GB1340604A - Method for fabricating photomasks - Google Patents

Method for fabricating photomasks

Info

Publication number
GB1340604A
GB1340604A GB2673271*A GB2673271A GB1340604A GB 1340604 A GB1340604 A GB 1340604A GB 2673271 A GB2673271 A GB 2673271A GB 1340604 A GB1340604 A GB 1340604A
Authority
GB
United Kingdom
Prior art keywords
iron
april
iron oxide
fabricating photomasks
photomasks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2673271*A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1340604A publication Critical patent/GB1340604A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/406—Oxides of iron group metals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thin Magnetic Films (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Hard Magnetic Materials (AREA)
  • Soft Magnetic Materials (AREA)
  • Compounds Of Iron (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

1340604 Iron oxide WESTERN ELECTRIC CO Inc 19 April 1971 [17 April 1970] 26732/71 Heading C1A [Also in Division G2] Iron oxide having a botryoidal morphology is vapour deposited on a substrate heated at 100 -160‹ C. from an iron compound (especially iron pentacarbonyl) which has been thermally decomposed in an oxidizing or inert medium.
GB2673271*A 1970-04-17 1971-04-19 Method for fabricating photomasks Expired GB1340604A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2956070A 1970-04-17 1970-04-17

Publications (1)

Publication Number Publication Date
GB1340604A true GB1340604A (en) 1973-12-12

Family

ID=21849664

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2673271*A Expired GB1340604A (en) 1970-04-17 1971-04-19 Method for fabricating photomasks

Country Status (8)

Country Link
BE (1) BE765706A (en)
CA (1) CA932595A (en)
DE (1) DE2118075A1 (en)
FR (1) FR2089818A5 (en)
GB (1) GB1340604A (en)
IE (1) IE35060B1 (en)
NL (1) NL7105048A (en)
ZA (1) ZA712438B (en)

Also Published As

Publication number Publication date
DE2118075A1 (en) 1971-11-04
CA932595A (en) 1973-08-28
BE765706A (en) 1971-08-30
IE35060L (en) 1971-10-17
FR2089818A5 (en) 1972-01-07
ZA712438B (en) 1972-02-23
IE35060B1 (en) 1975-10-29
NL7105048A (en) 1971-10-19

Similar Documents

Publication Publication Date Title
JPS5225296A (en) Forming method of highly heatproof insulating film on grain oriented s ilicon steel plate
CA974582A (en) Process for the fabrication of nitrogen containing pulverized carbon
EP0088290A3 (en) Lock
GB1340604A (en) Method for fabricating photomasks
GB1023188A (en) Externally controlled hermetically sealed apparatus
JPS5329703A (en) Production of thin magnetic film
GB1291209A (en) Improvements in or relating to the production of contact metal layers in semiconductor components
CA933172A (en) Alkaline earth metal organometallic compounds and method for making the same
CA1013755A (en) .delta.AND.pi. ORGANIC COMPLEXES OF TRANSITION METALS AND PROCESS FOR THE PREPARATION THEREOF
YU269273A (en) Process for obtaining 2,10-dichloro-12-methyl-12h-dibenzo (d.g.)-(1,3)dioxocines
JPS5314133A (en) Process for generating grain boundary oxidation by vacuum carburizing
IE35633B1 (en) Process for the manufacture of delta 4-3-oxo-1alpha-methyl-steroids
CA962037A (en) Method for generating concentrated hydrogen sulphide from solutions containing sulphide
ADMON et al. A METHOD FOR SPECIMEN PREPARATION FOR ELECTRON MICROSCOPY OF THIN METAL FILMS DEPOSITED ON COPPER
ZA762384B (en) Process for manufacture of 3,5-ditert.butyl-4-hydroxybenzaldehyde from 3,5-ditert.butyl-4-hydroxybenzyl alcohol
JPS5315231A (en) Process for generating grain boundary oxidation by vacuum carburizing
CA967408A (en) Columbium treated non-aging vacuum degassed low carbon steel and method for producing same
JPS51125598A (en) Latch lock
JPS5240070A (en) Process for production of semiconductor device
CA964670A (en) Process for oxidizing a 1,1-bis(alkylphenyl)alkane
CA964669A (en) Process for oxidizing a 1,1-bis(alkylphenyl) alkane
CA863335A (en) 1-methyl-3-hydroxy-11-keto-.delta.1,3,5(10)-steroid compounds
CA894739A (en) Process and composition for etching copper metal
CA859132A (en) Process for the manufacture of 6-chloro-.delta.4,6-pregnadienes
CA862806A (en) Process for the formation of 2, 6-diphenylphenol

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee