GB995387A - Improvements in or relating to electron lens systems - Google Patents
Improvements in or relating to electron lens systemsInfo
- Publication number
- GB995387A GB995387A GB43081/62A GB4308162A GB995387A GB 995387 A GB995387 A GB 995387A GB 43081/62 A GB43081/62 A GB 43081/62A GB 4308162 A GB4308162 A GB 4308162A GB 995387 A GB995387 A GB 995387A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron
- lens
- electrodes
- central
- nov
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005686 electrostatic field Effects 0.000 abstract 2
- 230000004075 alteration Effects 0.000 abstract 1
- 239000000428 dust Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US152531A US3100260A (en) | 1961-11-15 | 1961-11-15 | Electron lens for reduction of spherical aberration |
Publications (1)
Publication Number | Publication Date |
---|---|
GB995387A true GB995387A (en) | 1965-06-16 |
Family
ID=22543323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB43081/62A Expired GB995387A (en) | 1961-11-15 | 1962-11-14 | Improvements in or relating to electron lens systems |
Country Status (6)
Country | Link |
---|---|
US (1) | US3100260A (xx) |
CH (1) | CH407356A (xx) |
DE (1) | DE1236097B (xx) |
GB (1) | GB995387A (xx) |
NL (1) | NL285301A (xx) |
SE (1) | SE300852B (xx) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3452241A (en) * | 1966-09-06 | 1969-06-24 | Rca Corp | Electron gun suitable for electron microscope |
DE1905937B1 (de) * | 1969-02-06 | 1971-01-14 | Corpuscular Forschungs Stiftun | Stigmator zur elektrischen Kompensation von Abbildungsfehlern bei elektronenoptischen Systemen mit Hohlstrahlen und Ringblendenden |
DE1937482C3 (de) * | 1969-07-23 | 1974-10-10 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Mikrostrahlsonde |
NL7012387A (xx) * | 1970-08-21 | 1972-02-23 | Philips Nv | |
GB1416043A (en) * | 1972-01-28 | 1975-12-03 | Nasa | Electron microscope aperture system |
US3996468A (en) * | 1972-01-28 | 1976-12-07 | Nasa | Electron microscope aperture system |
US4002912A (en) * | 1975-12-30 | 1977-01-11 | The United States Of America As Represented By The United States Energy Research And Development Administration | Electrostatic lens to focus an ion beam to uniform density |
DE2752598C3 (de) * | 1977-11-25 | 1981-10-15 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür |
JPS5842935B2 (ja) * | 1978-04-07 | 1983-09-22 | 日本電子株式会社 | 走査電子顕微鏡等の対物レンズ |
AU534599B2 (en) * | 1978-08-25 | 1984-02-09 | Commonwealth Scientific And Industrial Research Organisation | Cold cathode ion soirce |
JPS6091544A (ja) * | 1983-10-24 | 1985-05-22 | Anelva Corp | オ−ジエ分析装置 |
US4725736A (en) * | 1986-08-11 | 1988-02-16 | Electron Beam Memories | Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
JP5097512B2 (ja) * | 2006-11-21 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム用軌道補正器、及び荷電粒子ビーム装置 |
JP5153348B2 (ja) * | 2008-01-09 | 2013-02-27 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム軌道補正器及び荷電粒子ビーム装置 |
JP6747687B2 (ja) * | 2014-08-25 | 2020-08-26 | ナショナル ユニヴァーシティー オブ シンガポール | 収差補正装置、これを有するデバイス、および荷電粒子の収差を補正するための方法 |
US10096448B2 (en) * | 2015-04-27 | 2018-10-09 | National University Corporation Nagoya University | Spherical aberration corrector for electromagnetic lens for charged particle beam |
JP7124216B2 (ja) * | 2019-05-15 | 2022-08-23 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL192009A (xx) * | 1953-11-02 | |||
BE536427A (xx) * | 1954-03-11 |
-
0
- NL NL285301D patent/NL285301A/xx unknown
-
1961
- 1961-11-15 US US152531A patent/US3100260A/en not_active Expired - Lifetime
-
1962
- 1962-11-09 CH CH1314562A patent/CH407356A/de unknown
- 1962-11-13 DE DEP30567A patent/DE1236097B/de active Pending
- 1962-11-14 SE SE12217/62A patent/SE300852B/xx unknown
- 1962-11-14 GB GB43081/62A patent/GB995387A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL285301A (xx) | |
SE300852B (xx) | 1968-05-13 |
DE1236097B (de) | 1967-03-09 |
US3100260A (en) | 1963-08-06 |
CH407356A (de) | 1966-02-15 |
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