IL130992A - Method for reducing measurement errors made by a machine using a probe and a machine using said method - Google Patents
Method for reducing measurement errors made by a machine using a probe and a machine using said methodInfo
- Publication number
- IL130992A IL130992A IL13099299A IL13099299A IL130992A IL 130992 A IL130992 A IL 130992A IL 13099299 A IL13099299 A IL 13099299A IL 13099299 A IL13099299 A IL 13099299A IL 130992 A IL130992 A IL 130992A
- Authority
- IL
- Israel
- Prior art keywords
- machine
- probe
- measurement errors
- errors made
- reducing measurement
- Prior art date
Links
- 238000000034 method Methods 0.000 title 2
- 238000005259 measurement Methods 0.000 title 1
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37432—Detected by accelerometer, piezo electric
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41128—Compensate vibration beam, gantry, feedback of speed of non driven end
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/42—Servomotor, servo controller kind till VSS
- G05B2219/42077—Position, speed or current, combined with vibration feedback
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9815830.6A GB9815830D0 (en) | 1998-07-22 | 1998-07-22 | Method of and apparatus for reducing vibrations on probes carried by coordinate measuring machines |
Publications (2)
Publication Number | Publication Date |
---|---|
IL130992A0 IL130992A0 (en) | 2001-01-28 |
IL130992A true IL130992A (en) | 2003-02-12 |
Family
ID=10835878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL13099299A IL130992A (en) | 1998-07-22 | 1999-07-20 | Method for reducing measurement errors made by a machine using a probe and a machine using said method |
Country Status (5)
Country | Link |
---|---|
US (2) | US6412329B1 (xx) |
EP (1) | EP0974882A3 (xx) |
JP (1) | JP4478248B2 (xx) |
GB (1) | GB9815830D0 (xx) |
IL (1) | IL130992A (xx) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6810597B2 (en) * | 1999-04-08 | 2004-11-02 | Renishaw Plc | Use of surface measuring probes |
GB0016533D0 (en) * | 2000-07-06 | 2000-08-23 | Renishaw Plc | Method of and apparatus for correction of coordinate measurement errors due to vibrations in coordinate measuring machines (cmms) |
DE10257856A1 (de) * | 2002-12-11 | 2004-07-08 | Leitz Messtechnik Gmbh | Verfahren zur Schwingungsdämpfung eines Koordinatenmessgerätes sowie Koordinatenmessgerät |
GB0326532D0 (en) * | 2003-11-13 | 2003-12-17 | Renishaw Plc | Method of error compensation |
DE102004038416B4 (de) * | 2004-07-30 | 2014-02-06 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Bestimmen von Raumkoordinaten eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät |
JP4335123B2 (ja) * | 2004-11-26 | 2009-09-30 | ファナック株式会社 | 制御装置 |
JP2006159345A (ja) * | 2004-12-07 | 2006-06-22 | Fanuc Ltd | 制御装置 |
JP4478584B2 (ja) * | 2005-01-17 | 2010-06-09 | 株式会社ミツトヨ | 位置制御装置、測定装置および加工装置 |
GB2425840A (en) * | 2005-04-13 | 2006-11-08 | Renishaw Plc | Error correction of workpiece measurements |
JP5658863B2 (ja) * | 2005-04-26 | 2015-01-28 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | プローブの較正 |
DE102005032749A1 (de) * | 2005-07-13 | 2007-01-18 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Antasten eines Werkstücks mit einem Koordinatenmessgerät und Koordinatenmessgeräte |
US20070168085A1 (en) * | 2005-11-18 | 2007-07-19 | Guilford John H | Systems and method for adaptively adjusting a control loop |
DE102006009181A1 (de) * | 2006-02-24 | 2007-09-06 | Carl Zeiss Industrielle Messtechnik Gmbh | Sichere Überwachung der Geschwindigkeit bei Koordinatenmessgeräten |
JP4851819B2 (ja) * | 2006-03-16 | 2012-01-11 | 株式会社ミツトヨ | 測定制御回路の制御ゲイン調整方法および測定制御回路 |
GB0611109D0 (en) * | 2006-06-06 | 2006-07-19 | Renishaw Plc | A method for measuring workpieces |
