CA921374A - Removal of projections on epitaxial layers - Google Patents

Removal of projections on epitaxial layers

Info

Publication number
CA921374A
CA921374A CA129401A CA129401A CA921374A CA 921374 A CA921374 A CA 921374A CA 129401 A CA129401 A CA 129401A CA 129401 A CA129401 A CA 129401A CA 921374 A CA921374 A CA 921374A
Authority
CA
Canada
Prior art keywords
projections
removal
epitaxial layers
epitaxial
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA129401A
Other languages
English (en)
Other versions
CA129401S (en
Inventor
C. Erdman William
Miller Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA921374A publication Critical patent/CA921374A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • H10P50/644—
    • H10W74/47—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/051—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/106—Masks, special
CA129401A 1971-05-28 1971-12-06 Removal of projections on epitaxial layers Expired CA921374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14808171A 1971-05-28 1971-05-28

Publications (1)

Publication Number Publication Date
CA921374A true CA921374A (en) 1973-02-20

Family

ID=22524177

Family Applications (1)

Application Number Title Priority Date Filing Date
CA129401A Expired CA921374A (en) 1971-05-28 1971-12-06 Removal of projections on epitaxial layers

Country Status (12)

Country Link
US (1) US3718514A (OSRAM)
JP (1) JPS51427B1 (OSRAM)
BE (1) BE783938A (OSRAM)
CA (1) CA921374A (OSRAM)
CH (1) CH541230A (OSRAM)
DE (1) DE2225366C3 (OSRAM)
FR (1) FR2139975B1 (OSRAM)
GB (1) GB1389941A (OSRAM)
HK (1) HK35676A (OSRAM)
IT (1) IT958953B (OSRAM)
NL (1) NL7207145A (OSRAM)
SE (1) SE379213B (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2431647C3 (de) * 1974-07-02 1982-04-22 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum Entfernen von Vorsprüngen an der Oberfläche einer epitaktischen Halbleiterschicht
US3990925A (en) * 1975-03-31 1976-11-09 Bell Telephone Laboratories, Incorporated Removal of projections on epitaxial layers
US4238275A (en) * 1978-12-29 1980-12-09 International Business Machines Corporation Pyrocatechol-amine-water solution for the determination of defects
JPS5612723A (en) * 1979-07-11 1981-02-07 Fujitsu Ltd Manufacture of semiconductor device
US4515652A (en) * 1984-03-20 1985-05-07 Harris Corporation Plasma sculpturing with a non-planar sacrificial layer
FR2578107A1 (fr) * 1985-02-26 1986-08-29 Socem Dispositif de connexion et de support, notamment pour le raccordement de lignes electriques
US4789646A (en) * 1987-07-20 1988-12-06 North American Philips Corporation, Signetics Division Company Method for selective surface treatment of semiconductor structures
US5387316A (en) * 1992-12-09 1995-02-07 Motorola, Inc. Wafer etch protection method

Also Published As

Publication number Publication date
DE2225366C3 (de) 1974-06-27
HK35676A (en) 1976-06-18
BE783938A (fr) 1972-09-18
JPS51427B1 (OSRAM) 1976-01-08
DE2225366B2 (de) 1973-11-22
US3718514A (en) 1973-02-27
FR2139975A1 (OSRAM) 1973-01-12
DE2225366A1 (de) 1972-12-14
NL7207145A (OSRAM) 1972-11-30
CH541230A (de) 1973-08-31
IT958953B (it) 1973-10-30
FR2139975B1 (OSRAM) 1977-04-01
GB1389941A (en) 1975-04-09
SE379213B (OSRAM) 1975-09-29

Similar Documents

Publication Publication Date Title
AU461622B2 (en) Crown-support carrier
CA978204A (en) Hydrocyanation of olefins
AU3860672A (en) Substituted-p-menthanes
CA1005305A (en) Digital amniotome
AU3878472A (en) Furyland furfuryl-benzomorphanes
AU462059B2 (en) Keylock
CA997671A (en) Crystallizer
CA921374A (en) Removal of projections on epitaxial layers
AU3256971A (en) Medicament-container
CA1014496A (en) Penicillin acylase
CA969374A (en) Separation of gallium
AU4743072A (en) Alternator
AU460980B2 (en) Cover removal
AU453888B2 (en) Improved crown-support carrier
CA879058A (en) Etching
AU2792771A (en) Paddleboat
AU3244971A (en) Clipshade
AU3750371A (en) Cikir bibd syrveukkabce ststem
CA865739A (en) Bis-carbamates of alkyladamantanes
CA873364A (en) Organophosphates
CA878872A (en) Carburetion
CA869809A (en) Engin sous-marin
CA883287A (en) Aryl allylsulfones
CA879001A (en) Separation procedure
CA862896A (en) Frequency control-arrangement