IL241879B - A multiplier, an image sensor, and a test system using a multiplier or image sensor - Google Patents

A multiplier, an image sensor, and a test system using a multiplier or image sensor

Info

Publication number
IL241879B
IL241879B IL241879A IL24187915A IL241879B IL 241879 B IL241879 B IL 241879B IL 241879 A IL241879 A IL 241879A IL 24187915 A IL24187915 A IL 24187915A IL 241879 B IL241879 B IL 241879B
Authority
IL
Israel
Prior art keywords
image sensor
insection
pmt
photomultiplier tube
photomultiplier
Prior art date
Application number
IL241879A
Other languages
English (en)
Hebrew (he)
Original Assignee
Kla Tencor Corp
Kla Tencor Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp, Kla Tencor Tech filed Critical Kla Tencor Corp
Publication of IL241879B publication Critical patent/IL241879B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J40/00—Photoelectric discharge tubes not involving the ionisation of a gas
    • H01J40/02—Details
    • H01J40/04—Electrodes
    • H01J40/06—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/08—Cathode arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
IL241879A 2013-04-01 2015-10-06 A multiplier, an image sensor, and a test system using a multiplier or image sensor IL241879B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361807058P 2013-04-01 2013-04-01
US14/198,175 US9478402B2 (en) 2013-04-01 2014-03-05 Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
PCT/US2014/032579 WO2014165544A1 (en) 2013-04-01 2014-04-01 Photomultiplier tube, image sensor, and an inspection system using a pmt or image sensor

Publications (1)

Publication Number Publication Date
IL241879B true IL241879B (en) 2020-05-31

Family

ID=51619860

Family Applications (1)

Application Number Title Priority Date Filing Date
IL241879A IL241879B (en) 2013-04-01 2015-10-06 A multiplier, an image sensor, and a test system using a multiplier or image sensor

Country Status (8)

Country Link
US (2) US9478402B2 (enExample)
EP (1) EP2973713B1 (enExample)
JP (1) JP6328225B2 (enExample)
KR (1) KR102239767B1 (enExample)
CN (1) CN105210189B (enExample)
IL (1) IL241879B (enExample)
TW (1) TWI631722B (enExample)
WO (1) WO2014165544A1 (enExample)

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US20140291493A1 (en) 2014-10-02
US20160300701A1 (en) 2016-10-13
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US9478402B2 (en) 2016-10-25
EP2973713A1 (en) 2016-01-20
EP2973713A4 (en) 2016-10-05
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US9620341B2 (en) 2017-04-11
KR102239767B1 (ko) 2021-04-12

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