DE102006055005A1 (de) * | 2006-11-17 | 2008-05-29 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zum Bestimmen von Raumkoordinaten an einer Vielzahl von Messpunkten |
EP1983297B1 (en) * | 2007-04-18 | 2010-04-07 | Hexagon Metrology AB | Scanning probe with constant scanning speed |
US8543416B2 (en) * | 2007-12-18 | 2013-09-24 | Hospira, Inc. | Infusion pump with configurable screen settings |
JP5424581B2 (ja) * | 2008-06-06 | 2014-02-26 | キヤノン株式会社 | 部分測定を合成する形状測定方法 |
US8197473B2 (en) | 2009-02-20 | 2012-06-12 | Vivant Medical, Inc. | Leaky-wave antennas for medical applications |
JP5438995B2 (ja) * | 2009-03-10 | 2014-03-12 | 株式会社ミツトヨ | 形状測定機および倣いプローブ装置 |
CN102472662B (zh) | 2009-06-30 | 2014-06-18 | 六边形度量衡股份公司 | 使用振动检测的坐标测量机 |
DE102009049534A1 (de) | 2009-10-06 | 2011-04-07 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät mit Lageänderungssensoren |
US8619361B2 (en) * | 2010-03-31 | 2013-12-31 | Nikon Corporation | Direct derivative feedforward vibration compensation system |
DE102010015780A1 (de) | 2010-04-20 | 2011-10-20 | Carl Zeiss Industrielle Messtechnik Gmbh | Betrieb einer Koordinatenmessmaschine oder einer Werkzeugmaschine |
DE102010052503B4 (de) | 2010-11-26 | 2012-06-21 | Wenzel Scantec Gmbh | Verfahren zur Steuerung eines Koordinatenmessgeräts sowie Koordinatenmessgerät |
CN103732364B (zh) * | 2012-03-15 | 2016-04-27 | 奥林巴斯株式会社 | 机械手装置 |
WO2013159803A1 (de) | 2012-04-23 | 2013-10-31 | Carl Zeiss Industrielle Messtechnik Gmbh | Steuerung des antriebsmotors von geräten, die ein von dem antriebsmotor angetriebenes bewegliches teil aufweisen |
DE102012207110A1 (de) * | 2012-04-27 | 2013-10-31 | Homag Holzbearbeitungssysteme Ag | Schwingungsdämpfungssystem |
US9568075B2 (en) * | 2013-10-28 | 2017-02-14 | Seiko Epson Corporation | Robot, robot control device, and robot system |
WO2015139505A1 (en) * | 2014-03-20 | 2015-09-24 | Harbin Institute Of Technology | Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part |
EP3289310B1 (en) | 2015-04-28 | 2022-06-15 | Hexagon Technology Center GmbH | Active damping of a measuring device |
DE102016112011A1 (de) * | 2016-04-14 | 2017-10-19 | Jenoptik Industrial Metrology Germany Gmbh | Verfahren zum Betreiben einer Messvorrichtung |
DE102017103938A1 (de) * | 2017-02-24 | 2018-08-30 | Carl Zeiss Industrielle Messtechnik Gmbh | Vorrichtung zum Messen der Rauheit einer Werkstückoberfläche |
US9835433B1 (en) * | 2017-05-09 | 2017-12-05 | Tesa Sa | Touch trigger probe |
GB201721309D0 (en) | 2017-12-19 | 2018-01-31 | Renishaw Plc | Production and measurement of workpieces |
CN108015627B (zh) * | 2017-12-25 | 2023-11-10 | 东莞捷荣技术股份有限公司 | 一种用于cnc机台探头的检测控制装置及其控制方法 |
CN111294014B (zh) * | 2018-12-10 | 2023-10-27 | 广州汽车集团股份有限公司 | 一种信号积分去偏差方法及其系统、电子设备 |
DE102021212817B4 (de) | 2021-11-15 | 2023-12-21 | Carl Zeiss Industrielle Messtechnik Gmbh | Wiederholte Positionsbestimmung eines beweglichen Teils eines Koordinatenmessgerätes |
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US3301508A (en) * | 1961-06-07 | 1967-01-31 | United Aircraft Corp | Guidance system with stellar correction |
US3288160A (en) * | 1964-04-01 | 1966-11-29 | Gen Electric | Acceleration limiting long range speed control |
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US3568029A (en) * | 1969-01-24 | 1971-03-02 | Smith Corp A O | Constant velocity drive control for machine tools and the like |
US3836835A (en) * | 1971-04-19 | 1974-09-17 | B Sawyer | Multi axes linear movement positioning system |
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US4345154A (en) | 1979-01-12 | 1982-08-17 | The United States Of America As Represented By The Secretary Of The Army | Bias-compensated, ionization sensor for gaseous media and method for attaining proper bias for same |
GB2045437B (en) * | 1979-03-30 | 1984-02-08 | Renishaw Electrical Ltd | Coordinate measuring machine |
