KR20000006076A - Bias power supply circuit for use in a semiconductor testing system - Google Patents

Bias power supply circuit for use in a semiconductor testing system Download PDF

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Publication number
KR20000006076A
KR20000006076A KR1019990021521A KR19990021521A KR20000006076A KR 20000006076 A KR20000006076 A KR 20000006076A KR 1019990021521 A KR1019990021521 A KR 1019990021521A KR 19990021521 A KR19990021521 A KR 19990021521A KR 20000006076 A KR20000006076 A KR 20000006076A
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KR
South Korea
Prior art keywords
current
power supply
test
current amplifier
amplifier
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KR1019990021521A
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Korean (ko)
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나가타다카히로
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나까무라 쇼오
안도덴키 가부시키가이샤
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Publication of KR20000006076A publication Critical patent/KR20000006076A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver

Abstract

PURPOSE: Bias power circuit for testing semiconductor apparatus is provided to overcome the problems of previous testing equipments dropping phenomena of power voltage level by the long distance between current amplifier and test head, and to make the size of test head. CONSTITUTION: The bias power circuit for testing semiconductor apparatus comprises power supply giving measuring target device, first current amplifier sending magnified current from the supplied power, body section having gauging the current of supplied power by first current amplifier, second current amplifier magnifying the previous stage current, and test head transmitting the current of the second current amplifier by modification section.

Description

반도체시험장치용 바이어스전원회로{BIAS POWER SUPPLY CIRCUIT FOR USE IN A SEMICONDUCTOR TESTING SYSTEM}Bias power circuit for semiconductor test equipment {BIAS POWER SUPPLY CIRCUIT FOR USE IN A SEMICONDUCTOR TESTING SYSTEM}

본 발명은, IC 테스터에서의 디바이스시험에 있어서, 디바이스의 교류시험 및 직류시험을 행하는 경우에 사용하는 반도체시험장치의 바이어스전원회로에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bias power supply circuit of a semiconductor test apparatus to be used in the case of performing an alternating current test and a direct current test of a device in a device test in an IC tester.

종래 기술에 의한 반도체시험장치용 바이어스전원회로로서, 도 2에 나타내는 바와 같은 것이 있었다. 도면중의 (1)은 제어회로, (2)는 DA변환회로, (3)은 증폭기, (4)는 전류증폭기, (5)는 전류측정회로이다. 상기의 1 내지 5는 모두 시험장치의 본체(6)에 내장되어 있다. (1O)은 피측정 디바이스(이하 DUT라고 한다), (11)은 이 DUT(1O)의 바로 옆에 설치되고, DUT(1O)에 테스트핀 등을 접속시키기 위한 테스트헤드이다.As a bias power supply circuit for a semiconductor test apparatus according to the prior art, there existed something as shown in FIG. In the figure, reference numeral 1 denotes a control circuit, reference numeral 2 denotes a DA conversion circuit, reference numeral 3 denotes an amplifier, reference numeral 4 denotes a current amplifier, and reference numeral 5 denotes a current measurement circuit. All of said 1-5 are built in the main body 6 of a test apparatus. Numeral 10 denotes a device under test (hereinafter referred to as DUT), and 11 is provided next to the DUT 10, and is a test head for connecting a test pin or the like to the DUT 10.

DUT(1O)의 시험은, 디바이스의 전원전류를 측정하는 직류시험과, 기능·동작을 시험하는 교류시험으로 나누어진다. 어느 쪽의 시험시에도 DUT(1O)에 전원이 공급되지만, 종래 기술에서는, 이 전원은 직류시험 및 교류시험에 공통으로 사용되는 전류증폭기(4)에 의해서 공급되고 있었다.The test of the DUT 10 is divided into a direct current test for measuring a power supply current of a device and an alternating current test for a function and operation. Although power was supplied to the DUT 10 during both tests, in the prior art, this power was supplied by the current amplifier 4 which is commonly used for the direct current test and the alternating current test.

그리고, 직류시험에 있어서는, DUT(1O)에 공급되는 전원전류가 전류측정회로(5)에 의해 측정되고, 이 측정치가 디지털값으로 변환되어, 제어회로(1)에 보내지고 있었다.In the direct current test, the power supply current supplied to the DUT 10 is measured by the current measuring circuit 5, and the measured value is converted into a digital value and sent to the control circuit 1.

그러나, 상기의 방법에서는, 전류증폭기(4)와 테스트 헤드(11)가 수 미터 떨어져 있기 때문에, 접속선로의 저항치가 크고, 교류시험 등의 급격히 전원전류가 변동하는 경우에, DUT(1O)와의 접속점에서의 전원전압레벨이 변동하여 버린다고 하는 문제가 있었다.However, in the above method, since the current amplifier 4 and the test head 11 are several meters apart, when the resistance value of the connection line is large and the power supply current suddenly fluctuates, such as an AC test, the DUT 10 There was a problem that the power supply voltage level at the connection point was changed.

이 문제를 해결한 것이 도 3에 나타내는 구성의 장치이다. 도 3의 장치에서는 전원회로전체를 테스트 헤드에 내장시키고 있기 때문에, DUT(1O)와 전원회로의 접속선로는 짧고, 그 저항치는 작다. 따라서, 도 2의 구성에서 일어나는 바와 같은 전원전압레벨의 변동은 발생하지 않는다.It is an apparatus of the structure shown in FIG. 3 that solved this problem. In the apparatus of Fig. 3, since the entire power supply circuit is incorporated in the test head, the connection line between the DUT 10 and the power supply circuit is short and its resistance is small. Therefore, no change in the power supply voltage level as occurs in the configuration of FIG. 2 occurs.

그러나, 도 3의 방법에서는, 테스트헤드의 회로규모가 커지고, 테스트헤드가 커져 버린다고 하는 문제가 있었다.However, in the method of Fig. 3, there is a problem that the circuit size of the test head is increased and the test head is increased.

본 발명은, 상기의 문제를 해결하기 위해서 이루어진 것으로, 테스트헤드의 회로규모를 억제하면서, 디바이스의 교류시험시에 전원전압변동을 발생시키지 않고 시험을 행할 수 있는 반도체시험장치용 바이어스전원회로를 제공하는 것이다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a bias power supply circuit for a semiconductor test apparatus which can perform a test without suppressing a power supply voltage fluctuation during an AC test of a device while suppressing a circuit size of a test head. It is.

도 1은, 본 발명에 의한 바이어스전원회로의 구성도,1 is a configuration diagram of a bias power supply circuit according to the present invention;

도 2는, 제 1 종래 기술을 나타낸 구성도,2 is a configuration diagram showing a first prior art;

도 3은, 제 2 종래 기술을 나타낸 구성도이다.3 is a configuration diagram showing a second conventional technology.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

