GB907999A - Improvements in or relating to methods and apparatus for producing electrodes on semi-conductor bodies - Google Patents
Improvements in or relating to methods and apparatus for producing electrodes on semi-conductor bodiesInfo
- Publication number
- GB907999A GB907999A GB3112760A GB3112760A GB907999A GB 907999 A GB907999 A GB 907999A GB 3112760 A GB3112760 A GB 3112760A GB 3112760 A GB3112760 A GB 3112760A GB 907999 A GB907999 A GB 907999A
- Authority
- GB
- United Kingdom
- Prior art keywords
- stencil
- semi
- conductor
- frame
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 8
- 238000000034 method Methods 0.000 title abstract 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 239000007772 electrode material Substances 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 229910052715 tantalum Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 210000000746 body region Anatomy 0.000 abstract 1
- 239000002775 capsule Substances 0.000 abstract 1
- 238000005485 electric heating Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- WTKKCYNZRWIVKL-UHFFFAOYSA-N tantalum Chemical compound [Ta+5] WTKKCYNZRWIVKL-UHFFFAOYSA-N 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES64847A DE1113521B (de) | 1959-09-10 | 1959-09-10 | Verfahren und Vorrichtung zum Erzeugen zweier dicht nebeneinander-liegender Elektroden an Halbleiterkoerpern |
| DES84300A DE1222168B (de) | 1959-09-10 | 1963-03-22 | Verfahren zum Erzeugen mindestens zweier dicht nebeneinanderliegender Elektroden aufHalbleiterkoerpern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB907999A true GB907999A (en) | 1962-10-10 |
Family
ID=25995837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3112760A Expired GB907999A (en) | 1959-09-10 | 1960-09-09 | Improvements in or relating to methods and apparatus for producing electrodes on semi-conductor bodies |
Country Status (4)
| Country | Link |
|---|---|
| CH (1) | CH395343A (OSRAM) |
| DE (1) | DE1222168B (OSRAM) |
| GB (1) | GB907999A (OSRAM) |
| NL (2) | NL255702A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2170822A (en) * | 1985-01-31 | 1986-08-13 | Sharp Kk | A method for the production of substrates coated with a uniform dispersion of extremely fine granules |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1113521B (de) * | 1959-09-10 | 1961-09-07 | Siemens Ag | Verfahren und Vorrichtung zum Erzeugen zweier dicht nebeneinander-liegender Elektroden an Halbleiterkoerpern |
-
0
- NL NL128994D patent/NL128994C/xx active
- NL NL255702D patent/NL255702A/xx unknown
-
1960
- 1960-09-07 CH CH1010560A patent/CH395343A/de unknown
- 1960-09-09 GB GB3112760A patent/GB907999A/en not_active Expired
-
1963
- 1963-03-22 DE DES84300A patent/DE1222168B/de active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2170822A (en) * | 1985-01-31 | 1986-08-13 | Sharp Kk | A method for the production of substrates coated with a uniform dispersion of extremely fine granules |
| US4654229A (en) * | 1985-01-31 | 1987-03-31 | Sharp Kabushiki Kaisha | Method for the production of substrates with a uniform dispersion of extremely fine granules |
| GB2170822B (en) * | 1985-01-31 | 1989-06-07 | Sharp Kk | A method for the production of substrates having a uniform dispersion of ultra fine granules deposited thereon |
Also Published As
| Publication number | Publication date |
|---|---|
| NL255702A (OSRAM) | |
| DE1222168B (de) | 1966-08-04 |
| NL128994C (OSRAM) | |
| CH395343A (de) | 1965-07-15 |
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