JPS49130668A - - Google Patents

Info

Publication number
JPS49130668A
JPS49130668A JP49033391A JP3339174A JPS49130668A JP S49130668 A JPS49130668 A JP S49130668A JP 49033391 A JP49033391 A JP 49033391A JP 3339174 A JP3339174 A JP 3339174A JP S49130668 A JPS49130668 A JP S49130668A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49033391A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS49130668A publication Critical patent/JPS49130668A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP49033391A 1973-03-28 1974-03-25 Pending JPS49130668A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7304298A NL7304298A (fr) 1973-03-28 1973-03-28

Publications (1)

Publication Number Publication Date
JPS49130668A true JPS49130668A (fr) 1974-12-14

Family

ID=19818520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49033391A Pending JPS49130668A (fr) 1973-03-28 1974-03-25

Country Status (11)

Country Link
US (1) US3889114A (fr)
JP (1) JPS49130668A (fr)
BE (1) BE812849A (fr)
CA (1) CA1002209A (fr)
DE (1) DE2412675A1 (fr)
ES (1) ES424663A1 (fr)
FR (1) FR2223831B1 (fr)
GB (1) GB1469777A (fr)
IT (1) IT1003873B (fr)
NL (1) NL7304298A (fr)
SE (1) SE392365B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010245046A (ja) * 2009-04-08 2010-10-28 Carl Zeiss Nts Gmbh 粒子ビーム顕微鏡

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
AT353519B (de) * 1978-03-07 1979-11-26 Oesterr Studien Atomenergie Einrichtung zur buendelung des primaerionen- strahls
JPS63298949A (ja) * 1987-05-28 1988-12-06 Jeol Ltd 広狭領域が同時観察可能な分析電子顕微鏡
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
JPH0594798A (ja) * 1991-05-21 1993-04-16 Jeol Ltd 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
DE4412137A1 (de) * 1993-12-28 1995-10-26 Alexander Dr Zarubin Mikroskop, welches mit geladenen Teilchen arbeitet
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
CN103388406A (zh) * 2013-07-29 2013-11-13 苏州市世好建材新技术工程有限公司 插合式铺浆器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464419A (en) * 1947-12-26 1949-03-15 Rca Corp Method of and apparatus for selectively achieving electronic darkfield and bright field illumation
DE2213208C3 (de) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationssymetrisches, sphärisch korrigiertes korpuskularstrahloptisches Abbildungssystem

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010245046A (ja) * 2009-04-08 2010-10-28 Carl Zeiss Nts Gmbh 粒子ビーム顕微鏡

Also Published As

Publication number Publication date
FR2223831A1 (fr) 1974-10-25
US3889114A (en) 1975-06-10
IT1003873B (it) 1976-06-10
SE392365B (sv) 1977-03-21
CA1002209A (en) 1976-12-21
BE812849A (fr) 1974-09-26
NL7304298A (fr) 1974-10-01
ES424663A1 (es) 1976-06-01
GB1469777A (en) 1977-04-06
DE2412675A1 (de) 1974-10-10
FR2223831B1 (fr) 1977-09-30

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