HK1219171A1 - Substrate processing device and substrate processing method - Google Patents
Substrate processing device and substrate processing methodInfo
- Publication number
- HK1219171A1 HK1219171A1 HK16107072.8A HK16107072A HK1219171A1 HK 1219171 A1 HK1219171 A1 HK 1219171A1 HK 16107072 A HK16107072 A HK 16107072A HK 1219171 A1 HK1219171 A1 HK 1219171A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- substrate processing
- processing device
- processing method
- substrate
- processing
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 2
- 238000003672 processing method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/32—Arrangements for turning or reversing webs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/50—Auxiliary process performed during handling process
- B65H2301/51—Modifying a characteristic of handled material
- B65H2301/517—Drying material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32234710P | 2010-04-09 | 2010-04-09 | |
US32241710P | 2010-04-09 | 2010-04-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1219171A1 true HK1219171A1 (en) | 2017-03-24 |
Family
ID=44763067
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK13102160.5A HK1175059A1 (en) | 2010-04-09 | 2013-02-20 | Substrate processing device |
HK16107072.8A HK1219171A1 (en) | 2010-04-09 | 2013-02-20 | Substrate processing device and substrate processing method |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK13102160.5A HK1175059A1 (en) | 2010-04-09 | 2013-02-20 | Substrate processing device |
Country Status (6)
Country | Link |
---|---|
JP (2) | JP5708642B2 (en) |
KR (4) | KR101756628B1 (en) |
CN (2) | CN105632978B (en) |
HK (2) | HK1175059A1 (en) |
TW (3) | TWI557834B (en) |
WO (1) | WO2011126132A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6011615B2 (en) * | 2012-04-13 | 2016-10-19 | 株式会社ニコン | Cassette apparatus, substrate transfer apparatus, substrate processing apparatus, and substrate processing method |
CN107256824A (en) * | 2012-05-24 | 2017-10-17 | 株式会社尼康 | Device making method |
JP6744720B2 (en) | 2016-01-05 | 2020-08-19 | 住友化学株式会社 | Organic device manufacturing method and roll |
KR102420594B1 (en) | 2018-05-24 | 2022-07-13 | 주식회사 엘지에너지솔루션 | Seperator for lithium sulfur battery and lithium sulfur battery comprising the same |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07294122A (en) * | 1994-04-21 | 1995-11-10 | Murata Mfg Co Ltd | Ceramic green sheet drying apparatus and ceramic green sheet drying method |
JP2001129460A (en) * | 1999-11-09 | 2001-05-15 | Fuji Photo Film Co Ltd | Liquid coating device |
EP1255294A4 (en) * | 2000-01-17 | 2009-01-21 | Ebara Corp | Wafer transfer control apparatus and method for transferring wafer |
US7367601B2 (en) * | 2000-06-29 | 2008-05-06 | Shibaura Mechatronics Corporation | Substrate transfer apparatus and substrate transfer method |
JP2002367774A (en) | 2001-06-04 | 2002-12-20 | Sony Corp | Thin-film pattern forming method and thin-film pattern forming device |
JP5022552B2 (en) * | 2002-09-26 | 2012-09-12 | セイコーエプソン株式会社 | Electro-optical device manufacturing method and electro-optical device |
KR101129101B1 (en) * | 2003-02-18 | 2012-03-23 | 코니카 미놀타 홀딩스 가부시키가이샤 | Organic Thin-Film Transistor Device and Method for Manufacturing Same |
JP2004307890A (en) * | 2003-04-03 | 2004-11-04 | Toppan Printing Co Ltd | Vacuum film deposition system |
US8080277B2 (en) * | 2005-03-18 | 2011-12-20 | Konica Minolta Holdings, Inc. | Method of forming organic compound layer, method of manufacturing organic EL element and organic EL element |
JP5157440B2 (en) * | 2005-03-18 | 2013-03-06 | コニカミノルタホールディングス株式会社 | Manufacturing method of organic EL element |
JP4845746B2 (en) * | 2006-06-20 | 2011-12-28 | 株式会社オーク製作所 | Transport device |
JP5109301B2 (en) * | 2006-07-27 | 2012-12-26 | 富士電機株式会社 | Film forming apparatus and film forming method |
EP2261394A4 (en) * | 2008-03-31 | 2013-05-01 | Fuji Electric Co Ltd | Production equipment and method of thin-film laminate |
KR100926437B1 (en) * | 2008-11-17 | 2009-11-13 | 에스엔유 프리시젼 주식회사 | Deposition material supply apparatus and Equipment for treating substrate having the same |
-
2011
- 2011-04-11 KR KR1020177011480A patent/KR101756628B1/en active IP Right Grant
- 2011-04-11 KR KR1020187014419A patent/KR101887856B1/en active IP Right Grant
- 2011-04-11 CN CN201610122229.1A patent/CN105632978B/en active Active
- 2011-04-11 CN CN201180018300.7A patent/CN102835189B/en active Active
- 2011-04-11 TW TW100112403A patent/TWI557834B/en active
- 2011-04-11 KR KR1020177018381A patent/KR101868304B1/en active Application Filing
- 2011-04-11 TW TW106114286A patent/TWI611500B/en active
- 2011-04-11 JP JP2012509717A patent/JP5708642B2/en active Active
- 2011-04-11 KR KR1020127025863A patent/KR101756496B1/en active IP Right Grant
- 2011-04-11 TW TW105103023A patent/TWI587433B/en active
- 2011-04-11 WO PCT/JP2011/058988 patent/WO2011126132A1/en active Application Filing
-
2013
- 2013-02-20 HK HK13102160.5A patent/HK1175059A1/en not_active IP Right Cessation
- 2013-02-20 HK HK16107072.8A patent/HK1219171A1/en not_active IP Right Cessation
-
2014
- 2014-03-06 JP JP2014043798A patent/JP5858068B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20180058853A (en) | 2018-06-01 |
JP5858068B2 (en) | 2016-02-10 |
TW201731010A (en) | 2017-09-01 |
CN102835189A (en) | 2012-12-19 |
KR20170082652A (en) | 2017-07-14 |
CN105632978A (en) | 2016-06-01 |
KR101756496B1 (en) | 2017-07-10 |
JPWO2011126132A1 (en) | 2013-07-11 |
CN105632978B (en) | 2018-10-30 |
KR20130041777A (en) | 2013-04-25 |
TWI557834B (en) | 2016-11-11 |
TW201620067A (en) | 2016-06-01 |
WO2011126132A1 (en) | 2011-10-13 |
KR20170049634A (en) | 2017-05-10 |
TWI587433B (en) | 2017-06-11 |
JP5708642B2 (en) | 2015-04-30 |
TW201218305A (en) | 2012-05-01 |
JP2014195070A (en) | 2014-10-09 |
KR101887856B1 (en) | 2018-08-10 |
HK1175059A1 (en) | 2013-06-21 |
TWI611500B (en) | 2018-01-11 |
CN102835189B (en) | 2016-06-29 |
KR101868304B1 (en) | 2018-06-15 |
KR101756628B1 (en) | 2017-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20230407 |