】[0005]

【課題を解決するための手段】請求項１に記載の発明
は、被測定デバイスに電源を供給する電源と、この電源
から供給される電流を増幅し、被測定デバイスに供給す
る第一の電流増幅器と、この第一の電流増幅器によって
供給される電源電流を測定する電流測定手段とを有する
本体と、前記電源から供給される電流を増幅する第二の
電流増幅器と、前記第一の電流増幅器からの電源供給
と、前記第二の電流増幅器からの電源供給とを切り替え
る切り替え手段とを有するテストヘッドとからなる半導
体試験装置用バイアス電源回路である。According to a first aspect of the present invention, there is provided a power supply for supplying power to a device under test, and a first current supplied to the device under test by amplifying a current supplied from the power supply. An amplifier, a main body having current measuring means for measuring a power supply current supplied by the first current amplifier, a second current amplifier for amplifying a current supplied from the power supply, and the first current amplifier And a test head having switching means for switching between the power supply from the second current amplifier and the power supply from the second current amplifier.

【０００６】切り替え手段によって第一の電流増幅器か
らの電源供給に切り替えて直流試験を行えば、第一の電
流増幅器の後段に設けられた電流測定手段によって電源
電流が測定され、この測定された電源電流が直接被測定
デバイスに供給されるので、電源電流を正確に測定する
ことができる。切り替え手段によって第二の電流増幅器
からの電源供給に切り替えて交流試験を行えば、被測定
デバイスのすぐ近くにあるテストヘッド内に設けられた
第二の電流増幅器から電源が供給されるので、電源電流
が変化しても電源供給線路における電圧変動が小さく、
適正な電源条件で正確な交流特性を測定することができ
る。また、切り替え手段によって電源供給の経路を切り
替えるので、テストヘッド内に全ての電源回路を設ける
必要がなく、テストヘッドが大きくなってしまうことが
ない。[0006] If a DC test is performed by switching to the power supply from the first current amplifier by the switching means, the power supply current is measured by the current measuring means provided at the subsequent stage of the first current amplifier. Since the current is supplied directly to the device under test, the power supply current can be accurately measured. If the AC test is performed by switching to the power supply from the second current amplifier by the switching means, the power is supplied from the second current amplifier provided in the test head in the immediate vicinity of the device under test. Even if the current changes, the voltage fluctuation on the power supply line is small,
Accurate AC characteristics can be measured under appropriate power supply conditions. Further, since the power supply path is switched by the switching means, it is not necessary to provide all the power supply circuits in the test head, and the test head does not become large.

【０００７】[0007]

【発明の実施の形態】本発明の一実施形態である半導体
試験装置の構成を図１に示す。この半導体試験装置は、
被測定デバイスのすぐそばに設けられ、この被測定デバ
イスにテストピン等を接続させるためのテストヘッド１
１と、このテストヘッド１１から数メートル離れた所に
設置された本体６とから構成されている。本体６は、制
御回路１、ＤＡ変換回路２、増幅器３、電流増幅器４、
電流測定回路５を内蔵している。制御回路１は、ＤＡ変
換回路２および電流測定回路５に接続されている。増幅
器３は、前記ＤＡ変換回路２のアナログ出力が入力さ
れ、これを電圧増幅する。この電圧増幅された出力は、
電流増幅器４に入力され、電流増幅される。この電流増
幅された出力は、電源ライン１２を経てテストヘッド１
１に供給されるが、この途中で電流測定回路５に入力さ
れ、その電流値が測定される。測定結果は、デジタル値
に変換され、前記制御回路１に入力される。FIG. 1 shows a configuration of a semiconductor test apparatus according to an embodiment of the present invention. This semiconductor test equipment
A test head 1 provided immediately adjacent to the device under test for connecting test pins and the like to the device under test.
1 and a main body 6 installed several meters away from the test head 11. The main body 6 includes a control circuit 1, a DA conversion circuit 2, an amplifier 3, a current amplifier 4,
A current measuring circuit 5 is built in. The control circuit 1 is connected to the DA conversion circuit 2 and the current measurement circuit 5. The amplifier 3 receives the analog output of the DA conversion circuit 2 and amplifies the voltage. This voltage-amplified output is
The current is input to the current amplifier 4 and the current is amplified. The amplified output is supplied to the test head 1 via the power supply line 12.
1 is supplied to the current measuring circuit 5 on the way, and the current value is measured. The measurement result is converted into a digital value and input to the control circuit 1.

