HK1224264A1 - Substrate processing device - Google Patents

Substrate processing device

Info

Publication number
HK1224264A1
HK1224264A1 HK16112478.8A HK16112478A HK1224264A1 HK 1224264 A1 HK1224264 A1 HK 1224264A1 HK 16112478 A HK16112478 A HK 16112478A HK 1224264 A1 HK1224264 A1 HK 1224264A1
Authority
HK
Hong Kong
Prior art keywords
processing device
substrate processing
substrate
processing
Prior art date
Application number
HK16112478.8A
Other languages
Chinese (zh)
Inventor
鈴木智也
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1224264A1 publication Critical patent/HK1224264A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/16—Pneumatic conveyors
HK16112478.8A 2012-04-03 2015-03-26 Substrate processing device HK1224264A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012084819 2012-04-03

Publications (1)

Publication Number Publication Date
HK1224264A1 true HK1224264A1 (en) 2017-08-18

Family

ID=49300192

Family Applications (2)

Application Number Title Priority Date Filing Date
HK15103065.7A HK1203183A1 (en) 2012-04-03 2015-03-26 Transfer apparatus, and electronic device forming method
HK16112478.8A HK1224264A1 (en) 2012-04-03 2015-03-26 Substrate processing device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
HK15103065.7A HK1203183A1 (en) 2012-04-03 2015-03-26 Transfer apparatus, and electronic device forming method

Country Status (6)

Country Link
JP (3) JP6137171B2 (en)
KR (5) KR102000430B1 (en)
CN (2) CN105752686B (en)
HK (2) HK1203183A1 (en)
TW (3) TWI660449B (en)
WO (1) WO2013150677A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102278073B1 (en) * 2014-11-28 2021-07-16 세메스 주식회사 Apparatus for treating substrate
JP2016127086A (en) * 2014-12-26 2016-07-11 東京エレクトロン株式会社 Substrate adsorption auxiliary member and substrate feeding device
JP6448132B2 (en) * 2015-03-13 2019-01-09 株式会社小森コーポレーション Printer
JP6829814B2 (en) * 2017-03-13 2021-02-17 日本電気硝子株式会社 Glass film manufacturing method
CN210972999U (en) * 2017-03-27 2020-07-10 日本电气硝子株式会社 Glass plate manufacturing device
CN107032163B (en) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 A kind of paper tape conveying device
CN107010449B (en) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 A kind of electronic bill leading portion process equipment
CN107618878A (en) * 2017-09-05 2018-01-23 深圳市华星光电技术有限公司 A kind of glass substrate conveying device
CN109693825A (en) * 2017-10-24 2019-04-30 金红叶纸业集团有限公司 Destatic conveying device and its Destaticizing device
CN108480135A (en) * 2018-05-24 2018-09-04 陈鸿奇 A kind of apparatus for coating of coiled film base material coating
TWI813718B (en) * 2018-07-18 2023-09-01 日商東京威力科創股份有限公司 Image processing device and image processing method
CN112752616B (en) 2018-08-01 2023-07-14 株式会社尼康 Mist generating device, mist film forming method, and mist film forming device
KR102301669B1 (en) 2018-08-10 2021-09-14 주식회사 엘지에너지솔루션 Cutting system and cutting method for electrode substrate
JP6771160B2 (en) * 2018-08-21 2020-10-21 パナソニックＩｐマネジメント株式会社 Conveying stage and an inkjet device using it
WO2020203125A1 (en) * 2019-03-29 2020-10-08 日東電工株式会社 Method for conveying glass film composite
CN114901575A (en) * 2020-01-08 2022-08-12 日本电气硝子株式会社 Method for producing glass film and apparatus for producing glass film
US11551970B2 (en) * 2020-10-22 2023-01-10 Innolux Corporation Method for manufacturing an electronic device
GB2605818B (en) * 2021-04-14 2023-12-06 Agfa Nv A substrate support system for a conveyor printer
CN114602741B (en) * 2022-03-30 2023-08-29 深圳市鑫龙邦科技有限公司 Roll-to-roll COB lamp strip dispenser and method
CN114590626B (en) * 2022-05-09 2022-08-02 常州树杰塑业有限公司 Coiling machine is used in plastic film production