US4345194A (en) * | 1980-12-01 | 1982-08-17 | The United States Of America As Represented By The United States Department Of Energy | Control system to reduce the effects of friction in drive trains of continuous-path-positioning systems |
JPS57208891A (en) * | 1981-06-17 | 1982-12-22 | Yaskawa Electric Mfg Co Ltd | Control system of motor driven machine |
JPS6020214A (ja) * | 1983-07-15 | 1985-02-01 | Hitachi Ltd | ロボツトのサ−ボ装置 |
JPS6224991A (ja) * | 1985-07-26 | 1987-02-02 | 松下電器産業株式会社 | 産業用ロボツト |
US4841184A (en) * | 1987-06-23 | 1989-06-20 | Mechanical Technology Incorporated | Velocity and imbalance observer control circuit for active magnetic bearing or damper |
US4925312A (en) * | 1988-03-21 | 1990-05-15 | Staubli International Ag | Robot control system having adaptive feedforward torque control for improved accuracy |
US4992716A (en) * | 1989-08-02 | 1991-02-12 | Kollmorgen Corp. | Motor control with digital feedback |
JP2707149B2 (ja) * | 1990-04-28 | 1998-01-28 | 日本電気株式会社 | 速度、位置のロバスト的制御装置 |
US5049797A (en) * | 1990-07-02 | 1991-09-17 | Utah State University Foundation | Device and method for control of flexible link robot manipulators |
US5459383A (en) * | 1991-02-07 | 1995-10-17 | Quantum Corporation | Robust active damping control system |
JPH05134758A (ja) * | 1991-05-17 | 1993-06-01 | Fanuc Ltd | サーボモータの制御方式 |
JP2833730B2 (ja) * | 1993-03-10 | 1998-12-09 | 三菱電機株式会社 | 位置制御装置 |
US5432423A (en) * | 1993-04-29 | 1995-07-11 | Universal Instruments Corporation | Electronic damping system |
DE4342312A1 (de) * | 1993-12-11 | 1995-06-14 | Zeiss Carl Fa | Verfahren zur Korrektur von schwingungsbedingten Meßfehlern bei Koordinatenmeßgeräten |
GB9401692D0 (en) * | 1994-01-28 | 1994-03-23 | Renishaw Plc | Performing measurement or calibration on positioning machines |
DE4436507A1 (de) | 1994-10-13 | 1996-04-18 | Zeiss Carl Fa | Verfahren zur Koordinatenmessung an Werkstücken |
US5834623A (en) * | 1995-03-03 | 1998-11-10 | Ignagni; Mario B. | Apparatus and method to provide high accuracy calibration of machine tools |
DE19637554B4 (de) * | 1995-09-19 | 2004-01-08 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren und Vorrichtung zum Meßfehlerausgleich bei Meßrobotern |
US5714831A (en) * | 1995-11-13 | 1998-02-03 | Wisconsin Alumni Research Foundation | Method and apparatus for improved control of piezoelectric positioners |
DE19614883C2 (de) * | 1996-04-16 | 2003-08-21 | Leitz Brown & Sharpe Mestechni | Verfahren zur Antastung und zum Scannen bei Koordinatenmeßgeräten |
JP3526385B2 (ja) * | 1997-03-11 | 2004-05-10 | 株式会社東芝 | パターン形成装置 |
SG99277A1 (en) * | 1998-02-05 | 2003-10-27 | Texas Instr Singapore Pte Ltd | Partial semionductor wafer processing with multiple cuts of random sizes |
US6156625A (en) * | 1998-03-07 | 2000-12-05 | Texas Instruments Incorporated | Partial semiconductor wafer processing using wafermap display |
-
1998
- 1998-07-22 GB GBGB9815830.6A patent/GB9815830D0/en not_active Ceased
-
1999
- 1999-07-13 EP EP99305560A patent/EP0974882A3/en not_active Ceased
- 1999-07-14 US US09/352,957 patent/US6412329B1/en not_active Expired - Fee Related
- 1999-07-20 IL IL13099299A patent/IL130992A/xx not_active IP Right Cessation
- 1999-07-22 JP JP20800099A patent/JP4478248B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-08 US US10/092,520 patent/US6568242B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20020095975A1 (en) | 2002-07-25 |
EP0974882A3 (en) | 2006-11-08 |
JP4478248B2 (ja) | 2010-06-09 |
IL130992A0 (en) | 2001-01-28 |
GB9815830D0 (en) | 1998-09-16 |
US6568242B2 (en) | 2003-05-27 |
US6412329B1 (en) | 2002-07-02 |
JP2000046541A (ja) | 2000-02-18 |
EP0974882A2 (en) | 2000-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
MM9K | Patent not in force due to non-payment of renewal fees |