GB2507214B - Method of forming a top gate transistor - Google Patents

Method of forming a top gate transistor

Info

Publication number
GB2507214B
GB2507214B GB1400693.6A GB201400693A GB2507214B GB 2507214 B GB2507214 B GB 2507214B GB 201400693 A GB201400693 A GB 201400693A GB 2507214 B GB2507214 B GB 2507214B
Authority
GB
United Kingdom
Prior art keywords
forming
gate transistor
top gate
transistor
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1400693.6A
Other versions
GB2507214A (en
GB201400693D0 (en
Inventor
Arne Fleissner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Display Technology Ltd
Original Assignee
Cambridge Display Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Display Technology Ltd filed Critical Cambridge Display Technology Ltd
Publication of GB201400693D0 publication Critical patent/GB201400693D0/en
Publication of GB2507214A publication Critical patent/GB2507214A/en
Application granted granted Critical
Publication of GB2507214B publication Critical patent/GB2507214B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/464—Lateral top-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/481—Insulated gate field-effect transistors [IGFETs] characterised by the gate conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Drying Of Semiconductors (AREA)
GB1400693.6A 2011-07-21 2012-07-13 Method of forming a top gate transistor Expired - Fee Related GB2507214B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB1112548.1A GB201112548D0 (en) 2011-07-21 2011-07-21 Method of forming a top-gate transistor
PCT/GB2012/000594 WO2013011257A1 (en) 2011-07-21 2012-07-13 Method of forming a top gate transistor

Publications (3)

Publication Number Publication Date
GB201400693D0 GB201400693D0 (en) 2014-03-05
GB2507214A GB2507214A (en) 2014-04-23
GB2507214B true GB2507214B (en) 2016-01-06

Family

ID=44586947

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB1112548.1A Ceased GB201112548D0 (en) 2011-07-21 2011-07-21 Method of forming a top-gate transistor
GB1400693.6A Expired - Fee Related GB2507214B (en) 2011-07-21 2012-07-13 Method of forming a top gate transistor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB1112548.1A Ceased GB201112548D0 (en) 2011-07-21 2011-07-21 Method of forming a top-gate transistor

Country Status (8)

Country Link
US (1) US20140151679A1 (en)
JP (1) JP6073880B2 (en)
KR (1) KR20140047133A (en)
CN (1) CN103703582A (en)
DE (1) DE112012003055T8 (en)
GB (2) GB201112548D0 (en)
TW (1) TWI549195B (en)
WO (1) WO2013011257A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102142038B1 (en) 2016-02-01 2020-09-14 가부시키가이샤 리코 Field effect transistor, manufacturing method thereof, display element, display device, and system
EP3555929A1 (en) * 2016-12-19 2019-10-23 Corning Incorporated Polar elastomer microstructures and methods for fabricating same
CN106711050A (en) * 2016-12-19 2017-05-24 深圳市华星光电技术有限公司 Method for preparing thin film transistor
DE102017100929A1 (en) * 2017-01-18 2018-07-19 Osram Oled Gmbh Method for producing an organic electronic component
US20190081277A1 (en) * 2017-09-13 2019-03-14 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Oled display panel packaging method

Citations (4)

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US5981970A (en) * 1997-03-25 1999-11-09 International Business Machines Corporation Thin-film field-effect transistor with organic semiconductor requiring low operating voltages
US20060258070A1 (en) * 2005-05-13 2006-11-16 Lg. Philips Lcd Co., Ltd. Organic thin film transistor, display device using the same and method of fabricating the same
US20070249122A1 (en) * 2006-04-20 2007-10-25 Lg. Philips Lcd Co. Ltd. Array substrate for liquid crystal display device using organic semiconductor material and method of fabricating the same
US20080035917A1 (en) * 2006-08-11 2008-02-14 Nack-Bong Choi Array substrate for liquid crystal display device and method of fabricating the same

