JP1729714S - heater lamp - Google Patents

heater lamp

Info

Publication number
JP1729714S
JP1729714S JP2021014101F JP2021014101F JP1729714S JP 1729714 S JP1729714 S JP 1729714S JP 2021014101 F JP2021014101 F JP 2021014101F JP 2021014101 F JP2021014101 F JP 2021014101F JP 1729714 S JP1729714 S JP 1729714S
Authority
JP
Japan
Prior art keywords
heater lamp
semiconductor manufacturing
wafer
article
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021014101F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021014101F priority Critical patent/JP1729714S/en
Priority to TW110307046F priority patent/TWD220762S/en
Application granted granted Critical
Publication of JP1729714S publication Critical patent/JP1729714S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置に設置し、半導体の製造工程で使用をするヒーターランプである。本物品は、半導体の製造工程において、本物品のヒーターランプを用いてウェーハの表面を加熱して、ウェーハ上の結晶成長を促進させるために使用をするものである。This product is a heater lamp installed in a semiconductor manufacturing apparatus and used in the semiconductor manufacturing process. The article is used in the semiconductor manufacturing process to heat the surface of a wafer using the heater lamp of the article to promote crystal growth on the wafer.

JP2021014101F 2021-06-29 2021-06-29 heater lamp Active JP1729714S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021014101F JP1729714S (en) 2021-06-29 2021-06-29 heater lamp
TW110307046F TWD220762S (en) 2021-06-29 2021-12-24 Heater lamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021014101F JP1729714S (en) 2021-06-29 2021-06-29 heater lamp

Publications (1)

Publication Number Publication Date
JP1729714S true JP1729714S (en) 2022-11-14

Family

ID=84027267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021014101F Active JP1729714S (en) 2021-06-29 2021-06-29 heater lamp

Country Status (2)

Country Link
JP (1) JP1729714S (en)
TW (1) TWD220762S (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD872322S1 (en) 2018-11-02 2020-01-07 Shenzhen Snc Opto Electronic Co., Ltd. LED lamp

Also Published As

Publication number Publication date
TWD220762S (en) 2022-08-21

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