JP2000005887A - Laser printing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize a printing time and a facility cost of laser printing, and prevent displacement of a printing position. SOLUTION: Laser lights oscillated from an oscillator 12 are branched into the laser to be passed and that to be reflected by a half mirror 10, and laser printing is carried out on two faces, namely a top face A and a side face B of an object by the branched laser lights. Thereby, since plural faces of the object are simultaneously printed by using only one laser printing device, the printing time can be shortened and also space for installing the laser printing device and a facility cost can be small. Furthermore, rotation of the printing object is not required, and displacement of a printing position caused by the rotation can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking device for marking an object with a laser beam.

[0002]

2. Description of the Related Art Conventionally, as described in Japanese Patent Application Laid-Open No. 5-245662, necessary information such as characters and figures is stamped on a semiconductor device by a laser beam.

[0003] Further, in the case where necessary items are stamped on a plurality of surfaces of an object such as a semiconductor device using a laser, a method of sequentially stamping each surface with one laser marking device, There was a method of stamping each surface with a stamping device.

[0004] First, two laser marking devices are used to print an object.
The method of stamping on the surface in order is shown. FIG. 10 is a perspective view showing a case where one laser stamping device sequentially stamps two surfaces of an object. First, as shown in FIG. 10A, the top surface A of the object 50 is stamped by the laser stamping device 51. The laser marking device 51 includes an oscillator 52 that oscillates a laser beam.
And two galvanometer mirror units 53 and 54 having reflection mirrors 55 and 56, respectively. Then, the YAG laser beam oscillated from the oscillator 52 is transmitted to the two galvanometer mirror units 53 and 54 and the reflection mirror 5.
By shaking at a high speed according to steps 5 and 56, necessary items such as predetermined characters are stamped on the top surface A of the object 50. Next, FIG.
As shown in FIG. 1B, the object 50 is rotated by 90 degrees, and the two sides are stamped by marking the side surface B of the object 50 with the laser marking device 51 as in FIG.

[0005] However, in this method, since one laser stamping device stamps each surface of the object one by one, the stamping time is twice as long. Further, in order to rotate the target object by 90 degrees, there is a case where a displacement of a stamp position occurs when the target object is rotated.

Next, a method for marking an object by using two laser marking devices will be described. FIG. 11 shows two laser marking devices.
It is a perspective view which shows the case where an object is stamped using a stand. FIG. 11A shows two laser marking devices 6 at a certain timing.
Reference numerals 1 and 71 denote laser marking on each of two objects. As in FIG. 10, the laser marking device 61 has an oscillator 62 for outputting a laser beam, and two galvano mirror units 63 and 64 having reflection mirrors 65 and 66, respectively. Similarly, the laser marking device 71 also includes an oscillator 72 for outputting a laser beam, and two galvanometer mirror units 73 and 74 having reflection mirrors 75 and 76, respectively. First, FIG.
In (a), the necessary items are stamped on the top surface A of the object 60 by the laser marking device 61 in the same manner as in FIG. 1, and the side surface B of the object 70 is marked by the laser marking device 71.
The necessary items are stamped.

At the next timing, as shown in FIG. 11B, laser marking is performed on the top surface A of the object 80 by the laser marking device 61, and at the timing of FIG. The object 60 stamped on the top surface A is rotated by 90 degrees, and the laser marking device 71
Stamped by Therefore, one laser marking device 61
, Only the top surface of the object is marked, and only the side surface of the object is marked by the other laser marking device 71.

As described above, in the method of stamping an object with two laser stamping devices, the stamping time is shortened, but since two laser stamping devices are required, installation space and equipment investment costs are two. It takes twice as long. Also, after laser marking the top surface of the object with one laser marking device and then laser marking the side surface of the object with the other laser marking device, it is necessary to rotate the object by 90 degrees. In such a case, the stamp position may be shifted.

Similarly, in the case where three surfaces of an object are similarly stamped, if each surface is sequentially stamped by one laser stamping machine, the stamping time is three times the same as described above. At the same time, since the object needs to be rotated, a shift of the stamping position may occur.

Also, in the same procedure as shown in FIG.
When marking an object with two laser stamping machines, the marking time is shortened. However, since three laser stamping machines are required, installation space and equipment investment costs are tripled.
It is necessary to rotate the object, which may cause a displacement of the marking position.

[0011]

As described above, in the conventional marking device, it takes a long time to print the number of surfaces to be stamped on the object, or it is necessary to prepare laser marking devices for the number of surfaces to be stamped. As a result, there arises a problem that a lot of space and equipment investment for installing the laser marking device are required. Further, the position of the stamp may be shifted by rotating the object. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a laser stamping apparatus which has a small stamping time and equipment cost by laser stamping and has no displacement of the stamping position.

