GB999498A - Improvements in or relating to vacuum-sealing arrangements - Google Patents

Improvements in or relating to vacuum-sealing arrangements

Info

Publication number
GB999498A
GB999498A GB1818764A GB1818764A GB999498A GB 999498 A GB999498 A GB 999498A GB 1818764 A GB1818764 A GB 1818764A GB 1818764 A GB1818764 A GB 1818764A GB 999498 A GB999498 A GB 999498A
Authority
GB
United Kingdom
Prior art keywords
aperture
recess
chamber
wall
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1818764A
Inventor
John Kelly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB1818764A priority Critical patent/GB999498A/en
Publication of GB999498A publication Critical patent/GB999498A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Abstract

999,498. Electron beam apparatus. MULLARD Ltd. May 1, 1964, No. 18187/64. Heading H1D. A plate valve 3 having an aperture 4 for connecting and isolating apertures 5, 6 in walls 1, 2 of vacuum chambers, e.g. the gun chamber and workpiece chamber of an electron beam milling machine, has an additional aperture 13 whereby a recess 10 between two sealing rings 7, 8 in a surface 9 of wall 1 is in communication with the aperture 6 in wall 2 in both the open (Fig. 1) and closed (Fig. 2) positions of the valve 3. The rings 7 and 8 are arranged eccentrically, and the aperture 13 opens into the widest part of the recess 10. A sealing ring 16 and circular recess 14 are provided in a surface 15 of wall 2. Any air entering the recess 10 when the workpiece chamber is opened to insert or remove a workpiece, with the valve 3 in the closed position, is removed when the chamber is evacuated again. The invention is also applicable to an electron microscope.
GB1818764A 1964-05-01 1964-05-01 Improvements in or relating to vacuum-sealing arrangements Expired GB999498A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1818764A GB999498A (en) 1964-05-01 1964-05-01 Improvements in or relating to vacuum-sealing arrangements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1818764A GB999498A (en) 1964-05-01 1964-05-01 Improvements in or relating to vacuum-sealing arrangements

Publications (1)

Publication Number Publication Date
GB999498A true GB999498A (en) 1965-07-28

Family

ID=10108160

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1818764A Expired GB999498A (en) 1964-05-01 1964-05-01 Improvements in or relating to vacuum-sealing arrangements

Country Status (1)

Country Link
GB (1) GB999498A (en)

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