IL154620A0 - Combination horizontal and vertical thermal actuator - Google Patents
Combination horizontal and vertical thermal actuatorInfo
- Publication number
- IL154620A0 IL154620A0 IL15462001A IL15462001A IL154620A0 IL 154620 A0 IL154620 A0 IL 154620A0 IL 15462001 A IL15462001 A IL 15462001A IL 15462001 A IL15462001 A IL 15462001A IL 154620 A0 IL154620 A0 IL 154620A0
- Authority
- IL
- Israel
- Prior art keywords
- thermal actuator
- vertical thermal
- combination horizontal
- horizontal
- combination
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/01—Details
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Control Of Position Or Direction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/659,282 US6483419B1 (en) | 2000-09-12 | 2000-09-12 | Combination horizontal and vertical thermal actuator |
PCT/US2001/025786 WO2002023565A2 (en) | 2000-09-12 | 2001-08-17 | Combination horizontal and vertical thermal actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
IL154620A0 true IL154620A0 (en) | 2003-09-17 |
Family
ID=24644792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15462001A IL154620A0 (en) | 2000-09-12 | 2001-08-17 | Combination horizontal and vertical thermal actuator |
Country Status (9)
Country | Link |
---|---|
US (2) | US6483419B1 (xx) |
EP (1) | EP1346383A2 (xx) |
JP (1) | JP2004509368A (xx) |
KR (1) | KR20030067666A (xx) |
AU (1) | AU2001283434A1 (xx) |
CA (1) | CA2422040A1 (xx) |
IL (1) | IL154620A0 (xx) |
TW (1) | TW502003B (xx) |
WO (1) | WO2002023565A2 (xx) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6483419B1 (en) * | 2000-09-12 | 2002-11-19 | 3M Innovative Properties Company | Combination horizontal and vertical thermal actuator |
US6708491B1 (en) * | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US6647164B1 (en) | 2000-10-31 | 2003-11-11 | 3M Innovative Properties Company | Gimbaled micro-mirror positionable by thermal actuators |
US6679055B1 (en) * | 2002-01-31 | 2004-01-20 | Zyvex Corporation | Electrothermal quadmorph microactuator |
US20030201654A1 (en) * | 2002-04-26 | 2003-10-30 | Ellis Matthew D. | Microgripper having linearly actuated grasping mechanisms |
US20030200748A1 (en) * | 2002-04-30 | 2003-10-30 | Adc Telecommunications, Inc. | Thermally-activated actuator |
TW593125B (en) * | 2002-08-09 | 2004-06-21 | Ind Tech Res Inst | MEMS type differential actuator |
US6685303B1 (en) * | 2002-08-14 | 2004-02-03 | Eastman Kodak Company | Thermal actuator with reduced temperature extreme and method of operating same |
US6691513B1 (en) * | 2002-08-16 | 2004-02-17 | Pc Lens Corporation | System and method for providing an improved electrothermal actuator for a micro-electro-mechanical device |
KR100499273B1 (ko) * | 2002-10-21 | 2005-07-01 | 한국전자통신연구원 | 광 스위치 소자의 패키징을 위한 실리콘 광학 벤치 및이를 이용한 광 스위치 패키지와 그 제조 방법 |
US6835589B2 (en) * | 2002-11-14 | 2004-12-28 | International Business Machines Corporation | Three-dimensional integrated CMOS-MEMS device and process for making the same |
WO2004066326A2 (en) * | 2003-01-17 | 2004-08-05 | The Regents Of The University Of California | Electro-thermally actuated lateral contact microrelay and associated manufacturing process |
WO2004089814A2 (en) * | 2003-04-08 | 2004-10-21 | Bookham Technology Plc | Thermal actuator |
US7036312B2 (en) | 2003-04-22 | 2006-05-02 | Simpler Networks, Inc. | MEMS actuators |
US7096568B1 (en) | 2003-07-10 | 2006-08-29 | Zyvex Corporation | Method of manufacturing a microcomponent assembly |
US7025619B2 (en) * | 2004-02-13 | 2006-04-11 | Zyvex Corporation | Sockets for microassembly |
US6956219B2 (en) * | 2004-03-12 | 2005-10-18 | Zyvex Corporation | MEMS based charged particle deflector design |
US7081630B2 (en) * | 2004-03-12 | 2006-07-25 | Zyvex Corporation | Compact microcolumn for automated assembly |
FR2868591B1 (fr) * | 2004-04-06 | 2006-06-09 | Commissariat Energie Atomique | Microcommutateur a faible tension d'actionnement et faible consommation |
US20060055499A1 (en) * | 2004-09-16 | 2006-03-16 | Bolle Cristian A | Fuse arrangement |
ATE525738T1 (de) * | 2005-03-18 | 2011-10-15 | Reseaux Mems | Mems-aktuatoren und -schalter |
US20060245028A1 (en) * | 2005-04-15 | 2006-11-02 | Sriram Ramamoorthi | Light modulator device |
US7314382B2 (en) | 2005-05-18 | 2008-01-01 | Zyvex Labs, Llc | Apparatus and methods of manufacturing and assembling microscale and nanoscale components and assemblies |
KR100633101B1 (ko) | 2005-07-27 | 2006-10-12 | 삼성전자주식회사 | 비대칭 스프링 강성을 갖는 rf 멤스 스위치 |
US7548145B2 (en) * | 2006-01-19 | 2009-06-16 | Innovative Micro Technology | Hysteretic MEMS thermal device and method of manufacture |
GB0610392D0 (en) * | 2006-05-25 | 2006-07-05 | Univ Durham | Electro-mechanical actuator and apparatus incorporating such device |
US7605377B2 (en) * | 2006-10-17 | 2009-10-20 | Zyvex Corporation | On-chip reflectron and ion optics |
US20090033454A1 (en) * | 2007-08-01 | 2009-02-05 | Simpler Networks Inc. | MEMS actuators with even stress distribution |
US7733200B2 (en) * | 2007-09-29 | 2010-06-08 | Alcatel-Lucent Usa Inc. | MEMS actuator |
DE102008011175B4 (de) * | 2008-02-26 | 2010-05-12 | Nb Technologies Gmbh | Mikromechanischer Aktuator und Verfahren zu seiner Herstellung |
KR100954544B1 (ko) | 2008-06-27 | 2010-04-22 | 한국산업기술대학교산학협력단 | 열구동 파장가변 광원 |
EP2168908A1 (en) * | 2008-09-30 | 2010-03-31 | Alcatel Lucent | Micromechanical thermal actuator |
US8093971B2 (en) * | 2008-12-22 | 2012-01-10 | General Electric Company | Micro-electromechanical system switch |
CN101905851A (zh) * | 2010-08-05 | 2010-12-08 | 上海交通大学 | 基于氧化铝薄膜与聚合物联合作用的电热微驱动器 |
CN107628587B (zh) * | 2017-09-21 | 2019-07-23 | 中国传媒大学 | 一种多级电热驱动mems执行器及其制造方法 |
US10332687B2 (en) | 2017-10-23 | 2019-06-25 | Blackberry Limited | Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof |
US10497774B2 (en) | 2017-10-23 | 2019-12-03 | Blackberry Limited | Small-gap coplanar tunable capacitors and methods for manufacturing thereof |
US11464140B2 (en) | 2019-12-06 | 2022-10-04 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
US10788034B2 (en) | 2018-08-10 | 2020-09-29 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
US11510341B2 (en) * | 2019-12-06 | 2022-11-22 | Frore Systems Inc. | Engineered actuators usable in MEMs active cooling devices |
US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
EP4078671A4 (en) | 2019-12-17 | 2024-01-10 | Frore Systems Inc. | MEMS-BASED COOLING SYSTEMS FOR CLOSED AND OPEN DEVICES |
WO2022072286A1 (en) | 2020-10-02 | 2022-04-07 | Frore Systems Inc. | Active heat sink |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4423401A (en) * | 1982-07-21 | 1983-12-27 | Tektronix, Inc. | Thin-film electrothermal device |
US4688885A (en) | 1985-05-28 | 1987-08-25 | American Telephone And Telegraph Company, At&T Bell Laboratories | Lightwave component package |
CA1262304A (en) | 1985-06-28 | 1989-10-17 | John Charles Goodwin | Laser-fiber positioner |
GB8707854D0 (en) | 1987-04-02 | 1987-05-07 | British Telecomm | Radiation deflector assembly |
DE3809597A1 (de) | 1988-03-22 | 1989-10-05 | Fraunhofer Ges Forschung | Mikromechanisches stellelement |
DE3844669A1 (de) * | 1988-12-09 | 1990-06-13 | Fraunhofer Ges Forschung | Mikromechanische einrichtung |
US5206557A (en) | 1990-11-27 | 1993-04-27 | Mcnc | Microelectromechanical transducer and fabrication method |
US5351412A (en) | 1991-06-11 | 1994-10-04 | International Business Machines Corporation | Micro positioning device |
WO1993021663A1 (en) | 1992-04-08 | 1993-10-28 | Georgia Tech Research Corporation | Process for lift-off of thin film materials from a growth substrate |
CA2154357C (en) | 1993-02-04 | 2004-03-02 | Kevin A. Shaw | Microstructures and single-mask, single-crystal process for fabrication thereof |
JPH0741207B2 (ja) | 1993-02-18 | 1995-05-10 | インターナショナル・ビジネス・マシーンズ・コーポレイション | マイクロアクチュエータ |
US5536988A (en) | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5446811A (en) | 1994-03-14 | 1995-08-29 | Hewlett-Packard Company | Thermally actuated optical fiber switch |
US5685062A (en) | 1994-07-05 | 1997-11-11 | Ford Motor Company | Self-assembly fabrication method for planar micro-motor |
