IT1010536B - Metodo ed apparecchio per edposita re una pellicola elettricamente conduttiva di un ossido di metallo su un sostrato non conduttivo mediante polverizzazione catodica reattiv - Google Patents

Metodo ed apparecchio per edposita re una pellicola elettricamente conduttiva di un ossido di metallo su un sostrato non conduttivo mediante polverizzazione catodica reattiv

Info

Publication number
IT1010536B
IT1010536B IT12955/73A IT1295573A IT1010536B IT 1010536 B IT1010536 B IT 1010536B IT 12955/73 A IT12955/73 A IT 12955/73A IT 1295573 A IT1295573 A IT 1295573A IT 1010536 B IT1010536 B IT 1010536B
Authority
IT
Italy
Prior art keywords
editing
metal oxide
electrically conductive
conductive film
conductive substrate
Prior art date
Application number
IT12955/73A
Other languages
English (en)
Italian (it)
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Application granted granted Critical
Publication of IT1010536B publication Critical patent/IT1010536B/it

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
IT12955/73A 1972-11-29 1973-11-27 Metodo ed apparecchio per edposita re una pellicola elettricamente conduttiva di un ossido di metallo su un sostrato non conduttivo mediante polverizzazione catodica reattiv IT1010536B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5515672A GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Publications (1)

Publication Number Publication Date
IT1010536B true IT1010536B (it) 1977-01-20

Family

ID=10473126

Family Applications (1)

Application Number Title Priority Date Filing Date
IT12955/73A IT1010536B (it) 1972-11-29 1973-11-27 Metodo ed apparecchio per edposita re una pellicola elettricamente conduttiva di un ossido di metallo su un sostrato non conduttivo mediante polverizzazione catodica reattiv

Country Status (10)

Country Link
JP (1) JPS5413596B2 (en:Method)
AT (1) AT337389B (en:Method)
BE (1) BE807989A (en:Method)
CA (1) CA1006845A (en:Method)
DE (1) DE2359893C2 (en:Method)
ES (1) ES420944A1 (en:Method)
FR (2) FR2208005B1 (en:Method)
GB (1) GB1446848A (en:Method)
IT (1) IT1010536B (en:Method)
SE (2) SE391328B (en:Method)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179296A (en) * 1974-12-28 1976-07-10 Citizen Watch Co Ltd Tomeidodenmakuno seizohoho
JPS51108294A (ja) * 1975-03-19 1976-09-25 Sharp Kk Sankabutsuhandotaimakuseizosochi
JPS6010022Y2 (ja) * 1981-03-24 1985-04-06 シャープ株式会社 酸化物半導体膜製造装置
US4574733A (en) * 1982-09-16 1986-03-11 Energy Conversion Devices, Inc. Substrate shield for preventing the deposition of nonhomogeneous films
FR2550138B1 (fr) * 1983-08-04 1985-10-11 Saint Gobain Vitrage Vitrage a basse emissivite, notamment pour vehicules
NL8401721A (nl) * 1984-05-29 1985-12-16 Leer Koninklijke Emballage Werkwijze en stelsel voor het produceren van een reactief gesputterde geleidende transparante metaaloxidefilm op een doorlopende materiaalbaan.
FR2581793B1 (fr) * 1985-05-07 1988-04-29 Duruy Nicolas Procede et dispositif de fabrication de composants electroniques ou optoelectroniques avec depot par evaporation sous vide
FR2695117B1 (fr) * 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Procédé de traitement de couches minces à propriétés de conduction électrique et/ou de réflexion dans l'infra-rouge.
AT407324B (de) * 1996-10-14 2001-02-26 Nk Karl Niederleitner Ges M B Flächenheizeinrichtung mit einem mehrschichtigen, bevorzugt transparenten, flächenelement und verfahren zum betrieb

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2569773A (en) * 1948-11-20 1951-10-02 Pittsburgh Plate Glass Co Electroconductive article
US2877329A (en) * 1950-05-25 1959-03-10 Libbey Owens Ford Glass Co Transparent resistance heated panel and method of producing same
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
FR70004E (fr) * 1956-05-18 1959-02-02 Pittsburgh Plate Glass Co Procédé de fabrication d'objets électroconducteurs
LU36582A1 (en:Method) * 1957-11-13
CA934325A (en) * 1970-07-31 1973-09-25 Ppg Industries, Inc. Coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films

Also Published As

Publication number Publication date
CA1006845A (en) 1977-03-15
DE2359893A1 (de) 1974-07-04
JPS4995196A (en:Method) 1974-09-10
SE7606228L (sv) 1976-06-03
AT337389B (de) 1977-06-27
FR2208005B1 (en:Method) 1978-03-10
FR2293405B1 (en:Method) 1983-04-22
GB1446848A (en) 1976-08-18
FR2293405A1 (fr) 1976-07-02
BE807989A (fr) 1974-05-29
JPS5413596B2 (en:Method) 1979-05-31
ES420944A1 (es) 1976-04-16
SE391328B (sv) 1977-02-14
ATA999073A (de) 1976-10-15
FR2208005A1 (en:Method) 1974-06-21
DE2359893C2 (de) 1984-03-29

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