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477558A (en) * 1966-10-27 1969-11-11 Fred J Fleischauer Air lift and vacuum conveyors and foraminous belt means therefor
US3889801A (en) * 1972-10-26 1975-06-17 Bell & Howell Co Vacuum conveyor belt with air bearing
DE3626244C3 (en) * 1986-08-02 1995-06-29 Rockwool Mineralwolle Device for conveying and turning goods in the form of lamellae
JP2578631B2 (en) * 1988-02-08 1997-02-05 コニカ株式会社 Coating device for magnetic recording media
JPH024813U (en) * 1988-06-20 1990-01-12
US5079854A (en) * 1989-12-27 1992-01-14 Xerox Corporation Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
JPH09156749A (en) * 1995-12-15 1997-06-17 Santrade Ltd Steel belt wet scrubber and steel belt cleaning process method
JP3498122B2 (en) * 1999-10-26 2004-02-16 株式会社ヒラノテクシード Veneer coating equipment
TW553780B (en) * 1999-12-17 2003-09-21 Sharp Kk Ultrasonic processing device and electronic parts fabrication method using the same
EP1127978B1 (en) * 2000-02-26 2006-01-04 Voith Paper Patent GmbH Vacuum belt conveyor
JP4557376B2 (en) * 2000-06-19 2010-10-06 日東電工株式会社 Method for producing porous body and porous body
JP2002045775A (en) * 2000-08-07 2002-02-12 Toppan Printing Co Ltd Coating apparatus
JP2002280340A (en) * 2001-03-22 2002-09-27 Toppan Printing Co Ltd Method of cleaning glass substrate
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP2004307149A (en) * 2003-04-08 2004-11-04 Toppan Printing Co Ltd Tape carrier
JP2004322305A (en) * 2003-04-11 2004-11-18 Tokki Corp Substrate surface flattening/cleaning device
TWI368757B (en) * 2003-04-30 2012-07-21 Olympus Corp Device for floating a substrate
JP4767251B2 (en) * 2004-04-14 2011-09-07 コアフロー サイエンティフィック ソリューションズ リミテッド A method for focusing an optical inspection apparatus on a contact surface of a flat object
JP2006113292A (en) * 2004-10-14 2006-04-27 Fuji Xerox Co Ltd Image forming apparatus and method for processing front and rear surfaces of endless belt for image forming apparatus
WO2006100868A1 (en) 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. Method of forming organic compound layer, process for producing organic el device, and organic el device
JP4491364B2 (en) 2005-03-23 2010-06-30 シーケーディ株式会社 Non-contact support device
KR20060109167A (en) * 2005-04-15 2006-10-19 엘지전자 주식회사 Unit of raising air for transfering flat panel display
JP4692924B2 (en) * 2005-06-21 2011-06-01 日本電気硝子株式会社 Protective sheet separating method and protective sheet separating apparatus
JP4796889B2 (en) * 2006-05-08 2011-10-19 Ｎｅｃ液晶テクノロジー株式会社 Panel washing machine and washing method
JP4962760B2 (en) 2006-07-19 2012-06-27 横河電機株式会社 Transport system
JP4753313B2 (en) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 Substrate processing equipment
DE202008003610U1 (en) * 2008-03-16 2008-05-21 Jonas & Redmann Automationstechnik Gmbh Conveyor belt system with at least one conveyor belt for transporting flat cargo, in particular of substrates such as silicon wafers and solar cells
JP5024145B2 (en) * 2008-03-24 2012-09-12 セイコーエプソン株式会社 Liquid ejector
JP5320876B2 (en) * 2008-07-16 2013-10-23 株式会社Ｉｈｉ Substrate transfer system and substrate transfer method
JP2010036999A (en) * 2008-07-31 2010-02-18 Nippon Electric Glass Co Ltd Conveying unit for glass substrate, conveying device for glass substrate, and conveying method for glass substrate
JP2010208243A (en) * 2009-03-12 2010-09-24 Duplo Seiko Corp Liquid discharging apparatus
JP2010232472A (en) * 2009-03-27 2010-10-14 Dainippon Screen Mfg Co Ltd Substrate transfer device and substrate processing apparatus
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
JP5451256B2 (en) * 2009-08-25 2014-03-26 日新工機株式会社 Steel strip passing plate conveyor and steel strip passing plate equipment
JP2011084352A (en) 2009-10-14 2011-04-28 Myotoku Ltd Work levitation device
JP2011194297A (en) * 2010-03-18 2011-10-06 Seiko Epson Corp Suction device and droplet discharge device

Also Published As

Publication number Publication date
CN105752686B (en) 2018-09-21
JPWO2013150677A1 (en) 2015-12-17
KR20180072871A (en) 2018-06-29
KR101879162B1 (en) 2018-07-16
CN104203779B (en) 2016-04-20
JP6137171B2 (en) 2017-05-31
KR20190010732A (en) 2019-01-30
KR20180038071A (en) 2018-04-13
JP6593507B2 (en) 2019-10-23
JP2017144433A (en) 2017-08-24
JP6414270B2 (en) 2018-10-31
KR101854959B1 (en) 2018-05-04
WO2013150677A1 (en) 2013-10-10
KR101809001B1 (en) 2017-12-13
KR20170095395A (en) 2017-08-22
TW201836046A (en) 2018-10-01
HK1203183A1 (en) 2015-10-23
KR102000430B1 (en) 2019-07-15
JP2018199580A (en) 2018-12-20
TWI590369B (en) 2017-07-01
TW201929139A (en) 2019-07-16
TWI674645B (en) 2019-10-11
CN104203779A (en) 2014-12-10
TW201351555A (en) 2013-12-16
KR101962083B1 (en) 2019-03-25
TWI660449B (en) 2019-05-21
KR20150000476A (en) 2015-01-02
CN105752686A (en) 2016-07-13

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20221030