[0012]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a laser marking device for marking a plurality of surfaces of an object with a laser beam, wherein the laser beam is branched into a plurality of paths. Means for marking each surface of the object with each laser beam branched by the branching means.

The branching means is provided on the path of the oscillated laser light, and transmits a part of the laser light and reflects the remaining laser light at a predetermined angle to oscillate the laser light. Is a first half mirror that branches into two.

[0014] Further, a second laser beam for branching again one of the laser beams branched into two by the branching means.
And a half mirror.

Further, in a laser marking device for marking a surface of an object with a laser beam, a part of the laser beam is passed through a path of the oscillated laser beam and the remaining laser beam is directed at a predetermined angle. The laser light oscillated by being reflected by
A mirror including a half mirror part that branches, a total reflection mirror part that reflects all of the oscillated laser light at a predetermined angle, and a mirrorless part that does not have a mirror that passes the oscillated laser light. A switching section for switching the section is provided, and the laser beam passed through the mirror section switched by the switching section or reflected by the mirror section is used to seal the surface of the object.

Further, the apparatus is characterized in that it is provided with an opening / closing means for switching whether or not to block the path of the laser light incident on the surface of the object to be stamped.

[0017]

(Embodiment 1) FIG. 2 is a perspective view showing the structure of a laser marking device according to a first embodiment of the present invention. A laser oscillator 2 having an oscillator that oscillates;
It has a laser light emitting unit 3 provided in the laser oscillation direction of the laser oscillation unit 2 and a laser light emitting unit 4 provided below the laser oscillation unit 2.

FIG. 1 is a perspective view showing laser marking on an object by the laser marking device shown in FIG.
The order of laser marking will be described with reference to FIG. First, the laser light oscillated by the oscillator 12 in the laser oscillation unit 2 is:
The laser beam passes through a first half mirror 10 serving as a branching means provided on the path of laser light in the laser oscillation section 2, travels straight in the direction a, enters the laser light emitting unit 3 shown in FIG. The light is reflected by the mirror 10 at an angle of 90 degrees in the downward direction b, and is split into two light beams which enter the laser light emitting unit 4 shown in FIG. At this time, the output of the laser light oscillated by the oscillator 12 is split into two at a power of 50%.

The laser light emitting unit 3 blocks two X-axis and Y-axis galvano mirror units 13 and 14 having reflecting mirrors 15 and 16, respectively, and cuts off laser light from entering the laser light emitting unit 3. A shutter 21 is provided as opening / closing means for switching whether or not the laser light has passed. The laser light passing through the half mirror 10 and entering the laser light emitting unit 3 is controlled and driven by a control unit (not shown) as stored in advance. The light is reflected by the reflecting mirrors 15 and 16 of the X-axis and Y-axis galvano mirror units 13 and 14, respectively, and travels in the d direction.

Similarly, the laser light emitting unit 4 also includes two X-axis and Y-axis galvano mirror units 23 and 24 having reflecting mirrors 25 and 26, respectively. A shutter 22 is provided as opening / closing means for switching whether or not to shut off. Similarly, a laser beam reflected by the half mirror 10 at an angle of 90 degrees and incident on the laser light emitting unit 4 is also not shown. X controlled and driven as previously stored by
The light is reflected by the reflection mirrors 25 and 26 of the galvanometer mirror units 23 and 24 for the axes and the Y axis, respectively, and travels in the direction e.

By splitting the laser beam with the half mirror 10 in this manner, the laser marking can be performed simultaneously on two surfaces of the object only by using one laser marking device 1. And the cost of space and equipment for installing the laser marking device can be reduced. In addition, it is not necessary to rotate the object to be laser-marked, and it is possible to prevent a shift in the marking position due to the rotation.

The galvanomirror units 13 and 14 provided in the laser light emitting unit 3 and the galvanomirror units 23 and 24 provided in the laser light emitting unit 4 are provided.
Are controlled by different control programs, different characters can be stamped on each of the two surfaces of the object 20.

The shutters 21 and 22 are opened and closed to open and close the laser light emitting units 3 and 4 for laser light.
It is possible to switch whether or not the laser light is incident on the target 20 by, for example, closing the shutter 21 and blocking the laser from being incident on the top surface A of the target 20 so that the sealing is not performed. Only one of the side surfaces B can be stamped. (Embodiment 2) FIG. 3 is a perspective view showing a structure of a laser marking device according to a second embodiment of the present invention. The laser marking device 101 has a laser oscillation having an oscillator for oscillating, for example, a YAG laser beam. A laser emitting unit 103 provided in an inverted L-shape in the laser oscillation direction of the laser oscillation unit 102; and a laser emission unit 104 provided below the laser oscillation unit 102.

FIG. 4 is a perspective view showing laser marking on an object by the laser marking device shown in FIG. 3, and shows the order of laser marking on the object with reference to FIG.

First, the laser beam output from the oscillator 112 is branched by the first half mirror 110 into a laser beam that passes through the laser beam and travels straight in the i direction and a laser beam that reflects the laser beam in the downward j direction at an angle of 90 degrees. You. At this time, the light traveling straight in the i direction has a power of 1/3 of the laser light oscillated from the oscillator 112, and the light reflected in the j direction has a power of 2/3. The laser beam that has traveled straight in the i direction is totally reflected in the downward k direction at an angle of 90 degrees by the total reflection mirror 150 provided on the path, and is controlled and driven by a control unit (not shown) as stored in advance. Reflection mirrors 115 and 11 of galvanometer mirror units 113 and 114 for X axis and Y axis
The laser beam is reflected at 6 and travels in the direction g shown in FIG. 3, and predetermined necessary items such as characters are laser-printed on the side surface B of the object 160.

The laser light reflected in the downward j direction by the half mirror 110 passes through the second half mirror 111 and travels straight in the l direction, and the laser light reflects in the horizontal m direction at an angle of 90 degrees. And two branches. At this time, both the laser beam that travels straight in the 1 direction and the laser beam that reflects in the m direction have a power of １ ／ of the oscillated laser light. Then, the laser light reflected in the horizontal m direction is applied to the galvano mirror units 123 and 12 for the X-axis and the Y-axis, which are controlled and driven as previously stored by a control unit (not shown).
4 are respectively reflected by the reflection mirrors 125 and 126 of FIG.
Take a course in the direction f indicated by
Prescribed items such as characters are stamped with laser.

The laser light that has passed through the half mirror 111 and travels straight in the l direction is controlled by a control unit (not shown) in a controlled manner as previously stored, so that galvano mirror units 133 and 134 for the X and Y axes are used. Reflection mirrors 135, 1
The light is reflected at 36 and travels in the h direction shown in FIG. 3, and predetermined necessary items such as characters are laser-printed on the side surface C of the object 160.

At this time, a shutter 14 serving as an opening / closing means for switching whether or not to block the path of the laser light on each path of the laser light traveling in the k, l, and m directions.
1, 143, and 142 are provided. By not stamping the surface of the object 160 corresponding to the path of the laser beam whose path is blocked by the shutter, only one side of the object,
Laser marking can be performed only on the surface.

The oscillator 112 and the half mirror 11
3 are provided in the laser oscillation unit 102 shown in FIG. 3, and the galvanomirror unit 133 provided with the reflection mirror 135, the galvanomirror unit 134 provided with the reflection mirror 136, and the shutter 143 serve as the laser emission unit shown in FIG. It is provided in the unit 104.

A galvano mirror unit 123 having a total reflection mirror 150 and a reflection mirror 125, a galvano mirror unit 124 having a reflection mirror 126,
Laser light emitting unit 105 including shutter 142
A laser emitting unit 104 including a galvano mirror unit 113 having a reflecting mirror 115, a galvano mirror unit 114 having a reflecting mirror 116, and a shutter 141 is provided in the laser issuing unit 103 in FIG.

Thus, the half mirrors 110, 1
By dividing the laser beam into three beams at 11, the laser marking can be performed simultaneously on three surfaces of the object only by using one laser marking device 101, so that the marking time can be reduced and the laser marking device can be used. The installation space and equipment costs are small. In addition, it is not necessary to rotate the object to be laser-marked, and it is possible to prevent a shift in the marking position due to the rotation.

Further, by controlling and driving each of the galvanomirror units laser-printed on each surface of the object 160 with different control programs, different characters can be imprinted on each of the three surfaces of the object 160. (Embodiment 3) A laser marking device according to a third embodiment of the present invention will be described.

The present embodiment has the same configuration as that shown in FIG. 2 except that the half mirror 10 in the laser oscillation section 2 is divided into a half mirror section, a total reflection mirror section, and a mirrorless section. In that the mirror unit 206 can be switched to any one of three types.

FIG. 5 is a front view of a switching unit for switching the mirror unit, and FIG. 6 is a side view of the switching unit. 5 and 6, the same components are denoted by the same reference numerals. The lens holder 200 is provided with a mirror unit 206 including a half mirror unit 201, a total reflection mirror unit 202, and a non-mirror unit 203. The lens unit 200 is driven by a driving device 204 such as a pulse motor.
By sliding the laser beam left and right, the position at which the laser beam is incident can be changed to the half mirror unit 201, the total reflection mirror unit 202,
It is configured to switch to one of the mirrorless units 203. The lens holder 200 and the driving device 20
4 constitutes a switching unit 205.

Next, the laser marking on the object in each case is shown by switching the mirror section through which the laser beam passes.

First, the mirror 206 is the half mirror 2
14 shows laser marking on an object when the object is switched to 01. FIG. 7 is a configuration diagram showing laser marking on an object when the mirror unit is switched to the half mirror unit, and the same components as those in FIG. 1 are denoted by the same reference numerals. 1 is different from the mirror unit 20 shown in FIG.
6 is replaced. In FIG. 7, the half mirror 201 of the mirror 206 is provided on the path of the laser light output from the oscillator 12, so that the laser beam is applied to the top surface A and the side surface B of the object 20 similarly to FIG. The output of the light is split into 50% each and is incident and stamped.

Next, the mirror 206 is the total reflection mirror 2
2 shows laser marking on an object when switching to 02 is performed. FIG. 8 is a configuration diagram showing laser marking on an object when the mirror unit is switched to the total reflection mirror unit, and the same components as those in FIG. 1 are denoted by the same reference numerals.

The difference from FIG. 1 is that the half mirror 10 is replaced by the mirror unit 206 shown in FIG. In FIG. 8, since the total reflection mirror portion 202 of the mirror portion 206 is provided on the path of the laser light output from the oscillator 12, the laser light is 100% directed downward by the total reflection mirror 202 at an angle of 90 degrees. The reflected laser light is reflected by the reflecting mirrors 25 and 26 of the X-axis and Y-axis galvanometer mirror units 23 and 24 which are controlled and driven by a control unit (not shown) in advance, as in FIG. Each of them is reflected, and predetermined necessary items such as characters are laser-printed on the side surface B of the object 20. At this time, 100% of the output of the laser beam output from the oscillator 12
And is laser-marked.

Next, the mirror unit 206 is moved to the non-mirror unit 20.
3 shows laser marking on an object when the mode is switched to 3. FIG. 9 is a configuration diagram illustrating laser marking on an object when the mirror unit is switched to the non-mirror unit.
The same numbers are given to the same items.

The difference from FIG. 1 is that the half mirror 10 is replaced by the mirror unit 206 shown in FIG. In FIG. 9, since the lensless portion 203 of the mirror unit 206 is provided on the path of the laser light output from the oscillator 12, the laser light travels straight in the direction a, and similarly to FIG. The object 20 is reflected by the reflecting mirrors 15 and 16 of the X-axis and Y-axis galvanometer mirror units 13 and 14 that are controlled and driven as stored in advance.
A predetermined required item such as a character is laser-printed on the top surface A of the printer. At this time, 1 of the laser light output from the oscillator 12
00% is incident on the top surface A of the object 20 and is laser-stamped.

Therefore, the mirror section 206 consisting of three sections, that is, a total reflection mirror section, a half mirror section, and a non-mirror section, is provided on the path of the laser light oscillated from the oscillator 12, so that the mirror section 206 is switched to any one of the three. The object 20 is irradiated with a laser beam having a power of 100% of the output oscillated from the oscillator.
When laser marking is performed on the top surface A of the object 20 and the laser beam of 100% power of the output oscillated from the oscillator
It is possible to switch between laser marking on the side surface B of the object 20 and laser marking on the top surface A and the side surface B of the object 20 with a laser beam of 50% power.

Therefore, when only the half mirror is provided on the path of the laser beam, the laser beam is branched, and even when only one surface of the object is stamped, 100% of the output of the oscillated laser beam is stamped. In contrast to the case where the laser beam cannot be incident on a surface to be irradiated, the configuration of the present embodiment makes this possible. High power.

Further, shutters 21 and 22 provided in the direction a or the direction b during laser marking shown in FIG.
By closing either of them, it is also possible to seal only one of the top surface A and the side surface B of the object 20 with an output of 50%.

[0044]

As described above, the first aspect of the present invention is provided with the branching means for branching the laser light into a plurality of paths, and for stamping each surface of the object with the laser light branched by the branching means. By using only one laser stamping device, it is possible to simultaneously stamp on multiple surfaces of the object, so that the stamping time can be shortened and the space and equipment cost for installing the laser stamping device can be reduced. . Further, it is not necessary to rotate the object to be stamped, and it is possible to prevent the stamping position from being shifted by rotating.