1 : 제어회로 2 : DA변환회로1: control circuit 2: DA conversion circuit

3 : 증폭기 4 : 제 1 전류증폭기3: amplifier 4: first current amplifier

5 : 전류측정회로 6 : 본체5: Current measuring circuit 6: Main body

7 : 제 2 전류증폭기 8 : 스위치7 second current amplifier 8 switch

9 : 스위치 10 : DUT9: switch 10: DUT

11 : 테스트헤드 12 : 전원라인11 test head 12 power line

본 발명의 제 1 실시형태에 따르면, 피측정 디바이스에 전원을 공급하는 전원과, 이 전원으로부터 공급되는 전류를 증폭하고, 피측정 디바이스에 공급하는 제 1 전류증폭기와, 이 제 1 전류증폭기에 의해서 공급되는 전원전류를 측정하는 전류측정수단을 가지는 본체와, 상기 전원으로부터 공급되는 전류를 증폭하는 제 2 전류증폭기와, 상기 제 1 전류증폭기로부터의 전원공급과, 상기 제 2 전류증폭기로부터의 전원공급을 변환하는 변환수단을 가진 테스트헤드로 이루어지는 반도체시험장치용 바이어스전원회로가 제공된다.According to the first embodiment of the present invention, a power supply for supplying power to a device under measurement, a first current amplifier for amplifying and supplying a current supplied from the power supply to the device under measurement, and the first current amplifier A main body having current measuring means for measuring a supplied power current, a second current amplifier for amplifying a current supplied from the power supply, a power supply from the first current amplifier, and a power supply from the second current amplifier A bias power supply circuit for a semiconductor test apparatus is provided, which comprises a test head having a converting means for converting.

변환수단에 의해 제 1 전류증폭기로부터의 전원공급으로 변환하여 직류시험을 행하면, 제 1 전류증폭기의 후단에 설치된 전류측정수단에 의해서 전원전류가 측정되고, 이 측정된 전원전류가 직접 피측정 디바이스에 공급되기 때문에, 전원전류를 정확하게 측정할 수 있다.When a direct current test is performed by converting the power supply from the first current amplifier by the converting means, the power supply current is measured by the current measuring means provided at the rear end of the first current amplifier, and the measured power supply current is directly transmitted to the device under measurement. Since it is supplied, the power supply current can be measured accurately.

변환수단에 의해 제 2 전류증폭기로부터의 전원공급으로 변환하여 교류시험을 행하면, 피측정 디바이스가 바로 가까이에 있는 테스트헤드내에 설치된 제 2 전류증폭기로부터 전원이 공급되므로, 전원전류가 변화하여도 전원공급선로에 있어서의 전압변동이 작고, 적정한 전원조건에서 정확한 교류특성을 측정할 수 있다.When the AC test is performed by converting the power supply from the second current amplifier by the converting means, the power is supplied from the second current amplifier installed in the test head in which the device under measurement is immediately located, so that the power supply line changes even if the power current changes. The voltage fluctuations in the furnace are small and accurate AC characteristics can be measured under suitable power supply conditions.

또한, 변환수단에 의해서 전원공급의 경로를 변환하기 때문에, 테스트헤드내에 모든 전원회로를 설치할 필요가 없고, 테스트헤드가 커져 버리는 일이 없다.In addition, since the power supply path is switched by the conversion means, it is not necessary to provide all the power supply circuits in the test head, and the test head does not become large.

(실시예)(Example)

본 발명의 한 실시형태인 반도체시험장치의 구성을 도 1에 나타낸다. 이 반도체시험장치는, 피측정 디바이스의 바로 옆에 설치되고, 이 피측정 디바이스에 테스트 핀 등을 접속시키기 위한 테스트 헤드(11)와, 이 테스트 헤드(11)로부터 수 미터 떨어진 곳에 설치된 본체(6)로 구성되어 있다.The structure of the semiconductor test apparatus which is one Embodiment of this invention is shown in FIG. The semiconductor test apparatus is provided next to the device under test, the test head 11 for connecting a test pin or the like to the device under test, and the main body 6 provided a few meters away from the test head 11. It consists of).

본체(6)는, 제어회로(1), DA변환회로(2), 증폭기(3), 전류증폭기(4), 전류측정회로(5)를 내장하고 있다. 제어회로(1)는, DA변환회로(2) 및 전류측정회로(5)에 접속되어 있다. 증폭기(3)는, 상기 DA변환회로(2)의 아날로그출력이 입력되고, 이것을 전압증폭한다. 이 전압증폭된 출력은, 전류증폭기(4)에 입력되어, 전류증폭된다. 이 전류증폭된 출력은, 전원라인(12)을 지나서 테스트 헤드(11)에 공급되는데, 이 도중에 전류측정회로(5)에 입력되어, 그 전류치가 측정된다. 측정결과는 디지털값으로 변환되어, 상기 제어회로(1)에 입력된다.The main body 6 has a control circuit 1, a DA conversion circuit 2, an amplifier 3, a current amplifier 4, and a current measurement circuit 5. The control circuit 1 is connected to the DA conversion circuit 2 and the current measurement circuit 5. The amplifier 3 receives an analog output of the DA conversion circuit 2 and voltage-amplifies it. This voltage-amplified output is input to the current amplifier 4 and amplified. This current-amplified output is supplied to the test head 11 via the power supply line 12, and is input to the current measurement circuit 5 during this time, and the current value is measured. The measurement result is converted into a digital value and input to the control circuit 1.

테스트 헤드(11)는, 전류증폭기(7), 스위치(8,9)를 내장하고 있다. 전류증폭기(7)는, 교류시험을 행할 때에 사용된다. 스위치(8,9)는, 상기 전류증폭기(4)와 전류증폭기(7)를 변환한다.The test head 11 incorporates the current amplifier 7 and the switches 8 and 9. The current amplifier 7 is used when performing an alternating current test. The switches 8 and 9 switch between the current amplifier 4 and the current amplifier 7.

전류증폭기(4) 혹은 전류증폭기(7)로부터 공급되는 전원은, 테스트 헤드(11)에 접속된 DUT(1O)에 공급된다.The power supplied from the current amplifier 4 or the current amplifier 7 is supplied to the DUT 10 connected to the test head 11.

다음으로, 디바이스의 시험에 있어서의 장치의 동작을 설명한다.Next, the operation of the apparatus in the test of the device will be described.

스위치(8)가 오프, 스위치(9)가 온이 된 상태에서, DUT(10)의 직류시험이 행하여진다. 직류시험은, 피측정 디바이스의 전원전류를 측정하는 시험이므로, 전류측정회로(5)를 지나 출력된 전원라인(12)이 스위치(9)를 거쳐 직접 DUT(10)로 공급된다.In the state where the switch 8 is off and the switch 9 is on, the DC test of the DUT 10 is performed. Since the direct current test is a test for measuring the power supply current of the device under test, the power supply line 12 output through the current measurement circuit 5 is directly supplied to the DUT 10 via the switch 9.

즉, DUT(10)는 본체(6)에 내장된 전류증폭기(4)로부터 전원전류가 공급된다. 전류증폭기(4)에 의해서 공급된 전류는, 전류측정회로(5)에 의해 측정된다. 이 측정치는, 디지털값으로 변환되어, 제어회로(1)로 보내진다. 제어회로(1)에서는, 보내져 온 디지털값과, 제어회로(1)에 내장되어 있는 상한치 및 하한치의 비교가 행하여지고, 디바이스가 정상인지의 여부가 시험된다.That is, the DUT 10 is supplied with power current from the current amplifier 4 built in the main body 6. The current supplied by the current amplifier 4 is measured by the current measuring circuit 5. This measured value is converted into a digital value and sent to the control circuit 1. In the control circuit 1, the sent digital value is compared with the upper limit value and the lower limit value built in the control circuit 1, and a test is made as to whether or not the device is normal.

스위치(8)가 온, 스위치(9)가 오프가 된 상태에서, DUT(10)의 교류시험이 행하여진다. 교류시험은, 피측정 디바이스의 기능·동작의 시험이므로, 전원전류의 측정은 행하여지지 않지만, 한편, 디바이스를 동작시키기 때문에 시험중에 전원전류가 변동한다.In the state where the switch 8 is on and the switch 9 is off, the AC test of the DUT 10 is performed. Since the AC test is a test of the function and operation of the device under test, the power supply current is not measured. On the other hand, the power supply current fluctuates during the test because the device is operated.

