GB1469777A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
GB1469777A
GB1469777A GB1116974A GB1116974A GB1469777A GB 1469777 A GB1469777 A GB 1469777A GB 1116974 A GB1116974 A GB 1116974A GB 1116974 A GB1116974 A GB 1116974A GB 1469777 A GB1469777 A GB 1469777A
Authority
GB
United Kingdom
Prior art keywords
specimen
lens
sequence
image
angles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1116974A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1469777A publication Critical patent/GB1469777A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1469777 Electron microscopes PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 13 March 1974 [28 March 1973] 11169/74 Heading H1D An electron microscope includes a first condenser lens 21, second condenser lens 3 for imaging electron source 1 on the specimen at point 5 and annular diaphragm 10 between source 1 and lens 3 so that the specimen is illuminated by a hollow conical beam of electrons, the conical angle of which is variable by use of a control means which by appropriate energizations of lenses 2 and 3 automatically maintains the image in focus. Angular scanning may be employed, the specimen be illuminated at a plurality of discrete energization levels of the lenses, and each image stored for later comparison. Fig. 1 also includes specimen holder 4, objective lens 6, objective diaphragm 7, and display screen 8. For each lens 2 setting, lens 3 is automatically energized to effect imaging. In the specimen, some electrons are scattered in cone 16. Fig. 2 (not shown) includes supply (20) with timer (21) providing illumination periods (22), with a sequence of illumination angles corresponding to block sequences (23, 24). Correlation between sequence of illumination times and a sequence of angles with reference to a known scattering pattern of a given structure, e.g. a type of atom, enables the particular structures to be selectively displayed. The preferred correlation is that the output signal is equal at all angles for the selected structure only. Image signal from TV camera tube (25) may be recorded in computer store (26) for display on monitor (27). Store (26) may incorporate 10<SP>4</SP> storage elements each with a (16) bit store. A colour monitor utilizes chromatizing device (28), image elements of the same diffraction pattern.
GB1116974A 1973-03-28 1974-03-13 Electron microscope Expired GB1469777A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7304298A NL7304298A (en) 1973-03-28 1973-03-28

Publications (1)

Publication Number Publication Date
GB1469777A true GB1469777A (en) 1977-04-06

Family

ID=19818520

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1116974A Expired GB1469777A (en) 1973-03-28 1974-03-13 Electron microscope

Country Status (11)

Country Link
US (1) US3889114A (en)
JP (1) JPS49130668A (en)
BE (1) BE812849A (en)
CA (1) CA1002209A (en)
DE (1) DE2412675A1 (en)
ES (1) ES424663A1 (en)
FR (1) FR2223831B1 (en)
GB (1) GB1469777A (en)
IT (1) IT1003873B (en)
NL (1) NL7304298A (en)
SE (1) SE392365B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208035A (en) * 1987-05-28 1989-02-15 Jeol Ltd Analytical electron microscope
GB2221567A (en) * 1988-07-25 1990-02-07 Hitachi Ltd Scanning electron microscope

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (en) * 1975-09-19 1977-03-31 Max Planck Gesellschaft BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
AT353519B (en) * 1978-03-07 1979-11-26 Oesterr Studien Atomenergie DEVICE FOR CONCENTRATING THE PRIMAERION BEAM
JPH0594798A (en) * 1991-05-21 1993-04-16 Jeol Ltd Electronic optical observation device for focal depth changeable electron microscope, etc.
DE4412137A1 (en) * 1993-12-28 1995-10-26 Alexander Dr Zarubin Microscope that works with charged particles
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
DE102009016861A1 (en) * 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh particle beam
CN103388406A (en) * 2013-07-29 2013-11-13 苏州市世好建材新技术工程有限公司 Spliced mortar spreader

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464419A (en) * 1947-12-26 1949-03-15 Rca Corp Method of and apparatus for selectively achieving electronic darkfield and bright field illumation
DE2213208C3 (en) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationally symmetrical, spherically corrected corpuscular beam optical imaging system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208035A (en) * 1987-05-28 1989-02-15 Jeol Ltd Analytical electron microscope
GB2208035B (en) * 1987-05-28 1992-03-18 Jeol Ltd Analytical electron microscope
GB2221567A (en) * 1988-07-25 1990-02-07 Hitachi Ltd Scanning electron microscope
US4983832A (en) * 1988-07-25 1991-01-08 Hitachi, Ltd. Scanning electron microscope
GB2221567B (en) * 1988-07-25 1992-11-11 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
BE812849A (en) 1974-09-26
DE2412675A1 (en) 1974-10-10
IT1003873B (en) 1976-06-10
CA1002209A (en) 1976-12-21
SE392365B (en) 1977-03-21
FR2223831B1 (en) 1977-09-30
US3889114A (en) 1975-06-10
ES424663A1 (en) 1976-06-01
NL7304298A (en) 1974-10-01
FR2223831A1 (en) 1974-10-25
JPS49130668A (en) 1974-12-14

Similar Documents

Publication Publication Date Title
US4240108A (en) Vehicle controlled raster display system
US4365869A (en) Large-screen visualization device
DE4424947B4 (en) projection device
US4651200A (en) Split-image, multi-power microscopic image display system and method
GB1469777A (en) Electron microscope
US4091374A (en) Method for pictorially displaying output information generated by an object imaging apparatus
US3076054A (en) X-ray system
US3113180A (en) Composite image reproducing means
GB1454097A (en) Corpuscular beam transmission microscopes
US3917946A (en) Electron-optical device for the recording of selected diffraction patterns
Golab et al. FIDAC—film input to digital automatic computer
US2798901A (en) Dark-trace cathode ray tube presentation systems
GB2144535A (en) Correlating a pair of patterns
JPS55126954A (en) Scanning electron microscope
US3740464A (en) Apparatus for simultaneous reproduction of images of selected superimposed pictures
KR0158405B1 (en) Measurement apparatus for color purity
JPH0139393Y2 (en)
US2400066A (en) Television apparatus
GB1006023A (en) Improvements in or relating to video signal display systems
JP2529687B2 (en) Spectral imaging device
SU851324A1 (en) Device for registering object motion phases in preparating for drawn cartoon film shooting
Eriksen et al. N-channel tachistoscopes
SU731446A2 (en) Device for displaying graphic information on crt screen
Dombrowskt et al. High speed photography of fast moving particles
JPS61243649A (en) Electron microscope for simultaneously displaing diffraction image

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee