HK1158304A1 - Vibrating micro-mechanical sensor of angular velocity - Google Patents

Vibrating micro-mechanical sensor of angular velocity

Info

Publication number
HK1158304A1
HK1158304A1 HK11112534.5A HK11112534A HK1158304A1 HK 1158304 A1 HK1158304 A1 HK 1158304A1 HK 11112534 A HK11112534 A HK 11112534A HK 1158304 A1 HK1158304 A1 HK 1158304A1
Authority
HK
Hong Kong
Prior art keywords
angular velocity
mechanical sensor
vibrating micro
vibrating
micro
Prior art date
Application number
HK11112534.5A
Other languages
English (en)
Chinese (zh)
Inventor
安斯．布盧姆奎斯特
Original Assignee
村田電子有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田電子有限公司 filed Critical 村田電子有限公司
Publication of HK1158304A1 publication Critical patent/HK1158304A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
HK11112534.5A 2008-04-16 2011-11-18 Vibrating micro-mechanical sensor of angular velocity HK1158304A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20085314A FI122397B (sv) 2008-04-16 2008-04-16 En vibrerande mikromekanisk vinkelhastighetssensor
PCT/FI2009/050270 WO2009127782A1 (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity

Publications (1)

Publication Number Publication Date
HK1158304A1 true HK1158304A1 (en) 2012-07-13

Family

ID=39385942

Family Applications (1)

Application Number Title Priority Date Filing Date
HK11112534.5A HK1158304A1 (en) 2008-04-16 2011-11-18 Vibrating micro-mechanical sensor of angular velocity

Country Status (8)

Country Link
US (1) US8176779B2 (sv)
EP (1) EP2269001B1 (sv)
JP (1) JP5620903B2 (sv)
KR (1) KR101641066B1 (sv)
CN (1) CN102066874B (sv)
FI (1) FI122397B (sv)
HK (1) HK1158304A1 (sv)
WO (1) WO2009127782A1 (sv)

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CN105371834B (zh) * 2014-08-21 2018-08-31 上海矽睿科技有限公司 检测质量块及采用该检测质量块的陀螺仪
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Also Published As

Publication number Publication date
CN102066874A (zh) 2011-05-18
EP2269001A4 (en) 2014-04-09
KR20110011625A (ko) 2011-02-08
FI20085314A0 (sv) 2008-04-16
CN102066874B (zh) 2014-08-27
JP2011517781A (ja) 2011-06-16
US20090260437A1 (en) 2009-10-22
FI122397B (sv) 2011-12-30
EP2269001B1 (en) 2016-11-30
KR101641066B1 (ko) 2016-07-21
WO2009127782A1 (en) 2009-10-22
JP5620903B2 (ja) 2014-11-05
US8176779B2 (en) 2012-05-15
EP2269001A1 (en) 2011-01-05
FI20085314A (sv) 2009-10-17

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20180408