GB2486347B - Apparatus and method for evaluating layers in a multi-layer structure - Google Patents

Apparatus and method for evaluating layers in a multi-layer structure

Info

Publication number
GB2486347B
GB2486347B GB1121319.6A GB201121319A GB2486347B GB 2486347 B GB2486347 B GB 2486347B GB 201121319 A GB201121319 A GB 201121319A GB 2486347 B GB2486347 B GB 2486347B
Authority
GB
United Kingdom
Prior art keywords
layer structure
evaluating
layers
evaluating layers
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1121319.6A
Other languages
English (en)
Other versions
GB2486347A (en
GB201121319D0 (en
Inventor
John R Linn
Jeffrey G Thompson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of GB201121319D0 publication Critical patent/GB201121319D0/en
Publication of GB2486347A publication Critical patent/GB2486347A/en
Application granted granted Critical
Publication of GB2486347B publication Critical patent/GB2486347B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/06—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/902—Arrangements for scanning by moving the sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
GB1121319.6A 2010-12-10 2011-12-09 Apparatus and method for evaluating layers in a multi-layer structure Active GB2486347B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/965,356 US8903680B2 (en) 2010-12-10 2010-12-10 Apparatus and method for evaluating layers in a multi-layer structure

Publications (3)

Publication Number Publication Date
GB201121319D0 GB201121319D0 (en) 2012-01-25
GB2486347A GB2486347A (en) 2012-06-13
GB2486347B true GB2486347B (en) 2016-01-27

Family

ID=45560312

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1121319.6A Active GB2486347B (en) 2010-12-10 2011-12-09 Apparatus and method for evaluating layers in a multi-layer structure

Country Status (5)

Country Link
US (1) US8903680B2 (cg-RX-API-DMAC7.html)
JP (1) JP5954726B2 (cg-RX-API-DMAC7.html)
CN (1) CN102607402B (cg-RX-API-DMAC7.html)
CA (1) CA2755744C (cg-RX-API-DMAC7.html)
GB (1) GB2486347B (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104833298B (zh) * 2014-02-12 2018-02-09 鸿发国际科技股份有限公司 纸张厚度检测装置及其纸张厚度检测方法
US11148070B2 (en) * 2018-03-07 2021-10-19 Palo Alto Research Center Incorporated Systems and methods of nanofiltration using graphene oxide
CN110006996B (zh) * 2019-04-22 2021-11-30 葫芦岛探克科技有限公司 金属复合材料超声波测厚方法及层间界面在超声波测厚中的应用
GB2593911B (en) * 2020-04-08 2022-05-04 Innovative Tech Ltd A coin apparatus
CN111458415B (zh) * 2020-04-13 2023-07-18 润电能源科学技术有限公司 一种超声相控阵换能器与待测工件耦合状态的检测方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5672303A (en) * 1979-11-15 1981-06-16 Nuclear Fuel Ind Ltd Measuring method of displacement of fuel rod of noncontact type
US4464332A (en) * 1980-11-26 1984-08-07 Commissariat A L'energie Atomique Device for controlling the dimensions and spaced apart relationship of rigid pieces disposed in a bundle
EP0147037A2 (en) * 1983-12-19 1985-07-03 The Babcock & Wilcox Company Apparatus for measuring the pitch between adjacent rods in a nuclear fuel assembly
US4816207A (en) * 1985-11-29 1989-03-28 Brown, Boveri Reaktor Gmbh Method for checking the dimensions of a fuel assembly for nuclear reactors
JPH0442002A (ja) * 1990-06-07 1992-02-12 Nuclear Fuel Ind Ltd 燃料棒ギャップ測定装置
JPH09318784A (ja) * 1996-05-31 1997-12-12 Mitsubishi Heavy Ind Ltd 核燃料集合体の燃料棒間隔測定装置
JP2004061240A (ja) * 2002-07-26 2004-02-26 Koa Corp 膜厚検査装置および膜厚検査方法
WO2011105629A1 (ja) * 2010-02-25 2011-09-01 Ｊｆｅスチール株式会社 ワイヤロープピッチの測定方法とワイヤロープピッチ測定装置およびワイヤロープの製造方法