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US4132586A (en) * 1977-12-20 1979-01-02 International Business Machines Corporation Selective dry etching of substrates
KR100303934B1 (en) * 1997-03-25 2001-09-29 포만 제프리 엘 Thin-film field-effect transistor with organic semiconductor requiring low operating voltages
US5946551A (en) * 1997-03-25 1999-08-31 Dimitrakopoulos; Christos Dimitrios Fabrication of thin film effect transistor comprising an organic semiconductor and chemical solution deposited metal oxide gate dielectric
JP3432744B2 (en) * 1998-06-11 2003-08-04 株式会社東芝 Semiconductor device and manufacturing method thereof
JP2000173980A (en) * 1998-12-09 2000-06-23 Sony Corp Dry etching method
JP2000232107A (en) * 1999-02-12 2000-08-22 Mitsubishi Electric Corp Pattern forming method of semiconductor device
JP4610173B2 (en) * 2003-10-10 2011-01-12 株式会社半導体エネルギー研究所 Method for manufacturing thin film transistor
JP2006156752A (en) * 2004-11-30 2006-06-15 Sony Corp Method for patterning organic semiconductor material layer, manufacturing method of semiconductor device, method for patterning electroluminescent organic material layer, manufacturing method of organic electroluminescence display device, method for patterning conductive polymer layer, and method for forming wiring layer
JP5153058B2 (en) * 2005-02-25 2013-02-27 株式会社半導体エネルギー研究所 Method for manufacturing semiconductor device
KR100719547B1 (en) 2005-03-24 2007-05-17 삼성에스디아이 주식회사 Method for patterning organic semiconductor layer, OTFT and Fabrication method using the same and flat panel display with OTFT
US7344928B2 (en) * 2005-07-28 2008-03-18 Palo Alto Research Center Incorporated Patterned-print thin-film transistors with top gate geometry
KR101163576B1 (en) * 2006-04-20 2012-07-06 엘지디스플레이 주식회사 The array substrate for liquid crystal display device using organic semiconductor and Method of fabricating the same
JP5256583B2 (en) * 2006-05-29 2013-08-07 大日本印刷株式会社 Organic semiconductor device and method for manufacturing organic semiconductor device
JP2008235402A (en) * 2007-03-19 2008-10-02 Toshiba Corp Semiconductor device and manufacturing method thereof
US7566628B2 (en) * 2007-06-15 2009-07-28 Spansion Llc Process for making a resistive memory cell with separately patterned electrodes
WO2010000806A1 (en) * 2008-07-02 2010-01-07 Imec Rfid device
JP2010140980A (en) * 2008-12-10 2010-06-24 Sony Corp Functional organic substance element, and functional organic substance apparatus
GB2469331A (en) * 2009-04-09 2010-10-13 Tech Universit T Graz OFET-based sensor with organic gate dielectric for detecting an analyte

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5981970A (en) * 1997-03-25 1999-11-09 International Business Machines Corporation Thin-film field-effect transistor with organic semiconductor requiring low operating voltages
US20060258070A1 (en) * 2005-05-13 2006-11-16 Lg. Philips Lcd Co., Ltd. Organic thin film transistor, display device using the same and method of fabricating the same
US20070249122A1 (en) * 2006-04-20 2007-10-25 Lg. Philips Lcd Co. Ltd. Array substrate for liquid crystal display device using organic semiconductor material and method of fabricating the same
US20080035917A1 (en) * 2006-08-11 2008-02-14 Nack-Bong Choi Array substrate for liquid crystal display device and method of fabricating the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DO KYUNG HWANG, FUENTES-HERNANDEZ CANEK, KIM JUNGBAE, POTSCAVAGE WILLIAM J., KIM SUNG-JIN, KIPPELEN BERNARD: "Top-Gate Organic Field-Effect Transistors with High Environmental and Operational Stability", ADVANCED MATERIALS, ¬VCH PUBLISHERS|, vol. 23, no. 10, 11 March 2011 (2011-03-11), pages 1293 - 1298, XP055011392, ISSN: 09359648, DOI: 10.1002/adma.201004278 *

Also Published As

Publication number Publication date
GB201112548D0 (en) 2011-08-31
TW201310548A (en) 2013-03-01
DE112012003055T8 (en) 2014-06-05
US20140151679A1 (en) 2014-06-05
JP2014527710A (en) 2014-10-16
WO2013011257A1 (en) 2013-01-24
KR20140047133A (en) 2014-04-21
JP6073880B2 (en) 2017-02-01
GB2507214A (en) 2014-04-23
GB201400693D0 (en) 2014-03-05
DE112012003055T5 (en) 2014-04-24
CN103703582A (en) 2014-04-02
TWI549195B (en) 2016-09-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20190713