GB8808723D0 - Method of exposing semiconductor wafer to light from mercury-vapour lamp - Google Patents

Method of exposing semiconductor wafer to light from mercury-vapour lamp

Info

Publication number
GB8808723D0
GB8808723D0 GB888808723A GB8808723A GB8808723D0 GB 8808723 D0 GB8808723 D0 GB 8808723D0 GB 888808723 A GB888808723 A GB 888808723A GB 8808723 A GB8808723 A GB 8808723A GB 8808723 D0 GB8808723 D0 GB 8808723D0
Authority
GB
United Kingdom
Prior art keywords
mercury
light
semiconductor wafer
vapour lamp
exposing semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB888808723A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of GB8808723D0 publication Critical patent/GB8808723D0/en
Pending legal-status Critical Current

Links

GB888808723A 1984-07-07 1988-04-13 Method of exposing semiconductor wafer to light from mercury-vapour lamp Pending GB8808723D0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59139775A JPS6120324A (ja) 1984-07-07 1984-07-07 水銀灯による半導体ウエハ−材料の露光方法

Publications (1)

Publication Number Publication Date
GB8808723D0 true GB8808723D0 (en) 1988-05-18

Family

ID=15253123

Family Applications (2)

Application Number Title Priority Date Filing Date
GB888808723A Pending GB8808723D0 (en) 1984-07-07 1988-04-13 Method of exposing semiconductor wafer to light from mercury-vapour lamp
GB8810523A Expired GB2203849B (en) 1984-07-07 1988-05-04 Method of exposing a semiconductor wafer to light from a mercury-vapor lamp

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB8810523A Expired GB2203849B (en) 1984-07-07 1988-05-04 Method of exposing a semiconductor wafer to light from a mercury-vapor lamp

Country Status (2)

Country Link
JP (1) JPS6120324A (enExample)
GB (2) GB8808723D0 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0679107B2 (ja) * 1986-07-04 1994-10-05 オリンパス光学工業株式会社 電子スコ−プ用光源装置
JPH0679109B2 (ja) * 1988-07-28 1994-10-05 オリンパス光学工業株式会社 電子スコープ用光源装置
JPH0679108B2 (ja) * 1988-07-28 1994-10-05 オリンパス光学工業株式会社 電子スコープ用光源装置
DE4402611A1 (de) * 1994-01-28 1995-08-10 Wack O K Chemie Gmbh Waschanlage für Motorräder
JP4897397B2 (ja) * 2005-12-27 2012-03-14 ハリソン東芝ライティング株式会社 紫外線照射装置
JP2008281934A (ja) * 2007-05-14 2008-11-20 Harison Toshiba Lighting Corp 紫外線照射装置
JP5736989B2 (ja) * 2011-06-15 2015-06-17 ウシオ電機株式会社 光源装置およびランプ点灯方法
JP2022167503A (ja) * 2021-04-23 2022-11-04 株式会社ブイ・テクノロジー 照明装置の制御方法及び露光装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54108478A (en) * 1978-02-14 1979-08-25 Ushio Electric Inc Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription

Also Published As

Publication number Publication date
GB8810523D0 (en) 1988-06-08
JPS6120324A (ja) 1986-01-29
GB2203849B (en) 1989-05-24
JPH0254654B2 (enExample) 1990-11-22
GB2203849A (en) 1988-10-26

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