GB896122A - Improvements in or relating to the coating of surfaces with thin films of aluminium oxide - Google Patents

Improvements in or relating to the coating of surfaces with thin films of aluminium oxide

Info

Publication number
GB896122A
GB896122A GB3062159A GB3062159A GB896122A GB 896122 A GB896122 A GB 896122A GB 3062159 A GB3062159 A GB 3062159A GB 3062159 A GB3062159 A GB 3062159A GB 896122 A GB896122 A GB 896122A
Authority
GB
United Kingdom
Prior art keywords
tip
cathode
rod
anode
aluminium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3062159A
Inventor
Brian Lewis
Donald Martin Rushmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Priority to GB3062159A priority Critical patent/GB896122A/en
Publication of GB896122A publication Critical patent/GB896122A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

896,122. Coating by vapour deposition. GENERAL ELECTRIC CO. Ltd. Aug. 22, 1960 [Sept. 8, 1959], No. 30621/59. Class 82(2). [Also in Group XL(a)] A surface 5, such as a glass plate, is coated with a thin film (e.g. 1À5 microns) of aluminium oxide by deposition in a vacuum of evaporated aluminium oxide from a molten droplet formed on the end of an Al 2 O 3 rod 2 (e.g. a rod 2 to 3 mm diameter of microcrystalline sapphire or sintered alumina) which is fed downwards through an anode 1, the tip 9 of which may consist of machined graphite, electrical contact being maintained with it preferably by biasing the rod against one side of the aperture 10 in the tip with a spring 12 fitted to a loop or stirrup 11 of tungsten wirewhich enters a slot behind the tip in the tantalum stud 8, whilst an electron current is passed to the anode from a heated cathode 3, preferably a single loop of tungsten wire, the electron current, the potential difference between the anode and cathode and the rate of downward feed of the rod being adjusted to maintain the droplet below (e.g. 1 to 2 mm) the tip. A screen electrode 4, with apertures in the top and bottom, may be provided extending on one or both sides of the cathode and maintained at a potential equal to or slightly negative to that of the cathode; the whole electrode system may also be screened. The surface to be coated may be heated and/or masked as desired.
GB3062159A 1959-09-08 1959-09-08 Improvements in or relating to the coating of surfaces with thin films of aluminium oxide Expired GB896122A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3062159A GB896122A (en) 1959-09-08 1959-09-08 Improvements in or relating to the coating of surfaces with thin films of aluminium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3062159A GB896122A (en) 1959-09-08 1959-09-08 Improvements in or relating to the coating of surfaces with thin films of aluminium oxide

Publications (1)

Publication Number Publication Date
GB896122A true GB896122A (en) 1962-05-09

Family

ID=10310520

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3062159A Expired GB896122A (en) 1959-09-08 1959-09-08 Improvements in or relating to the coating of surfaces with thin films of aluminium oxide

Country Status (1)

Country Link
GB (1) GB896122A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19958666A1 (en) * 1999-12-06 2001-06-07 Leybold Materials Gmbh Device for the detachable connection of a cylindrical tubular target part to a receiving part
RU2472869C2 (en) * 2007-05-25 2013-01-20 Эрликон Трейдинг Аг,Трюббах Vacuum treatment plant and method of vacuum treatment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19958666A1 (en) * 1999-12-06 2001-06-07 Leybold Materials Gmbh Device for the detachable connection of a cylindrical tubular target part to a receiving part
DE19958666C2 (en) * 1999-12-06 2003-10-30 Heraeus Gmbh W C Device for the detachable connection of a cylindrical tubular target part to a receiving part
RU2472869C2 (en) * 2007-05-25 2013-01-20 Эрликон Трейдинг Аг,Трюббах Vacuum treatment plant and method of vacuum treatment

Similar Documents

Publication Publication Date Title
GB1483966A (en) Vapourized-metal cluster ion source and ionized-cluster beam deposition
DE3663689D1 (en) Improved electric arc vapor deposition method
US5677012A (en) Plasma processing method and plasma processing apparatus
GB778434A (en) Improvements in or relating to ion sources
US2685535A (en) Method and apparatus for deposition of materials by thermal decomposition
GB896122A (en) Improvements in or relating to the coating of surfaces with thin films of aluminium oxide
GB1122438A (en) Ion cleaning and deposition apparatus
GB939275A (en) Device for producing thin metal layers by ion neutralization
GB1026676A (en) Vacuum deposition apparatus
US4567398A (en) Liquid metal ion source
US1832607A (en) Photo electric tube
US3382397A (en) Ion source having a high work function material coating the outer surface of the ionizer
GB1207091A (en) Method of manufacturing and electronic discharge tube including a photocathode
GB1177946A (en) Improvements in or relating to Camera Tubes
US4560907A (en) Ion source
GB1181220A (en) Fuel Cell
GB1094738A (en) Charged particle sources
Holland Evaporation from an electric arc in vacuum
JP4149565B2 (en) Coaxial vacuum arc evaporation source for high purity thin film formation
JPS5597468A (en) Ion plating equipment
GB1235942A (en) Method and apparatus for surface coating articles
GB1170880A (en) Improvements in or relating to thorium-film thermionic cathodes for electrical discharge vessels.
Steinberg et al. A Low‐Current Low‐Energy‐Spread Duoplasmatron Ion Source
GB1133397A (en) Method for the rapid deposition of metallic films using a plasma of the material to be deposited
JPS54100988A (en) Ion plating device