GB885323A - Improvements in or relating to apparatus and a method for purifying and/or endowing with an impurity a semi-conducting material - Google Patents

Improvements in or relating to apparatus and a method for purifying and/or endowing with an impurity a semi-conducting material

Info

Publication number
GB885323A
GB885323A GB839058A GB839058A GB885323A GB 885323 A GB885323 A GB 885323A GB 839058 A GB839058 A GB 839058A GB 839058 A GB839058 A GB 839058A GB 885323 A GB885323 A GB 885323A
Authority
GB
United Kingdom
Prior art keywords
semi
endowing
purifying
impurity
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB839058A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefunken AG
Original Assignee
Telefunken AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefunken AG filed Critical Telefunken AG
Publication of GB885323A publication Critical patent/GB885323A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

Semi-conductor material 13 is purified and/or doped in an evacuated envelope 1 having two interconnected portions 2 and 3, by causing a molten zone 16 to travel through the material 13 while maintaining portion 3 at a lower temperature <PICT:0885323/III/1> than portion 2. Portion 2 is heated by a heating element 5 in the walls of a container 4 surrounding it; portion 3 is kept at a constant temperature by a bath of liquid 7; and zone 16 is melted by a heating coil 8 movable axially of the envelope 1. Impurities in the material 13, which may be silicon, are vapourized as the molten zone 16 is passed through the material, and are condensed in the cooler portion 3. When doping substance is to be added to the material 13, the substance 9, which may be phosphorus, is evaporated in portion 3. The material 13 may be purified and doped simultaneously. The crystal obtained is grown on a seed 12.
GB839058A 1957-03-15 1958-03-17 Improvements in or relating to apparatus and a method for purifying and/or endowing with an impurity a semi-conducting material Expired GB885323A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DET13361A DE1040799B (en) 1957-03-15 1957-03-15 Arrangement for high cleaning and / or doping of a semiconductor body

Publications (1)

Publication Number Publication Date
GB885323A true GB885323A (en) 1961-12-28

Family

ID=7547312

Family Applications (1)

Application Number Title Priority Date Filing Date
GB839058A Expired GB885323A (en) 1957-03-15 1958-03-17 Improvements in or relating to apparatus and a method for purifying and/or endowing with an impurity a semi-conducting material

Country Status (2)

Country Link
DE (1) DE1040799B (en)
GB (1) GB885323A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL254549A (en) * 1959-08-07
DE1165882B (en) * 1960-02-05 1964-03-19 Philips Patentverwaltung Device for executing rotary movements on rod-shaped bodies, in particular on semiconductor bodies

Also Published As

Publication number Publication date
DE1040799B (en) 1958-10-09

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