GB918297A - Improvements in electron microscopes - Google Patents

Improvements in electron microscopes

Info

Publication number
GB918297A
GB918297A GB12361/60A GB1236160A GB918297A GB 918297 A GB918297 A GB 918297A GB 12361/60 A GB12361/60 A GB 12361/60A GB 1236160 A GB1236160 A GB 1236160A GB 918297 A GB918297 A GB 918297A
Authority
GB
United Kingdom
Prior art keywords
specimen
electrons
electron
analysis
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB12361/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB12361/60A priority Critical patent/GB918297A/en
Priority to NL263015D priority patent/NL263015A/xx
Priority to US112139A priority patent/US3155827A/en
Priority to FR17807A priority patent/FR1285063A/fr
Priority to DEN19846A priority patent/DE1204350B/de
Publication of GB918297A publication Critical patent/GB918297A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB12361/60A 1960-04-07 1960-04-07 Improvements in electron microscopes Expired GB918297A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB12361/60A GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes
NL263015D NL263015A (forum.php) 1960-04-07 1961-01-30
US112139A US3155827A (en) 1960-04-07 1961-03-24 Electron microscope with a secondary electron source utilized for electron probe analysis
FR17807A FR1285063A (fr) 1960-04-07 1961-03-29 Perfectionnements aux microscopes électroniques
DEN19846A DE1204350B (de) 1960-04-07 1961-04-05 Elektronenmikroskop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB12361/60A GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes

Publications (1)

Publication Number Publication Date
GB918297A true GB918297A (en) 1963-02-13

Family

ID=10003117

Family Applications (1)

Application Number Title Priority Date Filing Date
GB12361/60A Expired GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes

Country Status (5)

Country Link
US (1) US3155827A (forum.php)
DE (1) DE1204350B (forum.php)
FR (1) FR1285063A (forum.php)
GB (1) GB918297A (forum.php)
NL (1) NL263015A (forum.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0114765A3 (en) * 1983-01-14 1984-08-29 Cameca Process and device for the ion analysis of non-conducting specimen
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH451331A (de) * 1965-12-13 1968-05-15 Heinz Steigerwald Karl Elektronenstrahl-Erzeugungssystem
CA935568A (en) * 1970-03-20 1973-10-16 Houtman Eliberthus Device for examining material by x-ray fluorescence
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE692336C (de) * 1934-12-07 1940-06-18 Bodo V Borries Dr Ing Verfahren zur Abbildung von Flaechen mittels Korpuskularstrahlen
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
DE748680C (de) * 1939-10-19 1944-11-08 Elektronenmikroskop
DE761663C (de) * 1942-01-21 1953-10-12 Aeg Elektronenmikroskop, insbesondere UEbermikroskop, mit einer als Elektronenspiegel wirkenden Projektionslinse
DE893104C (de) * 1943-01-04 1953-10-12 Siemens Ag Vorrichtung zur Querverstellung des Objektes im Strahlengang von Korpuskularstrahlapparaten
NL98715C (forum.php) * 1953-09-04
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
DE1133841B (de) * 1957-09-11 1962-07-26 Leitz Ernst Gmbh Elektronenmikroskop zur direkten Abbildung von Oberflaechen durch Sekundaerelektronen, Verfahren zur Untersuchung von Nichtleitern oder Halbleitern und Anordnung zur Durchfuehrung des Verfahrens
US3049618A (en) * 1959-05-13 1962-08-14 Commissariat Energie Atomique Methods and devices for performing spectrum analysis, in particular in the far ultraviolet region
DE1099102B (de) * 1959-05-26 1961-02-09 Siemens Ag Blendenanordnung fuer Elektronenmikroskope mit Zusatzeinrichtung zur Roentgenspektroskopie durchstrahlbarer Praeparate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0114765A3 (en) * 1983-01-14 1984-08-29 Cameca Process and device for the ion analysis of non-conducting specimen
FR2542089A1 (fr) * 1983-01-14 1984-09-07 Centre Nat Rech Scient Procede et dispositif pour l'analyse ionique d'un echantillon isolant
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample

Also Published As

Publication number Publication date
FR1285063A (fr) 1962-02-16
DE1204350B (de) 1965-11-04
NL263015A (forum.php) 1964-05-25
US3155827A (en) 1964-11-03

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