IT1248534B - Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere. - Google Patents

Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere.

Info

Publication number
IT1248534B
IT1248534B ITMI911727A ITMI911727A IT1248534B IT 1248534 B IT1248534 B IT 1248534B IT MI911727 A ITMI911727 A IT MI911727A IT MI911727 A ITMI911727 A IT MI911727A IT 1248534 B IT1248534 B IT 1248534B
Authority
IT
Italy
Prior art keywords
calibration
misalignment
procedure
general
integrated circuits
Prior art date
Application number
ITMI911727A
Other languages
English (en)
Inventor
Pier Luigi Crotti
Original Assignee
Sgs Thomson Microelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sgs Thomson Microelectronics filed Critical Sgs Thomson Microelectronics
Priority to ITMI911727A priority Critical patent/IT1248534B/it
Publication of ITMI911727A0 publication Critical patent/ITMI911727A0/it
Priority to GB9212413A priority patent/GB2257804B/en
Priority to JP4164610A priority patent/JPH05198644A/ja
Priority to FR9208054A priority patent/FR2678108B1/fr
Publication of ITMI911727A1 publication Critical patent/ITMI911727A1/it
Priority to US08/149,707 priority patent/US5332470A/en
Application granted granted Critical
Publication of IT1248534B publication Critical patent/IT1248534B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/975—Substrate or mask aligning feature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere, la peculiarità del quale consiste nel fatto di realizzare strutture di calibrazione che presentano il disallineamento di uno strato rispetto ad un altro strato imposto di ampiezza nota mediante un'unica mascheratura.
ITMI911727A 1991-06-24 1991-06-24 Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere. IT1248534B (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITMI911727A IT1248534B (it) 1991-06-24 1991-06-24 Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere.
GB9212413A GB2257804B (en) 1991-06-24 1992-06-11 Photolithographic process for manufacturing calibration strctures
JP4164610A JPH05198644A (ja) 1991-06-24 1992-06-23 校正構造の製造方法
FR9208054A FR2678108B1 (fr) 1991-06-24 1992-06-23 Procede de fabrication de structures d'etalonnage, en particulier pour l'etalonnage de machines de mesure d'alignement dans des circuits integres.
US08/149,707 US5332470A (en) 1991-06-24 1993-11-09 Process for manufacturing calibration structures particularly for the calibration of machines for measuring alignment in integrated circuits in general

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI911727A IT1248534B (it) 1991-06-24 1991-06-24 Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere.

Publications (3)

Publication Number Publication Date
ITMI911727A0 ITMI911727A0 (it) 1991-06-24
ITMI911727A1 ITMI911727A1 (it) 1992-12-24
IT1248534B true IT1248534B (it) 1995-01-19

Family

ID=11360186

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI911727A IT1248534B (it) 1991-06-24 1991-06-24 Procedimento per la realizzazione di strutture di calibrazione particolarmente per la taratura di macchine di misura del disallineamento in circuiti integrati in genere.

Country Status (5)

Country Link
US (1) US5332470A (it)
JP (1) JPH05198644A (it)
FR (1) FR2678108B1 (it)
GB (1) GB2257804B (it)
IT (1) IT1248534B (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401691A (en) * 1994-07-01 1995-03-28 Cypress Semiconductor Corporation Method of fabrication an inverse open frame alignment mark
US5952247A (en) * 1994-11-23 1999-09-14 Intel Corporation Method of accessing the circuitry on a semiconductor substrate from the bottom of the semiconductor substrate
US5611855A (en) * 1995-01-31 1997-03-18 Seh America, Inc. Method for manufacturing a calibration wafer having a microdefect-free layer of a precisely predetermined depth
US5545570A (en) * 1995-09-29 1996-08-13 Taiwan Semiconductor Manufacturing Company Method of inspecting first layer overlay shift in global alignment process
US5599464A (en) * 1995-10-06 1997-02-04 Vlsi Standards, Inc. Formation of atomic scale vertical features for topographic instrument calibration
US5936311A (en) * 1996-12-31 1999-08-10 Intel Corporation Integrated circuit alignment marks distributed throughout a surface metal line
US5904486A (en) * 1997-09-30 1999-05-18 Intel Corporation Method for performing a circuit edit through the back side of an integrated circuit die
US5998226A (en) * 1998-04-02 1999-12-07 Lsi Logic Corporation Method and system for alignment of openings in semiconductor fabrication
KR100295049B1 (ko) * 1998-07-23 2001-11-30 윤종용 위상반전마스크제조방법
US6146910A (en) * 1999-02-02 2000-11-14 The United States Of America, As Represented By The Secretary Of Commerce Target configuration and method for extraction of overlay vectors from targets having concealed features
US6358860B1 (en) 1999-10-07 2002-03-19 Vlsi Standards, Inc. Line width calibration standard manufacturing and certifying method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307179A (en) * 1980-07-03 1981-12-22 International Business Machines Corporation Planar metal interconnection system and process
US4576900A (en) * 1981-10-09 1986-03-18 Amdahl Corporation Integrated circuit multilevel interconnect system and method
US4888450A (en) * 1981-12-11 1989-12-19 At&T Bell Laboratories Circuit board fabrication leading to increased capacity
US4731318A (en) * 1985-02-26 1988-03-15 Societe Pour L'etude Et La Fabrication Des Circuits Integres Speciaux - E.F.C.I.S. Integrated circuit comprising MOS transistors having electrodes of metallic silicide and a method of fabrication of said circuit
JPH0682727B2 (ja) * 1986-02-18 1994-10-19 ホ−ヤ株式会社 検査用基板とその製造方法
GB2204992A (en) * 1987-05-05 1988-11-23 British Telecomm Bipolar transistor
DE68921995T2 (de) * 1988-01-19 1995-12-07 Nat Semiconductor Corp Verfahren zum Herstellen eines Polysiliciumemitters und eines Polysiliciumgates durch gleichzeitiges Ätzen von Polysilicium auf einem dünnen Gateoxid.
JP2606900B2 (ja) * 1988-09-08 1997-05-07 株式会社東芝 パターン形成方法
EP0369053B1 (de) * 1988-11-17 1994-03-02 International Business Machines Corporation Verfahren zur Herstellung von Masken mit Strukturen im Submikrometerbereich
EP0416809A3 (en) * 1989-09-08 1991-08-07 American Telephone And Telegraph Company Reduced size etching method for integrated circuits
US4996167A (en) * 1990-06-29 1991-02-26 At&T Bell Laboratories Method of making electrical contacts to gate structures in integrated circuits
IT1251393B (it) * 1991-09-04 1995-05-09 St Microelectronics Srl Procedimento per la realizzazione di strutture metrologiche particolarmente per l'analisi dell'accuratezza di strumenti di misura di allineamento su substrati processati.

Also Published As

Publication number Publication date
JPH05198644A (ja) 1993-08-06
GB2257804A (en) 1993-01-20
GB2257804B (en) 1995-01-04
US5332470A (en) 1994-07-26
ITMI911727A0 (it) 1991-06-24
ITMI911727A1 (it) 1992-12-24
FR2678108B1 (fr) 1996-09-06
FR2678108A1 (fr) 1992-12-24
GB9212413D0 (en) 1992-07-22

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Legal Events

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0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970628