FR2725038B1 (fr) * | 1994-09-27 | 1996-11-15 | Dassault Automatismes | Commutateur optique integre bidirectionnel destine a commuter le faisceau lumineux d'une fibre optique |
DE69511999T2 (de) | 1994-10-31 | 2000-03-16 | Texas Instruments Inc. | Verbesserungen für mikromechanische Geräte |
US5726480A (en) * | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
SE9501547D0 (sv) | 1995-04-27 | 1995-04-27 | Pharmacia Ab | Micromachined structures actuated by hinges and use thereof |
US5602955A (en) | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5962949A (en) * | 1996-12-16 | 1999-10-05 | Mcnc | Microelectromechanical positioning apparatus |
US5994816A (en) * | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US5880921A (en) * | 1997-04-28 | 1999-03-09 | Rockwell Science Center, Llc | Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
US5912094A (en) | 1997-05-15 | 1999-06-15 | Lucent Technologies, Inc. | Method and apparatus for making a micro device |
AUPO794797A0 (en) | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A device (MEMS07) |
US5960132A (en) | 1997-09-09 | 1999-09-28 | At&T Corp. | Fiber-optic free-space micromachined matrix switches |
US5963367A (en) * | 1997-09-23 | 1999-10-05 | Lucent Technologies, Inc. | Micromechanical xyz stage for use with optical elements |
US5994159A (en) | 1997-12-22 | 1999-11-30 | Lucent Technologies, Inc. | Self-assemblying micro-mechanical device |
US5995688A (en) | 1998-06-01 | 1999-11-30 | Lucent Technologies, Inc. | Micro-opto-electromechanical devices and method therefor |
US5959376A (en) | 1998-09-10 | 1999-09-28 | Sandia Corporation | Microelectromechanical reciprocating-tooth indexing apparatus |
US6101371A (en) | 1998-09-12 | 2000-08-08 | Lucent Technologies, Inc. | Article comprising an inductor |
US6014240A (en) | 1998-12-01 | 2000-01-11 | Xerox Corporation | Method and apparatus for an integrated laser beam scanner using a carrier substrate |
US6070656A (en) | 1998-12-09 | 2000-06-06 | The Aerospace Corporation | Microelectronic substrate active thermal cooling wick |
US6236300B1 (en) * | 1999-03-26 | 2001-05-22 | R. Sjhon Minners | Bistable micro-switch and method of manufacturing the same |
US6211598B1 (en) * | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
US6275325B1 (en) | 2000-04-07 | 2001-08-14 | Microsoft Corporation | Thermally activated microelectromechanical systems actuator |
US6483419B1 (en) * | 2000-09-12 | 2002-11-19 | 3M Innovative Properties Company | Combination horizontal and vertical thermal actuator |
US6708491B1 (en) * | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US6531947B1 (en) * | 2000-09-12 | 2003-03-11 | 3M Innovative Properties Company | Direct acting vertical thermal actuator with controlled bending |
US6438954B1 (en) * | 2001-04-27 | 2002-08-27 | 3M Innovative Properties Company | Multi-directional thermal actuator |
-
2000
- 2000-09-12 US US09/659,282 patent/US6483419B1/en not_active Expired - Fee Related
-
2001
- 2001-08-17 EP EP01962238A patent/EP1346383A2/en not_active Withdrawn
- 2001-08-17 CA CA002422040A patent/CA2422040A1/en not_active Abandoned
- 2001-08-17 AU AU2001283434A patent/AU2001283434A1/en not_active Abandoned
- 2001-08-17 KR KR10-2003-7003552A patent/KR20030067666A/ko not_active Application Discontinuation
- 2001-08-17 IL IL15462001A patent/IL154620A0/xx unknown
- 2001-08-17 JP JP2002527522A patent/JP2004509368A/ja active Pending
- 2001-08-17 WO PCT/US2001/025786 patent/WO2002023565A2/en not_active Application Discontinuation
- 2001-08-28 TW TW090121199A patent/TW502003B/zh not_active IP Right Cessation
-
2002
- 2002-10-02 US US10/263,117 patent/US20030038703A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU2001283434A1 (en) | 2002-03-26 |
EP1346383A2 (en) | 2003-09-24 |
TW502003B (en) | 2002-09-11 |
JP2004509368A (ja) | 2004-03-25 |
WO2002023565A3 (en) | 2003-07-10 |
WO2002023565A2 (en) | 2002-03-21 |
US6483419B1 (en) | 2002-11-19 |
US20030038703A1 (en) | 2003-02-27 |
KR20030067666A (ko) | 2003-08-14 |
CA2422040A1 (en) | 2002-03-21 |
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