IL130992A - Method for reducing measurement errors made by a machine using a probe and a machine using said method - Google Patents

Method for reducing measurement errors made by a machine using a probe and a machine using said method

Info

Publication number
IL130992A
IL130992A IL13099299A IL13099299A IL130992A IL 130992 A IL130992 A IL 130992A IL 13099299 A IL13099299 A IL 13099299A IL 13099299 A IL13099299 A IL 13099299A IL 130992 A IL130992 A IL 130992A
Authority
IL
Israel
Prior art keywords
machine
probe
measurement errors
errors made
reducing measurement
Prior art date
Application number
IL13099299A
Other languages
English (en)
Other versions
IL130992A0 (en
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Publication of IL130992A0 publication Critical patent/IL130992A0/xx
Publication of IL130992A publication Critical patent/IL130992A/xx

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37432Detected by accelerometer, piezo electric
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41128Compensate vibration beam, gantry, feedback of speed of non driven end
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/42Servomotor, servo controller kind till VSS
    • G05B2219/42077Position, speed or current, combined with vibration feedback

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
IL13099299A 1998-07-22 1999-07-20 Method for reducing measurement errors made by a machine using a probe and a machine using said method IL130992A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9815830.6A GB9815830D0 (en) 1998-07-22 1998-07-22 Method of and apparatus for reducing vibrations on probes carried by coordinate measuring machines

Publications (2)

Publication Number Publication Date
IL130992A0 IL130992A0 (en) 2001-01-28
IL130992A true IL130992A (en) 2003-02-12

Family

ID=10835878

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13099299A IL130992A (en) 1998-07-22 1999-07-20 Method for reducing measurement errors made by a machine using a probe and a machine using said method

Country Status (5)

Country Link
US (2) US6412329B1 (xx)
EP (1) EP0974882A3 (xx)
JP (1) JP4478248B2 (xx)
GB (1) GB9815830D0 (xx)
IL (1) IL130992A (xx)

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GB0016533D0 (en) * 2000-07-06 2000-08-23 Renishaw Plc Method of and apparatus for correction of coordinate measurement errors due to vibrations in coordinate measuring machines (cmms)
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GB0326532D0 (en) * 2003-11-13 2003-12-17 Renishaw Plc Method of error compensation
DE102004038416B4 (de) * 2004-07-30 2014-02-06 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen von Raumkoordinaten eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät
JP4335123B2 (ja) * 2004-11-26 2009-09-30 ファナック株式会社 制御装置
JP2006159345A (ja) * 2004-12-07 2006-06-22 Fanuc Ltd 制御装置
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GB2425840A (en) * 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
JP5658863B2 (ja) * 2005-04-26 2015-01-28 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company プローブの較正
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US20070168085A1 (en) * 2005-11-18 2007-07-19 Guilford John H Systems and method for adaptively adjusting a control loop
DE102006009181A1 (de) * 2006-02-24 2007-09-06 Carl Zeiss Industrielle Messtechnik Gmbh Sichere Überwachung der Geschwindigkeit bei Koordinatenmessgeräten
JP4851819B2 (ja) * 2006-03-16 2012-01-11 株式会社ミツトヨ 測定制御回路の制御ゲイン調整方法および測定制御回路
GB0611109D0 (en) * 2006-06-06 2006-07-19 Renishaw Plc A method for measuring workpieces
DE102006055005A1 (de) * 2006-11-17 2008-05-29 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Bestimmen von Raumkoordinaten an einer Vielzahl von Messpunkten
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JP5424581B2 (ja) * 2008-06-06 2014-02-26 キヤノン株式会社 部分測定を合成する形状測定方法
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CN102472662B (zh) 2009-06-30 2014-06-18 六边形度量衡股份公司 使用振动检测的坐标测量机
DE102009049534A1 (de) 2009-10-06 2011-04-07 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit Lageänderungssensoren
US8619361B2 (en) * 2010-03-31 2013-12-31 Nikon Corporation Direct derivative feedforward vibration compensation system
DE102010015780A1 (de) 2010-04-20 2011-10-20 Carl Zeiss Industrielle Messtechnik Gmbh Betrieb einer Koordinatenmessmaschine oder einer Werkzeugmaschine
DE102010052503B4 (de) 2010-11-26 2012-06-21 Wenzel Scantec Gmbh Verfahren zur Steuerung eines Koordinatenmessgeräts sowie Koordinatenmessgerät
CN103732364B (zh) * 2012-03-15 2016-04-27 奥林巴斯株式会社 机械手装置
WO2013159803A1 (de) 2012-04-23 2013-10-31 Carl Zeiss Industrielle Messtechnik Gmbh Steuerung des antriebsmotors von geräten, die ein von dem antriebsmotor angetriebenes bewegliches teil aufweisen
DE102012207110A1 (de) * 2012-04-27 2013-10-31 Homag Holzbearbeitungssysteme Ag Schwingungsdämpfungssystem
US9568075B2 (en) * 2013-10-28 2017-02-14 Seiko Epson Corporation Robot, robot control device, and robot system
WO2015139505A1 (en) * 2014-03-20 2015-09-24 Harbin Institute Of Technology Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part
EP3289310B1 (en) 2015-04-28 2022-06-15 Hexagon Technology Center GmbH Active damping of a measuring device
DE102016112011A1 (de) * 2016-04-14 2017-10-19 Jenoptik Industrial Metrology Germany Gmbh Verfahren zum Betreiben einer Messvorrichtung
DE102017103938A1 (de) * 2017-02-24 2018-08-30 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zum Messen der Rauheit einer Werkstückoberfläche
US9835433B1 (en) * 2017-05-09 2017-12-05 Tesa Sa Touch trigger probe
GB201721309D0 (en) 2017-12-19 2018-01-31 Renishaw Plc Production and measurement of workpieces
CN108015627B (zh) * 2017-12-25 2023-11-10 东莞捷荣技术股份有限公司 一种用于cnc机台探头的检测控制装置及其控制方法
CN111294014B (zh) * 2018-12-10 2023-10-27 广州汽车集团股份有限公司 一种信号积分去偏差方法及其系统、电子设备
DE102021212817B4 (de) 2021-11-15 2023-12-21 Carl Zeiss Industrielle Messtechnik Gmbh Wiederholte Positionsbestimmung eines beweglichen Teils eines Koordinatenmessgerätes

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Also Published As

Publication number Publication date
US20020095975A1 (en) 2002-07-25
EP0974882A3 (en) 2006-11-08
JP4478248B2 (ja) 2010-06-09
IL130992A0 (en) 2001-01-28
GB9815830D0 (en) 1998-09-16
US6568242B2 (en) 2003-05-27
US6412329B1 (en) 2002-07-02
JP2000046541A (ja) 2000-02-18
EP0974882A2 (en) 2000-01-26

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees