IL82882A - Pressure transducer with stress isolation for hard mounting - Google Patents

Pressure transducer with stress isolation for hard mounting

Info

Publication number
IL82882A
IL82882A IL82882A IL8288287A IL82882A IL 82882 A IL82882 A IL 82882A IL 82882 A IL82882 A IL 82882A IL 8288287 A IL8288287 A IL 8288287A IL 82882 A IL82882 A IL 82882A
Authority
IL
Israel
Prior art keywords
pressure transducer
stress isolation
hard mounting
hard
mounting
Prior art date
Application number
IL82882A
Other languages
English (en)
Other versions
IL82882A0 (en
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of IL82882A0 publication Critical patent/IL82882A0/xx
Publication of IL82882A publication Critical patent/IL82882A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IL82882A 1986-06-23 1987-06-15 Pressure transducer with stress isolation for hard mounting IL82882A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/877,278 US4800758A (en) 1986-06-23 1986-06-23 Pressure transducer with stress isolation for hard mounting

Publications (2)

Publication Number Publication Date
IL82882A0 IL82882A0 (en) 1987-12-20
IL82882A true IL82882A (en) 1991-05-12

Family

ID=25369620

Family Applications (1)

Application Number Title Priority Date Filing Date
IL82882A IL82882A (en) 1986-06-23 1987-06-15 Pressure transducer with stress isolation for hard mounting

Country Status (8)

Country Link
US (1) US4800758A (xx)
EP (1) EP0311613B1 (xx)
JP (2) JP2660247B2 (xx)
BR (1) BR8707718A (xx)
CA (1) CA1311365C (xx)
DE (1) DE3772992D1 (xx)
IL (1) IL82882A (xx)
WO (1) WO1987007948A1 (xx)

