GB759694A - Improvements in or relating to methods and apparatus for carrying out processes for the treatment of objects and materials employing electric glow discharges - Google Patents

Improvements in or relating to methods and apparatus for carrying out processes for the treatment of objects and materials employing electric glow discharges

Info

Publication number
GB759694A
GB759694A GB1823251A GB1823251A GB759694A GB 759694 A GB759694 A GB 759694A GB 1823251 A GB1823251 A GB 1823251A GB 1823251 A GB1823251 A GB 1823251A GB 759694 A GB759694 A GB 759694A
Authority
GB
United Kingdom
Prior art keywords
atmosphere
duration
pulses
pressure
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1823251A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB759694A publication Critical patent/GB759694A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
GB1823251A 1950-08-03 1951-08-01 Improvements in or relating to methods and apparatus for carrying out processes for the treatment of objects and materials employing electric glow discharges Expired GB759694A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH291360T 1950-08-03

Publications (1)

Publication Number Publication Date
GB759694A true GB759694A (en) 1956-10-24

Family

ID=32315181

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1823251A Expired GB759694A (en) 1950-08-03 1951-08-01 Improvements in or relating to methods and apparatus for carrying out processes for the treatment of objects and materials employing electric glow discharges

Country Status (5)

Country Link
CH (1) CH291360A (enrdf_load_stackoverflow)
DE (1) DE904491C (enrdf_load_stackoverflow)
FR (1) FR1053916A (enrdf_load_stackoverflow)
GB (1) GB759694A (enrdf_load_stackoverflow)
NL (2) NL163085B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411938A (en) * 1964-08-07 1968-11-19 Sperry Rand Corp Copper substrate cleaning and vapor coating method
US4460415A (en) * 1981-09-30 1984-07-17 Kymi Kymmene Oy Method for nitriding materials at low pressures using a glow discharge
US4900371A (en) * 1986-10-29 1990-02-13 The Electricity Council Method and apparatus for thermochemical treatment
EP1612290A1 (de) * 2004-07-02 2006-01-04 METAPLAS IONON Oberflächenveredelungstechnik GmbH Verfahren zum Gasnitrieren eines Werkstücks eine Gasnitriervorrichtung zur Durchfürung des Verfahrens sowie ein Werkstück

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH342980A (de) * 1950-11-09 1959-12-15 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Rohren aus Eisen und Stahl oder deren Legierungen
BE526527A (enrdf_load_stackoverflow) * 1953-02-17
DE1135112B (de) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glimmentladungsgefaess mit Wechselstrom-speisung fuer stromstarke Entladungen zur Behandlung von in das Gefaess eingebrachten Koerpern
DE1204047B (de) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Koerpern
US3096221A (en) * 1959-09-15 1963-07-02 To A Kako Kabushiki Kaisha Method of quick nitrification in which fluidized particles are employed
CH545859A (enrdf_load_stackoverflow) * 1970-09-08 1974-02-15
CH551496A (de) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl.
FR2379615A1 (fr) * 1977-02-08 1978-09-01 Vide & Traitement Sa Procede de traitement thermochimique de metaux
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
FR2501727A1 (fr) * 1981-03-13 1982-09-17 Vide Traitement Procede de traitements thermochimiques de metaux par bombardement ionique
GB2100023B (en) * 1981-06-05 1985-01-09 Aizenshtein Anatoly Gdalievich Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the same
FR2518354A1 (fr) * 1981-12-16 1983-06-17 Atelier Electro Thermie Const Procede pour generer un plasma et dispositif pour la mise en oeuvre de ce procede
DE4238993C1 (enrdf_load_stackoverflow) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411938A (en) * 1964-08-07 1968-11-19 Sperry Rand Corp Copper substrate cleaning and vapor coating method
US4460415A (en) * 1981-09-30 1984-07-17 Kymi Kymmene Oy Method for nitriding materials at low pressures using a glow discharge
US4900371A (en) * 1986-10-29 1990-02-13 The Electricity Council Method and apparatus for thermochemical treatment
EP1612290A1 (de) * 2004-07-02 2006-01-04 METAPLAS IONON Oberflächenveredelungstechnik GmbH Verfahren zum Gasnitrieren eines Werkstücks eine Gasnitriervorrichtung zur Durchfürung des Verfahrens sowie ein Werkstück

Also Published As

Publication number Publication date
NL91406C (enrdf_load_stackoverflow)
FR1053916A (fr) 1954-02-05
NL163085B (nl)
DE904491C (de) 1954-02-18
CH291360A (de) 1953-06-15

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