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US3693075A (en) * 1969-11-15 1972-09-19 Forster F M O Eddy current system for testing tubes for defects,eccentricity,and wall thickness
FR2585868B1 (fr) * 1985-08-02 1987-11-27 Framatome Sa Dispositif de controle de l'alignement dans la direction verticale des equipements internes superieurs et inferieurs d'un reacteur nucleaire a eau sous pression.
JPH0636046B2 (ja) * 1988-06-08 1994-05-11 株式会社日立製作所 燃料集合体，燃料スペーサ及び原子炉の初装荷炉心
US4876506A (en) * 1988-06-13 1989-10-24 Westinghouse Electric Corp. Apparatus and method for inspecting the profile of the inner wall of a tube employing a wall follower and an eddy current probe
FR2656415B1 (fr) * 1989-12-27 1993-04-09 Framatome Sa Procede et dispositif de mesure simultanee de distance entre tubes metalliques et d'epaisseur d'oxyde sur les tubes.
FR2669843B1 (fr) * 1990-11-29 1995-01-20 Lorraine Laminage Dispositif de detection des criques longitudinales sur des brames, notamment sur des brames d'acier.
US5371462A (en) * 1993-03-19 1994-12-06 General Electric Company Eddy current inspection method employing a probe array with test and reference data acquisition and signal processing
US5341678A (en) * 1993-05-12 1994-08-30 General Electric Company Method for determining thickness of ferromagnetic material deposition on nuclear fuel rods
US5744952A (en) * 1997-02-25 1998-04-28 Mcdermott Technology, Inc. Eddy current measurement of tube element spacing
US7314075B2 (en) * 2003-04-04 2008-01-01 Nisca Corporation Adhesive dispensing apparatus and image forming apparatus
DE102004034083A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Schichtdicke durch Widerstands- und Induktivitätsmessung einer Sensorspule
DE102004034081A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
JP2006349377A (ja) * 2005-06-13 2006-12-28 Shinko Electric Co Ltd ２自由度センサ
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten
CN101074861B (zh) * 2007-06-27 2011-02-02 力帆实业(集团)股份有限公司 一种仿形梳组件

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5672303A (en) * 1979-11-15 1981-06-16 Nuclear Fuel Ind Ltd Measuring method of displacement of fuel rod of noncontact type
US4464332A (en) * 1980-11-26 1984-08-07 Commissariat A L'energie Atomique Device for controlling the dimensions and spaced apart relationship of rigid pieces disposed in a bundle
EP0147037A2 (en) * 1983-12-19 1985-07-03 The Babcock & Wilcox Company Apparatus for measuring the pitch between adjacent rods in a nuclear fuel assembly
US4816207A (en) * 1985-11-29 1989-03-28 Brown, Boveri Reaktor Gmbh Method for checking the dimensions of a fuel assembly for nuclear reactors
JPH0442002A (ja) * 1990-06-07 1992-02-12 Nuclear Fuel Ind Ltd 燃料棒ギャップ測定装置
JPH09318784A (ja) * 1996-05-31 1997-12-12 Mitsubishi Heavy Ind Ltd 核燃料集合体の燃料棒間隔測定装置
JP2004061240A (ja) * 2002-07-26 2004-02-26 Koa Corp 膜厚検査装置および膜厚検査方法
WO2011105629A1 (ja) * 2010-02-25 2011-09-01 Ｊｆｅスチール株式会社 ワイヤロープピッチの測定方法とワイヤロープピッチ測定装置およびワイヤロープの製造方法

Also Published As

Publication number Publication date
GB2486347A (en) 2012-06-13
JP2012127948A (ja) 2012-07-05
CN102607402B (zh) 2016-05-25
US20120150466A1 (en) 2012-06-14
CA2755744A1 (en) 2012-06-10
CN102607402A (zh) 2012-07-25
GB201121319D0 (en) 2012-01-25
CA2755744C (en) 2016-04-12
JP5954726B2 (ja) 2016-07-20
US8903680B2 (en) 2014-12-02

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