【０００８】テストヘッド１１は、電流増幅器７、スイ
ッチ８、９を内蔵している。電流増幅器７は、交流試験
を行うときに使用される。スイッチ８、９は、前記電流
増幅器４と電流増幅器７とを切り替える。電流増幅器４
あるいは電流増幅器７から供給される電源は、テストヘ
ッド１１に接続されたＤＵＴ１０に供給される。The test head 11 has a built-in current amplifier 7 and switches 8 and 9. The current amplifier 7 is used when performing an AC test. Switches 8 and 9 switch between the current amplifier 4 and the current amplifier 7. Current amplifier 4
Alternatively, the power supplied from the current amplifier 7 is supplied to the DUT 10 connected to the test head 11.

【０００９】次に、デバイスの試験における装置の動作
を説明する。スイッチ８がオフ、スイッチ９がオンされ
た状態で、ＤＵＴ１０の直流試験が行われる。直流試験
とは、被測定デバイスの電源電流を測定する試験なの
で、電流測定回路５を経て出力された電源ライン１２が
スイッチ９を経て直接ＤＵＴ１０へ供給される。すなわ
ち、ＤＵＴ１０は本体６に内蔵された電流増幅器４から
電源電流が供給される。電流増幅器４によって供給され
た電流は、電流測定回路５によって測定される。この測
定値は、デジタル値に変換され、制御回路１に送られ
る。制御回路１では、送られてきたデジタル値と、制御
回路１に内蔵されている上限値および下限値との比較が
行われ、デバイスが正常か否かが試験される。Next, the operation of the apparatus in a device test will be described. With the switch 8 turned off and the switch 9 turned on, a DC test of the DUT 10 is performed. Since the DC test is a test for measuring the power supply current of the device under test, the power supply line 12 output via the current measurement circuit 5 is supplied directly to the DUT 10 via the switch 9. That is, the power supply current is supplied to the DUT 10 from the current amplifier 4 built in the main body 6. The current supplied by the current amplifier 4 is measured by a current measuring circuit 5. This measured value is converted to a digital value and sent to the control circuit 1. The control circuit 1 compares the transmitted digital value with the upper limit value and the lower limit value built in the control circuit 1, and tests whether the device is normal or not.

【００１０】スイッチ８がオン、スイッチ９がオフされ
た状態で、ＤＵＴ１０の交流試験が行われる。交流試験
とは、被測定デバイスの機能・動作の試験なので、電源
電流の測定は行われないが、一方、デバイスを動作させ
るので試験中に電源電流が変動する。このため、ＤＵＴ
１０はテストヘッド１１に内蔵された電流増幅器７とス
イッチ８を経て接続され、この電流増幅器７から電源電
流が供給される。このとき、電源電流が変動しても、電
流増幅器７とＤＵＴ１０との間の電源供給線路は短く、
その抵抗値は低い。従って、この電源供給線路における
電圧降下は小さく、電圧変動も小さく抑えられる。With the switch 8 turned on and the switch 9 turned off, an AC test of the DUT 10 is performed. Since the AC test is a test of the function and operation of the device under test, the power supply current is not measured. On the other hand, since the device is operated, the power supply current fluctuates during the test. Therefore, DUT
Reference numeral 10 is connected to a current amplifier 7 built in the test head 11 via a switch 8, and a power supply current is supplied from the current amplifier 7. At this time, even if the power supply current fluctuates, the power supply line between the current amplifier 7 and the DUT 10 is short,
Its resistance is low. Therefore, the voltage drop in this power supply line is small, and the voltage fluctuation can be suppressed to be small.

