IE35060B1 - Method for fabricating photomasks - Google Patents
Method for fabricating photomasksInfo
- Publication number
- IE35060B1 IE35060B1 IE462/71A IE46271A IE35060B1 IE 35060 B1 IE35060 B1 IE 35060B1 IE 462/71 A IE462/71 A IE 462/71A IE 46271 A IE46271 A IE 46271A IE 35060 B1 IE35060 B1 IE 35060B1
- Authority
- IE
- Ireland
- Prior art keywords
- iron
- april
- iron oxide
- fabricating photomasks
- photomasks
- Prior art date
Links
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 abstract 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 150000002506 iron compounds Chemical class 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/406—Oxides of iron group metals
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/76—Patterning of masks by imaging
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Thin Magnetic Films (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Hard Magnetic Materials (AREA)
- Soft Magnetic Materials (AREA)
- Compounds Of Iron (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2956070A | 1970-04-17 | 1970-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IE35060L IE35060L (en) | 1971-10-17 |
| IE35060B1 true IE35060B1 (en) | 1975-10-29 |
Family
ID=21849664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IE462/71A IE35060B1 (en) | 1970-04-17 | 1971-04-14 | Method for fabricating photomasks |
Country Status (8)
| Country | Link |
|---|---|
| BE (1) | BE765706A (enExample) |
| CA (1) | CA932595A (enExample) |
| DE (1) | DE2118075A1 (enExample) |
| FR (1) | FR2089818A5 (enExample) |
| GB (1) | GB1340604A (enExample) |
| IE (1) | IE35060B1 (enExample) |
| NL (1) | NL7105048A (enExample) |
| ZA (1) | ZA712438B (enExample) |
-
1970
- 1970-11-26 CA CA099195A patent/CA932595A/en not_active Expired
-
1971
- 1971-04-14 BE BE765706A patent/BE765706A/xx unknown
- 1971-04-14 DE DE19712118075 patent/DE2118075A1/de active Pending
- 1971-04-14 IE IE462/71A patent/IE35060B1/xx unknown
- 1971-04-15 NL NL7105048A patent/NL7105048A/xx unknown
- 1971-04-16 FR FR7113627A patent/FR2089818A5/fr not_active Expired
- 1971-04-16 ZA ZA712438A patent/ZA712438B/xx unknown
- 1971-04-19 GB GB2673271*A patent/GB1340604A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1340604A (en) | 1973-12-12 |
| NL7105048A (enExample) | 1971-10-19 |
| CA932595A (en) | 1973-08-28 |
| DE2118075A1 (de) | 1971-11-04 |
| BE765706A (fr) | 1971-08-30 |
| FR2089818A5 (enExample) | 1972-01-07 |
| IE35060L (en) | 1971-10-17 |
| ZA712438B (en) | 1972-02-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA932626A (en) | Composite method for growth of iib-via compounds on substrates, and process for making composition for the compounds | |
| CA980547A (en) | Metal layer rivet form, tooling, process and assembly | |
| CA971838A (en) | Process for forming resinous films on aluminum-bearing substrates | |
| CA960445A (en) | Metal layer rivet form, tooling, process and assembly | |
| GB2003660A (en) | Deposition of material on a substrate | |
| IE35060B1 (en) | Method for fabricating photomasks | |
| JPS5329703A (en) | Production of thin magnetic film | |
| CA992478A (en) | Process and installation for the oxidation of an oxidisable substance, notably a hydrocarbon | |
| AU499138B2 (en) | Compensating foe. pease difference between magnetic tracks | |
| AU498352B2 (en) | Process for manganese removal from metal bearing solutions | |
| ADMON et al. | A METHOD FOR SPECIMEN PREPARATION FOR ELECTRON MICROSCOPY OF THIN METAL FILMS DEPOSITED ON COPPER | |
| IE35633B1 (en) | Process for the manufacture of delta 4-3-oxo-1alpha-methyl-steroids | |
| ZA762384B (en) | Process for manufacture of 3,5-ditert.butyl-4-hydroxybenzaldehyde from 3,5-ditert.butyl-4-hydroxybenzyl alcohol | |
| CA997753A (en) | PROCESS FOR PRODUCING 15.alpha., 16.alpha.-METHYLENE-.DELTA.4 OESTREN-17.beta.-OLS | |
| JPS5220774A (en) | Manufacturing method of variable capacitance element | |
| JPS51125598A (en) | Latch lock | |
| CA863335A (en) | 1-methyl-3-hydroxy-11-keto-.delta.1,3,5(10)-steroid compounds | |
| CA964670A (en) | Process for oxidizing a 1,1-bis(alkylphenyl)alkane | |
| CA964669A (en) | Process for oxidizing a 1,1-bis(alkylphenyl) alkane | |
| JPS51144209A (en) | Control circuit for one sentence autorepeat tape recorder | |
| CA897697A (en) | Process for producing 2,5,5,-substituted thiazolines-.delta.3 | |
| CA891999A (en) | Process for producing 6-hydroxy-3-keto-.delta.1,4-steroids | |
| CA950052A (en) | Stabilized transferred electron amplifier | |
| JPS5258899A (en) | Production of dielectric thin film | |
| JPS5436181A (en) | Manufacture for semiconductor device |