IL263638B2 - An improved self-mixing module that uses filters - Google Patents
An improved self-mixing module that uses filtersInfo
- Publication number
- IL263638B2 IL263638B2 IL263638A IL26363818A IL263638B2 IL 263638 B2 IL263638 B2 IL 263638B2 IL 263638 A IL263638 A IL 263638A IL 26363818 A IL26363818 A IL 26363818A IL 263638 B2 IL263638 B2 IL 263638B2
- Authority
- IL
- Israel
- Prior art keywords
- laser
- sensor device
- filter
- vcsel
- light
- Prior art date
Links
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/0205—Interferometers characterised by particular mechanical design details of probe head
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4912—Receivers
- G01S7/4916—Receivers using self-mixing in the laser cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
- H01S5/0028—Laser diodes used as detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02253—Out-coupling of light using lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
- H01S5/02326—Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0239—Combinations of electrical or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18305—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] with emission through the substrate, i.e. bottom emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Semiconductor Lasers (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662349123P | 2016-06-13 | 2016-06-13 | |
| PCT/US2017/037148 WO2017218467A1 (en) | 2016-06-13 | 2017-06-13 | Improved self-mix module utilizing filters |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| IL263638A IL263638A (en) | 2019-01-31 |
| IL263638B1 IL263638B1 (en) | 2023-05-01 |
| IL263638B2 true IL263638B2 (en) | 2023-09-01 |
Family
ID=60664253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL263638A IL263638B2 (en) | 2016-06-13 | 2017-06-13 | An improved self-mixing module that uses filters |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20190331473A1 (enExample) |
| EP (1) | EP3469670A4 (enExample) |
| JP (1) | JP7187324B2 (enExample) |
| KR (1) | KR102390693B1 (enExample) |
| CN (1) | CN110168823B (enExample) |
| IL (1) | IL263638B2 (enExample) |
| WO (1) | WO2017218467A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017218467A1 (en) * | 2016-06-13 | 2017-12-21 | Vixar, Llc | Improved self-mix module utilizing filters |
| EP3718183B1 (en) | 2017-11-29 | 2023-02-15 | Vixar, Inc. | Power monitoring approach for vcsels and vcsel arrays |
| CN111868487B (zh) | 2018-03-20 | 2024-08-30 | 维克萨股份有限公司 | 对眼睛安全的光学模块 |
| US11243686B2 (en) | 2018-04-13 | 2022-02-08 | Apple Inc. | Self-mixing interference based sensors for characterizing user input |
| US11157113B2 (en) * | 2018-04-13 | 2021-10-26 | Apple Inc. | Self-mixing interference based sensors for characterizing touch input |
| US11303355B2 (en) | 2018-05-30 | 2022-04-12 | Apple Inc. | Optical structures in directional free-space optical communication systems for portable electronic devices |
| US10700780B2 (en) | 2018-05-30 | 2020-06-30 | Apple Inc. | Systems and methods for adjusting movable lenses in directional free-space optical communication systems for portable electronic devices |
| CN111446345A (zh) | 2019-01-16 | 2020-07-24 | 隆达电子股份有限公司 | 发光元件的封装结构 |
| DE102019103155A1 (de) * | 2019-02-08 | 2020-08-13 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronische sensoranordnung und optisches messverfahren |
| US11549799B2 (en) * | 2019-07-01 | 2023-01-10 | Apple Inc. | Self-mixing interference device for sensing applications |
| US11112233B2 (en) * | 2019-09-12 | 2021-09-07 | Apple Inc. | Self-mixing particulate matter sensors using VCSELs with extrinsic photodiodes |
| US11984526B2 (en) | 2019-12-12 | 2024-05-14 | Brolis Sensor Technology, Uab | Optical device having an out-of-plane arrangement for light emission and detection |
| WO2021158176A1 (en) * | 2020-02-07 | 2021-08-12 | Ams Sensors Asia Pte. Ltd. | Sensing method and sensor system |
