ITMI20131171A1 - Erogatore migliorato di vapori metallici - Google Patents
Erogatore migliorato di vapori metallici Download PDFInfo
- Publication number
- ITMI20131171A1 ITMI20131171A1 IT001171A ITMI20131171A ITMI20131171A1 IT MI20131171 A1 ITMI20131171 A1 IT MI20131171A1 IT 001171 A IT001171 A IT 001171A IT MI20131171 A ITMI20131171 A IT MI20131171A IT MI20131171 A1 ITMI20131171 A1 IT MI20131171A1
- Authority
- IT
- Italy
- Prior art keywords
- terminals
- metal vapor
- dispenser
- metal
- vapor dispenser
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 claims description 47
- 239000002184 metal Substances 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 229910052783 alkali metal Inorganic materials 0.000 claims description 8
- 150000001340 alkali metals Chemical class 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052744 lithium Inorganic materials 0.000 claims description 5
- 229910052792 caesium Inorganic materials 0.000 claims description 4
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 4
- -1 zirconate Chemical compound 0.000 claims description 4
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 2
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- BROHICCPQMHYFY-UHFFFAOYSA-N caesium chromate Chemical class [Cs+].[Cs+].[O-][Cr]([O-])(=O)=O BROHICCPQMHYFY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000604 Ferrochrome Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001339 alkali metal compounds Chemical class 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013270 controlled release Methods 0.000 description 1
- 239000011258 core-shell material Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/0013—Resistance welding; Severing by resistance heating welding for reasons other than joining, e.g. build up welding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/395—Filling vessels
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
- Resistance Heating (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT001171A ITMI20131171A1 (it) | 2013-07-11 | 2013-07-11 | Erogatore migliorato di vapori metallici |
| US14/901,714 US20160340769A1 (en) | 2013-07-11 | 2014-07-02 | Improved metal vapour dispenser |
| EP14752407.8A EP3001879B8 (en) | 2013-07-11 | 2014-07-02 | Improved metal vapour dispenser |
| PCT/IB2014/062788 WO2015004574A1 (en) | 2013-07-11 | 2014-07-02 | Improved metal vapour dispenser |
| CN201480037424.3A CN105359248B (zh) | 2013-07-11 | 2014-07-02 | 改进的金属蒸气给料器 |
| KR1020157036702A KR20160030119A (ko) | 2013-07-11 | 2014-07-02 | 개선된 금속 증기 분배기 |
| JP2016524922A JP2016525631A (ja) | 2013-07-11 | 2014-07-02 | 改良された金属蒸気ディスペンサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT001171A ITMI20131171A1 (it) | 2013-07-11 | 2013-07-11 | Erogatore migliorato di vapori metallici |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ITMI20131171A1 true ITMI20131171A1 (it) | 2015-01-11 |
Family
ID=49085124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT001171A ITMI20131171A1 (it) | 2013-07-11 | 2013-07-11 | Erogatore migliorato di vapori metallici |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20160340769A1 (enExample) |
| EP (1) | EP3001879B8 (enExample) |
| JP (1) | JP2016525631A (enExample) |
| KR (1) | KR20160030119A (enExample) |
| CN (1) | CN105359248B (enExample) |
| IT (1) | ITMI20131171A1 (enExample) |
| WO (1) | WO2015004574A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109920711B (zh) * | 2017-12-13 | 2021-06-15 | 有研工程技术研究院有限公司 | 一种碱金属释放剂所用释放器的制备方法 |
| CN109950787B (zh) * | 2019-03-08 | 2020-04-21 | 山西大学 | 一种可精确控制原子密度的碱金属蒸汽池 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2557530A (en) * | 1946-09-07 | 1951-06-19 | Eastman Kodak Co | Electric heating element |
| GB1274528A (en) * | 1968-09-13 | 1972-05-17 | Getters Spa | Improvements in or relating to metal vapour generators |
| US4112290A (en) * | 1976-10-27 | 1978-09-05 | Denki Kagaku Kogyo Kabushiki Kaisha | Evaporation vessel for use in vacuum evaporation |
| EP1967605A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation tube and evaporation apparatus with adapted evaporation characteristic |
| WO2011006811A1 (en) * | 2009-07-15 | 2011-01-20 | Saes Getters S.P.A. | Support for filiform elements containing an active material |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3579459A (en) | 1966-12-13 | 1971-05-18 | Getters Spa | Metal vapor generating compositions |
| DE1945508B2 (de) * | 1968-09-13 | 1971-06-09 | Vorrichtung zum freisetzen von metalldaempfen | |
| US3678246A (en) * | 1970-06-24 | 1972-07-18 | Oster Mfg Co John | Liquid heating vessel |
| NL7208146A (enExample) * | 1972-06-15 | 1973-12-18 | ||
| NL7802116A (nl) | 1977-03-14 | 1978-09-18 | Getters Spa | Alkalimetaaldampgenerator. |
| NL8802172A (nl) * | 1988-09-02 | 1990-04-02 | Philips Nv | Alkalimetaaldamp-dispenser. |
| ITMI20010995A1 (it) * | 2001-05-15 | 2002-11-15 | Getters Spa | Dispensatori di cesio e processo per il loro uso |
| JP2004353085A (ja) * | 2003-05-08 | 2004-12-16 | Sanyo Electric Co Ltd | 蒸発装置 |
| ITMI20041736A1 (it) * | 2004-09-10 | 2004-12-10 | Getters Spa | Miscele per l'evaporazione del litio e dispensatori di litio |
| ITMI20042279A1 (it) | 2004-11-24 | 2005-02-24 | Getters Spa | Sistema dispensatore di metalli alcalini in grado di dispensare quantita' elevate di metalli |
| JP2007238967A (ja) * | 2006-03-03 | 2007-09-20 | Sharp Corp | 気相成長装置、気相成長方法、基板加熱装置、および基板加熱方法 |
| EP1967606A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with adapted evaporation characteristic |
| DE102007035593B4 (de) * | 2007-07-30 | 2018-05-09 | Ledvance Gmbh | Elektrische Lampe mit einem Außenkolben, einem Tellerfuß und einer Einbaulampe |
| ITMI20082187A1 (it) * | 2008-12-11 | 2010-06-12 | Getters Spa | Sistema dispensatore di mercurio per lampade a fluorescenza |
| US8052310B2 (en) * | 2009-05-14 | 2011-11-08 | Tyco Electronics Corporation | Lighting device |
-
2013
- 2013-07-11 IT IT001171A patent/ITMI20131171A1/it unknown
-
2014
- 2014-07-02 KR KR1020157036702A patent/KR20160030119A/ko not_active Withdrawn
- 2014-07-02 EP EP14752407.8A patent/EP3001879B8/en active Active
- 2014-07-02 CN CN201480037424.3A patent/CN105359248B/zh active Active
- 2014-07-02 JP JP2016524922A patent/JP2016525631A/ja active Pending
- 2014-07-02 WO PCT/IB2014/062788 patent/WO2015004574A1/en not_active Ceased
- 2014-07-02 US US14/901,714 patent/US20160340769A1/en not_active Abandoned
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2557530A (en) * | 1946-09-07 | 1951-06-19 | Eastman Kodak Co | Electric heating element |
| GB1274528A (en) * | 1968-09-13 | 1972-05-17 | Getters Spa | Improvements in or relating to metal vapour generators |
| US4112290A (en) * | 1976-10-27 | 1978-09-05 | Denki Kagaku Kogyo Kabushiki Kaisha | Evaporation vessel for use in vacuum evaporation |
| EP1967605A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation tube and evaporation apparatus with adapted evaporation characteristic |
| WO2011006811A1 (en) * | 2009-07-15 | 2011-01-20 | Saes Getters S.P.A. | Support for filiform elements containing an active material |
Non-Patent Citations (1)
| Title |
|---|
| "Alkali Metal Dispenser", 20 April 2011 (2011-04-20), XP002720836, Retrieved from the Internet <URL:http://www.saesgetters.com/sites/default/files/AMD%20Brochure_0.pdf> [retrieved on 20140220] * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3001879A1 (en) | 2016-04-06 |
| US20160340769A1 (en) | 2016-11-24 |
| EP3001879B8 (en) | 2017-04-12 |
| JP2016525631A (ja) | 2016-08-25 |
| EP3001879B1 (en) | 2016-12-07 |
| CN105359248A (zh) | 2016-02-24 |
| CN105359248B (zh) | 2017-07-07 |
| WO2015004574A1 (en) | 2015-01-15 |
| KR20160030119A (ko) | 2016-03-16 |
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