IT958953B - Procedimento per l eliminazione di sporgenze da strati semicondut tori epitassiali - Google Patents

Procedimento per l eliminazione di sporgenze da strati semicondut tori epitassiali

Info

Publication number
IT958953B
IT958953B IT68633/72A IT6863372A IT958953B IT 958953 B IT958953 B IT 958953B IT 68633/72 A IT68633/72 A IT 68633/72A IT 6863372 A IT6863372 A IT 6863372A IT 958953 B IT958953 B IT 958953B
Authority
IT
Italy
Prior art keywords
elimination
projections
procedure
epitaxial layers
semiconductor epitaxial
Prior art date
Application number
IT68633/72A
Other languages
English (en)
Italian (it)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Application granted granted Critical
Publication of IT958953B publication Critical patent/IT958953B/it

Links

Classifications

    • H10P95/00—
    • H10P50/644—
    • H10W74/47—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/051—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/106—Masks, special
IT68633/72A 1971-05-28 1972-05-23 Procedimento per l eliminazione di sporgenze da strati semicondut tori epitassiali IT958953B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14808171A 1971-05-28 1971-05-28

Publications (1)

Publication Number Publication Date
IT958953B true IT958953B (it) 1973-10-30

Family

ID=22524177

Family Applications (1)

Application Number Title Priority Date Filing Date
IT68633/72A IT958953B (it) 1971-05-28 1972-05-23 Procedimento per l eliminazione di sporgenze da strati semicondut tori epitassiali

Country Status (12)

Country Link
US (1) US3718514A (OSRAM)
JP (1) JPS51427B1 (OSRAM)
BE (1) BE783938A (OSRAM)
CA (1) CA921374A (OSRAM)
CH (1) CH541230A (OSRAM)
DE (1) DE2225366C3 (OSRAM)
FR (1) FR2139975B1 (OSRAM)
GB (1) GB1389941A (OSRAM)
HK (1) HK35676A (OSRAM)
IT (1) IT958953B (OSRAM)
NL (1) NL7207145A (OSRAM)
SE (1) SE379213B (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2431647C3 (de) * 1974-07-02 1982-04-22 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum Entfernen von Vorsprüngen an der Oberfläche einer epitaktischen Halbleiterschicht
US3990925A (en) * 1975-03-31 1976-11-09 Bell Telephone Laboratories, Incorporated Removal of projections on epitaxial layers
US4238275A (en) * 1978-12-29 1980-12-09 International Business Machines Corporation Pyrocatechol-amine-water solution for the determination of defects
JPS5612723A (en) * 1979-07-11 1981-02-07 Fujitsu Ltd Manufacture of semiconductor device
US4515652A (en) * 1984-03-20 1985-05-07 Harris Corporation Plasma sculpturing with a non-planar sacrificial layer
FR2578107A1 (fr) * 1985-02-26 1986-08-29 Socem Dispositif de connexion et de support, notamment pour le raccordement de lignes electriques
US4789646A (en) * 1987-07-20 1988-12-06 North American Philips Corporation, Signetics Division Company Method for selective surface treatment of semiconductor structures
US5387316A (en) * 1992-12-09 1995-02-07 Motorola, Inc. Wafer etch protection method

Also Published As

Publication number Publication date
DE2225366C3 (de) 1974-06-27
HK35676A (en) 1976-06-18
BE783938A (fr) 1972-09-18
JPS51427B1 (OSRAM) 1976-01-08
DE2225366B2 (de) 1973-11-22
US3718514A (en) 1973-02-27
FR2139975A1 (OSRAM) 1973-01-12
DE2225366A1 (de) 1972-12-14
NL7207145A (OSRAM) 1972-11-30
CH541230A (de) 1973-08-31
CA921374A (en) 1973-02-20
FR2139975B1 (OSRAM) 1977-04-01
GB1389941A (en) 1975-04-09
SE379213B (OSRAM) 1975-09-29

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