| CN111751830B (zh) * | 2020-07-08 | 2021-02-19 | 北京工业大学 | 一种基于vcsel混合激光的空间微弱目标红外探测系统 |
| CN112461352A (zh) * | 2020-12-08 | 2021-03-09 | 苏州亮芯光电科技有限公司 | 基于量子阱二极管的同质集成光电子装置 |
| US11909171B2 (en) | 2021-03-31 | 2024-02-20 | Apple Inc. | Laser-integrated balance detection for self-mixing interferometry |
| US11543235B2 (en) | 2021-03-31 | 2023-01-03 | Apple Inc. | Hybrid interferometric and scatterometric sensing using in-plane sensors |
| US12413043B2 (en) | 2021-09-21 | 2025-09-09 | Apple Inc. | Self-mixing interference device with tunable microelectromechanical system |
| US12498797B2 (en) * | 2021-11-25 | 2025-12-16 | Pixart Imaging Inc. | Navigation device with improved light utilization efficiency and optical engine thereof |
| DE102022106146A1 (de) | 2022-03-16 | 2023-09-21 | Trumpf Photonic Components Gmbh | Verfahren zum Bereitstellen einer Kalibrierzahl, Computerprogrammprodukt und Laservorrichtung zur Ausführung des Verfahrens |
| US11927441B1 (en) * | 2022-08-19 | 2024-03-12 | Ams International Ag | Self-mixing inteferometry sensor module, electronic device and method of determining an optical power ratio for a self-mixing inteferometry sensor module |
| US20240063607A1 (en) * | 2022-08-22 | 2024-02-22 | Ams International Ag | Laser sensor and method of manufacturing a laser sensor |
| CN115823956B (zh) * | 2022-11-19 | 2025-04-29 | 西安工业大学 | 一种大靶面超音速弹丸着靶坐标测量装置及其测量方法 |
| CN116826507A (zh) * | 2023-04-14 | 2023-09-29 | 苏州立琻半导体有限公司 | 光源模组 |
| DE102023111344A1 (de) * | 2023-05-03 | 2024-11-07 | Trumpf Photonic Components Gmbh | Verfahren zum Messen einer Topographie eines Schweißbereichs in einem Schweißprozess sowie Schweißsystem |
| CN116487984B (zh) * | 2023-05-15 | 2024-08-23 | 密尔医疗科技(深圳)有限公司 | 非互易性相移器及激光器 |
| DE102024112844A1 (de) * | 2024-05-07 | 2025-11-13 | Ams-Osram International Gmbh | Lidar-vorrichtung und elektronische vorrichtung |
| EP4650706A1 (en) * | 2024-05-14 | 2025-11-19 | ams-OSRAM International GmbH | Self mixing interferometric sensor and method for detecting a motion of a moving target |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020901A (en) * | 1990-01-30 | 1991-06-04 | The Perkin-Elmer Corporation | Multimode laser diode system for range measurement |
| US5808743A (en) * | 1996-04-05 | 1998-09-15 | Board Of Regents Of The University Of Colorado | Laser sensor using optical feedback-induced frequency modulation |
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| WO2014167175A1 (en) * | 2013-04-12 | 2014-10-16 | Vaisala Oyj | Laser doppler velocimeter with edge filter demodulation |
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| JP2002040350A (ja) * | 2000-07-28 | 2002-02-06 | Fuji Xerox Co Ltd | 光走査装置 |
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- 2017-06-13 IL IL263638A patent/IL263638B2/en unknown
- 2017-06-13 CN CN201780049020.XA patent/CN110168823B/zh not_active Expired - Fee Related
- 2017-06-13 EP EP17813900.2A patent/EP3469670A4/en not_active Withdrawn
- 2017-06-13 JP JP2018566426A patent/JP7187324B2/ja active Active
- 2017-06-13 KR KR1020197001049A patent/KR102390693B1/ko active Active
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| WO2014167175A1 (en) * | 2013-04-12 | 2014-10-16 | Vaisala Oyj | Laser doppler velocimeter with edge filter demodulation |
Also Published As
| Publication number | Publication date |
|---|---|
| IL263638A (en) | 2019-01-31 |
| CN110168823B (zh) | 2022-04-26 |
| US20190331473A1 (en) | 2019-10-31 |
| JP7187324B2 (ja) | 2022-12-12 |
| CN110168823A (zh) | 2019-08-23 |
| KR20190039927A (ko) | 2019-04-16 |
| KR102390693B1 (ko) | 2022-04-27 |
| EP3469670A1 (en) | 2019-04-17 |
| EP3469670A4 (en) | 2020-05-27 |
| JP2019526785A (ja) | 2019-09-19 |
| US11307019B2 (en) | 2022-04-19 |
| US20210223027A1 (en) | 2021-07-22 |
| WO2017218467A1 (en) | 2017-12-21 |
| IL263638B1 (en) | 2023-05-01 |
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