IE35060B1 - Method for fabricating photomasks - Google Patents

Method for fabricating photomasks

Info

Publication number
IE35060B1
IE35060B1 IE462/71A IE46271A IE35060B1 IE 35060 B1 IE35060 B1 IE 35060B1 IE 462/71 A IE462/71 A IE 462/71A IE 46271 A IE46271 A IE 46271A IE 35060 B1 IE35060 B1 IE 35060B1
Authority
IE
Ireland
Prior art keywords
iron
april
iron oxide
fabricating photomasks
photomasks
Prior art date
Application number
IE462/71A
Other versions
IE35060L (en
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of IE35060L publication Critical patent/IE35060L/en
Publication of IE35060B1 publication Critical patent/IE35060B1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/406—Oxides of iron group metals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Thin Magnetic Films (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Hard Magnetic Materials (AREA)
  • Soft Magnetic Materials (AREA)
  • Compounds Of Iron (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

1340604 Iron oxide WESTERN ELECTRIC CO Inc 19 April 1971 [17 April 1970] 26732/71 Heading C1A [Also in Division G2] Iron oxide having a botryoidal morphology is vapour deposited on a substrate heated at 100 -160‹ C. from an iron compound (especially iron pentacarbonyl) which has been thermally decomposed in an oxidizing or inert medium.
IE462/71A 1970-04-17 1971-04-14 Method for fabricating photomasks IE35060B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2956070A 1970-04-17 1970-04-17

Publications (2)

Publication Number Publication Date
IE35060L IE35060L (en) 1971-10-17
IE35060B1 true IE35060B1 (en) 1975-10-29

Family

ID=21849664

Family Applications (1)

Application Number Title Priority Date Filing Date
IE462/71A IE35060B1 (en) 1970-04-17 1971-04-14 Method for fabricating photomasks

Country Status (8)

Country Link
BE (1) BE765706A (en)
CA (1) CA932595A (en)
DE (1) DE2118075A1 (en)
FR (1) FR2089818A5 (en)
GB (1) GB1340604A (en)
IE (1) IE35060B1 (en)
NL (1) NL7105048A (en)
ZA (1) ZA712438B (en)

Also Published As

Publication number Publication date
CA932595A (en) 1973-08-28
FR2089818A5 (en) 1972-01-07
BE765706A (en) 1971-08-30
DE2118075A1 (en) 1971-11-04
NL7105048A (en) 1971-10-19
ZA712438B (en) 1972-02-23
IE35060L (en) 1971-10-17
GB1340604A (en) 1973-12-12

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