IL24399A - A positively charged particle source - Google Patents

A positively charged particle source

Info

Publication number
IL24399A
IL24399A IL24399A IL2439965A IL24399A IL 24399 A IL24399 A IL 24399A IL 24399 A IL24399 A IL 24399A IL 2439965 A IL2439965 A IL 2439965A IL 24399 A IL24399 A IL 24399A
Authority
IL
Israel
Prior art keywords
source
jet
charged particles
positively charged
plates
Prior art date
Application number
IL24399A
Other languages
English (en)
Hebrew (he)
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of IL24399A publication Critical patent/IL24399A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Plasma Technology (AREA)
  • Catalysts (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
IL24399A 1964-10-14 1965-10-03 A positively charged particle source IL24399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR991423A FR1476514A (fr) 1964-10-14 1964-10-14 Source d'ions

Publications (1)

Publication Number Publication Date
IL24399A true IL24399A (en) 1969-05-28

Family

ID=8840338

Family Applications (1)

Application Number Title Priority Date Filing Date
IL24399A IL24399A (en) 1964-10-14 1965-10-03 A positively charged particle source

Country Status (10)

Country Link
US (1) US3376469A (fr)
BE (1) BE670351A (fr)
CH (1) CH444829A (fr)
DE (1) DE1489777B1 (fr)
ES (1) ES318459A1 (fr)
FR (1) FR1476514A (fr)
GB (1) GB1063199A (fr)
IL (1) IL24399A (fr)
LU (1) LU49581A1 (fr)
NL (1) NL6512861A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950330C2 (de) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur chemischen Analyse von Proben
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
JPS59113175A (ja) * 1982-12-20 1984-06-29 Nisshin Haiboruteeji Kk 負イオン源
US4472174A (en) * 1983-04-25 1984-09-18 Raymond L. Chuan Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation
US6515426B1 (en) 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor
US6441382B1 (en) 1999-05-21 2002-08-27 Axcelis Technologies, Inc. Deceleration electrode configuration for ultra-low energy ion implanter

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082326A (en) * 1954-03-08 1963-03-19 Schlumberger Well Surv Corp Neutron generating apparatus
FR1140034A (fr) * 1955-01-07 1957-07-09 Licentia Gmbh Source d'ions
DE1021963B (de) * 1955-04-01 1958-01-02 Messen Jaschin G A Einrichtung zur elektrischen Beladung von in einem Luftstrom suspendierter Materie mittels radioaktiver Praeparate
US2934665A (en) * 1956-09-12 1960-04-26 Siemens Ag Ion source
US3279176A (en) * 1959-07-31 1966-10-18 North American Aviation Inc Ion rocket engine
US3287582A (en) * 1963-01-04 1966-11-22 Lionel V Baldwin Apparatus for increasing ion engine beam density

Also Published As

Publication number Publication date
ES318459A1 (es) 1967-05-16
CH444829A (fr) 1967-10-15
US3376469A (en) 1968-04-02
FR1476514A (fr) 1967-04-14
GB1063199A (en) 1967-03-30
NL6512861A (fr) 1966-04-15
DE1489777B1 (de) 1970-01-15
LU49581A1 (fr) 1965-12-06
BE670351A (fr) 1966-01-17

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