이 때문에, DUT(10)는 테스트 헤드(11)에 내장된 전류증폭기(7)와 스위치(8)를 지나서 접속되고, 이 전류증폭기(7)로부터 전원전류가 공급된다. 이 때, 전원전류가 변동하여도, 전류증폭기(7)와 DUT(10)와의 사이의 전원공급선로는 짧고, 그 저항치는 낮다. 따라서, 이 전원공급선로에 있어서의 전압강하는 작고, 전압변동도 작게 억제된다.For this reason, the DUT 10 is connected through the current amplifier 7 built in the test head 11 and the switch 8, and a power supply current is supplied from the current amplifier 7. At this time, even if the power supply current varies, the power supply line between the current amplifier 7 and the DUT 10 is short and its resistance is low. Therefore, the voltage drop in this power supply line is small and voltage fluctuation is also suppressed small.

본 발명은, 피측정 디바이스에 전원을 공급하는 전원과, 이 전원으로부터 공급되는 전류를 증폭하여, 피측정 디바이스에 공급하는 제 1 전류증폭기와, 이 제 1 전류증폭기에 의해서 공급되는 전원전류를 측정하는 전류측정수단을 갖는 본체와,The present invention measures a power supply for supplying power to a device under test, a first current amplifier for amplifying a current supplied from the power supply, and supplying the current to the device under measurement, and a power supply current supplied by the first current amplifier. A main body having current measuring means for

상기 전원으로부터 공급되는 전류를 증폭하는 제 2 전류증폭기와, 상기 제 1 전류증폭기로부터의 전원공급과, 상기 제 2 전류증폭기로부터의 전원공급을 변환하는 변환수단을 갖는 테스트헤드로 이루어지는 반도체시험장치용 바이어스전원회로이므로, 디바이스의 교류시험에 있어서, 시험되는 디바이스의 바로 가까이에 전원전류의 공급원이 있기 때문에, 전원전류가 변화하여도 전원공급선로에 있어서의 전압변동이 작다. 따라서, 적정한 전원조건에서 정확한 교류특성을 측정할 수 있다.For a test head having a second current amplifier for amplifying a current supplied from the power supply, a test head having a power supply from the first current amplifier, and conversion means for converting a power supply from the second current amplifier. Since it is a bias power supply circuit, in the AC test of the device, since there is a supply source of the power current immediately near the device to be tested, the voltage fluctuation in the power supply line is small even if the power supply current changes. Therefore, accurate AC characteristics can be measured under appropriate power supply conditions.

Claims (1)

피측정 디바이스에 전원을 공급하는 전원과,A power supply for supplying power to the device under test, 이 전원으로부터 공급되는 전류를 증폭하여, 피측정 디바이스에 공급 하는 제 1 전류증폭기와,A first current amplifier for amplifying the current supplied from this power supply and supplying it to the device under measurement, 이 제 1 전류증폭기에 의해서 공급되는 전원전류를 측정하는 전류측정수단을 갖는 본체와,A main body having current measuring means for measuring a power supply current supplied by the first current amplifier, 상기 전원으로부터 공급되는 전류를 증폭하는 제 2 전류증폭기와,A second current amplifier for amplifying a current supplied from the power supply; 상기 제 1 전류증폭기로부터의 전원공급과, 상기 제 2 전류증폭기로부터의 전원공급을 변환하는 변환수단을 갖는 테스트헤드로 이루어지는 반도체시험장치용 바이어스전원회로.A bias power supply circuit for a semiconductor test apparatus, comprising: a test head having power supply from the first current amplifier and conversion means for converting power supply from the second current amplifier.
KR1019990021521A 1998-06-24 1999-06-10 Bias power supply circuit for use in a semiconductor testing system KR20000006076A (en)

Applications Claiming Priority (2)

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JP177878 1998-06-24
JP17787898A JP3436138B2 (en) 1998-06-24 1998-06-24 Bias power supply circuit for semiconductor test equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102180582B1 (en) 2020-05-29 2020-11-18 (주)에이블리 System and method for cognizing current in semiconductor test equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102180582B1 (en) 2020-05-29 2020-11-18 (주)에이블리 System and method for cognizing current in semiconductor test equipment

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