HK1015188A1 - Fabrication of electron-emitting devices having high emitter packing density - Google Patents

Fabrication of electron-emitting devices having high emitter packing density

Info

Publication number
HK1015188A1
HK1015188A1 HK98116148A HK98116148A HK1015188A1 HK 1015188 A1 HK1015188 A1 HK 1015188A1 HK 98116148 A HK98116148 A HK 98116148A HK 98116148 A HK98116148 A HK 98116148A HK 1015188 A1 HK1015188 A1 HK 1015188A1
Authority
HK
Hong Kong
Prior art keywords
fabrication
electron
emitting devices
packing density
high emitter
Prior art date
Application number
HK98116148A
Other languages
English (en)
Inventor
John M Macaulay
Christopher J Spindt
Peter C Searson
Robert M Duboc
Original Assignee
Silicon Video Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/118,490 external-priority patent/US5462467A/en
Priority claimed from US08/158,102 external-priority patent/US5559389A/en
Application filed by Silicon Video Corp filed Critical Silicon Video Corp
Publication of HK1015188A1 publication Critical patent/HK1015188A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/319—Circuit elements associated with the emitters by direct integration

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
HK98116148A 1993-09-08 1998-12-28 Fabrication of electron-emitting devices having high emitter packing density HK1015188A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/118,490 US5462467A (en) 1993-09-08 1993-09-08 Fabrication of filamentary field-emission device, including self-aligned gate
US08/158,102 US5559389A (en) 1993-09-08 1993-11-24 Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
US08/269,229 US5564959A (en) 1993-09-08 1994-06-29 Use of charged-particle tracks in fabricating gated electron-emitting devices
PCT/US1994/009762 WO1995007543A1 (en) 1993-09-08 1994-09-08 Fabrication and structure of electron-emitting devices having high emitter packing density

Publications (1)

Publication Number Publication Date
HK1015188A1 true HK1015188A1 (en) 1999-10-08

Family

ID=27382175

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98116148A HK1015188A1 (en) 1993-09-08 1998-12-28 Fabrication of electron-emitting devices having high emitter packing density

Country Status (7)

Country Link
US (6) US5564959A (xx)
EP (2) EP0717877B1 (xx)
JP (2) JP3699114B2 (xx)
AU (1) AU7677094A (xx)
DE (1) DE69421711T2 (xx)
HK (1) HK1015188A1 (xx)
WO (1) WO1995007543A1 (xx)

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DE69421711T2 (de) 2000-03-09
DE69421711D1 (de) 1999-12-23
US5564959A (en) 1996-10-15
EP0945885B1 (en) 2010-02-17
EP0717877B1 (en) 1999-11-17
JP3793219B2 (ja) 2006-07-05
EP0945885A1 (en) 1999-09-29
US6515407B1 (en) 2003-02-04
JP3699114B2 (ja) 2005-09-28
US5827099A (en) 1998-10-27
JP2005285778A (ja) 2005-10-13
WO1995007543A1 (en) 1995-03-16
JPH09504900A (ja) 1997-05-13
US5913704A (en) 1999-06-22
EP0717877A1 (en) 1996-06-26
US5801477A (en) 1998-09-01
US5578185A (en) 1996-11-26
AU7677094A (en) 1995-03-27

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