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FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
DE3932618A1 (de) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
US5094109A (en) * 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5421956A (en) * 1991-11-20 1995-06-06 Nippondenso Co., Ltd. Method of fabricating an integrated pressure sensor
DE4321804A1 (de) * 1993-06-30 1995-01-12 Ranco Inc Verfahren zur Herstellung von Kleinbauelementen
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
JP3415846B2 (ja) * 1993-09-24 2003-06-09 ローズマウント インコーポレイテッド 圧力伝達装置の隔離ダイアフラム
US5424650A (en) * 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
US5520054A (en) * 1994-03-29 1996-05-28 Rosemount Inc. Increased wall thickness for robust bond for micromachined sensor
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
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US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor
US6059254A (en) * 1997-03-27 2000-05-09 Rosemount Inc. Process instrument mount
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US20020003274A1 (en) * 1998-08-27 2002-01-10 Janusz Bryzek Piezoresistive sensor with epi-pocket isolation
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US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6255728B1 (en) 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
JP3620795B2 (ja) 2000-01-06 2005-02-16 ローズマウント インコーポレイテッド 超小型電気機械システム用電気的相互接続部の結晶粒成長
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US20040041254A1 (en) * 2002-09-04 2004-03-04 Lewis Long Packaged microchip
US7166911B2 (en) 2002-09-04 2007-01-23 Analog Devices, Inc. Packaged microchip with premolded-type package
US6946742B2 (en) * 2002-12-19 2005-09-20 Analog Devices, Inc. Packaged microchip with isolator having selected modulus of elasticity
US6768196B2 (en) * 2002-09-04 2004-07-27 Analog Devices, Inc. Packaged microchip with isolation
US20050056870A1 (en) * 2002-12-19 2005-03-17 Karpman Maurice S. Stress sensitive microchip with premolded-type package
AU2004202234B2 (en) * 2003-07-18 2009-12-17 St. Jude Medical Coordination Center Bvba Sensor and guide wire assembly
SE0302097L (sv) * 2003-07-18 2005-03-08 Radi Medical Systems Sensor- och styrtrådsanordning för intravaskulär mätning av fysiologiska variabler
DE10349540A1 (de) * 2003-10-22 2005-05-25 Endress + Hauser Gmbh + Co. Kg Halbleiterdrucksensor und Verfahren zu seiner Herstellung
FR2881224B1 (fr) * 2005-01-21 2007-11-23 Auxitrol Sa Sa Ensemble de detection de la pression absolue d'un fluide
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US7622782B2 (en) * 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same
DE602007013484D1 (de) * 2006-02-27 2011-05-12 Auxitrol Sa Spannungsisolierter Drucksensorchip
US7661318B2 (en) * 2006-02-27 2010-02-16 Auxitrol S.A. Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly
WO2008003051A2 (en) * 2006-06-29 2008-01-03 Analog Devices, Inc. Stress mitigation in packaged microchips
US7694610B2 (en) * 2007-06-27 2010-04-13 Siemens Medical Solutions Usa, Inc. Photo-multiplier tube removal tool
US7798010B2 (en) * 2007-10-11 2010-09-21 Honeywell International Inc. Sensor geometry for improved package stress isolation
WO2009108230A1 (en) * 2007-12-13 2009-09-03 The Timken Company Sensor module with stress isolated temperature compensation and method of manufacture
US8614491B2 (en) * 2009-04-07 2013-12-24 Honeywell International Inc. Package interface plate for package isolation structures
DE102009046692A1 (de) * 2009-11-13 2011-05-19 Endress + Hauser Gmbh + Co. Kg Druck-Messeinrichtung
AU2012213262B2 (en) 2011-01-31 2015-10-01 Bae Systems Plc Arrangement and method of mounting an active element on a solid substrate
JP6051873B2 (ja) * 2013-01-09 2016-12-27 株式会社デンソー 物理量センサおよびその製造方法
US9676614B2 (en) 2013-02-01 2017-06-13 Analog Devices, Inc. MEMS device with stress relief structures
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
US10131538B2 (en) 2015-09-14 2018-11-20 Analog Devices, Inc. Mechanically isolated MEMS device
DE102016107856A1 (de) * 2016-04-28 2017-11-02 Endress + Hauser Gmbh + Co. Kg Druckmesseinrichtung
US10481025B2 (en) 2017-01-26 2019-11-19 Rosemount Aerospace Inc. Piezoresistive sensor with spring flexures for stress isolation
EP3586148B1 (en) 2017-05-08 2022-06-29 Safran Colibrys SA Decoupling structure for accelerometer
US11153985B2 (en) * 2017-06-29 2021-10-19 Rosemount Inc. Modular hybrid circuit packaging
DE102017127704A1 (de) 2017-11-23 2019-05-23 Endress+Hauser SE+Co. KG Druckmesseinrichtung
JP6810680B2 (ja) * 2017-12-20 2021-01-06 株式会社鷺宮製作所 圧力センサ
JP2021517969A (ja) 2018-05-17 2021-07-29 ローズマウント インコーポレイテッド 測定素子およびこれを具備する測定機器
CN109738098A (zh) * 2018-12-29 2019-05-10 菲比蓝科技(深圳)有限公司 压力传感器及其形成方法
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
US11981560B2 (en) 2020-06-09 2024-05-14 Analog Devices, Inc. Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
CN112082681B (zh) * 2020-09-18 2021-11-23 重庆齿轮箱有限责任公司 一种风电主齿轮箱无应力安装方法
US11607589B1 (en) 2020-10-01 2023-03-21 Mark E. Van Denend Device for accurately measuring string bed stiffness in a racket
US11692895B2 (en) * 2021-03-30 2023-07-04 Rosemount Aerospace Inc. Differential pressure sensor

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US4021766A (en) * 1975-07-28 1977-05-03 Aine Harry E Solid state pressure transducer of the leaf spring type and batch method of making same
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JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
DE2709858B2 (de) * 1977-03-07 1979-01-04 Hebel Gasbetonwerk Gmbh, 8080 Emmering Verfahren zur Herstellung von dampfgehärtetem Gasbeton
JPS6022638B2 (ja) * 1977-06-24 1985-06-03 富士写真フイルム株式会社 記録材料
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JPS58146827A (ja) * 1982-02-25 1983-09-01 Fuji Electric Co Ltd 半導体式圧力センサ
JPS59100833A (ja) * 1982-11-30 1984-06-11 Shimadzu Corp 半導体圧力センサ
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DE3313261A1 (de) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
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JPS59217126A (ja) * 1983-05-25 1984-12-07 Mitsubishi Electric Corp 絶対圧形半導体圧力変換素子
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DE3436440A1 (de) * 1984-10-04 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Halbleiter-messeinrichtung

Also Published As

Publication number Publication date
JP2660247B2 (ja) 1997-10-08
DE3772992D1 (de) 1991-10-17
JP2775430B2 (ja) 1998-07-16
BR8707718A (pt) 1989-08-15
JPH102824A (ja) 1998-01-06
CA1311365C (en) 1992-12-15
WO1987007948A1 (en) 1987-12-30
EP0311613B1 (en) 1991-09-11
IL82882A0 (en) 1987-12-20
JPH01503002A (ja) 1989-10-12
EP0311613A1 (en) 1989-04-19
EP0311613A4 (en) 1989-04-27
US4800758A (en) 1989-01-31

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