HRP20130938T1 - Rf mems prospojna sklopka i komutacijska matrica koja sadrži rf mems prospojne sklopke - Google Patents

Rf mems prospojna sklopka i komutacijska matrica koja sadrži rf mems prospojne sklopke Download PDF

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Publication number
HRP20130938T1
HRP20130938T1 HRP20130938AT HRP20130938T HRP20130938T1 HR P20130938 T1 HRP20130938 T1 HR P20130938T1 HR P20130938A T HRP20130938A T HR P20130938AT HR P20130938 T HRP20130938 T HR P20130938T HR P20130938 T1 HRP20130938 T1 HR P20130938T1
Authority
HR
Croatia
Prior art keywords
transmission line
mems
switching element
switch according
switching
Prior art date
Application number
HRP20130938AT
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English (en)
Inventor
Christophe Pavageau
Original Assignee
Delfmems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delfmems filed Critical Delfmems
Publication of HRP20130938T1 publication Critical patent/HRP20130938T1/hr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/15—Auxiliary devices for switching or interrupting by semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/003—Coplanar lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Claims (13)

1. RF MEMS prospojna sklopka (1) koja sadrži prvu prijenosnu liniju (10) i drugu prijenosnu liniju (11) koja se ukršta s prvom prijenosnom linijom, pri se čemu prva prijenosna linija (10) sastoji od dva međusobno razmaknuta odsječka te prijenosne linije (100, 101), naznačena time da ona nadalje sadrži jedan prospojni element (12) koji trajno električno spaja spomenuta dva međusobno razmaknuta odsječka prijenosne linije (100, 101), pri čemu se druga prijenosna linija (11) ukršta s prvom prijenosnom linijom (10) između ta dva međusobno razmaknuta odsječka prijenosne linije (100, 101), RF MEMS prospojna sklopka (1) nadalje sadrži pobudna sredstva (121) za pobuđivanje prospojnog elementa (12) barem između jednog prvog položaja, u kojem taj prospojni element (12) električno spaja spomenuta dva međusobno razmaknuta odsječka prijenosne linije (100, 101) prve prijenosne linije (10) dok su prva (10) i druga (11) prijenosna linija električno rastavljene, i jednog drugog položaja, u kojem prospojni element (12) električno spaja spomenuta dva međusobno razmaknuta odsječka prijenosne linije (100, 101) prve prijenosne linije (10) a isto tako električno spaja dotične dvije prijenosne linije (10, 11) zajedno.
2. RF MEMS prospojna sklopka iz zahtjeva 1, naznačena time da prospojni element (12) sadrži jednu fleksibilnu membranu (120a).
3. RF MEMS prospojna sklopka iz zahtjeva 2, naznačena time da fleksibilnu membranu (120a) podupire najmanje jedan stup (120b) te da membrana (120a) i najmanje jedan stup (120b) tvore dio prve prijenosne linije (10).
4. RF MEMS prospojna sklopka iz zahtjeva 3, naznačena time da je fleksibilna membrana (120a) neukotvljena i da može slobodno kliziti u odnosu na barem jedan stup (120b) prilikom svog savijanja.
5. RF MEMS prospojna sklopka iz bilo kojeg od zahtjeva 1 do 3 naznačena time da je prospojni element (12) ukotvljen u podlogu.
6. RF MEMS prospojna sklopka iz zahtjeva 5 naznačena time da je prospojni element (12) ukotvljen u podlogu na oba kraja i tvori jedan most.
7. RF MEMS prospojna sklopka iz zahtjeva 5, naznačena time da je prospojni element (12) ukotvljen u podlogu na samo jednom kraju i tvori jedan konzolni prospojni element.
8. RF MEMS prospojna sklopka iz bilo kojeg od zahtjeva od 1 do 7, naznačena time da su pobudna sredstva podešena tako prospojni element (12) svijaju prema dolje u prisilno stanje koje odgovara spomenutom drugom položaju.
9. RF MEMS prospojna sklopka iz bilo kojeg od zahtjeva od 1 do 8, naznačena time da su pobudna sredstva podešena tako prospojni element (12) svijaju prema gore u prisilno stanje koje odgovara spomenutom prvom položaju.
10. RF MEMS prospojna sklopka iz bilo kojeg od zahtjeva od 1 do 9, naznačena time da je prospojni element (12) podešen tako da stvara omski kontakt s drugom prijenosnom linijom (11).
11. RF MEMS prospojna sklopka iz bilo kojeg od zahtjeva od 1 do 9, naznačena time da je prospojni element (12) podešen tako da tvori kapacitivni spoj s drugom prijenosnom linijom (11).
12. RF MEMS komutacijska matrica koja više sadrži prijenosnih linija u redu (RF-Ri) i više prijenosnih linija u stupcu. (RF-Cj), koji se ukrštavaju s prijenosnim linijama u redu i koje na svakom križištu imaju jednu sklopku (SWi,j) u skladu s bilo kojim od zahtjeva 1 do 11.
13. Uporaba komutacijske matrice RF MEMS iz zahtjeva 12 za usmjeravanje RF signala.
HRP20130938AT 2011-03-28 2013-10-07 Rf mems prospojna sklopka i komutacijska matrica koja sadrži rf mems prospojne sklopke HRP20130938T1 (hr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP11160016.9A EP2506282B1 (en) 2011-03-28 2011-03-28 RF MEMS crosspoint switch and crosspoint switch matrix comprising RF MEMS crosspoint switches

Publications (1)

Publication Number Publication Date
HRP20130938T1 true HRP20130938T1 (hr) 2013-11-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
HRP20130938AT HRP20130938T1 (hr) 2011-03-28 2013-10-07 Rf mems prospojna sklopka i komutacijska matrica koja sadrži rf mems prospojne sklopke

Country Status (18)

Country Link
US (1) US9048523B2 (hr)
EP (1) EP2506282B1 (hr)
JP (1) JP5774193B2 (hr)
KR (1) KR20140003474A (hr)
CN (1) CN103518248A (hr)
AU (1) AU2012234514A1 (hr)
BR (1) BR112013023017A2 (hr)
CA (1) CA2823973A1 (hr)
ES (1) ES2436644T3 (hr)
HK (1) HK1177323A1 (hr)
HR (1) HRP20130938T1 (hr)
IL (1) IL227548A0 (hr)
MX (1) MX2013011270A (hr)
PL (1) PL2506282T3 (hr)
RU (1) RU2013147496A (hr)
SG (1) SG193261A1 (hr)
WO (1) WO2012130664A1 (hr)
ZA (1) ZA201305325B (hr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3000049B1 (fr) * 2012-12-21 2016-01-15 Thales Sa Composant mems capacitif a ligne de transmission enterree
JP5542231B1 (ja) * 2013-04-09 2014-07-09 太陽誘電株式会社 多層回路基板
US9390877B2 (en) 2013-12-19 2016-07-12 Google Inc. RF MEMS based large scale cross point electrical switch
US9362608B1 (en) 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
WO2017086048A1 (ja) 2015-11-17 2017-05-26 コニカミノルタ株式会社 光学反射フィルムおよび光学反射体
CN106159384B (zh) * 2016-08-30 2018-10-12 南京理工大学 贯序旋转结构无阻塞rf-mems开关矩阵
WO2018234629A1 (en) 2017-06-19 2018-12-27 Teknologian Tutkimuskeskus Vtt Oy CAPACITIVE MICRO-STRUCTURE
CN109950063A (zh) * 2019-04-16 2019-06-28 苏州希美微纳系统有限公司 基于杠杆原理的双稳态rf mems接触式开关
CN110460323A (zh) * 2019-08-27 2019-11-15 深圳市迈铭科技有限公司 一种矩阵开关控制方法及其控制系统
CN112713374A (zh) * 2020-12-07 2021-04-27 北京无线电计量测试研究所 一种与同轴接头适配的共面波导
CN113035650B (zh) * 2021-05-25 2021-09-07 深圳清华大学研究院 高可靠性的电容式rf mems开关
CN115377631B (zh) * 2022-09-16 2023-11-03 北京邮电大学 一种射频mems开关

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5463233A (en) * 1993-06-23 1995-10-31 Alliedsignal Inc. Micromachined thermal switch
JPH11274805A (ja) * 1998-03-20 1999-10-08 Ricoh Co Ltd 高周波スイッチ並びに製造方法、及び集積化高周波スイッチアレイ
AU2002309106A1 (en) * 2001-07-05 2003-02-24 International Business Machines Coporation Microsystem switches
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US20040050674A1 (en) * 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
US6984870B2 (en) * 2002-10-18 2006-01-10 M/A-Com, Inc. High speed cross-point switch using SiGe HBT technology
US6888420B2 (en) * 2002-11-14 2005-05-03 Hrl Laboratories, Llc RF MEMS switch matrix
JP4364565B2 (ja) * 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
EP1705676B9 (en) * 2005-03-21 2010-08-11 Delfmems RF MEMS switch with a flexible and free switch membrane
JP4498181B2 (ja) * 2005-03-22 2010-07-07 東京エレクトロン株式会社 スイッチアレイ
FR2930374B1 (fr) * 2008-04-18 2011-08-26 Thales Sa Circulateur radiofrequence a base de mems.

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Publication number Publication date
MX2013011270A (es) 2013-10-17
ES2436644T3 (es) 2014-01-03
JP2014512643A (ja) 2014-05-22
PL2506282T3 (pl) 2014-02-28
CA2823973A1 (en) 2012-10-04
AU2012234514A1 (en) 2013-07-25
WO2012130664A1 (en) 2012-10-04
US9048523B2 (en) 2015-06-02
ZA201305325B (en) 2014-12-23
BR112013023017A2 (pt) 2018-07-03
CN103518248A (zh) 2014-01-15
JP5774193B2 (ja) 2015-09-09
HK1177323A1 (en) 2013-08-16
KR20140003474A (ko) 2014-01-09
RU2013147496A (ru) 2015-05-10
EP2506282B1 (en) 2013-09-11
US20140009244A1 (en) 2014-01-09
IL227548A0 (en) 2013-09-30
SG193261A1 (en) 2013-10-30
EP2506282A1 (en) 2012-10-03

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