According to a second aspect of the present invention, a half mirror for splitting the laser beam into two is provided on the path of the oscillated laser beam.
In order to print on two surfaces of the object with each of the branched laser beams, it is possible to simultaneously print on two surfaces of the object simply by using one laser marking device.
The stamping time can be shortened, and the space and equipment cost for installing the laser stamping device can be reduced. Further, it is not necessary to rotate the object to be stamped, and it is possible to prevent the stamping position from being shifted by rotating.

According to a third aspect of the present invention, on the oscillated course,
A first half mirror for splitting the laser beam into two is provided, and a second half mirror for splitting one of the laser beams split into two again by the first half mirror is provided. The oscillated laser beam is branched into three, and it is possible to simultaneously stamp three surfaces of an object only by using one laser marking device.
The stamping time can be shortened, and the space and equipment cost for installing the laser stamping device can be reduced. Further, it is not necessary to rotate the object to be stamped, and it is possible to prevent the stamping position from being shifted by rotating.

According to a fourth aspect of the present invention, there is provided a half mirror which divides the oscillated laser beam into two by passing a part of the oscillated laser beam and reflecting the remaining laser beam on the path of the oscillated laser beam. Unit, a total reflection mirror unit that reflects all of the oscillated laser light, and a mirror unit that has no mirror that does not have a mirror that passes all of the oscillated laser light, and switches between them. A switching section is provided, and the laser beam passed through the mirror section switched by the switching section or reflected by the mirror section is stamped on the surface of the object, so that the output of the laser light incident on the surface of the object is provided. Power can be set in multiple types, and it is possible to support multiple types.

According to the fifth aspect of the present invention, there is provided the opening / closing means for switching whether or not to block the path of the laser light incident on the surface of the object to be stamped. By blocking, it is possible to select so as not to seal the surface of the object in the path of the laser beam.

[Brief description of the drawings]

FIG. 1 is a perspective view showing laser marking on an object by the laser marking device shown in FIG. 2;

FIG. 2 is a perspective view showing a structure of the laser marking device according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing a structure of a laser marking device according to a second embodiment of the present invention.

FIG. 4 is a perspective view showing laser marking on an object by the laser marking device shown in FIG. 3;

FIG. 5 is a front view of a switching unit that switches a mirror unit.

FIG. 6 is a side view of a switching unit that switches a mirror unit.

FIG. 7 is a configuration diagram showing laser marking on an object when the mirror unit is switched to a half mirror unit.

FIG. 8 is a configuration diagram showing laser marking on an object when the mirror unit is switched to a total reflection mirror unit.

FIG. 9 is a configuration diagram illustrating laser marking on an object when a mirror unit is switched to a non-mirror unit.

FIG. 10 is a perspective view showing a case where one laser stamping device sequentially stamps two surfaces of an object.

FIG. 11 is a perspective view showing a case where an object is stamped using two laser stamping devices.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Half mirror 12 Oscillator 13, 14, 23, 24 Galvano mirror unit 15, 16, 25, 26 Reflection mirror 20 Object 21, 22 Shutter

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B41M 5/26 H01L 23/00 A H01L 23/00 B41M 5/26 S

Claims (5)

[Claims] 1. A laser marking apparatus for marking a plurality of surfaces of an object with laser light, comprising: a branching means for branching the laser light into a plurality of paths; A laser marking device for marking each side of an object. 2. The laser beam oscillated by providing a part of the laser beam and reflecting the remaining laser beam at a predetermined angle while the branching means is provided on a path of the oscillated laser beam. 2. The laser marking device according to claim 1, wherein the laser marking device is a first half mirror that divides the light into two. 3. The apparatus according to claim 1, further comprising a second half mirror for splitting one of the laser beams split by the splitter into two again. Laser marking device. 4. A laser marking device for marking a surface of an object with a laser beam, wherein a part of the laser beam is passed on a path of the oscillated laser beam and the remaining laser beam is directed at a predetermined angle. A half-mirror unit that divides the laser light oscillated by reflecting the light into two,
A switching unit that switches a mirror unit that includes a total reflection mirror unit that reflects all of the oscillated laser light at a predetermined angle and a mirrorless unit that does not have a mirror that passes all of the oscillated laser light. A laser marking device, wherein marking is performed on a surface of an object by a laser beam that has passed through a mirror portion switched by the switching portion or reflected by the mirror portion. 5. The apparatus according to claim 1, further comprising an opening / closing means for switching whether or not to block a path of the laser light incident on the surface of the object to be stamped. Laser marking device.