IT1003873B - Perfezionamento nei microscopi elettronici - Google Patents

Perfezionamento nei microscopi elettronici

Info

Publication number
IT1003873B
IT1003873B IT49615/74A IT4961574A IT1003873B IT 1003873 B IT1003873 B IT 1003873B IT 49615/74 A IT49615/74 A IT 49615/74A IT 4961574 A IT4961574 A IT 4961574A IT 1003873 B IT1003873 B IT 1003873B
Authority
IT
Italy
Prior art keywords
improvement
electronic microscopes
microscopes
electronic
Prior art date
Application number
IT49615/74A
Other languages
English (en)
Italian (it)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of IT1003873B publication Critical patent/IT1003873B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261Details
    • H01J37/265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
IT49615/74A 1973-03-28 1974-03-25 Perfezionamento nei microscopi elettronici IT1003873B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7304298A NL7304298A (fr) 1973-03-28 1973-03-28

Publications (1)

Publication Number Publication Date
IT1003873B true IT1003873B (it) 1976-06-10

Family

ID=19818520

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49615/74A IT1003873B (it) 1973-03-28 1974-03-25 Perfezionamento nei microscopi elettronici

Country Status (11)

Country Link
US (1) US3889114A (fr)
JP (1) JPS49130668A (fr)
BE (1) BE812849A (fr)
CA (1) CA1002209A (fr)
DE (1) DE2412675A1 (fr)
ES (1) ES424663A1 (fr)
FR (1) FR2223831B1 (fr)
GB (1) GB1469777A (fr)
IT (1) IT1003873B (fr)
NL (1) NL7304298A (fr)
SE (1) SE392365B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
AT353519B (de) * 1978-03-07 1979-11-26 Oesterr Studien Atomenergie Einrichtung zur buendelung des primaerionen- strahls
JPS63298949A (ja) * 1987-05-28 1988-12-06 Jeol Ltd 広狭領域が同時観察可能な分析電子顕微鏡
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
JPH0594798A (ja) * 1991-05-21 1993-04-16 Jeol Ltd 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
DE4412137A1 (de) * 1993-12-28 1995-10-26 Alexander Dr Zarubin Mikroskop, welches mit geladenen Teilchen arbeitet
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
DE102009016861A1 (de) * 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop
CN103388406A (zh) * 2013-07-29 2013-11-13 苏州市世好建材新技术工程有限公司 插合式铺浆器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464419A (en) * 1947-12-26 1949-03-15 Rca Corp Method of and apparatus for selectively achieving electronic darkfield and bright field illumation
DE2213208C3 (de) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationssymetrisches, sphärisch korrigiertes korpuskularstrahloptisches Abbildungssystem

Also Published As

Publication number Publication date
NL7304298A (fr) 1974-10-01
JPS49130668A (fr) 1974-12-14
GB1469777A (en) 1977-04-06
BE812849A (fr) 1974-09-26
ES424663A1 (es) 1976-06-01
FR2223831B1 (fr) 1977-09-30
DE2412675A1 (de) 1974-10-10
SE392365B (sv) 1977-03-21
CA1002209A (en) 1976-12-21
US3889114A (en) 1975-06-10
FR2223831A1 (fr) 1974-10-25

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