IT1150002B - Apparecchiatura per produrre un fascio di elettroni molto stretto di alta luminosita' - Google Patents

Apparecchiatura per produrre un fascio di elettroni molto stretto di alta luminosita'

Info

Publication number
IT1150002B
IT1150002B IT19219/80A IT1921980A IT1150002B IT 1150002 B IT1150002 B IT 1150002B IT 19219/80 A IT19219/80 A IT 19219/80A IT 1921980 A IT1921980 A IT 1921980A IT 1150002 B IT1150002 B IT 1150002B
Authority
IT
Italy
Prior art keywords
electrons
produce
narrow band
high brightness
brightness
Prior art date
Application number
IT19219/80A
Other languages
English (en)
Other versions
IT8019219A0 (it
Inventor
Alec Nigel Broers
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT8019219A0 publication Critical patent/IT8019219A0/it
Application granted granted Critical
Publication of IT1150002B publication Critical patent/IT1150002B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
IT19219/80A 1979-01-18 1980-01-16 Apparecchiatura per produrre un fascio di elettroni molto stretto di alta luminosita' IT1150002B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/004,518 US4210806A (en) 1979-01-18 1979-01-18 High brightness electron probe beam and method

Publications (2)

Publication Number Publication Date
IT8019219A0 IT8019219A0 (it) 1980-01-16
IT1150002B true IT1150002B (it) 1986-12-10

Family

ID=21711163

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19219/80A IT1150002B (it) 1979-01-18 1980-01-16 Apparecchiatura per produrre un fascio di elettroni molto stretto di alta luminosita'

Country Status (5)

Country Link
US (1) US4210806A (it)
EP (1) EP0013738B1 (it)
JP (1) JPS5948508B2 (it)
DE (1) DE2965831D1 (it)
IT (1) IT1150002B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2513425A1 (fr) * 1981-09-22 1983-03-25 Thomson Csf Dispositif de limitation angulaire dans un systeme a faisceau de particules chargees
JPS5968158A (ja) * 1982-09-27 1984-04-18 Jeol Ltd 電子線装置
EP0132657A1 (en) * 1983-07-21 1985-02-13 The Perkin-Elmer Corporation Aperture imaging electron gun
US4766372A (en) * 1987-02-10 1988-08-23 Intel Corporation Electron beam tester
JPH06215714A (ja) * 1992-06-05 1994-08-05 Hitachi Ltd 電界放出型透過電子顕微鏡
WO2006076036A2 (en) * 2004-05-25 2006-07-20 The Trustees Of The University Of Pennsylvania Nanostructure assemblies, methods and devices thereof
WO2013036615A1 (en) * 2011-09-06 2013-03-14 Kla-Tencor Corporation Linear stage for reflective electron beam lithography

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB646019A (en) * 1946-01-05 1950-11-15 Philips Nv Improvements in or relating to electron microscopes
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
DE1225775B (de) * 1963-03-23 1966-09-29 United Aircraft Corp Verfahren und Einrichtung zur Bearbeitung eines Werkstueckes mittels eines Ladungstraegerstrahles
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus
NL7204859A (it) * 1972-04-12 1973-10-16
DE2256084A1 (de) * 1972-11-16 1974-05-30 Ibm Deutschland Verfahren zur fokussierung von elektronenmikroskopen
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
NL7404363A (nl) * 1974-04-01 1975-10-03 Philips Nv Elektronenmikroskoop met energieanalysator.

Also Published As

Publication number Publication date
IT8019219A0 (it) 1980-01-16
US4210806A (en) 1980-07-01
EP0013738A1 (en) 1980-08-06
EP0013738B1 (en) 1983-07-06
DE2965831D1 (en) 1983-08-11
JPS5948508B2 (ja) 1984-11-27
JPS5596549A (en) 1980-07-22

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