GB768733A - Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds - Google Patents

Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds

Info

Publication number
GB768733A
GB768733A GB3002454A GB3002454A GB768733A GB 768733 A GB768733 A GB 768733A GB 3002454 A GB3002454 A GB 3002454A GB 3002454 A GB3002454 A GB 3002454A GB 768733 A GB768733 A GB 768733A
Authority
GB
United Kingdom
Prior art keywords
workpiece
chamber
metal
carbonyl
conduit member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3002454A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Engineering Company of Ohio
Original Assignee
Commonwealth Engineering Company of Ohio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Engineering Company of Ohio filed Critical Commonwealth Engineering Company of Ohio
Priority to GB3002454A priority Critical patent/GB768733A/en
Publication of GB768733A publication Critical patent/GB768733A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

768,733. Coating with metals. COMMONWEALTH ENGINEERING CO. OF OHIO. Oct. 19, 1954, No. 30024/54. Crass 82(2) In an apparatus for coating an electrically conductive work piece, e.g. of iron, steel, nickel or copper, with metal by the pyrolysis of a metal-bearing thermally decomposable gaseous compound which is brought in to contact with the workpiece supported in a chamber, the gas is conveyed through a heat insulating conduit member mounted inside the chamber and adjacent to the workpiece, said conduit member having jet apertures therein facing toward the workpiece for directing the gas thereagainst and means are provided, located outside the chamber, for heating the workpiece while in the chamber. As shown, the metal-bearing compound, e.g. nickel, iron, chromium, molybdenum or cobalt carbonyl, antimony hydride, tin hydride, chromyl chloride, osmium carbonyl bromide, copper nitroxyl or cobalt nitroxyl carbonyl, which may be entrained in a carrier gas, e.g. carbon dioxide, nitrogen or helium, is brought into chamber 1, which is surrounded by a cooling jacket 9 and induction coil 11, through the heat-insulating tube 6, and discharged therefrom, through apertures 7 to coat workpiece 5 which is heated by said induction coil. The apparatus may be modified to coat (a) both sides of a workpiece simultaneously when the conduit member is Y-shaped so as to have one leg disposed on each side of the workpiece, (b) the entire periphery of a workpiece when the member described in (a) is rotated about the workpiece, and (c) the interior of a tubular element when the member is positioned inside the workpiece and rotated.
GB3002454A 1954-10-19 1954-10-19 Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds Expired GB768733A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3002454A GB768733A (en) 1954-10-19 1954-10-19 Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3002454A GB768733A (en) 1954-10-19 1954-10-19 Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds

Publications (1)

Publication Number Publication Date
GB768733A true GB768733A (en) 1957-02-20

Family

ID=10301031

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3002454A Expired GB768733A (en) 1954-10-19 1954-10-19 Improvements in and relating to plating by the decomposition of gaseous metal-bearing compounds

Country Status (1)

Country Link
GB (1) GB768733A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587731A1 (en) * 1985-09-23 1987-03-27 Centre Nat Rech Scient METHOD AND DEVICE FOR CHEMICAL DEPOSITION OF UNIFORM THIN FILMS ON MANY PLANE SUBSTRATES FROM A GASEOUS PHASE
GB2194966A (en) * 1986-08-20 1988-03-23 Gen Electric Plc Deposition of films
US4938999A (en) * 1988-07-11 1990-07-03 Jenkin William C Process for coating a metal substrate by chemical vapor deposition using a metal carbonyl

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587731A1 (en) * 1985-09-23 1987-03-27 Centre Nat Rech Scient METHOD AND DEVICE FOR CHEMICAL DEPOSITION OF UNIFORM THIN FILMS ON MANY PLANE SUBSTRATES FROM A GASEOUS PHASE
EP0223629A1 (en) * 1985-09-23 1987-05-27 Centre National De La Recherche Scientifique (Cnrs) Method and apparatus for the chemical vapour deposition of uniform thin films on many flat substrates
GB2194966A (en) * 1986-08-20 1988-03-23 Gen Electric Plc Deposition of films
US4938999A (en) * 1988-07-11 1990-07-03 Jenkin William C Process for coating a metal substrate by chemical vapor deposition using a metal carbonyl

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