IL100824A - Method of inspecting articles - Google Patents

Method of inspecting articles

Info

Publication number
IL100824A
IL100824A IL10082492A IL10082492A IL100824A IL 100824 A IL100824 A IL 100824A IL 10082492 A IL10082492 A IL 10082492A IL 10082492 A IL10082492 A IL 10082492A IL 100824 A IL100824 A IL 100824A
Authority
IL
Israel
Prior art keywords
features
article
list
transformation parameters
detected
Prior art date
Application number
IL10082492A
Other languages
English (en)
Other versions
IL100824A0 (en
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to IL10082492A priority Critical patent/IL100824A/en
Publication of IL100824A0 publication Critical patent/IL100824A0/xx
Priority to JP5513436A priority patent/JPH07504978A/ja
Priority to US08/122,507 priority patent/US5495535A/en
Priority to DE69326920T priority patent/DE69326920T2/de
Priority to PCT/US1993/000791 priority patent/WO1993015474A1/en
Priority to EP93904717A priority patent/EP0578816B1/de
Publication of IL100824A publication Critical patent/IL100824A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • G06V10/7515—Shifting the patterns to accommodate for positional errors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Biochemistry (AREA)
  • Evolutionary Computation (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Signal Processing (AREA)
  • Image Analysis (AREA)
IL10082492A 1992-01-31 1992-01-31 Method of inspecting articles IL100824A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IL10082492A IL100824A (en) 1992-01-31 1992-01-31 Method of inspecting articles
JP5513436A JPH07504978A (ja) 1992-01-31 1993-01-28 製品の検査方法
US08/122,507 US5495535A (en) 1992-01-31 1993-01-28 Method of inspecting articles
DE69326920T DE69326920T2 (de) 1992-01-31 1993-01-28 Verfahren zum prüfen von artikeln
PCT/US1993/000791 WO1993015474A1 (en) 1992-01-31 1993-01-28 Method of inspecting articles
EP93904717A EP0578816B1 (de) 1992-01-31 1993-01-28 Verfahren zum prüfen von artikeln

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL10082492A IL100824A (en) 1992-01-31 1992-01-31 Method of inspecting articles

Publications (2)

Publication Number Publication Date
IL100824A0 IL100824A0 (en) 1992-09-06
IL100824A true IL100824A (en) 1996-12-05

Family

ID=11063330

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10082492A IL100824A (en) 1992-01-31 1992-01-31 Method of inspecting articles

Country Status (5)

Country Link
EP (1) EP0578816B1 (de)
JP (1) JPH07504978A (de)
DE (1) DE69326920T2 (de)
IL (1) IL100824A (de)
WO (1) WO1993015474A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517234A (en) * 1993-10-26 1996-05-14 Gerber Systems Corporation Automatic optical inspection system having a weighted transition database
US6975755B1 (en) 1999-11-25 2005-12-13 Canon Kabushiki Kaisha Image processing method and apparatus
GB2359884B (en) * 1999-11-25 2004-06-30 Canon Kk Image processing method and apparatus
DE10025751A1 (de) 2000-05-24 2001-12-06 Atg Test Systems Gmbh Verfahren zum Untersuchen einer leiterplatte an einem vorbestimmten Bereich der Leiterplatte und Vorrichtung zum Durchführen des Verfahrens
DE10043726C2 (de) * 2000-09-05 2003-12-04 Atg Test Systems Gmbh Verfahren zum Prüfen von Leiterplatten mit einem Paralleltester und eine Vorrichtung zum Ausführen des Verfahrens
JP2007286003A (ja) * 2006-04-20 2007-11-01 Pioneer Electronic Corp 外観計測装置、外観計測方法、及び外観計測プログラム
TWI440847B (zh) * 2009-03-30 2014-06-11 Koh Young Tech Inc 檢測方法
DE102016111200A1 (de) 2016-06-20 2017-12-21 Noris Automation Gmbh Verfahren und Vorrichtung zur berührungslosen funktionalen Überprüfung elektronischer Bauelemente in Schaltungsanordnungen mit örtlicher Fehlerlokalisierung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4247203A (en) * 1978-04-03 1981-01-27 Kla Instrument Corporation Automatic photomask inspection system and apparatus
US4926489A (en) * 1983-03-11 1990-05-15 Kla Instruments Corporation Reticle inspection system
JPS61213612A (ja) * 1985-03-19 1986-09-22 Hitachi Ltd プリント基板のパタ−ン検査装置
US4805123B1 (en) * 1986-07-14 1998-10-13 Kla Instr Corp Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems
US4783826A (en) * 1986-08-18 1988-11-08 The Gerber Scientific Company, Inc. Pattern inspection system
JPH02148180A (ja) * 1988-11-29 1990-06-07 Nippon Seiko Kk パターン検査方法及び装置

Also Published As

Publication number Publication date
EP0578816A1 (de) 1994-01-19
IL100824A0 (en) 1992-09-06
DE69326920D1 (de) 1999-12-09
EP0578816B1 (de) 1999-11-03
WO1993015474A1 (en) 1993-08-05
DE69326920T2 (de) 2000-04-20
JPH07504978A (ja) 1995-06-01
EP0578816A4 (en) 1994-07-20

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Legal Events

Date Code Title Description
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KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees