JP1706322S - - Google Patents

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Publication number
JP1706322S
JP1706322S JP2021018468F JP2021018468F JP1706322S JP 1706322 S JP1706322 S JP 1706322S JP 2021018468 F JP2021018468 F JP 2021018468F JP 2021018468 F JP2021018468 F JP 2021018468F JP 1706322 S JP1706322 S JP 1706322S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021018468F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021018468F priority Critical patent/JP1706322S/ja
Application granted granted Critical
Publication of JP1706322S publication Critical patent/JP1706322S/ja
Priority to TW111300807F priority patent/TWD230199S/zh
Priority to US29/828,155 priority patent/USD1022933S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021018468F 2021-08-27 2021-08-27 Active JP1706322S (enExample)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021018468F JP1706322S (enExample) 2021-08-27 2021-08-27
TW111300807F TWD230199S (zh) 2021-08-27 2022-02-18 半導體製造裝置用基板支承具
US29/828,155 USD1022933S1 (en) 2021-08-27 2022-02-24 Wafer support of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021018468F JP1706322S (enExample) 2021-08-27 2021-08-27

Publications (1)

Publication Number Publication Date
JP1706322S true JP1706322S (enExample) 2022-01-31

Family

ID=80218929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021018468F Active JP1706322S (enExample) 2021-08-27 2021-08-27

Country Status (3)

Country Link
US (1) USD1022933S1 (enExample)
JP (1) JP1706322S (enExample)
TW (1) TWD230199S (enExample)

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
USD291413S (en) * 1984-07-30 1987-08-18 Tokyo Denshi Kagaku Co., Ltd. Wafer holding frame
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
JP3487497B2 (ja) * 1998-06-24 2004-01-19 岩手東芝エレクトロニクス株式会社 被処理体収容治具及びこれを用いた熱処理装置
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
KR100410982B1 (ko) * 2001-01-18 2003-12-18 삼성전자주식회사 반도체 제조장치용 보트
TWD119910S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD119911S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
JP1537629S (enExample) * 2014-11-20 2015-11-09
JP1597807S (enExample) * 2017-08-21 2018-02-19
JP1651258S (enExample) * 2019-07-29 2020-01-27
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft

Also Published As

Publication number Publication date
USD1022933S1 (en) 2024-04-16
TWD230199S (zh) 2024-03-01

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