【００１１】[0011]

【発明の効果】本発明は、被測定デバイスに電源を供給
する電源と、この電源から供給される電流を増幅し、被
測定デバイスに供給する第一の電流増幅器と、この第一
の電流増幅器によって供給される電源電流を測定する電
流測定手段とを有する本体と、前記電源から供給される
電流を増幅する第二の電流増幅器と、前記第一の電流増
幅器からの電源供給と、前記第二の電流増幅器からの電
源供給とを切り替える切り替え手段とを有するテストヘ
ッドとからなる半導体試験装置用バイアス電源回路なの
で、デバイスの交流試験において、試験されるデバイス
のすぐ近くに電源電流の供給源があるので、電源電流が
変化しても電源供給線路における電圧変動が小さい。従
って、適正な電源条件で正確な交流特性を測定すること
ができる。According to the present invention, there are provided a power supply for supplying power to a device under test, a first current amplifier for amplifying a current supplied from the power supply and supplying the same to the device under test, and a first current amplifier. A main body having current measuring means for measuring a power supply current supplied by the power supply, a second current amplifier for amplifying a current supplied from the power supply, a power supply from the first current amplifier, And a test head having switching means for switching between the power supply from the current amplifier and the power supply from the current amplifier. Therefore, even if the power supply current changes, the voltage fluctuation on the power supply line is small. Therefore, accurate AC characteristics can be measured under appropriate power supply conditions.

【図面の簡単な説明】[Brief description of the drawings]

【図１】 本発明によるバイアス電源回路の構成図。FIG. 1 is a configuration diagram of a bias power supply circuit according to the present invention.

【図２】 第一の従来技術を示した構成図。FIG. 2 is a configuration diagram showing a first conventional technique.

【図３】 第二の従来技術を示した構成図。FIG. 3 is a configuration diagram showing a second conventional technique.

【符号の説明】[Explanation of symbols]

１ 制御回路 ２ ＤＡ変換回路 ３ 増幅器 ４ 電流増幅器 ５ 電流測定回路 ６ 本体 ７ 電流増幅器 ８ スイッチ ９ スイッチ １０ ＤＵＴ １１ テストヘッド １２ 電源ライン DESCRIPTION OF SYMBOLS 1 Control circuit 2 DA conversion circuit 3 Amplifier 4 Current amplifier 5 Current measurement circuit 6 Main body 7 Current amplifier 8 Switch 9 Switch 10 DUT 11 Test head 12 Power supply line

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】 被測定デバイスに電源を供給する電源
と、 この電源から供給される電流を増幅し、被測定デバイス
に供給する第一の電流増幅器と、 この第一の電流増幅器によって供給される電源電流を測
定する電流測定手段とを有する本体と、 前記電源から供給される電流を増幅する第二の電流増幅
器と、 前記第一の電流増幅器からの電源供給と、前記第二の電
流増幅器からの電源供給とを切り替える切り替え手段と
を有するテストヘッドとからなる半導体試験装置用バイ
アス電源回路。1. A power supply for supplying power to a device under test, a first current amplifier for amplifying a current supplied from the power supply and supplying the same to the device under test, and a power supply provided by the first current amplifier A main body having current measuring means for measuring a power supply current, a second current amplifier for amplifying a current supplied from the power supply, a power supply from the first current amplifier, and a power supply from the second current amplifier. A biasing circuit for a semiconductor test apparatus, comprising: a test head having switching means for switching between the power supply of the semiconductor test device and the test head.
JP17787898A 1998-06-24 1998-06-24 Bias power supply circuit for semiconductor test equipment Expired - Fee Related JP3436138B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17787898A JP3436138B2 (en) 1998-06-24 1998-06-24 Bias power supply circuit for semiconductor test equipment
KR1019990021521A KR20000006076A (en) 1998-06-24 1999-06-10 Bias power supply circuit for use in a semiconductor testing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17787898A JP3436138B2 (en) 1998-06-24 1998-06-24 Bias power supply circuit for semiconductor test equipment

Publications (2)

Publication Number Publication Date
JP2000009791A true JP2000009791A (en) 2000-01-14
JP3436138B2 JP3436138B2 (en) 2003-08-11

Family

ID=16038646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17787898A Expired - Fee Related JP3436138B2 (en) 1998-06-24 1998-06-24 Bias power supply circuit for semiconductor test equipment

Country Status (2)

Country Link
JP (1) JP3436138B2 (en)
KR (1) KR20000006076A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102180582B1 (en) 2020-05-29 2020-11-18 (주)에이블리 System and method for cognizing current in semiconductor test equipment

Also Published As

Publication number Publication date
KR20000006076A (en) 2000-01-25
JP3436138B2 (en) 2003-08-11

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